Rolling shaft structure suitable for wet etching

Abstract

The utility model discloses a rolling shaft structure suitable for wet etching, which comprises a rolling shaft body and ribs formed on the rolling shaft body, and a roller groove is formed by two adjacent ribs and the rolling shaft body. According to the utility model, on one hand, the roller groove design with a special shape is adopted, so that more liquid can be brought out from acid liquor, more acid liquor is in contact with a silicon wafer, the problem that the liquid carried by the rolling shaft is not uniform is solved, the consumption of liquid medicine can be effectively reduced, and the generation rate of bad battery pieces is reduced; and on the other hand, the formed sharp corners are bent, so that the deformation of the rolling shaft and the vibration generated in the transmission process can be effectively reduced, the uniformity of the etching process is ensured, the etching precision can be improved to a certain extent, and the over-etching probability is reduced.

Description

Technical Field

[0001] The utility model belongs to the field of etching processing equipment, and in particular relates to a roller structure suitable for wet etching. Background Art

[0002] In recent years, with the continuous improvement of solar cell technology, the continuous reduction of production costs and the rapid growth of cell efficiency, photovoltaic power generation has gradually become an important way to supply electricity. In the two processes of removing borosilicate glass and removing phosphorus silicon glass in the production process of crystalline silicon solar cells, the borosilicate glass on the front of the cell and the phosphorus silicon glass on the back need to be removed respectively, and the other side needs to be protected from being corroded by acid. The quality of etching will directly affect the conversion efficiency of the cell.

[0003] At present, in order to further improve the production capacity, the operation speed of the machine is gradually increased. The existing roller structure for removing borosilicate glass / phosphosilicate glass on the surface of solar cells includes a roller body, a convex ridge formed on the roller body, wherein two adjacent convex ridges and the roller body form a roller groove, and the roller groove is in the shape of a groove tooth, and the "roller with liquid" mode is used for surface etching in the corresponding section. However, in actual operation, there are the following technical defects:

[0004] 1) Since the amount of liquid formed by the alveolar groove is small, it is easy to form uneven liquid and cause poor battery cells. In order to solve this problem, the only way is to increase the concentration of the liquid to improve the battery etching efficiency. Therefore, the amount of liquid used is large and the cost is high;

[0005] 2) Since the entire mechanism is rigidly connected by gears, slight vibrations are inevitable, causing the battery cells to shift during the transmission process, resulting in poor etching of the battery cells and unstable etching effects. Utility Model Content

[0006] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide an improved roller structure suitable for wet etching.

[0007] In order to solve the above technical problems, the technical solutions adopted by the utility model are as follows:

[0008] A roller structure suitable for wet etching, comprising a roller body, convex ridges formed on the roller body, wherein two adjacent convex ridges and part of the roller body form a roller groove, in the axial orthographic projection of the roller body, each convex ridge comprises an inner arc segment and an outer arc segment arranged concentrically with the roller body, and an end arc segment for connecting the inner arc segment and the outer arc segment from the end, wherein the area formed by the inner arc segment, the outer arc segment and the end arc segment is the convex ridge; the curvature formed by the inner arc segment is smaller than the curvature formed by the outer arc segment, the width formed between the two end arc segments along the radial outward direction of the roller body gradually increases, and an acute angle is formed between the end arc segment and the outer arc segment.

[0009] According to a specific implementation and preferred aspect of the utility model, the ridge includes an inner arc sheet and an outer arc sheet of equal thickness, wherein the thickness of the inner arc sheet in the radial direction of the roller body is δ1, the thickness of the outer arc sheet in the radial direction of the roller body is δ2, and δ2≥δ1.

[0010] Preferably, in the radial direction of the roller body, the two end arc segments of the inner arc sheet body change in a straight line from inside to outside, and the two end arc segments of the outer arc sheet body change in an arc shape from inside to outside.

[0011] Furthermore, the width change rate formed between the two end arc segments of the inner arc sheet along the roller body radially outward is △A, and the width change rate formed between the two end arc segments of the outer arc sheet along the roller body radially outward is △B, where △A≥△B. Generally, △A>△B, combined with the restriction of gradually widening from the inside to the outside, the final bending angle formed can effectively reduce the deformation of the roller itself and the vibration occurring during the transmission process, thereby ensuring the uniformity of the etching process.

[0012] In some specific implementations, the end arc segments corresponding to the inner arc sheet body change in a straight line; the end arc segments corresponding to the outer arc sheet body change in an arc shape from the two ends to the inside of the convex ridge.

[0013] In some specific embodiments, the connection point between the inner arc segment and the end arc segment is an endpoint, and the angle formed between the tangent direction of the roller body at the corresponding endpoint and the extension direction of the end arc segment of the inner arc sheet is 30~65°.

[0014] Preferably, δ2=2δ1; the degree of the sharp angle is 20~40°.

[0015] According to another specific implementation and preferred aspect of the utility model, the end arc segments are symmetrically arranged about the center line connecting the inner arc segment and the outer arc segment, which is not only convenient for processing and forming, but also the etching effect formed is relatively uniform.

[0016] Furthermore, the ridges are evenly distributed around the roller body, so that more acid liquid contacts the silicon wafer, thereby solving the problem of uneven liquid carrying on the roller, effectively reducing the consumption of liquid, reducing the generation of defective cells, and at the same time, the etching effect is relatively stable.

[0017] In some specific implementations, the arc formed by the outer arc segment is 12-18°; the arc formed by the inner arc segment is 8-10°.

[0018] In addition, r is the radius of the roller body, and the thickness of the ridge in the radial direction of the roller body is δ, wherein r is 10 to 15 times of δ.

[0019] Due to the implementation of the above technical solution, the utility model has the following advantages compared with the prior art:

[0020] In the existing roller structure, during the roller liquid carrying process, the amount of liquid carried by the tooth groove is small, so it is easy to form uneven liquid carrying, resulting in poor battery cells. The only way to solve this problem is to increase the concentration of the liquid to improve the battery etching efficiency. Therefore, the amount of liquid used is large and the cost is high. At the same time, since the entire mechanism is rigidly connected by gears, slight vibrations are inevitably generated, causing the battery cells to be displaced during the transmission process, thereby resulting in poor battery cell etching and unstable etching effects. The utility model cleverly solves various deficiencies of the existing structure by overall design of the roller structure. After adopting this roller structure, a roller groove is formed by every two adjacent convex edges and the roller body, and combined with the angle restriction, more liquid is brought out from the acid liquid during the operation of the roller, so that more acid liquid is in contact with the silicon wafer. Therefore, on the one hand, the utility model is designed with a specially shaped roller groove, which can not only bring out more liquid from the acid liquid, so that more acid liquid is in contact with the silicon wafer, but also solve the problem of uneven roller liquid carrying, effectively reduce the consumption of liquid medicine, and reduce the generation rate of defective battery cells; on the other hand, the sharp angle formed is curved, therefore, it can effectively reduce the deformation of the roller itself and the vibration occurring during the transmission process, thereby ensuring the uniformity of the etching process, and to a certain extent can improve the etching accuracy and reduce the probability of over-engraving. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of the roller structure of this embodiment;

[0022] Figure 2 for Figure 1 Schematic side view (enlarged);

[0023] Among them: 1, roller body; 2, convex edge; 20, inner arc segment; 21, outer arc segment; 22, end arc segment; 2a, inner arc sheet; 2b, outer arc sheet. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the utility model is described in detail below in conjunction with the accompanying drawings and specific embodiments. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In the utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0030] like Figure 1 and Figure 2 As shown, the roller structure suitable for wet etching provided in this embodiment includes a roller body 1 and a ridge 2 formed on the roller body 1, wherein two adjacent ridges 2 and part of the roller body 1 form a roller groove c, and multiple ridges 2 are evenly distributed on the circumference of the roller body 1.

[0031] See again Figure 2 In the axial orthographic projection of the roller body 1, each convex ridge 2 includes an inner arc segment 20 and an outer arc segment 21 which are arranged concentrically with the roller body 1, and an end arc segment 22 for connecting the inner arc segment 20 and the outer arc segment 21 from the ends, respectively, wherein the area formed by the inner arc segment 20, the outer arc segment 21 and the end arc segment 22 is the convex ridge 2, the width formed between the two end arc segments 22 along the radial outward direction of the roller body 1 gradually increases, and an acute angle γ is formed between the end arc segment 22 and the outer arc segment 21, and the degree of the acute angle γ is 20~40° (in this example, γ=35°), and at the same time, the end arc segment 22 is symmetrically arranged about the center line connecting the inner arc segment 20 and the outer arc segment 21.

[0032] In some specific embodiments, the radius of the roller body 1 is r, and the thickness of the ridge 2 in the radial direction of the roller body 1 is δ, wherein r is 10 to 15 times of δ (in this example, r=14δ).

[0033] Furthermore, the convex rib 2 includes an inner arc sheet 2a and an outer arc sheet 2b of equal thickness, wherein the thickness of the inner arc sheet 2a in the radial direction of the roller body 1 is δ1, and the thickness of the outer arc sheet 2b in the radial direction of the roller body is δ2, and δ2=2δ1. At the same time, the curvature formed by the inner arc segment 20 is smaller than the curvature formed by the outer arc segment 21, and in the radial direction of the roller body 1, the two end arc segments 22 of the inner arc sheet 2a change linearly from the inside to the outside, and the two end arc segments 22 of the outer arc sheet 2b change arc-shaped from the inside to the outside. In this example, the width change rate formed by the two end arc segments of the inner arc sheet 2a along the radial outward of the roller body 1 is △A, and the width change rate formed by the two end arc segments of the outer arc sheet 2b along the radial outward of the roller body 1 is △B, wherein △A≥△B. In general, △A>△B, combined with the restriction of gradually widening from the inside to the outside, the final bending angle formed can effectively reduce the deformation of the roller itself and the vibration during the transmission process, thereby ensuring the uniformity of the etching process. In this example, the end arc segment corresponding to the inner arc sheet 2a changes in a straight line; the end arc segment corresponding to the outer arc sheet 2b changes in an arc from the two ends to the inside of the convex ridge 2. The connection point between the inner arc segment 20 and the end arc segment 22 is the endpoint, and the angle formed between the tangent direction of the roller body 1 at the corresponding endpoint and the extension direction of the end arc segment of the inner arc sheet 2a is 30~65° (in this example, the angle is 60°). In some specific embodiments, the arc formed by the outer arc segment is 12~18° (in this example, the arc is 18°); the arc formed by the inner arc segment is 8~10° (in this example, the arc is 10°).

[0034] In summary, after adopting the roller structure, a roller groove is formed by every two adjacent convex ridges and the roller body, and combined with the angle restriction, more liquid is brought out from the acid liquid during the operation of the roller, so that more acid liquid is in contact with the silicon wafer. Therefore, on the one hand, the utility model is designed with a special roller groove, which can not only bring out more liquid from the acid liquid, so that more acid liquid is in contact with the silicon wafer, thereby solving the problem of uneven roller liquid carrying, but also effectively reduce the consumption of liquid medicine and reduce the production rate of defective battery cells; on the other hand, the sharp angle formed is curved, so it can effectively reduce the deformation of the roller itself and the vibration occurring during the transmission process, thereby ensuring the uniformity of the etching process, and to a certain extent can improve the etching accuracy and reduce the probability of over-engraving; the third aspect is based on the curvature, thickness and angle restriction of the ridges, combined with the linear change of the end arc segment corresponding to the inner arc sheet, the end arc segment corresponding to the outer arc sheet The segment part changes in an arc shape from the two ends to the inner side of the convex ridge. The enlargement rate formed by the two end arc segments of the inner arc sheet body is smaller than the enlargement rate formed by the two end arc segments of the outer arc sheet body. The end arc segments are symmetrically arranged about the central line connecting the inner arc segment and the outer arc segment, so that the roller groove formed not only allows more acid liquid to contact with the silicon wafer, thereby solving the problem of uneven roller liquid carrying, effectively reducing the consumption of liquid medicine, and reducing the generation of defective battery cells. At the same time, the etching effect is relatively stable, and the formed sharp-angle bending structure can improve the deformation ability of the convex ridge, so that the etching roller can be deformed in the process of contacting with the silicon wafer and other materials, which can effectively compensate and offset some displacements of the silicon wafer during shaking and vibration, thereby ensuring the normal etching effect of the etching process and reducing the generation rate of failed cells.

[0035] The above detailed description of the utility model is intended to enable people familiar with the technology in this field to understand the content of the utility model and implement it. It is not intended to limit the protection scope of the utility model. All equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A roller structure suitable for wet etching, comprising a roller body (1), a ridge (2) formed on the roller body (1), wherein two adjacent ridges (2) and a portion of the roller body (1) form a roller groove (c), characterized in that: In the axial orthographic projection of the roller body (1), each of the convex ridges (2) comprises an inner arc segment (20) and an outer arc segment (21) which are arranged concentrically with the roller body (1), and an end arc segment (22) for connecting the inner arc segment (20) and the outer arc segment (21) from their ends, wherein the area formed by the inner arc segment (20), the outer arc segment (21) and the end arc segment (22) is the convex ridge (2); the arc formed by the inner arc segment (20) is smaller than the arc formed by the outer arc segment (21), the width formed between the two end arc segments (22) along the radial outward direction of the roller body (1) gradually increases, and an acute angle is formed between the end arc segment (22) and the outer arc segment (21).

2. The roller structure suitable for wet etching according to claim 1, characterized in that: The convex ridge (2) comprises an inner arc sheet (2a) and an outer arc sheet (2b) both of equal thickness, wherein the thickness of the inner arc sheet (2a) in the radial direction of the roller body (1) is δ1, and the thickness of the outer arc sheet (2b) in the radial direction of the roller body (1) is δ2, and δ2≥δ1.

3. The roller structure suitable for wet etching according to claim 2, characterized in that: In the radial direction of the roller body (1), the two end arc segments (22) of the inner arc sheet (2a) change in a straight line from inside to outside, and the two end arc segments (22) of the outer arc sheet (2b) change in an arc shape from inside to outside.

4. The roller structure suitable for wet etching according to claim 3, characterized in that: The width change rate formed between the two end arc segments (22) of the inner arc sheet (2a) along the radial outward direction of the roller body (1) is △A, and the width change rate formed between the two end arc segments (22) of the outer arc sheet (2b) along the radial outward direction of the roller body (1) is △B, wherein △A≥△B.

5. The roller structure suitable for wet etching according to claim 2, characterized in that: The connection point between the inner arc segment (20) and the end arc segment (22) is an endpoint, and the angle formed between the tangent direction of the roller body (1) at the corresponding endpoint and the extension direction of the end arc segment (22) of the inner arc sheet (2a) is 30-65°.

6. The roller structure suitable for wet etching according to claim 2, characterized in that: δ2=2δ1.

7. The roller structure suitable for wet etching according to claim 1, characterized in that: The degree of the sharp angle is 20-40°.

8. The roller structure suitable for wet etching according to claim 1, characterized in that: The end arc segment (22) is symmetrically arranged with respect to a line connecting the centers of the inner arc segment (20) and the outer arc segment (21); and / or the ridges (2) are evenly distributed in the circumferential direction of the roller body (1).

9. The roller structure suitable for wet etching according to claim 1, characterized in that: The arc formed by the outer arc segment (21) is 12-18°; and / or the arc formed by the inner arc segment (20) is 8-10°.

10. The roller structure suitable for wet etching according to any one of claims 1 to 9, characterized in that: r is the radius of the roller body (1), and the thickness of the ridge (2) in the radial direction of the roller body (1) is δ, wherein r is 10 to 15 times of δ.

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