Infiltration tool for small-size heat sink material

By designing a fusion seepage tool for a small-sized heat sink material including conical holes, the problems of center loss and copper material drop during the melting process of small-sized heat sink material are solved, and the complete infiltration of copper liquid and the difficulty of stacking are reduced.

CN222830726UActive Publication Date: 2025-05-06CHANGSHA SHENGHUA MICROELECTRONIC MATERIALS CO LTD
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Patent Information

Application Number
CN202421749897.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-23
Publication Date
2025-05-06
Estimated Expiration
2034-07-23

AI Technical Summary

Technical Problem

During the melting and seepage of small-sized heat sink materials, problems of center loss and copper material drop are prone to occur, resulting in the loss of copper seepage and the difficulty of stacking.

Method used

A small-size heat sink material fusion tooling is designed, including a base plate, a middle plate and a top plate. The top plate is equipped with conical holes to place copper material to ensure that it is aligned with the molybdenum skeleton or tungsten skeleton; square holes are used to place molybdenum skeleton or tungsten skeleton.

Benefits of technology

Through the design of the conical hole, the copper material is removed from the shedding and center deviation, ensuring the complete infiltration of the copper liquid, and reducing the difficulty and efficiency of stacking.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an infiltration tool for a small-size heat sink material, which relates to an infiltration process and comprises a bottom layer plate, an upper layer plate and a lower layer plate, the middle-layer plate is detachably arranged on the upper surface of the bottom-layer plate, and a plurality of square holes are formed in the middle-layer plate; the top layer plate is detachably arranged on the upper surface of the middle layer plate, a plurality of taper holes are formed in the top layer plate, the taper holes are of a big-end-up structure, the taper holes correspond to the square holes one to one, and the diameter of the bottom end circle of each taper hole is smaller than the side length of each square hole. The square hole is used for containing a molybdenum framework or a tungsten framework, the conical hole is used for containing a copper material to be infiltrated, the copper material is easily aligned with the molybdenum framework or the tungsten framework below under the limitation of the conical hole, center deviation or copper sheet falling is avoided, meanwhile, molten copper can flow into the square hole through the conical hole, and the copper material is prevented from being infiltrated. And the bottom layer plate ensures the smoothness of the infiltration bottom of the molybdenum framework or the tungsten framework.
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Description

Technical Field

[0001] The utility model relates to a melt infiltration process, in particular to a melt infiltration tool for a small-size heat sink material. Background Art

[0002] Heat sink materials are heat dissipation materials commonly used in the combination of integrated circuits and chips. Heat sink materials are represented by typical tungsten-copper alloys, molybdenum-copper alloys, copper-molybdenum-copper, and copper-molybdenum-copper-copper flat composite materials. These materials have the advantages of high thermal conductivity, low thermal expansion coefficient, and matching with chips.

[0003] At present, the main production method of tungsten copper and molybdenum copper heat sink materials is the infiltration method, which uses the different melting points of molybdenum copper or tungsten copper to melt them at a temperature higher than the melting point of copper. Through the capillary force effect, the molten copper penetrates into the pre-sintered porous molybdenum skeleton or tungsten skeleton, and then solidifies and cools at high temperature to finally form molybdenum copper or tungsten copper heat sink materials. This process has the advantages of simple preparation method, high material density, and uniform composition, so the prepared heat sink material has the advantages of high thermal conductivity and low thermal expansion coefficient.

[0004] The existing technology uses the melt infiltration process to prepare molybdenum-copper / tungsten-copper composite materials. The process is simple. Usually, only the copper sheets of corresponding weight need to be cut and stacked on the molybdenum skeleton or tungsten skeleton. It is often used to prepare the melt infiltration of larger size and thicker molybdenum skeleton or tungsten skeleton. However, for small size (length less than 10mm, width less than 10mm, thickness not more than 4mm) and thin thickness (thickness not more than 4mm) blanks, the volume of the skeleton and the copper block is small, which easily causes the position center to deviate or the copper sheet to fall off, which will lead to the failure of high-temperature copper liquid infiltration and the lack of copper infiltration. At the same time, stacking is difficult and the efficiency is low.

[0005] To this end, the present application provides a tool suitable for melt infiltration of small-sized skeleton blanks. Utility Model Content

[0006] The utility model provides a melting and infiltration tool for small-sized heat sink materials, which aims to solve the problems of center deviation and copper material falling that are easy to occur during the melting and infiltration process of small-sized heat sink materials.

[0007] In order to achieve the above-mentioned object, an embodiment of the utility model provides a melt infiltration tool for a small-sized heat sink material, comprising:

[0008] The bottom plate has a flat upper surface;

[0009] A middle layer plate is detachably arranged on the upper surface of the bottom layer plate, and a plurality of square holes are arranged on the middle layer plate;

[0010] The top layer plate is detachably arranged on the upper surface of the middle layer plate, and a plurality of conical holes are arranged on the top layer plate. The conical holes are in a structure of being larger at the top and smaller at the bottom, and the conical holes correspond to the square holes one by one. The bottom circular diameter of the conical holes is smaller than the side length of the square holes.

[0011] Preferably, the bottom plate, the middle plate and the top plate are respectively provided with a first positioning hole 11 , a second positioning hole 21 and a third positioning hole 31 , and positioning pins are inserted into the first positioning hole 11 , the second positioning hole 21 and the third positioning hole 31 .

[0012] Preferably, a plurality of elongated holes are arranged in parallel on the middle layer board, partition bars are arranged in the elongated holes, and the square holes are formed by partitioning the elongated holes with the partition bars.

[0013] Preferably, the bottom plate, the middle plate and the top plate are all made of alumina or graphite.

[0014] Preferably, the tapered hole is located above the center of the square hole.

[0015] The above solution of the utility model has the following beneficial effects:

[0016] In the present application, the square hole is used to place the molybdenum skeleton or the tungsten skeleton, and the conical hole is used to place the copper material to be infiltrated. Under the restriction of the conical hole, the copper material can be easily aligned with the molybdenum skeleton or the tungsten skeleton below to avoid center deviation or copper sheet falling. At the same time, the conical hole can make the molten copper flow into the square hole and completely penetrate into the molybdenum skeleton or the tungsten skeleton, while the bottom plate ensures the flatness of the bottom of the molybdenum skeleton or the tungsten skeleton.

[0017] Other features and advantages of the present invention will be described in detail in the subsequent specific implementation section. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is an exploded view of the utility model;

[0019] Figure 2 It is a front sectional view of the utility model;

[0020] Figure 3 It is a schematic diagram of the middle layer board. DETAILED DESCRIPTION

[0021] In order to make the technical problems to be solved, technical solutions and advantages of the present invention more clear, a detailed description will be given below in conjunction with the accompanying drawings and specific embodiments.

[0022] like Figure 1-3As shown, an embodiment of the utility model provides a melt infiltration tooling for a small-sized heat sink material, including a bottom plate 1, a middle plate 2 and a top plate 3, wherein the bottom plate 1, the middle plate 2 and the top plate 3 are arranged from bottom to top, wherein the upper surface of the bottom plate 1 is a plane, the middle plate 2 is detachably arranged on the bottom plate 1, and a plurality of square holes 5 are arranged on the middle plate 2, and the square holes 5 penetrate the bottom plate 1. In this embodiment, the plurality of square holes 5 are arranged in a rectangular array. The top plate 3 is detachably arranged on the middle plate 2, and a plurality of conical holes 7 are arranged on the top plate 3, the conical holes 7 are in a structure of being larger at the top and smaller at the bottom, and the plurality of conical holes 7 penetrate the top plate 3. In this embodiment, the conical holes 7 are arranged in a rectangular array, and the conical holes 7 correspond to the square holes 5 one by one, that is, the conical holes 7 are aligned with the square holes 5 in the vertical direction. The diameter of the bottom circle of the conical hole 7 is smaller than the side length of the square hole 5.

[0023] In the present application, the conical hole 7 is located above the square hole 5. The square hole 5 is used to place the tungsten skeleton or the molybdenum skeleton. The conical hole 7 is used to place the copper material, such as a copper sheet or a copper block. During the infiltration process, the copper material melts and flows into the square hole 5 through the bottom of the conical hole 7. Then, it infiltrates into the molybdenum skeleton or the tungsten skeleton in the square hole 5, and forms an alloy material after being cooled and solidified.

[0024] In the present application, since the hole of the top plate 3 is conical, in the molten state, it will flow downward along the conical hole 7, thus preventing the copper material from falling off and preventing the loss of copper infiltration. At the same time, the setting of the conical hole 7 reduces the difficulty of stacking.

[0025] Further, a first positioning hole 11 is provided on the bottom plate 1, a second positioning hole 21 is provided on the middle plate 2, and a third positioning hole 31 is provided on the top plate 3. A positioning pin 4 is provided through the first positioning hole 11, the second positioning hole 21, and the third positioning hole 31. Preferably, the second positioning hole 21 and the third positioning hole 31 are provided outside the array formed by the square hole 5 and the tapered hole 7. The number of each positioning hole is the same, and in this embodiment, they are all four.

[0026] In this embodiment, the first positioning hole 11, the second positioning hole 21, the third positioning hole 31 cooperate with the positioning pin 4 to realize the detachable connection and quick alignment between the top plate 3, the middle plate 2 and the bottom plate 1, so that the loading and unloading before and after the infiltration is simple and fast. In addition, the bottom plate 1 becomes the bottom wall of the square hole 5 after the tooling is assembled, and the bottom plate 1 with a flat upper surface can level the molybdenum frame or the tungsten frame, which is convenient for disassembly and material removal after the infiltration is completed.

[0027] Furthermore, a plurality of parallel long holes are provided on the middle plate 2 , and the long holes penetrate the middle plate 2 . Partition bars 6 are provided in the long holes, and the partition bars 6 are provided along the length direction of the long holes to divide the long holes into a plurality of square holes 5 .

[0028] Preferably, the tapered hole 7 is located above the center of the square hole 5 , that is, the central axis of the square hole 5 is colinear with the rotation line of the tapered hole 7 .

[0029] In the present application, the tapered hole 7 is located directly above the square hole 5 to form a center-aligned positional relationship, which enables the molten copper material to fall into the square hole 5 evenly.

[0030] Preferably, the bottom plate 1, the middle plate 2 and the top plate 3 are all made of alumina or graphite.

[0031] When using this tooling, the first step is to assemble the bottom plate 1 and the middle plate 2 together through the first positioning hole 11, the second positioning hole 21 and the positioning pin 4; the second step is to place the tungsten skeleton or the molybdenum skeleton in the square hole 5; the third step is to assemble the top plate 3 with the bottom plate 1 and the middle plate 2 through the third positioning hole 31 and the positioning pin 4, and place the copper material in the conical hole 7; step four, melt the copper material under atmospheric conditions to prepare a small-sized, molybdenum-copper composite material or a tungsten-copper composite material.

[0032] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A melt infiltration tool for small-sized heat sink materials, characterized in that: include: A bottom plate (1) having a flat upper surface; A middle layer plate (2) is detachably arranged on the upper surface of the bottom layer plate (1), and a plurality of square holes (5) are arranged on the middle layer plate (2); A top plate (3) is detachably arranged on the upper surface of the middle plate (2), and a plurality of conical holes (7) are arranged on the top plate (3). The conical holes (7) are of a structure that is larger at the top and smaller at the bottom. The conical holes (7) correspond to the square holes (5) one by one, and the bottom circular diameter of the conical holes (7) is smaller than the side length of the square holes (5).

2. The infiltration tooling for small-sized heat sink material according to claim 1, characterized in that: The bottom plate (1), the middle plate (2) and the top plate (3) are respectively provided with a first positioning hole (11), a second positioning hole (21) and a third positioning hole (31), and positioning pins (4) are inserted into the first positioning hole (11), the second positioning hole (21) and the third positioning hole (31).

3. The infiltration tooling for small-sized heat sink material according to claim 1, characterized in that: The middle plate (2) is provided with a plurality of long holes arranged in parallel, a partition bar (6) is provided in the long holes, and the square hole (5) is formed by the partition bar (6) partitioning the long holes.

4. The infiltration tooling for small-sized heat sink material according to claim 1, characterized in that: The bottom plate (1), the middle plate (2) and the top plate (3) are all made of alumina or graphite.

5. The infiltration tooling for small-sized heat sink material according to claim 1, characterized in that: The conical hole (7) is located above the center of the square hole (5).