Composite structure template for nanoimprint

Abstract

The utility model discloses a composite structure template for nanoimprint, which comprises an imprint soft film and a framework embedded in the imprint soft film, the framework is hollow, the framework is used for supporting the self weight of the imprint soft film, and the framework can be bent at millimeter level when the composite structure template is stressed. The embossed soft film is simple in structure, the integral rigidity of the embossed soft film is increased by the aid of the framework, and center sagging is eliminated. During imprinting, the composite structure template can still keep the curvature deformation effect and the ultraviolet light transmission effect of a traditional imprinting soft film, and patterns on the imprinting soft film are pressed on a base material in an equal-pressure mode.

Description

Technical Field

[0001] The utility model belongs to the technical field of nano-imprinting, and in particular relates to a composite structure template for nano-imprinting. Background Art

[0002] Micro-nano imprint technology commonly uses PDMS soft templates to imprint the imprint glue on the wafer, such as Figure 1 As shown, the main working process of nanoimprinting is as follows:

[0003] First, a PDMS soft template 1 with a pattern complementary to that after embossing is placed on an aluminum ring 2, which is placed between the UV lamp above and the platform below.

[0004] Second, the wafer 3 coated with the imprint glue is placed on the platform 4 .

[0005] Third, fill the space between the upper PDMS soft template 1 and the UV lamp with air pressure P1 (eg, 20 kPa, etc.).

[0006] Fourth, the wafer on the platform 4 is lifted until it contacts the sagging PDMS soft template 1 .

[0007] Fifth, the air pressure between the PDMS soft template 1 and the UV lamp is inflated to P2 (eg, 50 kPa, etc.).

[0008] Sixth, the wafer on the platform 4 is raised again until the wafer 3 is in full contact with the PDMS soft template 1 .

[0009] Seventh, the UV lamp gate is opened, and the UV light passes through the PDMS soft template 1 from above to expose and cure the embossing glue.

[0010] Eighth, the air pressure is released, the platform 4 and the wafer 3 are lowered, and the imprinting is completed.

[0011] The traditional PDMS soft template is supported by a circle of aluminum rings, between the UV lamp above and the wafer below. Due to the gravity of the PDMS soft template itself, the slightly inflated P1 pressure to avoid left and right deviation when contacting the wafer, and the gradual rise of the platform, the PDMS soft template and the wafer are in contact and pushed from the center to the outside, accompanied by the inflation pressure P2. At the P1 pressure, the center of the PDMS soft template forms a curvature, the pattern is stretched and slightly deformed. At the P2 inflation pressure, the center-to-outward expansion and pushing phenomenon may cause the imprinted pattern to tilt. Utility Model Content

[0012] In order to solve the above technical problems, the utility model proposes a composite structure template for nanoimprinting.

[0013] In order to achieve the above object, the technical solution of the utility model is as follows:

[0014] On the one hand, the utility model discloses a composite structure template for nanoimprinting, comprising: an imprinting soft film and a skeleton embedded in the imprinting soft film, the skeleton is hollow, the skeleton is used to support the weight of the imprinting soft film, and can bend at the millimeter level when the composite structure membrane plate is under pressure.

[0015] On the basis of the above technical solution, the following improvements can be made:

[0016] As a preferred solution, the structure of the embossed soft film matches the structure of the substrate to be embossed.

[0017] As a preferred solution, the structure of the skeleton matches the structure of the substrate to be imprinted.

[0018] As a preferred solution, the skeleton includes: an outer main ring and a mesh support distributed inside the outer main ring.

[0019] As a preferred solution, the diameter of the outer main ring is larger than the diameter of the mesh stent.

[0020] As a preferred solution, the mesh density near the center of the mesh support is greater than the mesh density near the edge of the mesh support.

[0021] The utility model discloses a composite structure template for nanoimprinting, which has the following beneficial effects:

[0022] The utility model has a simple structure, and uses a skeleton to increase the overall rigidity of the embossed soft film and eliminate the center sagging. During embossing, the composite structure template can still maintain the curvature deformation effect and the ultraviolet light transmission effect of the traditional embossed soft film, and the pattern on the embossed soft film is pressed on the substrate in an evenly even manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 Schematic diagram of PDMS soft template nanoimprinting provided by the prior art.

[0025] Figure 2 A schematic diagram of nanoimprinting of a composite structure template provided in an embodiment of the present invention.

[0026] Figure 3 A schematic structural diagram of a composite structure template provided in an embodiment of the utility model.

[0027] Figure 4This is one of the cross-sectional views of the composite structure template provided in the embodiment of the utility model.

[0028] Figure 5 This is the second cross-sectional view of the composite structure template provided in the embodiment of the utility model.

[0029] Wherein: 1-PDMS soft template, 2-aluminum ring, 3-wafer, 4-platform;

[0030] 5-composite structure template, 51-embossed soft film, 52-skeleton, 521-outer main ring, 522-mesh support. DETAILED DESCRIPTION

[0031] The preferred embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] In addition, the expression of “comprising” an element is an “open” expression, which merely means that corresponding components or steps exist, and should not be interpreted as excluding additional components or steps.

[0034] In order to achieve the purpose of the present invention, some embodiments of the composite structure template for nanoimprinting, such as Figure 2-4 As shown, the composite structure template 5 includes: an embossed soft film 51 and a skeleton 52 embedded in the embossed soft film 51. The skeleton is hollow and is used to support the weight of the embossed soft film and can bend at the millimeter level when the composite structure membrane plate is under pressure.

[0035] In order to further optimize the implementation effect of the utility model, in some other implementations, the remaining characteristic technologies are the same, and the difference is that the structure of the embossed soft film matches the structure of the substrate to be embossed.

[0036] Further, based on the above embodiments, the structure of the skeleton matches the structure of the substrate to be imprinted.

[0037] It is worth noting that when the substrate to be imprinted is not a conventional flat substrate, the skeleton is used to support the imprinted soft film so that the composite structure template can have a structure matching the substrate to be imprinted. For example, when the substrate to be imprinted has a curved surface with two sides bent downward, the composite structure template can be designed to have a structure matching this (such as Figure 5As shown), the subsequent graphics printing is more accurate.

[0038] In order to further optimize the implementation effect of the utility model, in some other embodiments, the other characteristic technologies are the same, and the difference is that the skeleton 52 includes: an outer main ring 521 and a mesh support 522 distributed inside the outer main ring 521.

[0039] Ultraviolet light can pass through the mesh of the mesh support 522 .

[0040] Further, based on the above embodiment, the diameter of the outer main ring 521 is larger than the diameter of the mesh support 522 to ensure the overall rigidity of the skeleton.

[0041] Further, based on the above embodiment, the mesh density of the mesh support near its center is greater than the mesh density near its edge.

[0042] Ensure that the center of the frame is more rigid and less likely to sag.

[0043] The present utility model also discloses a method for preparing a composite structure template for nanoimprinting, which is used to prepare the composite structure template disclosed in any of the above embodiments, comprising:

[0044] Step S1: injecting a quantitative amount of soft film glue into the soft film injection mold so that the soft film glue covers the area with micro-nano structure patterns on the soft film injection mold;

[0045] Step S2: placing the skeleton into a soft film injection mold;

[0046] Step S3: further injecting a quantitative amount of soft film glue into the soft film injection mold;

[0047] Step S4: After heating and curing, demoulding.

[0048] Among them, the imprinted soft film is a PDMS soft film;

[0049] The frame is made of one of PMMA, PC, ABS, transparent crystal, metal, acrylic, and glass fiber.

[0050] Furthermore, a soft film injection mold matching the structure of the substrate to be imprinted is prepared.

[0051] Furthermore, a skeleton matching the structure of the substrate to be imprinted is prepared.

[0052] The utility model discloses a composite structure template for nanoimprinting, which has the following beneficial effects:

[0053] The utility model has a simple structure, and uses a skeleton to increase the overall rigidity of the embossed soft film and eliminate the center sagging. During embossing, the composite structure template can still maintain the curvature deformation effect and the ultraviolet light transmission effect of the traditional embossed soft film, and the pattern on the embossed soft film is pressed on the substrate in an evenly even manner.

[0054] The utility model can effectively solve the problems mentioned in the background technology that the soft template sags due to gravity, has a large contact range when bent, and the wafer (substrate) is prone to uneven stretching of the soft template when imprinting; and the arc surface is formed between the soft template and the imprinted pattern during demolding, thereby causing the soft template to deform and pull the pattern, resulting in pattern defects. The utility model can also withstand the application of inflation pressure, and the PDMS pattern is applied to the wafer by pressure on the entire surface.

[0055] Furthermore, the composite structure template of the utility model can be supported by a skeleton so as to be bent into a structure matching the substrate to be imprinted, thereby ensuring the accuracy of imprinting.

[0056] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0057] In the present utility model, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation" and "screw-on" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.

[0058] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which shall fall within the scope of the utility model to be protected. The scope of protection of the utility model shall be defined by the attached claims and their equivalents.

Claims

1. A composite structure template for nanoimprinting, characterized in that: include: The embossed soft film and the frame embedded in the embossed soft film are hollowed out and used to support the deadweight of the embossed soft film and can bend at the millimeter level when the composite structure membrane plate is under pressure.

2. The composite structure template according to claim 1, characterized in that: The structure of the embossing soft film matches the structure of the substrate to be embossed.

3. The composite structure template according to claim 2, characterized in that: The structure of the skeleton matches the structure of the substrate to be imprinted.

4. The composite structure template according to any one of claims 1 to 3, characterized in that: The skeleton comprises: an outer main ring and a mesh support distributed inside the outer main ring.

5. The composite structure template according to claim 4, characterized in that: The diameter of the outer main ring is greater than the diameter of the mesh support.

6. The composite structure template according to claim 4, characterized in that: The mesh density of the mesh support near the center is greater than the mesh density near the edge.

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