Silicon source tube lifting tool

Abstract

The utility model belongs to the technical field of semiconductor diffusion equipment, and particularly relates to a silicon source tube lifting tool. The device comprises a tray, telescopic supporting legs and a bracket, baffles are arranged on the periphery of the tray, and the baffles are folded to be connected with the tray to form a semi-surrounding structure with an upward opening; the telescopic legs are arranged at four corners of the bottom of the tray; the bracket is arranged in the semi-surrounding structure of the tray, the bracket comprises an arc-shaped supporting plate attached to the periphery of the silicon source tube and two limiting supporting feet arranged at the bottom of the supporting plate, and the two limiting supporting feet arranged at intervals are attached to the inner side of the baffle in a limiting mode. The device is used for solving the problem that the source pipe is inconvenient to feed into the furnace mouth.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor diffusion equipment, and in particular relates to a silicon source tube lifting tool. Background Art

[0002] Diffusion is an important process in the semiconductor chip manufacturing process, and many parameters are determined by this process. Diffusion equipment is usually composed of a furnace body that can control the temperature rise and fall / constant temperature and a system that can control the input gas flow.

[0003] Before diffusion, the silicon wafer usually needs to be placed on a silicon boat, which is placed in a source tube. Then the entire source tube is placed in a diffusion furnace. Since the source tube itself, the silicon boat, and the silicon wafer are all heavy, and there is usually a certain height difference between the furnace mouth and the operating table of the diffusion furnace, it is usually difficult to place the entire source tube into the diffusion furnace smoothly. It requires the coordinated operation of multiple people. If an accident occurs, the source tube and the internal silicon wafer are easily damaged, and the efficiency is relatively low, and the handling operation is extremely inconvenient. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a silicon source tube lifting tooling for solving the problem of inconvenient operation of feeding the source tube into the furnace mouth.

[0005] The utility model solves the above technical problems with the following technical solutions: a silicon source tube lifting tool, which includes:

[0006] A tray, wherein baffles are arranged around the tray, and the baffles are closed and connected to the tray to form a semi-enclosed structure with an opening facing upward;

[0007] A plurality of telescopic legs are arranged at the four corners of the bottom of the tray;

[0008] The bracket is placed in the semi-enclosed structure of the tray, and the bracket includes an arc-shaped support plate that fits the outer periphery of the silicon source tube, and two limiting support legs arranged at the bottom of the support plate, and the two limiting support legs are arranged at intervals to limit and fit the inner side of the baffle.

[0009] Compared with the prior art, the above technical solution has the following beneficial effects:

[0010] By setting up a pallet and arranging telescopic legs at the bottom of the pallet, the height of the entire pallet can be controlled to meet the height of different furnace openings, and then a bracket is placed on the pallet, and the source tube is supported by the arc-shaped support plate in the bracket, so that the source tube can be stably supported, and the bracket and the pallet are detachable for easy cleaning, and the bracket is limited in a semi-enclosed structure on the pallet by two limiting legs, thereby avoiding displacement deviation between the pallet and the bracket during use.

[0011] Based on the above technical solution, the embodiment of the present application can also be improved as follows:

[0012] In one embodiment, a support frame is provided in the tray, and an arc-shaped support plate is formed on the top of the support frame to fit the bottom of the support plate.

[0013] In one embodiment, two ends of the support frame are fitted on the inner side of the limiting support leg, and the support frame and the outer baffle form a limiting space for limiting the limiting support leg.

[0014] In one embodiment, the telescopic legs include:

[0015] A support screw connected to the bottom of the tray;

[0016] The supporting chassis is screwed to the bottom of the supporting screw rod.

[0017] In one embodiment, a buffer layer is further included, which is installed on the bottom of the supporting chassis.

[0018] In one embodiment, the bracket is a quartz bracket. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0021] Figure 2 for Figure 1 Schematic diagram of the explosion structure.

[0022] Reference numerals:

[0023] 1. Tray; 2. Baffle;

[0024] 3. Telescopic legs; 301. Support screw; 302. Support chassis; 303. Buffer layer;

[0025] 4. Bracket; 5. Arc-shaped support plate; 6. Limiting support foot;

[0026] 7. Support frame; 8. Arc-shaped support plate. DETAILED DESCRIPTION

[0027] The following embodiments of the technical solution of the utility model are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model, and are therefore only used as examples, and cannot be used to limit the protection scope of the utility model.

[0028] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application should have the common meanings understood by technicians in the field to which the utility model belongs.

[0029] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0030] In addition, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present utility model, the meaning of "plurality" is more than two, unless otherwise clearly and specifically limited.

[0031] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0032] Example

[0033] like Figure 1 As shown, the utility model provides a silicon source tube lifting tool, which includes: a tray, a bracket and four telescopic legs.

[0034] Baffles are arranged around the tray, and the baffles are closed and connected to the tray to form a semi-enclosed structure with an opening facing upward. The bracket is placed in the semi-enclosed structure of the tray, and the semi-enclosed structure formed by the baffles is used to limit the movement of the bracket. The bracket includes an arc-shaped support plate that fits the outer periphery of the silicon source tube, and two limiting legs arranged at the bottom of the support plate, and the two limiting legs are limited and fit to the inner side of the baffle. Specifically, the two limiting legs are arranged at axial intervals along the arc surface of the support plate, and the two limiting legs are limited on the inner side of the baffle, so that the support can avoid displacement in the axial direction, and at the same time, it is convenient to push the source tube on the support plate into the furnace mouth from the axial direction.

[0035] Four telescopic legs are arranged at the four corners of the bottom of the tray;

[0036] This embodiment provides a tray with telescopic legs at the bottom of the tray, so as to control the height of the entire tray to meet the height of different furnace openings. A bracket is then placed on the tray, and the source tube is supported by an arc-shaped support plate in the bracket, so that the source tube can be stably supported. The bracket and the tray are detachable for easy cleaning, and the bracket is limited in a semi-enclosed structure on the tray by two limiting legs, so as to avoid displacement deviation between the tray and the bracket during use.

[0037] The bracket is a quartz bracket, which can be cleaned more conveniently to ensure cleanliness, and the quartz bracket has a smooth surface and low friction, which is convenient for pushing the source tube thereon and avoids contact between the source tube and the tray below.

[0038] In order to improve the support of the tray to the bracket, a support frame is provided in the tray, and an arc-shaped support plate is formed on the top of the support frame to fit the bottom of the bracket. The arc-shaped support plate fits the bottom of the arc-shaped bracket to achieve a better supporting effect.

[0039] Specifically, the support frame and the arc-shaped support plate on the top are integrally arranged between the two limit support feet at the bottom of the bracket, and the outer two ends of the support frame are fitted on the inner side of the limit support feet. The support frame and the outer baffle form a limit space for limiting the limit support feet, thereby limiting the axial displacement of the bracket.

[0040] Specifically, the length and width of the limiting space are consistent with the common length and width of the limit, which limits the displacement of the bracket in two perpendicular directions, axial and radial.

[0041] Specifically, the telescopic legs include: a supporting screw and a supporting chassis.

[0042] The support screw is connected to the bottom of the tray, the support chassis is screwed to the bottom of the support screw, and the support chassis can be adjusted in height with the bottom of the tray through the support screw.

[0043] It also includes a buffer layer, which is installed at the bottom of the supporting chassis to avoid hard friction between the bottom of the telescopic legs and the operating table, and increases the friction to prevent the entire lifting tool from sliding.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A silicon source tube lifting tool, characterized in that: include: A tray, wherein baffles are arranged around the tray, and the baffles are closed and connected to the tray to form a semi-enclosed structure with an opening facing upward; A plurality of telescopic legs are arranged at the four corners of the bottom of the tray; The bracket is placed in the semi-enclosed structure of the tray, and the bracket includes an arc-shaped support plate that fits the outer periphery of the silicon source tube, and two limiting support legs arranged at the bottom of the support plate, and the two limiting support legs are arranged at intervals to limit and fit the inner side of the baffle.

2. The silicon source tube lifting tool according to claim 1, characterized in that: A support frame is arranged in the tray, and an arc-shaped support plate is formed on the top of the support frame and fits the bottom of the support plate.

3. The silicon source tube lifting tool according to claim 2, characterized in that: The two ends of the support frame are fitted on the inner side of the limiting support leg, and the support frame and the outer baffle form a limiting space for limiting the limiting support leg.

4. The silicon source tube lifting tool according to claim 1, characterized in that: The telescopic legs include: A support screw connected to the bottom of the tray; The supporting chassis is screwed to the bottom of the supporting screw rod.

5. The silicon source tube lifting tool according to claim 4, characterized in that: It also includes a buffer layer installed on the bottom of the supporting chassis.

6. The silicon source tube lifting tool according to claim 1, characterized in that: The bracket is a quartz bracket.

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