Turnover mechanism and vacuum coating equipment

Abstract

The utility model discloses a turnover mechanism and vacuum coating equipment and relates to the field of vacuum coating equipment, the turnover mechanism comprises a rack, a target body and an air cylinder, a mounting opening is formed in the first side wall of the rack in the height direction, and the rack is provided with a supporting part; the target body comprises a first end part and a second end part in a first direction, and the first end part is rotatably connected to the first side wall through a first rotating shaft, so that the target body rotates between a first position and a second position to be close to and far away from the mounting opening; the target body is provided with a placing surface for placing a target material; the air cylinder is movably hinged between the first surface of the rack and the target body; when the target body is located at the first position, the output rod of the air cylinder extends to the longest position, the target body is stopped at the mounting opening, and the placing surface is vertically located in the rack; when the target body is located at the second position, the output rod shrinks to the shortest position, the target body abuts against the supporting part, the target body is fixed relative to the rack, and the placing face intersects with the height direction and faces upwards.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating equipment, and in particular to a flipping mechanism and vacuum coating equipment. Background Art

[0002] Vacuum coating equipment is a coating equipment that operates under a relatively high vacuum degree. The target material is plated onto the substrate by placing the substrate and the target material in a vacuum chamber at the same time. The target material is usually placed on the placement surface of the target body, and the placement surface is flipped by rotating the target body. When the placement surface of the target body is flipped outside the vacuum chamber, a new target material can be replaced or placed.

[0003] The flipping mechanism used for target material replacement in the related art usually adopts a hinge. When the placement surface is horizontally facing upward, the hinge is connected between the target material and the frame, so the target material is interfered by the hinge during the replacement process, resulting in inconvenience in target material replacement. Alternatively, the frame and the target body are rotatably connected through multiple cylinders and bracket structures, making the flipping mechanism structure more complicated. Utility Model Content

[0004] The embodiments of the present application provide a flipping mechanism and a vacuum coating device, which are used to achieve the purpose of simplifying the structure of the flipping mechanism and facilitating the replacement of the target material.

[0005] In a first aspect, an embodiment of the present application provides a flipping mechanism for vacuum coating equipment, wherein the flipping mechanism includes a frame, a target body and a cylinder, wherein a mounting opening is provided on a first side wall of the frame along a height direction of the frame, and the frame has a supporting portion; the target body includes a first end and a second end opposite to each other in a first direction, and the first end is rotatably connected to the first side wall via a first rotating shaft, so that the target body can rotate between a first position and a second position to approach and move away from the mounting opening; the target body has a placement surface for placing a target material along a side of the target body thickness direction and close to the first side wall; the first direction is perpendicular to the target body in the thickness direction; the cylinder is movably hinged between the first surface of the frame and the target body; along the height direction, the first surface is located below the connection between the first side wall and the first rotating shaft; when the target body is in the first position, the output rod of the cylinder is extended to the longest position, the target body is stopped at the mounting port, and the placement surface is vertically located within the frame; when the target body is in the second position, the output rod is contracted to the shortest position, the target body is in contact with the support portion, and the target body is fixed relative to the frame under the upward supporting force of the support portion, the placement surface intersects with the height direction, and the placement surface faces upward.

[0006] In some embodiments, when the target is in the second position, the placement surface is perpendicular to the height direction.

[0007] In some embodiments, a rod avoidance groove is provided at the edge of the second end; the rod avoidance groove is open at one end in the first direction and closed at the other end; a positioning rod is provided on the first side wall, and when the target body is in the first position, the positioning rod is located in the rod avoidance groove through the opening to limit the movement of the target body along the second direction, and the second direction, the first direction and the thickness direction of the target body are perpendicular to each other.

[0008] In some embodiments, the target body includes a target body and a supporting frame mounted on the target body, the supporting frame having the first end and the second end along the first direction; a bracket is mounted on the side of the supporting frame away from the placement surface, a cylinder top seat is provided on the bracket, the output rod is rotatably connected to the cylinder top seat via a second rotating shaft, and the second rotating shaft is parallel to the second direction; a cylinder base is provided on the first surface, and one end of the cylinder away from the output rod is hinged to the cylinder base.

[0009] In some embodiments, the bracket is mounted along the second direction at a middle position between the first end and the second end of the carrying frame.

[0010] In some embodiments, the second end portion is detachably fixedly connected to the first side wall via a fastener.

[0011] In some embodiments, two connecting seats are provided on the first side wall, and the connecting seats are spaced apart along the second direction. A through hole is opened on the connecting seat and passes through the connecting seat, and the axial direction of the through hole is parallel to the second direction, and the second direction, the first direction and the thickness direction of the target body are perpendicular to each other; the first end is located between the two connecting seats, and the first rotating shaft is fixedly connected to the first end, and the first rotating shaft extends into the through hole and is rotatably connected to the connecting seat.

[0012] In some embodiments, two connecting ears are provided at intervals at the first end, and the two connecting ears correspond to the two connecting seats one by one.

[0013] In some embodiments, the frame includes a base and a vacuum chamber arranged on the base along the height direction, the vacuum chamber having the first side wall; the plane where the bottom surface of the base away from the vacuum chamber along the height direction is located is the first surface, and the first surface is perpendicular to the height direction; the frame also includes an auxiliary seat arranged on the first surface, along the thickness of the target body, the auxiliary seat is located between the base and the connection between the cylinder and the frame, and the side surface of the auxiliary seat away from the first surface is the supporting part.

[0014] In some embodiments, a cylinder avoidance groove for avoiding the cylinder is provided on a surface of the auxiliary seat away from the first surface, and the cylinder avoidance groove penetrates the auxiliary seat along the thickness direction of the target body. The cylinder avoidance groove is located on the rotation trajectory of the cylinder, and the groove end face of the cylinder avoidance groove is the support portion.

[0015] In some embodiments, a side of the target body away from the placement surface is rotatably connected to a support rod, and when the target body is in the first position and the second position, the support rod is parallel to the height direction; when the target body is in the second position, along the height direction, the sum of the height of the auxiliary seat and the length of the support rod is equal to the height between the first rotating axis and the first surface.

[0016] The flip mechanism provided in the embodiment of the present application is hinged between the first surface of the frame and the target body through a cylinder. When the output rod of the cylinder is extended to the longest position and shortened to the shortest position, the first end of the target body can rotate around the first rotation axis relative to the frame between the first position and the second position; when the target body is in the first position, the target body stops at the mounting port of the frame, and the placement surface is located in the frame, and the target material placed on the placement surface can be processed at this time; when the target material on the placement surface needs to be replaced, the output rod of the cylinder retracts, and the first end of the target body can rotate around the first rotation axis under the action of its own gravity until the target material abuts against the support part of the frame. At this time, the body stops at the support part under the action of the upward support force of the support part so that the body is fixed relative to the frame. At this time, the placement surface of the target body is inclined or vertical relative to the height direction and the placement surface faces upward, so that the user can replace the target material located above the placement surface of the target body. The flip mechanism in the technical solution of the present application has a simple structure and is easy to operate, which is convenient for users to replace the target material.

[0017] In a second aspect, an embodiment of the present application further provides a vacuum coating device, comprising a flipping mechanism as described in the first aspect.

[0018] The flipping mechanism in the vacuum coating equipment in the embodiment of the present application has the same structure and technical effects as the flipping mechanism in the first aspect, and will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1This is a schematic structural diagram of a target body of a flipping mechanism at an angle when it is in a first position in some embodiments of the present application;

[0021] Figure 2 for Figure 1 A schematic diagram of the structure at an angle when the target is in the second position;

[0022] Figure 3 for Figure 1 A schematic diagram of the structure of the flipping mechanism at another angle;

[0023] Figure 4 for Figure 2 A schematic diagram of the structure of the flipping mechanism at another angle;

[0024] Figure 5 It is a schematic diagram of the structure when the target body of the flipping mechanism in some embodiments of the present application is in one of the positions between the first position and the second position.

[0025] Description of reference numerals:

[0026] 10. frame; 101. first side wall; 102. mounting opening; 103. support portion; 11. base; 12. vacuum chamber; 13. auxiliary seat; 130. cylinder avoidance groove; 14. bracket; 15. connection seat; 16. through hole;

[0027] 20, target body; 201, first end; 202, second end; 203, placement surface; 21, target body; 22, carrying frame; 23, rod avoidance groove; 24, support rod; 25, connection ear;

[0028] 30. Cylinder; 301. Output rod; 31. Cylinder top seat; 32. Cylinder base;

[0029] 41. first rotating shaft; 42. positioning rod; 43. second rotating shaft; 44. third rotating shaft; 45. fourth rotating shaft;

[0030] 200, target material;

[0031] Height direction Z; first direction M; second direction X; thickness direction N of the target body; third direction Y. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0033] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0034] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0036] An embodiment of the present application also provides a vacuum coating device, which includes a flipping mechanism.

[0037] The above vacuum coating equipment is a coating equipment that is carried out under a relatively high vacuum degree. The substrate to be coated is called a substrate, and the material to be coated is called a target material. The substrate and the target material are placed in a vacuum chamber at the same time to coat the target material onto the substrate. Coating methods include vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many other methods.

[0038] Sputtering coating can be simply understood as bombarding the target material with electrons or high-energy lasers, causing the surface components to be sputtered out in the form of atomic groups or ions, and finally deposited on the surface of the substrate, undergoing a film-forming process, and finally forming a thin film.

[0039] For the vacuum coating equipment in this application, the target material needs to be replaced after use. The target body is rotated relative to the frame by extending and retracting the output rod of the cylinder, thereby rotating the target body carrying the target material outside the vacuum chamber, and then replacing or placing a new target material.

[0040] like Figure 1 to Figure 4As shown, the flip mechanism includes a frame 10, a target body 20 and a cylinder 30. The frame 10 is provided with a mounting opening 102 on a first side wall 101 along the height direction of the frame 10, and the frame 10 has a supporting portion 103; the target body 20 includes a first end 201 and a second end 202 opposite to each other along a first direction, and the first end 201 is rotatably connected to the first side wall 101 through a first rotating shaft 41, so that the target body 20 rotates between a first position and a second position to approach and move away from the mounting opening 102; the target body 20 has a placement surface 203 for placing the target material 200 along a thickness direction of the target body 20 and close to the first side wall 101; the first direction is perpendicular to the thickness direction of the target body 20; the cylinder 30 is movably hinged between the first surface of the frame 10 and the target body 20; The first surface is located below the connection between the first side wall 101 and the first rotating shaft 41 along the height direction; when the target body 20 is in the first position, the output rod 301 of the cylinder 30 is extended to the longest position, and the target body 20 rotates around the first rotating shaft 41 under the support force of the output rod 301 until the target body 20 stops at the installation opening 102, and the placement surface 203 is vertically located inside the frame 10; when the target body 20 is in the second position, the output rod 301 is contracted to the shortest position, and the target body 20 rotates around the first rotating shaft 41 under the action of its own gravity until it abuts against the support part 103, and the target body 20 is fixed relative to the frame 10 under the upward support force of the support part 103, and the placement surface 203 intersects with the height direction, and the placement surface 203 faces upward.

[0041] The first surface is the plane where the bottom surface of the frame 10 is located. Figure 1 and Figure 3 As shown, the first surface may be a work surface or a ground on which the turning mechanism is placed or installed.

[0042] The first direction is the length direction of the target 20, and the second direction is the width direction of the target 20. The height direction of the frame 10 is the Z axis, the width direction N of the target 20 is parallel to the X axis, and the first surface is parallel to the XOY plane to establish a coordinate system. Figure 1 and Figure 3 As shown, when the target 20 is in the first position, the first direction, that is, the length direction of the target 20 is parallel to the Z axis; Figure 2 and Figure 4 As shown, when the target 20 is in the second position, the first direction, that is, the length direction of the target 20 is parallel to the Y axis.

[0043] The first rotation axis 41 is parallel to the X axis, so that the target body 20 can rotate relatively in the YOZ plane.

[0044] When the target body 20 is in the second position, the placement surface 203 intersects with the height direction, which means that when the target body 20 is in the second position, the placement surface 203 intersects with the first surface (such as Figure 2The XOY plane shown in the figure is inclined within a certain angle range or is parallel to the first surface, that is, the angle range between the placement surface 203 and the first surface can be ±10°.

[0045] The flip mechanism provided in the embodiment of the present application is movably hinged between the first surface of the frame 10 and the target body 20 through the cylinder 30. When the output rod 301 of the cylinder 30 is extended to the longest position and shortened to the shortest position, the first end 201 of the target body 20 can rotate around the first rotation axis 41 relative to the frame 10 between the first position and the second position; when the target body 20 is in the first position, the target body 20 is stopped at the installation opening 102 of the frame 10, and the placement surface 203 is located in the frame 10. At this time, the target material 200 placed on the placement surface 203 can be processed; when the placement surface 203 needs to be replaced, the target material 200 can be processed. When the target 200 on the placement surface 203 is placed, the output rod 301 of the cylinder 30 retracts, and the first end 201 of the target body 20 can rotate around the first rotating shaft 41 under the action of its own gravity until the target is in contact with the support portion 103 of the frame 10. At this time, the body 20 is stopped at the support portion 103 under the action of the upward supporting force of the support portion 103, so that the body 20 is fixed relative to the frame 10. At this time, the placement surface 203 of the target body 20 is inclined or vertical relative to the height direction and the placement surface 203 faces upward, so that the user can replace the target 200 located above the placement surface 203 of the target body 20. The flip mechanism in the technical solution of the present application has a simple structure and is easy to operate, which is convenient for users to replace the target 200.

[0046] like Figure 4 As shown, in some embodiments, when the target 20 is in the second position, the placement surface 203 is perpendicular to the height direction.

[0047] When the target body 20 is in the second position, compared with the placement surface 203 intersecting the height direction non-perpendicularly, the placement surface 203 is arranged perpendicular to the height direction, that is, Figure 4 As shown, the placement surface 203 is parallel to the first surface. In this way, when replacing the target 200 on the placement surface 203, it is not only convenient to place the target 200, but also reduces the risk of the target 200 falling from the placement surface 203.

[0048] like Figure 2 As shown, in some embodiments, the target body 20 includes a target body 21 and a supporting frame 22 mounted on the target body 21, the supporting frame 22 having a first end 201 and a second end 202 along a first direction; a bracket 14 is mounted on the side of the supporting frame 22 away from the placement surface 203, a cylinder top seat 31 is arranged on the bracket 14, the output rod 301 is rotatably connected to the cylinder top seat 31 through a second rotating shaft 43, and the second rotating shaft 43 is parallel to the second direction; a cylinder base 32 is arranged on the first surface, and one end of the cylinder 30 away from the output rod 301 is hinged to the cylinder base 32.

[0049] By sleeved the supporting frame 22 on the target body 21, not only the area of ​​the target body 20 in the direction perpendicular to the thickness is increased, but also when the target body 20 is located in the first position, the supporting frame 22 is stopped at the mounting opening 102. Moreover, when the target body 20 is connected to the output rod 301 of the cylinder 30, the output rod 301 of the cylinder 30 is movably hinged to the supporting frame 22, so that the target body 20 can rotate more smoothly.

[0050] like Figure 2 As shown, the cylinder base 32 is rotatably connected to the cylinder 30 via a third rotating shaft 44, and the bracket 14 is in a concave shape.

[0051] In some embodiments, the bracket 14 is mounted along the second direction at a middle position between the first end 201 and the second end 202 of the carrying frame 22 .

[0052] The above-mentioned middle position may refer to the central area of ​​the supporting frame 22 along the first direction, that is, the length direction of the target body 20 , and is not limited to the geometric center along the length direction.

[0053] If the bracket 14 is set at the first end 201, during the rotation of the target body 20, the target body 20 is easy to shake due to the heavier weight of the end close to the second end 202; if the bracket 14 is set at the second end 202, the length of the output rod 301 of the cylinder 30 is increased. Especially when the length of the target body 20 is longer, it is necessary to use a cylinder 30 with a longer output rod 301, which is not only not conducive to reducing the space occupied by the flipping mechanism, but also increases the cost of the cylinder 30.

[0054] By arranging the bracket 14 at the middle position between the first end 201 and the second end 202, not only the target body 20 can be smoothly rotated, but also the occupied space of the flipping mechanism can be reduced and the cost can be reduced.

[0055] like Figure 1 and Figure 2 As shown, in some embodiments, a rod avoidance groove 23 is opened at the edge of the second end portion 202; the rod avoidance groove 23 is open at one end in the first direction and closed at the other end; a positioning rod 42 is provided on the first side wall 101, and when the target body 20 is in the first position, the positioning rod 42 is located in the rod avoidance groove 23 through the opening to limit the movement of the target body 20 along the second direction, and the second direction, the first direction and the thickness direction of the target body 20 are perpendicular to each other.

[0056] Through the above arrangement, when the target body 20 rotates from the second position to the first position, the positioning rod 42 is clamped in the rod avoidance groove 23 through the opening, which not only plays a guiding role, but also the rod avoidance groove 23 limits the movement of the positioning rod 42 along the second direction relative to the first side wall 101, thereby improving the positioning accuracy of the target body 20 and the first side wall 101.

[0057] In some embodiments, the second end portion 202 is detachably fixedly connected to the first side wall 101 via a fastener (not shown in the figure).

[0058] Through the above arrangement, when the target body 20 is in the first position, the target body 20 can be fixed relative to the frame 10 by fasteners, and the cylinder 30 does not need to be in the air supply state all the time, that is, the cylinder 30 is in the standby state, which avoids the output rod 301 from continuously providing force, thereby improving the use efficiency and life of the cylinder 30.

[0059] The above-mentioned fasteners are usually arranged on the supporting frame 22. One or more fasteners may be arranged between the two rod avoidance grooves 23, or multiple fasteners may be arranged near the two rod avoidance grooves 23 on the supporting frame 22, which is not specifically limited here.

[0060] like Figure 1 As shown, in some embodiments, two connecting seats 15 are provided on the first side wall 101, and the connecting seats 15 are spaced apart along the second direction. A through hole 16 penetrating the connecting seat 15 is opened on the connecting seat 15, and the axial direction of the through hole 16 is parallel to the second direction, and the second direction, the first direction and the thickness direction of the target body 20 are perpendicular to each other; the first end 201 is located between the two connecting seats 15, and the first rotating shaft 41 is fixedly connected to the first end 201, and the first rotating shaft 41 extends into the through hole 16 and is rotatably connected to the connecting seat 15.

[0061] The target body 20 is rotatably connected between the two connection seats 15 through the two connection seats 15 and the two first rotation shafts 41 which are arranged at intervals along the second direction. In this way, the stability of the target body 20 rotating around the first rotation shaft 41 is improved.

[0062] Of course, a first rotating shaft 41 extending along the second direction may also be provided, and both ends of the first rotating shaft 41 extend into the through hole 16 respectively to rotate relative to the connecting seat 15, which is not specifically limited here.

[0063] In some embodiments, two connecting ears 25 are provided at intervals on the first end portion 201 , and the two connecting ears 25 correspond to the two connecting seats 15 one by one.

[0064] By arranging two connecting ears 25 at the first connecting portion, not only the target body 20 is firmly connected to the connecting seat 15, but also the structure and space of the first end 201 between the two connecting ears 25 are optimized, thereby avoiding the possibility of interference between the first end 201 and the first side wall 101 during the rotation of the target body 20 around the first rotating axis 41.

[0065] like Figure 1 and Figure 3As shown, in some embodiments, the frame 10 includes a base 11 and a vacuum chamber 12 arranged on the base 11 along the height direction, and the vacuum chamber 12 has a first side wall 101; the plane where the bottom surface of the base 11 away from the vacuum chamber 12 along the height direction is located is a first surface, and the first surface is perpendicular to the height direction; the frame 10 also includes an auxiliary seat 13 arranged on the first surface, along the thickness of the target body 20, the auxiliary seat 13 is located between the base 11 and the connection between the cylinder 30 and the frame 10, and the side surface of the auxiliary seat 13 away from the first surface is a support portion 103.

[0066] By arranging the auxiliary seat 13 between the base 11 and the connection between the cylinder 30 and the frame 10, that is, along the Figure 3 As shown in the Y-axis, the auxiliary seat 13 is located between the base 11 and the cylinder base 32, so that the space in the frame 10, that is, the space between the base 11 and the cylinder base 32, can be well utilized, thereby reducing the space occupied by the flip mechanism.

[0067] The auxiliary seat 13 may be a separate structure from the base 11 , or the auxiliary seat 13 may be a partial structure that abuts against the support portion 103 to support the support portion 103 when the target 20 rotates to the second position, which is not specifically limited here.

[0068] like Figure 2 and Figure 4 As shown, in some embodiments, a cylinder avoidance groove 130 for avoiding the cylinder 30 is opened on the side surface of the auxiliary seat 13 away from the first surface, and the cylinder avoidance groove 130 penetrates the auxiliary seat 13 along the thickness direction of the target body 20. The cylinder avoidance groove 130 is located on the rotation trajectory of the cylinder, and the groove end face of the cylinder avoidance groove 130 is the support part 103.

[0069] Through the above arrangement, when the target body 20 is in the second position, the cylinder 30 is located in the cylinder avoidance groove 130. In this way, the length of the support rod 24 can be reduced on the basis of further reducing the space occupied by the flipping mechanism, which is beneficial to the folding of the support rod 24 and reduces the risk of the support rod 24 being too long and interfering with the bracket 14.

[0070] People like Figure 2 , Figure 3 and 4 As shown, in some embodiments, the side of the target body 20 away from the placement surface 203 is rotatably connected to the support rod 24. When the target body 20 is in the first position and the second position, the placement surface 203 of the target body 20 is perpendicular to the height direction, that is, the placement surface 203 is parallel to the first surface, and the support rod 24 is parallel to the height direction; when the target body 20 is in the second position, along the height direction, the sum of the height of the auxiliary seat 13 and the length of the support rod 24 is equal to the height between the first rotating shaft 41 and the first surface.

[0071] Through the above arrangement, the length of the support rod 24 can be adjusted to adapt to different scenarios. That is, when the position of the first rotating shaft 41 or the size of the target 20 changes, the placement surface 203 can be ensured to be located on the first surface only by changing the length of the support rod 24 .

[0072] It should be noted that the length of the support rod 24 is determined by combining the length of the target 20 , the position where the support rod 24 is set, and the position of the support portion 103 , and is not specifically limited here.

[0073] like Figure 3 and Figure 4 As shown, the side of the carrier frame 22 away from the placement surface 203 is connected to the support rod 24 through the fourth rotating shaft 45. The support rod 24 can rotate relative to the target body 20 to open and retract the support rod 24. When the support rod 24 is retracted, the axial direction of the support rod 24 is parallel to the first direction, as shown in FIG. Figure 3 When the target 20 is in the second position, the support rod 24 is opened, and the axial direction of the support rod 24 is parallel to the height direction, as shown in FIG. Figure 4 shown.

[0074] In order to improve the stability of the support rod 24 and the frame 10 when the target 20 is in the second position, a limiting structure can be set on the target 20, that is, the supporting frame 22, so that the support rod 24 can be fixed relative to the target 20 when the target 20 is in the first position and the second position.

[0075] Of course, in order to further improve the connection stability between the target body 20 and the frame 10 when the target body 20 is in the second position, the fourth rotating shaft 45 can be a damping rotating shaft. In this way, not only can the support rod 24 be fixed relative to the target body 20 when the target body 20 is in the first position and the second position when the target body 20 is in the first position and the second position, but also, when the target body 20 is rotated to any position relative to the frame 10, the support rod 24 can be fixed relative to the target body 20 when it is in any position between the opening and the retracting, thereby reducing the random swing of the support rod 24 during the rotation of the target body 20.

[0076] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A turning mechanism for vacuum coating equipment, characterized in that: The flipping mechanism comprises: A frame (10), a first side wall (101) along a height direction (Z) of the frame (10) is provided with a mounting opening (102), and the frame (10) has a supporting portion (103); A target body (20) comprises a first end (201) and a second end (202) which are opposite to each other in a first direction (M); the first end (201) is rotatably connected to the first side wall (101) via a first rotating shaft (41), so that the target body (20) can rotate between a first position and a second position to approach and move away from the mounting opening (102); the target body (20) has a placement surface (203) for placing a target material (200) along a thickness direction (N) of the target body (20) and on one side close to the first side wall (101); the first direction (M) is perpendicular to the thickness direction (N) of the target body (20); A cylinder (30) is movably hinged between the first surface of the frame (10) and the target body (20); along the height direction (Z), the first surface is located below the connection between the first side wall (101) and the first rotating shaft (41); When the target body (20) is in the first position, the output rod (301) of the cylinder (30) is extended to the longest position, the target body (20) is stopped at the installation opening (102), and the placement surface (203) is vertically located inside the frame (10); when the target body (20) is in the second position, the output rod (301) is retracted to the shortest position, the target body (20) is in contact with the support portion (103), the target body (20) is fixed relative to the frame (10) under the upward supporting force of the support portion (103), the placement surface (203) intersects with the height direction (Z), and the placement surface (203) faces upward.

2. The turning mechanism according to claim 1, characterized in that: When the target body (20) is in the second position, the placement surface (203) is perpendicular to the height direction (Z).

3. The turning mechanism according to claim 1, characterized in that: The edge of the second end portion (202) is provided with a rod avoidance groove (23); The rod avoidance groove (23) is open at one end in the first direction (M) and closed at the other end; A positioning rod (42) is provided on the first side wall (101); when the target body (20) is in the first position, the positioning rod (42) is located in the rod avoidance groove (23) through the opening to limit the movement of the target body (20) along a second direction (X); the second direction (X), the first direction (M) and a thickness direction (N) of the target body (20) are perpendicular to each other.

4. The turning mechanism according to claim 3, characterized in that: The target body (20) comprises a target body (21) and a carrying frame (22) sleeved on the target body (21), wherein the carrying frame (22) has the first end (201) and the second end (202) along the first direction (M); A bracket (14) is mounted on a side of the bearing frame (22) away from the placement surface (203), a cylinder top seat (31) is arranged on the bracket (14), the output rod (301) is rotatably connected to the cylinder top seat (31) via a second rotating shaft (43), and the second rotating shaft (43) is parallel to the second direction (X); A cylinder base (32) is provided on the first surface, and one end of the cylinder (30) away from the output rod (301) is hinged to the cylinder base (32).

5. The turning mechanism according to claim 4, characterized in that: The bracket (14) is mounted along the second direction (X) at a middle position between the first end (201) and the second end (202) of the supporting frame (22).

6. The turning mechanism according to any one of claims 1 to 5, characterized in that: The second end portion (202) is detachably fixedly connected to the first side wall (101) via a fastener.

7. The turning mechanism according to any one of claims 1 to 5, characterized in that: Two connecting seats (15) are provided on the first side wall (101), the connecting seats (15) are arranged at intervals along the second direction (X), the connecting seats (15) are provided with a through hole (16) penetrating the connecting seat (15), the axial direction of the through hole (16) is parallel to the second direction (X), and the second direction (X), the first direction (M) and the thickness direction (N) of the target body (20) are perpendicular to each other; The first end portion (201) is located between the two connecting seats (15), the first rotating shaft (41) is fixedly connected to the first end portion (201), and the first rotating shaft (41) extends into the through hole (16) and is rotatably connected to the connecting seat (15).

8. The turning mechanism according to claim 7, characterized in that: The first end portion (201) is provided with two connection ears (25) at intervals, and the two connection ears (25) correspond one to one to the two connection seats (15).

9. The turning mechanism according to any one of claims 2 to 5, characterized in that: The frame (10) comprises a base (11) and a vacuum chamber (12) arranged on the base (11) along the height direction (Z), the vacuum chamber (12) having the first side wall (101); the plane where the bottom surface of the base (11) away from the vacuum chamber (12) along the height direction (Z) is located is the first surface, and the first surface is perpendicular to the height direction (Z); The frame (10) further comprises an auxiliary seat (13) arranged on the first surface, and along the thickness of the target body (20), the auxiliary seat (13) is located between the base (11) and the connection between the cylinder (30) and the frame (10), and a side surface of the auxiliary seat (13) away from the first surface is the support portion (103).

10. The turning mechanism according to claim 9, characterized in that: A cylinder avoidance groove (130) for avoiding the cylinder (30) is provided on a side surface of the auxiliary seat (13) away from the first surface. The cylinder avoidance groove (130) penetrates the auxiliary seat (13) along the thickness direction (N) of the target body (20). The cylinder avoidance groove (130) is located on the rotation trajectory of the cylinder (30), and the notch end surface of the cylinder avoidance groove (130) is the support portion (103).

11. The turning mechanism according to claim 9, characterized in that: A side of the target body (20) away from the placement surface (203) is rotatably connected to a support rod (24), and when the target body (20) is in the first position and the second position, the support rod (24) is parallel to the height direction (Z); When the target body (20) is in the second position, along the height direction (Z), the sum of the height of the auxiliary seat (13) and the length of the support rod (24) is equal to the height between the first rotating shaft (41) and the first surface.

12. A vacuum coating device, characterized in that: include: The turning mechanism according to any one of claims 1 to 11.

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