LED dodging device and LED dodging system based on super lens
By using the ultra-lens group to perform collimation and uniformity processing in the LED uniformity device, the problem of low integration in the prior art resulting in large volume is solved, and the device is miniaturized and lightweighted.
Patent Information
- Application Number
- CN202421582662.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-05
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-05
AI Technical Summary
The existing LED uniform devices have low integration, resulting in larger volume, which is not conducive to the miniaturization of equipment.
Using an LED uniform device based on an ultralens, including a collimated ultralens group and a uniform ultralens group, the beam of the LED light source is processed by collimating and uniformizing the light to generate a homogenized spot.
It improves the integration of LED uniform devices, reduces the size of the device, facilitates the miniaturization of the device, reduces the weight of the device, improves the lightweight and wear comfort.
Smart Images
Figure CN222840043U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of light homogenization, and in particular, to an LED light homogenization device and an LED light homogenization system based on a super lens. Background Art
[0002] As an advanced display technology, LED (Light Emitting Diode) homogenization has been widely used in many fields due to its advantages such as high brightness, high contrast, and high color reproduction. For example, augmented reality (AR) technology provides users with a richer interactive experience by superimposing virtual information on the real world; virtual reality (VR) technology enables users to fully immerse themselves in the virtual world by simulating a three-dimensional environment. In the field of AR / VR, LED homogenization has a high application value.
[0003] The LED homogenizing device provided in the prior art for homogenizing the LED light source usually has a low degree of integration, which leads to a large volume, which is not conducive to the miniaturization of the device (for example, AR / VR device) in which the LED homogenizing device is located. Utility Model Content
[0004] In order to solve the technical problems existing in the LED light homogenization device in the prior art, the first aspect of the present disclosure provides an LED light homogenization device based on a super lens, comprising:
[0005] The collimating super lens group is arranged on the light-emitting side of the LED light source and is configured to collimate the light beam emitted by the LED light source to generate a collimated light beam; the collimating super lens group includes a first super lens and a second super lens;
[0006] The uniform light superlens group is arranged on the side of the collimating superlens group away from the LED light source, and is configured to uniform the collimated light beam to generate a uniform light beam; the uniform light superlens group includes a third superlens and a fourth superlens;
[0007] Among them, all super lenses are provided with a substrate and a micro-nano structure arranged on the surface of the substrate; the first super lens, the second super lens, the third super lens and the fourth super lens are arranged in sequence along the propagation direction of the light beam.
[0008] Optionally, the micro-nano structure of any superlens is arranged on a side of the substrate facing the LED light source, or on a side of the substrate facing away from the LED light source.
[0009] Optionally, the first superlens is configured to diverge the LED light source to generate a divergent light beam; and the second superlens is configured to collimate the divergent light beam to generate a collimated light beam.
[0010] Optionally, the third superlens is a superlens array, comprising at least two third sub-superlenses, and the third sub-superlenses are arranged in an array on a plane perpendicular to the optical axis of the LED homogenizing device; the fourth superlens is a superlens array, comprising at least two fourth sub-superlenses, and the fourth sub-superlenses are arranged in an array on a plane perpendicular to the optical axis of the LED homogenizing device;
[0011] Among them, the third sub-superlens is associated with the fourth sub-superlens one by one; the third sub-superlens is used to split the collimated light beam and converge the sub-beams obtained by the splitting; the back focal plane of the third sub-superlens is located between the third sub-superlens and the associated fourth sub-superlens; the fourth sub-superlens is at least used to homogenize the light beam output by the associated third sub-superlens; the third sub-superlens is arranged on the front focal plane of the associated fourth sub-superlens.
[0012] Optionally, the micro-nano structure of the third superlens is arranged on the side of its substrate facing the LED light source, and the micro-nano structure of the fourth superlens is arranged on the side of its substrate facing away from the LED light source. Optionally, the fourth sub-superlens is used to homogenize the light beam output by the associated third sub-superlens, and to deflect the light beam shaped by the associated third sub-superlens; the light beams output by each fourth sub-superlens are projected to the same position of the target plane to obtain a homogenized light spot; the target plane is perpendicular to the optical axis of the LED homogenizing device.
[0013] Optionally, the LED light homogenizing device satisfies the following relationship:
[0014]
[0015] Among them, D FT is the diameter of the homogenized spot, f LA2 is the focal length of the fourth superlens, p LA is the diameter of the third sub-superlens, a FL is the distance between the fourth sub-superlens and the target plane.
[0016] Optionally, the LED light homogenizing device further includes a positive lens; the positive lens is arranged on the light-emitting side of the fourth super lens, and the positive lens is perpendicular to the optical axis of the light homogenizing device;
[0017] The fourth sub-super lens is used to homogenize the light beam output by the associated third sub-super lens; the positive lens converges the received light beams output by each fourth sub-super lens to the same position of the target plane to obtain a homogenized light spot; the target plane is perpendicular to the optical axis of the LED homogenizing device.
[0018] Optionally, the LED light homogenizing device satisfies the following relationship:
[0019]
[0020] Among them, DFT is the diameter of the homogenized spot, f LA2 is the focal length of the fourth superlens, p LA is the diameter of the third sub-superlens, f FL is the focal length of the positive lens.
[0021] A second aspect of the present disclosure provides an LED light homogenizing device based on a superlens, comprising: an LED light source; and an LED light homogenizing device as described in any one of the first aspects.
[0022] The technical solution disclosed in the present invention has achieved at least the following beneficial effects: by using a collimating superlens group and a uniform light superlens group to collimate and uniformly light the LED light source, while ensuring a good uniform light effect, the integration of the LED uniform light device can be effectively improved, which is beneficial to reducing the volume of the LED uniform light device, thereby facilitating the miniaturization of the equipment in which the LED uniform light device is located. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] The accompanying drawings are included to provide a further understanding of the present disclosure and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate embodiments of the present disclosure and together with the following description serve to explain the principles of the present disclosure.
[0024] Figure 1 A schematic diagram of the structure of an LED light homogenizing device based on a superlens provided in an embodiment of the present disclosure is shown;
[0025] Figure 2 A comparison diagram of the collimation effects of a double super lens and a positive lens provided in an embodiment of the present disclosure is shown;
[0026] Figure 3 A diagram showing the correlation between the diameter of the homogenized light spot provided by the embodiment of the present disclosure and the third super lens and the fourth super lens;
[0027] Figure 4 A diagram showing the correlation between the diameter of the homogenized light spot provided by the embodiment of the present disclosure and the third super lens, the fourth super lens, and the positive lens;
[0028] Figure 5 A schematic diagram of light collimation effect in a specific embodiment provided by the present disclosure is shown;
[0029] Figure 6 A schematic diagram of light uniformity effect in a specific embodiment provided by the present disclosure is shown;
[0030] Figure 7 The effect diagram of the homogenized light spot provided by the embodiment of the present disclosure is shown;
[0031] Figure 8 The light intensity distribution diagram of the homogenized light spot provided by the embodiment of the present disclosure is shown.
[0032] The reference numerals in the figure represent respectively:
[0033] 101: first super lens; 102: second super lens; 103: third super lens;
[0034] 104: fourth super lens; 105: LED light source; 201: light source;
[0035] 202: divergent superlens; 203: collimating superlens; 204: positive lens;
[0036] 106: Target plane. DETAILED DESCRIPTION
[0037] The present disclosure will now be described more fully below with reference to the accompanying drawings, in which various embodiments are shown. However, the present disclosure can be implemented in many different ways and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present disclosure will be exhaustive and complete, and will fully convey the scope of the present disclosure to those skilled in the art. The same reference numerals throughout the text represent the same components. Furthermore, in the accompanying drawings, the thickness, ratios, and sizes of the components are exaggerated for clarity.
[0038] The terms used herein are only used for the purpose of describing specific embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, "one", "the", "at least one" as used herein do not represent a limitation on quantity, but are intended to include both the singular and the plural. For example, unless the context clearly indicates otherwise, "a component" has the same meaning as "at least one component". "At least one" should not be interpreted as being limited to the number "one". "Or" means "and / or". The term "and / or" includes any and all combinations of one or more of the associated listed items.
[0039] Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art. Terms defined in commonly used dictionaries should be interpreted as having the same meanings as in the relevant technical context, and unless clearly defined in the specification, these terms are not interpreted as having formal meanings in an idealized or overly formal sense.
[0040] The meaning of “include” or “comprising” specifies properties, quantities, steps, operations, components, parts or a combination thereof, but does not exclude other properties, quantities, steps, operations, components, parts or a combination thereof.
[0041] Embodiments are described herein with reference to cross-sectional views as idealized embodiments. Thus, variations in shape relative to the illustrated diagram are anticipated as a result of, for example, manufacturing techniques and / or tolerances. Therefore, the embodiments described herein should not be interpreted as being limited to the specific shapes of the regions as shown herein, but should include deviations in shape due to, for example, manufacturing. For example, a region shown or described as flat may typically have rough and / or nonlinear features. Moreover, the sharp angles shown may be rounded. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the precise shape of the regions and are not intended to limit the scope of the claims.
[0042] The LED light homogenization device provided in the prior art usually includes multiple layers of traditional lenses (for example, spherical refractive lenses, aspherical refractive lenses, refractive lens arrays, etc.), and the thickness of traditional lenses is usually between 1 mm and 2 mm, and it is difficult to arrange them compactly, so the integration is low, which leads to a larger volume, which is not conducive to the miniaturization of the device in which it is located.
[0043] Based on this, the inventor provides an LED light homogenizing device based on a super lens.
[0044] Hereinafter, exemplary embodiments according to the present disclosure will be described with reference to the accompanying drawings.
[0045] like Figure 1 As shown, the embodiment of the present application provides an LED light homogenizing device based on a super lens, comprising:
[0046] The collimating super lens group is arranged on the light-emitting side of the LED light source 105 and is configured to collimate the light beam emitted by the LED light source 105 to generate a collimated light beam; the collimating super lens group includes a first super lens 101 and a second super lens 102;
[0047] The light homogenizing superlens group is arranged on the side of the collimating superlens group away from the LED light source 105, and is configured to homogenize the collimated light beam to generate a homogenized light beam; the light homogenizing superlens group includes a third superlens 103 and a fourth superlens 104;
[0048] Among them, all super lenses are provided with a substrate and a micro-nano structure arranged on the surface of the substrate; the first super lens 101, the second super lens 102, the third super lens 103 and the fourth super lens 104 are arranged in sequence along the propagation direction of the light beam.
[0049] It should be noted that design requirements often require the size of the light spot obtained by projecting the final output light beam of the LED homogenizing device onto a target plane at a certain distance. Therefore, when collimating the emitted light of the LED light source 105, it is also necessary to control the cross-sectional size of the collimated light beam. If only one metalens is used, it is difficult to complete the collimation and control the cross-sectional size within a short distance. Therefore, in the embodiment of the present application, two metalenses (i.e., the first metalens 101 and the second metalens 102) are used for collimation, so that the collimation and control of the cross-sectional size can be completed within a short distance, thereby effectively improving the integration of the LED homogenizing device.
[0050] Furthermore, the use of two super lenses (ie, the third super lens 103 and the fourth super lens 104) for light homogenization can effectively ensure that the final output light beam has good light intensity uniformity.
[0051] In summary, in this application, by using a collimating superlens group and a uniform light superlens group to collimate and uniformly light the LED light source, while ensuring a good uniform light effect, the integration of the LED uniform light device can be effectively improved, which is beneficial to reducing the volume of the LED uniform light device, thereby facilitating the miniaturization of the equipment in which the LED uniform light device is located.
[0052] Moreover, since the weight of the super lens is lighter than that of the traditional lens, the weight of the LED light homogenizing device can be greatly reduced, so the present application is also conducive to the lightweighting of the LED light homogenizing device. When the LED light homogenizing device provided by the present application is applied to the smart wearable device in the AR / VR field, its lightweight advantage can effectively improve the wearing comfort of the user, and at the same time, it can reserve more space for configuring other devices, which is conducive to enriching the functions of the smart wearable device.
[0053] In some embodiments, optionally, the micro-nano structure of any superlens is disposed on a side of the substrate facing the LED light source, or on a side of the substrate facing away from the LED light source.
[0054] In some embodiments, optionally, the first superlens is configured to diverge the light beam emitted by the LED light source to generate a divergent light beam; and the second superlens is configured to collimate the divergent light beam to generate a collimated light beam.
[0055] The collimating metalens group uses two metalenses to diverge and then collimate the light beam emitted by the LED light source. Specifically, by diverging the LED light source first and then collimating it, the cross-sectional size of the small-angle light beam can be modulated to a degree that meets the design requirements within a short distance, and then collimated, thereby effectively reducing the distance between the collimated light beam and the LED light source, improving the integration of the LED light homogenizing device, and then reducing the volume of the LED light homogenizing device.
[0056] like Figure 2 As shown, Figure 2 FIG. 2 shows a comparison of the effect of collimating only by the divergent metalens 203 and the collimating metalens 204 and only by the positive lens 204. The light beam emitted by the light source 201 has a certain divergence angle. When using the positive lens 204 to collimate the light beam, it is necessary to Figure 2 As shown, the positive lens 204 is arranged in the direction of the light source as shown in the figure; the positive lens 204 is perpendicular to the optical axis of the LED light homogenizing device, and its front focal plane coincides with the light source 201. The position of the positive lens 204 allows it to receive all the light beams emitted by the light source 201, and the cross-sectional size of the received light beam meets the requirements, and then the positive lens 204 can collimate to obtain a collimated light beam with a cross-sectional size that meets the requirements.
[0057] For the same light source 201, the divergent superlens 202 and the collimating superlens 203 cooperate with each other to collimate the light source. Figure 2 As shown in the figure, compared with the collimating superlens 203, the diverging superlens 202 is closer to the light source 201; the diverging superlens 202 is used to diverge the light beam emitted by the light source 201, thereby increasing the divergence angle and thus rapidly expanding the cross-sectional size; the collimating superlens 203 is used to receive the light beam emitted by the diverging superlens 202 and collimate it.
[0058] The collimation effect of using the positive lens 204 is similar to the collimation effect of using the divergent super lens 202 and the collimating super lens 203. Figure 2 It can be seen that, compared with the case where the positive lens 204 is used for collimation, the overall device has a higher degree of integration when the divergent superlens 202 and the collimating superlens 203 are used for collimation. It can be seen that in the optional embodiment of the present disclosure, the solution of diverging the light beam emitted by the LED light source through the first superlens and then collimating the divergent light beam through the second superlens can shorten the distance between the collimating element and the light source while ensuring the quality of collimation, thereby effectively improving the integration of the LED light homogenizing device, thereby compressing the size of the LED light homogenizing device along the optical axis.
[0059] In some embodiments, optionally, the third superlens is a superlens array, comprising at least two third sub-superlenses, and the third sub-superlenses are arranged in an array on a plane perpendicular to the optical axis of the LED homogenizing device; the fourth superlens is a superlens array, comprising at least two fourth sub-superlenses, and the fourth sub-superlenses are arranged in an array on a plane perpendicular to the optical axis of the LED homogenizing device;
[0060] Among them, the third sub-superlens is associated with the fourth sub-superlens one by one; the third sub-superlens is used to split the collimated light beam and converge the sub-beams obtained by the splitting; the back focal plane of the third sub-superlens is located between the third sub-superlens and the associated fourth sub-superlens; the fourth sub-superlens is at least used to homogenize the light beam output by the associated third sub-superlens; the third sub-superlens is arranged on the front focal plane of the associated fourth sub-superlens.
[0061] In this embodiment, after the collimated light beam passes through the third super lens, it is divided into multiple sub-beams by multiple third sub-super lenses in the third super lens; multiple fourth sub-super lenses in the fourth super lens homogenize the multiple sub-beams, and then superimpose on the target surface to generate a homogenized light spot. Since the homogenized light spot is formed by homogenizing and superimposing multiple sub-beams, its homogenization effect is better than the homogenization effect obtained by homogenizing a single total light beam.
[0062] In some embodiments, optionally, the micro-nano structure of the third superlens is arranged on a side of its substrate facing the LED light source, and the micro-nano structure of the fourth superlens is arranged on a side of its substrate facing away from the LED light source.
[0063] The substrate of the third super lens and the substrate of the fourth super lens are arranged facing each other. This arrangement can shorten the distance between the two super lenses as much as possible and further reduce the size of the LED uniform light device, while ensuring that the front focal plane of the third super lens is located between the two super lenses.
[0064] In some embodiments, optionally, the fourth sub-superlens is used to homogenize the light beam output by the associated third sub-superlens, and to deflect the light beam shaped by the associated third sub-superlens; the light beams output by each fourth sub-superlens are projected to the same position of the target plane to obtain a homogenized light spot; the target plane is perpendicular to the optical axis of the LED homogenizing device.
[0065] Due to the phase superposition and high configurability of the metalens, the homogenization phase corresponding to the homogenization and the deflection phase corresponding to the positive lens can be combined by phase superposition, so that the fourth metalens has the performance of both light homogenization and beam deflection, further reducing the size of the homogenization device and improving the system integration.
[0066] In some embodiments, Figure 3 As shown, optionally, the LED light homogenizing device at least satisfies the following relationship:
[0067]
[0068] In formula (1), D FT is the diameter of the homogenized spot, f LA2 is the focal length of the fourth superlens, p LAis the diameter of the third sub-superlens, a FL is the distance between the fourth metalens and the target plane.
[0069] In some embodiments, Figure 4 As shown, optionally, the LED light homogenizing device further includes a positive lens; the positive lens is arranged on the light-emitting side of the fourth super lens. The fourth super lens is used to homogenize the light beam output by the associated third super lens; the positive lens converges the received light beams output by each fourth super lens to the same position of the target plane to obtain a homogenized light spot; the target plane is perpendicular to the optical axis of the LED light homogenizing device.
[0070] Optionally, the LED light homogenizing device satisfies the following relationship:
[0071]
[0072] In formula (2), D FT is the diameter of the homogenized spot, f LA2 is the focal length of the fourth superlens, p LA is the diameter of the third sub-superlens, f FL is the focal length of the positive lens.
[0073] In the LED light homogenizing device, the positive lens is used to deflect the homogenizing light beam from the fourth super lens to form a homogenized light spot on the target plane, wherein the fourth super lens is only responsible for light beam homogenization, and the positive lens is responsible for light beam deflection.
[0074] The inventor provides an LED light homogenization system based on a superlens, comprising: an LED light source; and an LED light homogenization device in any one of the above technical solutions.
[0075] Example 1
[0076] like Figure 5 As shown, Example 1 provides an optional implementation of the present disclosure. In Example 1, the light source is an LED light source 105 with a wavelength of 530 nm, a light source size of 0.5 mm*0.5 mm, and a divergence angle half angle of 0 to 90°.
[0077] In this embodiment, the first super lens 101 is disposed on the light emitting side of the LED light source 105.
[0078] The micro-nano structure of the first superlens 101 is located on the side of its substrate away from the LED light source 105; the thickness of the first superlens 101 is 0.4mm, and the net aperture is 0.78mm. The net aperture of the superlens refers to the maximum diameter that the superlens allows light to pass through without obstruction. This diameter determines the size of the light beam that the superlens can handle, which in turn affects its optical performance and application range. The phase distribution expression of the first superlens 101 is:
[0079]
[0080] In formula (3), represents the phase distribution of the first superlens 101 , and r represents the radial coordinates of each position on the first superlens 101 with the center of the first superlens 101 as the origin.
[0081] The micro-nano structure of the second super lens 102 is located on a side of the second super lens 102 away from the LED light source 105, and is arranged on a side of the first super lens 101 away from the LED light source 105;
[0082] The thickness of the second super lens 102 is 0.4 mm, the clear aperture is 2 mm, and the phase distribution expression of the second super lens 102 is:
[0083]
[0084] In formula (4), represents the phase distribution of the second superlens 102 , and r represents the radial coordinates of each position on the second superlens 102 with the center of the second superlens 102 as the origin.
[0085] like Figure 6 As shown in the figure, two super lenses form a collimating super lens group. The collimating super lens group includes a first super lens 101 and a second super lens 102, wherein the first super lens 101 is used to diverge the light source, and the second super lens 102 is used to collimate the divergent light beam of the first super lens 101. In the prior art, by collimating the light source through the collimating super lens group, the distance of the projection equipment in the optical axis direction can be effectively reduced, and the integration of the light homogenizing device can be improved.
[0086] The third superlens 103 is arranged on the side of the second superlens 102 away from the LED light source 105, and its micro-nano structure is arranged on the side of the LED light source 105; the third superlens 103 is a superlens array, which includes 7 sub-superlenses. The overall diameter of the superlens array is 2 mm, the thickness is 0.4 mm, the focal length of the sub-superlens is 1.06 mm, and the phase distribution expression is:
[0087]
[0088] In formula (5), represents the phase distribution of the third superlens 103 , and r represents the radial coordinates of each position on the third superlens 103 with the center of the third superlens 103 as the origin.
[0089] The fourth superlens 104 is arranged on the side of the third superlens 103 away from the LED light source 105, and its micro-nano structure is arranged on the side away from the LED light source 105; the fourth superlens 104 is a superlens array, including 7 sub-superlenses, and one-to-one corresponds to the sub-superlenses in the third superlens 103. The overall aperture of the fourth superlens 104 is 2 mm, the thickness is 0.4 mm, the focal length of the sub-superlens is 9.868 mm, and the phase distribution expression is:
[0090]
[0091] In formula (6), represents the phase distribution of the fourth superlens 104 , and r represents the radial coordinates of each position on the fourth superlens 104 with the center of the fourth superlens 104 as the origin.
[0092] Among them, the third superlens 103 is used to cut the collimated light beam into sub-beams, the fourth superlens 104 is used to deflect the cut sub-beams to form a homogenized light spot on the target plane 106, and the first superlens 101, the second superlens 102, the third superlens 103, and the fourth superlens 104 are all perpendicular to the system optical axis. Figure 7 As shown in , the content is the homogenized light spot formed on the target plane; Figure 8 As shown, the content is a light intensity distribution diagram of a homogenized light spot on a target plane. In summary, the embodiment of the present disclosure provides an LED light homogenizing device based on a superlens, which can effectively reduce the overall size of the light homogenizing device and improve the system's integration by replacing a conventional lens with a superlens.
[0093] According to the compound eye light homogenization principle, the third superlens and the fourth superlens are respectively set as superlens arrays. Using the superlens array to homogenize the collimated light beam can effectively reduce the requirements for the collimation of the collimated light beam and improve the quality of the homogenization to a certain extent.
[0094] Due to the phase superposition and high configurability of the metalens, the phase corresponding to the light homogenization and the phase corresponding to the positive lens are combined by phase merging, so that the fourth metalens has the performance of both light homogenization and beam deflection, further reducing the size and integration of the light homogenization device.
[0095] The positive lens is used to deflect the uniform light beam from the fourth super lens to form a uniform light spot on the target plane, wherein the fourth super lens is only responsible for light homogenization, and the positive lens is responsible for light deflection.
[0096] This setting can shorten the distance between the third super lens and the fourth super lens to the greatest extent, and further reduce the volume of the light homogenizing device.
[0097] The above is only a specific implementation of the embodiment of the present disclosure, but the protection scope of the embodiment of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the embodiment of the present disclosure, which should be included in the protection scope of the embodiment of the present disclosure. Therefore, the protection scope of the embodiment of the present disclosure should be based on the protection scope of the claims.
Claims
1. An LED light homogenizing device based on a superlens, characterized in that: include: A collimating metalens group is arranged on the light-emitting side of the LED light source and is configured to collimate the light beam emitted by the LED light source to generate a collimated light beam; The collimating superlens group includes a first superlens and a second superlens; A uniform light superlens group is arranged on a side of the collimating superlens group away from the LED light source, and is configured to uniformly light the collimated light beam to generate a uniform light beam; the uniform light superlens group includes a third superlens and a fourth superlens; Among them, all super lenses are provided with a substrate and a micro-nano structure arranged on the surface of the substrate; the first super lens, the second super lens, the third super lens and the fourth super lens are arranged in sequence along the propagation direction of the light beam.
2. The LED light homogenizing device based on a super lens according to claim 1, characterized in that: The micro-nano structure of any superlens is arranged on a side of the substrate facing the LED light source, or is arranged on a side of the substrate facing away from the LED light source.
3. The LED light homogenizing device based on super lens according to claim 1, characterized in that: The first super lens is configured to diverge the light beam emitted by the LED light source to generate a divergent light beam; the second super lens is configured to collimate the divergent light beam to generate the collimated light beam.
4. The LED light homogenizing device based on super lens according to claim 1, characterized in that: The third superlens is a superlens array, comprising at least two third sub-superlenses, and the third sub-superlenses are arranged in an array on a plane perpendicular to the optical axis of the LED homogenizing device; the fourth superlens is a superlens array, comprising at least two fourth sub-superlenses, and the fourth sub-superlenses are arranged in an array on a plane perpendicular to the optical axis of the LED homogenizing device; Among them, the third sub-superlens is associated with the fourth sub-superlens one by one; the third sub-superlens is used to split the collimated light beam and converge the sub-beams obtained by the splitting; the back focal plane of the third sub-superlens is located between the third sub-superlens and the associated fourth sub-superlens; the fourth sub-superlens is at least used to homogenize the light beam output by the associated third sub-superlens; the third sub-superlens is arranged on the front focal plane of the associated fourth sub-superlens.
5. The LED light homogenizing device based on super lens according to claim 4, characterized in that: The micro-nano structure of the third super lens is arranged on a side of its substrate facing the LED light source, and the micro-nano structure of the fourth super lens is arranged on a side of its substrate facing away from the LED light source.
6. The LED light homogenizing device based on super lens according to claim 4, characterized in that: The fourth sub-superlens is used to homogenize the light beam output by the associated third sub-superlens, and to deflect the light beam shaped by the associated third sub-superlens; the light beams output by each fourth sub-superlens are projected to the same position of the target plane to obtain a homogenized light spot; the target plane is perpendicular to the optical axis of the LED homogenizing device.
7. The LED light homogenizing device based on a super lens according to claim 6, characterized in that: The LED light homogenizing device satisfies the following relationship: Among them, D FT is the diameter of the homogenized light spot, f LA2 is the focal length of the fourth sub-superlens, p LA is the diameter of the third sub-superlens, a FL is the distance between the fourth sub-super lens and the target plane.
8. The LED light homogenizing device based on a super lens according to claim 4, characterized in that: The LED light homogenizing device further includes a positive lens; the positive lens is arranged on the light exiting side of the fourth super lens, and the positive lens is perpendicular to the optical axis of the LED light homogenizing device; The fourth sub-super lens is used to homogenize the light beam output by the associated third sub-super lens; the positive lens converges the received light beams output by each of the fourth sub-super lenses to the same position of the target plane to obtain a homogenized light spot; the target plane is perpendicular to the optical axis of the LED homogenizing device.
9. The LED light homogenizing device based on a super lens according to claim 8, characterized in that: The LED light homogenizing device satisfies the following relationship: Among them, D FT is the diameter of the homogenized light spot, f LA2 is the focal length of the fourth sub-superlens, p LA is the diameter of the third sub-superlens, f FL is the focal length of the positive lens.
10. An LED light homogenization system based on a super lens, characterized in that: The LED light homogenization system comprises: an LED light source; and an LED light homogenization device as described in any one of claims 1-9.