Magnetic control device suitable for OLED (Organic Light Emitting Diode) metal mask

Abstract

The utility model discloses a magnetic control device suitable for an OLED (Organic Light Emitting Diode) metal mask, which comprises a chamber, an evaporation source, an adjustable placing frame, a fixed magnetic attraction structure, a movable magnetic attraction structure and a bidirectional moving structure, and is characterized in that the evaporation source is arranged at the bottom of the chamber; the two adjustable placing racks are oppositely arranged on the two sides of the cavity respectively so as to sequentially bear the metal mask plate and the substrate to be evaporated from bottom to top; the multiple fixed magnetic attraction structures are arranged on the top of the cavity in an array mode. The two groups of movable magnetic attraction structures are respectively arranged on two sides of the plurality of fixed magnetic attraction structures and are respectively connected with two movable ends of the bidirectional moving structure; the magnetic attraction ends of the multiple fixed magnetic attraction structures and the magnetic attraction ends of the two movable magnetic attraction structures are located at the same height. According to the utility model, the metal mask plates and the substrate to be evaporated with different sizes can be supported more flexibly, and the attachment between the metal mask plates and the substrate to be evaporated is improved by matching with the movable magnetic suction structure.

Description

Technical Field

[0001] The utility model relates to the field of display technology manufacturing, in particular to a magnetic control device suitable for an OLED metal mask. Background Art

[0002] OLED (Organic Light Emitting Diode) Metal Mask (commonly referred to as FMM, Fine Metal Mask) is one of the key components in the OLED evaporation process, which is used to control the precise deposition position of organic materials to form the desired pixel pattern.

[0003] In the related art, the design of the magnetic control device of the OLED metal mask usually adopts a fixed size design to place the metal mask plate and the substrate to be evaporated.

[0004] For example, a vapor deposition device with application number CN201420222130.5 is provided with a fixed mask plate support frame and a substrate support frame, the mask plate support frame is used to support the metal mask plate, and the substrate support frame is used to support the substrate to be vapor deposited; there are also a plurality of magnetic blocks arranged in a matrix and arranged on the side of the substrate to be vapor deposited away from the metal mask plate, and a traction device for adjusting the up and down movement of each magnetic block. The height of each magnetic block relative to the substrate to be vapor deposited is controlled by the traction device, so that the magnetic fields of all the magnetic blocks can be made consistent.

[0005] At that time, the above patent still had certain problems in actual use. For example, the existing positioning devices were often difficult to flexibly adapt to metal mask plates and substrates of different sizes, resulting in low production efficiency. In addition, the method of adjusting the position of each magnetic block through the traction device not only required a lot of work but also had low work efficiency. Utility Model Content

[0006] The utility model aims to solve one of the technical problems in the above-mentioned technology at least to a certain extent.

[0007] To achieve the above-mentioned purpose, the first aspect of the utility model proposes a magnetic control device suitable for an OLED metal mask, comprising: a chamber, an evaporation source, an adjustable placement rack, a fixed magnetic attraction structure, a movable magnetic attraction structure and a bidirectional movable structure, wherein the evaporation source is arranged at the bottom of the chamber; two adjustable placement racks are respectively arranged on both sides of the chamber relative to each other, each of the adjustable placement racks comprises a synchronously movable mask plate support rack and a substrate support rack, and the mask plate support rack and the substrate support rack are arranged in sequence from bottom to top, wherein the mask plate support racks on the two adjustable placement racks jointly support the metal mask plate, and the substrate support racks on the two adjustable placement racks jointly support the substrate to be evaporated; a plurality of the fixed magnetic attraction structures are arranged in an array at the top of the chamber; two groups of the movable magnetic attraction structures are respectively arranged on both sides of the plurality of the fixed magnetic attraction structures, and are respectively connected to the two movable ends of the bidirectional movable structure; wherein the magnetic ends of the plurality of the fixed magnetic attraction structures and the two groups of the movable magnetic attraction structures are at the same height.

[0008] In addition, the magnetic control device for OLED metal mask proposed in the utility model may also have the following additional technical features:

[0009] As a further description of the above technical solution: each of the adjustable placement racks also includes a connecting rack and a driving cylinder, wherein the connecting rack connects the same side of the mask plate support rack and the substrate support rack; the driving cylinder is arranged outside the chamber, and the telescopic end of the driving cylinder extends into the chamber and is connected to the connecting rack.

[0010] As a further description of the above technical solution: the bidirectional movable structure includes a driving motor, a bidirectional lead screw and a lead screw slider, wherein the driving motor is arranged outside the chamber; the bidirectional lead screw is rotatably arranged in the chamber; the two lead screw sliders are respectively arranged on both sides of the bidirectional lead screw; wherein the two lead screw sliders are respectively connected to the two movable magnetic suction structures.

[0011] As a further description of the above technical solution: the movable magnetic attraction structure includes a movable electromagnet and a movable frame, wherein at least one movable electromagnet is arranged on the movable frame; the lead screw slider is embedded in the movable frame, and relevant staff can increase or decrease the electromagnets on the movable frame according to actual conditions.

[0012] As a further description of the above technical solution: a slider is arranged on the top of the movable frame, a slide rail is arranged on the top of the chamber, and the slider is slidably arranged in the slide rail to improve the stability of the movable frame when moving.

[0013] As a further description of the above technical solution: the fixed magnetic attraction structure includes a fixed electromagnet and a fixed plate, wherein the fixed electromagnet is arranged on the fixed plate; the fixed plate is fixedly arranged on the top of the chamber; wherein a through hole is opened on the fixed plate, and the bidirectional lead screw passes through the through hole, so when the bidirectional lead screw rotates, the bidirectional lead screw will not interfere with the fixed plate.

[0014] As a further description of the above technical solution: a controller is arranged outside the chamber, wherein the fixed magnetic attraction structure and the movable magnetic attraction structure are electrically connected to the controller respectively, and the two adjustable placement racks are synchronously connected to the controller. The controller can change the magnetic size of the fixed magnetic attraction structure and the movable magnetic attraction structure by controlling the current, and can also control the synchronous movement of the two adjustable placement racks.

[0015] As a further description of the above technical solution: the chamber is provided with an openable and closable operating door to facilitate taking out the metal mask plate and the substrate to be evaporated.

[0016] The magnetic control device for OLED metal mask according to the utility model has the following beneficial effects:

[0017] 1. By setting up an adjustable placement rack, the position can be adjusted according to metal mask plates and substrates of different sizes, which improves the versatility and flexibility of the device.

[0018] 2. The fixed magnetic structure provides a stable magnetic field force to ensure the stable adsorption of the metal mask during the entire evaporation process, avoiding the displacement of the mask due to mechanical vibration and other reasons. The mobile magnetic structure can be precisely adjusted according to the changes in the size of the metal mask, ensuring the close fit between the mask and the substrate, thereby improving the pixel uniformity and accuracy of the OLED device.

[0019] 3. The magnetic field strength can be easily adjusted by changing the current passing through the fixed electromagnet and the movable electromagnet, without physically moving the magnet, which greatly simplifies the adjustment process and improves the convenience of operation. The magnetic field strength can be fine-tuned by precisely controlling the current, which helps to more accurately control the position of the metal mask and ensure a better fit between the mask and the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the internal structure of a magnetic control device applicable to an OLED metal mask according to an embodiment of the utility model;

[0021] Figure 2 is a schematic diagram of the internal structure of a magnetic control device applicable to an OLED metal mask according to another embodiment of the utility model;

[0022] Figure 3 This is a schematic diagram of the connection between the mobile magnetic attraction structure and the bidirectional moving structure according to an embodiment of the utility model;

[0023] Figure 4 is a schematic diagram of a fixed magnetic attraction structure according to an embodiment of the utility model;

[0024] As shown in the figure:

[0025] 100, chamber; 101, slide rail; 200, evaporation source; 300, adjustable placement rack; 310, mask plate support rack; 320, substrate support rack; 330, connecting rack; 340, driving cylinder; 400, fixed magnetic structure; 410, fixed electromagnet; 420, fixed plate; 421, through hole; 500, movable magnetic structure; 510, movable electromagnet; 520, movable rack; 600, bidirectional movable structure; 610, driving motor; 620, bidirectional lead screw; 630, lead screw slider; 700, controller; 800, metal mask; 900, substrate to be evaporated. DETAILED DESCRIPTION

[0026] like Figures 1 to 4 As shown, the magnetic control device for OLED metal mask of the embodiment of the utility model can adapt to metal mask plates 800 and substrates to be evaporated 900 of different sizes by adjusting the position of the adjustable placement frame 300, thereby improving the versatility and flexibility of the device.

[0027] The application number is CN201420222130.5, which is a evaporation device (hereinafter referred to as "the patent"), and the evaporation device includes: an evaporation chamber, an evaporation source arranged in the evaporation chamber, a mask plate support frame and a substrate support frame. The mask plate support frame is used to support the metal mask plate, and the substrate support frame is used to support the substrate to be evaporated. Therefore, the patent has high requirements for the size limit of the metal mask plate and the substrate to be evaporated, and cannot provide a flexible and variable adaptation mechanism.

[0028] The magnetic control device suitable for OLED metal mask of the utility model can control the driving cylinder 340 to make the driving cylinder 340 extend and retract, thereby driving the connecting frame 330 to move, so that the positions of the mask plate support frame 310 and the substrate support frame 320 connected to the connecting frame 330 change, thereby realizing adaptive adjustment according to the sizes of the metal mask plate 800 and the substrate 900 to be evaporated, and the two adjustable placement frames 300 can ensure that the two adjustable placement frames 300 are close to or away from each other by synchronously connecting the corresponding driving cylinders 340 with the controller 700, thereby realizing precise position adjustment.

[0029] In addition, when performing magnetic control, this patent is implemented by providing a plurality of magnetic blocks arranged in a matrix on the side of the substrate to be evaporated away from the metal mask plate, and a traction device for adjusting the up and down movement of each magnetic block relative to the substrate to be evaporated. It is also unable to cope with metal mask plates and substrates to be evaporated of different sizes.

[0030] The magnetic control device suitable for OLED metal mask of the utility model is designed with a fixed magnetic structure 400 and a movable magnetic structure 500. The two movable ends of the bidirectional movable structure 600 drive the two movable magnetic structures 500 to move closer to or away from each other, so as to match metal mask plates 800 and substrates to be evaporated 900 of different sizes. That is, the fixed magnetic structure 400 provides stable magnetism, so that the metal mask plate 800 is adsorbed onto the substrate to be evaporated 900, and the movement of the movable magnetic structure 500 increases the magnetism on both sides, thereby improving the fit of the metal mask plate 800 to the substrate to be evaporated 900.

[0031] Relevant staff can start the driving motor 610 to rotate the bidirectional lead screw 620 to drive the movement of the two lead screw sliders 630, thereby realizing the two movable magnetic structures 500 approaching or moving away from each other, and adaptively adjusting according to the width of the metal mask plate 800 and the substrate to be evaporated 900.

[0032] This patent can change the magnetic field size of these magnetic blocks by adjusting the distance between each magnetic block and the substrate to be evaporated when it is necessary to improve the fit between the metal mask plate and the substrate to be evaporated, so that the magnetic fields of all the magnetic blocks tend to be consistent, avoiding deformation of the metal mask plate due to uneven magnetic field, thereby avoiding affecting the evaporation pattern. This adjustment method is relatively cumbersome and lacks precision.

[0033] The magnetic control device for OLED metal mask of the utility model controls the current through the controller 700 so that the fixed electromagnet 410 and the movable electromagnet 510 have appropriate magnetism, without the need to adjust the height of the fixed electromagnet 410 and the movable electromagnet 510. The magnetic adjustment method is faster and more accurate.

[0034] In summary, according to the magnetic control device suitable for OLED metal mask of the embodiment of the utility model, through the setting of the adjustable placement frame 300, the position can be adjusted according to the metal mask plate 800 and the substrate of different sizes, thereby improving the versatility and flexibility of the device; the fixed magnetic attraction structure 400 provides a stable magnetic field force to ensure the stable adsorption of the metal mask plate 800 during the entire evaporation process, thereby avoiding the displacement of the mask plate due to mechanical vibration and the like; the movable magnetic attraction structure 500 can be precisely adjusted according to the change in the size of the metal mask plate 800, thereby ensuring the close fit between the mask plate and the substrate, thereby improving the pixel uniformity and accuracy of the OLED device; the magnetic field strength can be easily adjusted by changing the current passing through the fixed electromagnet 410 and the movable electromagnet 510, without physically moving the magnet, thereby greatly simplifying the adjustment process and improving the convenience of operation, and the magnetic field strength can be fine-tuned by precisely controlling the current, which helps to more accurately control the position of the metal mask plate 800 and ensure a better fit between the metal mask plate 800 and the substrate 900 to be evaporated.

[0035] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A magnetic control device suitable for an OLED metal mask, characterized in that: include: A chamber (100), a vapor deposition source (200), an adjustable placement rack (300), a fixed magnetic attraction structure (400), a movable magnetic attraction structure (500) and a bidirectional movable structure (600), wherein: The evaporation source (200) is arranged at the bottom of the chamber (100); The two adjustable placement racks (300) are respectively arranged on two sides of the chamber (100) opposite to each other, each of the adjustable placement racks (300) comprises a mask plate support rack (310) and a substrate support rack (320) that move synchronously, and the mask plate support rack (310) and the substrate support rack (320) are arranged in sequence from bottom to top, wherein the mask plate support racks (310) on the two adjustable placement racks (300) jointly support the metal mask plate (800), and the substrate support racks (320) on the two adjustable placement racks (300) jointly support the substrate (900) to be evaporated; A plurality of the fixed magnetic attraction structures (400) are arranged in an array on the top of the chamber (100); The two groups of movable magnetic attraction structures (500) are respectively arranged on both sides of the plurality of fixed magnetic attraction structures (400), and are respectively connected to the two movable ends of the bidirectional movable structure (600); The magnetic ends of the plurality of fixed magnetic structures (400) and the two groups of movable magnetic structures (500) are at the same height.

2. The magnetic control device for OLED metal mask according to claim 1, characterized in that: Each of the adjustable placement racks (300) further comprises a connecting rack (330) and a driving cylinder (340), wherein: The connecting frame (330) connects the same side of the mask support frame (310) and the substrate support frame (320); The driving cylinder (340) is arranged outside the chamber (100), and the telescopic end of the driving cylinder (340) extends into the chamber (100) and is connected to the connecting frame (330).

3. The magnetic control device for OLED metal mask according to claim 1, characterized in that: The bidirectional moving structure (600) comprises a driving motor (610), a bidirectional lead screw (620) and a lead screw slider (630), wherein: The driving motor (610) is arranged outside the chamber (100); The bidirectional lead screw (620) is rotatably disposed in the chamber (100); The two lead screw sliders (630) are respectively arranged on both sides of the bidirectional lead screw (620); Wherein, the two lead screw sliders (630) are respectively connected to the two movable magnetic attraction structures (500).

4. The magnetic control device for OLED metal mask according to claim 3, characterized in that: The movable magnetic attraction structure (500) comprises a movable electromagnet (510) and a movable frame (520), wherein: At least one of the moving electromagnets (510) is disposed on the moving frame (520); The lead screw slider (630) is embedded in the movable frame (520).

5. The magnetic control device for OLED metal mask according to claim 4, characterized in that: A slider (521) is arranged on the top of the movable frame (520), a slide rail (101) is arranged on the top of the chamber (100), and the slider (521) is slidably arranged in the slide rail (101).

6. The magnetic control device for OLED metal mask according to claim 3, characterized in that: The fixed magnetic attraction structure (400) comprises a fixed electromagnet (410) and a fixed plate (420), wherein: The fixed electromagnet (410) is arranged on the fixed plate (420); The fixing plate (420) is fixedly arranged on the top of the chamber (100); Wherein, a through hole (421) is provided on the fixing plate (420), and the bidirectional lead screw (620) passes through the through hole (421).

7. The magnetic control device for OLED metal mask according to claim 1, characterized in that: A controller (700) is arranged outside the chamber (100), wherein the fixed magnetic attraction structure (400) and the movable magnetic attraction structure (500) are electrically connected to the controller (700) respectively, and the two adjustable placement racks are synchronously connected to the controller.

8. The magnetic control device for OLED metal mask according to claim 1, characterized in that: The chamber (100) is provided with an operating door that can be opened and closed.

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