Temperature measuring device for MPCVD equipment

Abstract

The utility model relates to the field of diamond production, in particular to a temperature measuring device for MPCVD equipment. The temperature measuring device for the MPCVD equipment comprises a temperature measuring base and a power mechanism, the power mechanism comprises a first power mechanism, and the first power mechanism is provided with a first power output end used for driving a temperature measuring instrument to measure the temperature of seed crystals in different columns; and the second power mechanism is provided with a second power output end for driving the thermodetector to measure the temperature of different seed crystals in the same column. The second power output end of the second power mechanism can superpose the movement of the first power mechanism and the movement of the second power mechanism, so that the thermodetector can move towards different columns and move towards different positions of the same column, and all positions of the placed diamond can be covered; therefore, the problems of high labor intensity of personnel and potential safety hazards caused by manual angle adjustment of the thermodetector in the prior art are solved.

Description

[0001] This application is a divisional application of the following application. The application date of the original application is August 28, 2023, the application number of the original application is 2023223171945, and the name of the utility model of the original application is: A temperature measurement device for MPCVD equipment. Technical Field

[0002] The utility model relates to the field of diamond production, in particular to a temperature measuring device for MPCVD equipment. Background Art

[0003] Microwave Plasma Chemical Vapor Deposition (MPCVD) is the preferred method for preparing high-quality single-crystal diamond. Diamond grows by reaction in the cavity of the MPCVD equipment.

[0004] like Figure 1 As shown, usually, the cavity of the MPCVD equipment is a sealed structure surrounded by a top cover 11, a cavity body 12 and a bottom plate 13. An air inlet and an air outlet are provided on the cavity bottom plate 12 for gas replenishment, and an observation window is also provided on the top cover 11 for observing the internal situation. The top cover includes a large diameter section for installing the observation window and a reduced diameter section arranged close to the cavity body. A water-cooled copper table 14 is also provided in the middle position of the bottom plate 13 of the cavity, and a molybdenum table 15 is placed on the water-cooled copper table 14. A diamond sheet is placed on the upper surface of the molybdenum table 15 for the diamond sheet to react and grow. During the diamond growth process, the interior of the cavity will be heated under the action of microwaves, and then the diamond sheet placed on the molybdenum sheet table will be heated. A certain temperature needs to be maintained during the diamond growth process. Too high or too low temperature will affect the quality and speed of diamond growth, so it is necessary to monitor the temperature of the diamond.

[0005] There are devices for detecting the temperature of diamonds in MPCVD equipment in the prior art, such as a temperature measuring bracket with authorization announcement number CN219161481U, a resonant cavity using the temperature measuring bracket, and an MPCVD device, which discloses that the temperature measuring bracket is provided with a base fixedly arranged on a window flange, an adjustment turntable is rotatably arranged on the base, a connecting arm and a mounting plate for installing a thermometer are hingedly connected on the adjustment turntable, and the thermometer and the mounting plate are screwed together. When temperature measurement is required, the temperature measuring angle of the thermometer can be changed by adjusting the turntable and rotating the connecting arm, thereby measuring the temperature of the diamond on the molybdenum sheet table.

[0006] However, the above scheme requires manual switching of the thermometer angle. There are multiple diamonds in the chamber, and the temperature of each diamond needs to be measured separately, which requires multiple switching and high labor intensity. In addition, since the temperature of the diamond during reaction growth needs to be measured, that is, when the personnel switch the angle of the thermometer, the MPCVD equipment is in the on-state, which is prone to safety hazards. Utility Model Content

[0007] The utility model aims to provide a temperature measuring device for MPCVD equipment, which is used to solve the problem that manual angle adjustment of the temperature measuring instrument in the prior art leads to high labor intensity and potential safety hazards.

[0008] In order to achieve the above-mentioned purpose, the temperature measuring device for MPCVD equipment in the present invention adopts the following technical scheme:

[0009] A temperature measuring device for MPCVD equipment includes a temperature measuring base fixedly arranged on a cavity of the MPCVD equipment and a power mechanism for driving a temperature measuring instrument to automatically move, the power mechanism includes a first power mechanism installed on the temperature measuring base, the first power mechanism has a first power output end for driving the temperature measuring instrument to measure the temperature of seed crystals in different columns, the power mechanism also includes a second power mechanism installed on the first power output end, the second power mechanism has a second power output end for driving the temperature measuring instrument to measure the temperature of different seed crystals in the same column, and the second power output end has a temperature measuring instrument installation structure for installing the temperature measuring instrument.

[0010] The beneficial effect of the above technical solution is that: the utility model pioneers a temperature measuring device for MPCVD equipment, wherein a power mechanism is set up so that the temperature measuring device has power to move by itself; since the power mechanism includes a first power mechanism and a second power mechanism, and the second power mechanism is set on the first power output end, the second power output end of the second power mechanism will superimpose the movement of the first power mechanism and the second power mechanism, and since the movement direction that the first power output end can drive is for seed crystals in different columns, and the movement direction that the second power mechanism can drive is for different seed crystals in the same column, since the temperature meter is fixedly arranged on the second power output end, then through the superimposed movement of the first power output end and the second power output end, the temperature meter has the movement to different columns and the movement to different positions in the same column, so as to cover all positions of the placed diamonds, thereby solving the problem of manual adjustment of the angle of the temperature meter in the prior art, which leads to high labor intensity and potential safety hazards.

[0011] Furthermore, the first power output end is a swing output end for outputting a swing motion.

[0012] The beneficial effect of the above technical solution is that the swinging motion makes the displacement of the first power mechanism relatively small, which is convenient for saving space.

[0013] Furthermore, the first power mechanism also includes a first limit switch that cooperates with the first power output end to control its swing angle.

[0014] The beneficial effect of the above technical solution is that the swing of the first power output end is controlled by setting the first limit switch to avoid collision with other components.

[0015] Furthermore, the first limit switches include two and are respectively fixed on the housing of the first power mechanism, and a first triggering member located between the two first limit switches is fixedly provided on the first power output end.

[0016] The beneficial effect of the above technical solution is that: the first trigger member is fixedly connected to the first power output end, so the swing of the first power output end is the same as the rotation angle of the first trigger member, and the first power output end can be easily limited by limiting the first trigger member.

[0017] Furthermore, the second power output end is a swing output end for outputting a swing motion.

[0018] The beneficial effect of the above technical solution is that the swinging motion makes the displacement of the second power mechanism relatively small, which is convenient for saving space.

[0019] Furthermore, the second power mechanism also includes a second limit switch that cooperates with the second power output end to control its swing angle.

[0020] The beneficial effect of the above technical solution is that the swing of the second power output end is controlled by setting the second limit switch to avoid collision with other components.

[0021] Furthermore, the second limit switches include two and are respectively fixed on the housing of the second power mechanism, and a second triggering member located between the two second limit switches is fixedly provided on the second power output end.

[0022] The beneficial effect of the above technical solution is that: the second trigger member is fixedly connected to the second power output end, so the rotation angle of the second power output end is the same as the rotation angle of the second trigger member, and the rotation angle of the second power output end is conveniently limited by limiting the second trigger member.

[0023] Furthermore, the temperature measuring base includes a mounting substrate, which includes a first mounting substrate and a second mounting substrate that are detachably connected together, the first power mechanism is mounted on the first mounting substrate or the second mounting substrate, and the first mounting substrate and the second mounting substrate are respectively provided with arc-shaped notches to be assembled together to form a mounting hole for being mounted on and fixed on the outer periphery of the reduced diameter section of the top cover of the MPCVD equipment.

[0024] The beneficial effect of the above technical solution is that the installation hole is set to facilitate fixing on the top cover, and because it needs to be installed on the reduced diameter section of the top cover, a split installation base plate is set to facilitate installation. The two arc-shaped notches are just assembled into a complete installation hole, and because it is installed on the reduced diameter section, it can avoid falling off due to loose installation.

[0025] Furthermore, the first mounting substrate and the second mounting substrate are respectively provided with corresponding bolt mounting holes to fix the two together.

[0026] The beneficial effects of the above technical solution are: the bolt connection form is simple, and the clamping force can be adjusted by screwing the bolt.

[0027] Furthermore, the thermometer mounting structure is an L-shaped mounting bracket, and the mounting bracket includes a first bracket plate and a second bracket plate vertically connected, the first bracket plate is used to be installed on the second power output end, and the second bracket plate is provided with a fixing hole for fixing the thermometer.

[0028] The beneficial effect of the above technical solution is that it is convenient to install the transmission mechanism and the temperature measuring instrument at the same time, and the direction change is convenient through the provision of the L-shaped installation bracket. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of the chamber of the MPCVD device in the prior art of the utility model;

[0030] Figure 2 This is a schematic diagram of the structure of Example 1 of the temperature measuring device for MPCVD equipment in the present utility model;

[0031] Figure 1 Middle: 100, socket; 200, plug-in printed circuit board; 300, connecting printed circuit board; 400, insulator; 500, contact piece;

[0032] In the figure: 11, top cover; 12, cavity body; 13, bottom plate; 14, water-cooled copper table; 15, molybdenum table; 16, diamond sheet; 17, observation window; 21, first motor; 22, second motor; 31, first transmission mechanism; 32, second transmission mechanism; 41, swing plate; 42, first trigger member; 43, first limit switch; 51, mounting bracket; 52, second trigger member; 53, second limit switch; 6, thermometer; 71, first mounting substrate; 72, second mounting substrate. DETAILED DESCRIPTION

[0033] The features and performance of the present invention are further described in detail below in conjunction with the embodiments.

[0034] In the embodiment 1 of the temperature measuring device for MPCVD equipment (hereinafter referred to as the temperature measuring device) of the present invention:

[0035] In the present embodiment, two groups of power mechanisms are respectively arranged, which are specifically divided into a first power mechanism and a second power mechanism. The second power mechanism is arranged on the first power output end of the first power mechanism, and a second power output end is arranged on the second power mechanism. Then, the movement of the second power output end can be superimposed on the movement of the first power mechanism and the second power mechanism, so that the first power output end can move in multiple directions. The thermometer mounting structure for installing the thermometer is arranged on the second power output end, so that the thermometer mounting structure can also move in multiple directions, so that the thermometer can also face different positions. Since the power mechanism can drive the thermometer to move automatically, personnel do not need to operate manually during temperature measurement, and personnel can also keep a distance from the cavity of the MPCVD equipment.

[0036] like Figure 2 As shown, in this embodiment, the temperature measuring device includes a temperature measuring base fixedly arranged on the cavity and a power mechanism for connecting the temperature measuring instrument 6 arranged on the temperature measuring base, and the power mechanism includes a first power mechanism and a second power mechanism, and the first power mechanism is fixed on the temperature measuring base. The second power mechanism is fixedly arranged on the first power output end of the first power mechanism. Specifically, the first power mechanism includes a first motor 21 and a first transmission mechanism 31, and the second power mechanism includes a second motor 22 and a second transmission mechanism 32. The first motor 21 drives the first transmission mechanism 31, and the second motor 22 drives the second transmission mechanism 32. In order to better control the movement of the temperature measuring device, a controller is also provided to control the movement of the first motor 21 and the second motor 22 respectively. In this embodiment, the electrode adopts a stepper motor, and the stepper motor controller acts as the controller. Of course, in other embodiments, a servo motor can also be used as a power source.

[0037] The temperature measuring base is a mounting substrate. Since the structure of the top cover 11 is a stepped structure with a large diameter section and a reduced diameter section, in order to facilitate stable installation and fixation, the mounting substrate is fixed on the reduced diameter section. The mounting substrate includes a first mounting substrate 71 and a second mounting substrate 72. The first mounting substrate 71 and the second mounting substrate 72 are respectively provided with arc-shaped notches to be assembled together to form the mounting hole. One of the first mounting substrate 71 and the second mounting substrate 72 is provided with a bolt through hole, and the other is provided with a threaded hole to fix the two together. In other words, the first mounting substrate 71 and the second mounting substrate 72 are assembled together to form a mounting substrate with a mounting hole. In this embodiment, the first mounting substrate 71 is provided with a bolt through hole, and the second mounting substrate 72 is provided for the installation of the first transmission mechanism 31.

[0038] Specifically, in the use state, the first motor 21 and the second motor 22 are both arranged vertically, and the output shafts of the motors are arranged downward. The first transmission mechanism 31 is a first reducer, which includes a housing and an internal transmission structure. The input shaft of the first transmission mechanism 31 is arranged upward and is transmission-connected with the output shaft of the first motor 21. The output shaft of the first transmission mechanism 31 is arranged horizontally, that is, the rotation of the first motor 21 is transmitted to the output shaft of the first transmission mechanism 31 through the internal transmission structure. A swing plate 41 for fixedly connecting the second transmission mechanism 32 is provided on the output shaft of the first motor 21, and the swing plate 41 also constitutes the first power output end. In this embodiment, the swing plate 41 is a rectangular plate, which is fixedly connected to the output shaft of the first reducer, that is, when the first motor 21 rotates, it will drive the output shaft of the first reducer to rotate, and then drive the swing plate 41 to rotate, and finally drive the movement of the second transmission mechanism 32 and the second motor 22.

[0039] The second motor 22 is also arranged vertically, with its output shaft facing downward. The second transmission mechanism 32 is a second reducer, which has a cubic shell and a transmission structure arranged inside the shell. The output shaft of the second reducer is arranged horizontally, and the extension direction of the second output shaft is perpendicular to the extension direction of the output shaft of the first reducer. The output shafts of the two reducers can output rotational motion, that is, the rotational motion output by the first reducer will act on the second reducer. When the output shaft of the second reducer outputs rotational motion, the rotational motion of the first reducer and the second reducer will be superimposed, so that the output shaft of the second reducer can output rotation in more directions. Both transmission mechanisms use reducers so that the rotation of the motor can be output to the temperature meter 6 after being decelerated and amplified, which is convenient for small angle control.

[0040] A thermometer mounting structure for connecting the thermometer 6 is fixedly connected to the output shaft of the second reducer. In this embodiment, the thermometer mounting structure is an L-shaped mounting bracket 51. The mounting bracket 51 has a first bracket plate and a second bracket plate that are perpendicular to each other. The first bracket plate is used to be mounted on the output shaft of the second transmission mechanism 32, and the second bracket plate is used to mount the thermometer 6. Specifically, a fixing hole is provided on the second bracket plate of the mounting bracket 51 for the thermometer 6 to pass through, which allows the temperature measuring end of the thermometer 6 to pass through for better temperature measurement. The fixing hole forms an installation and fixation for the thermometer 6. In order to facilitate temperature measurement, the temperature measuring end is extended into the observation window 17 of the top cover 11 to measure the temperature. The temperature measuring end can swing under the action of the two transmission mechanisms, so that the temperature can be measured at any position of the diamond.

[0041] It is worth noting that, since the temperature measuring end of the thermometer 6 is inserted into the top cover 11, in order to avoid collision, a limit switch is also provided on the transmission mechanism, and the rotation angle is measured and limited during the rotation of the transmission mechanism. When the rotation angle is too large, the motor can be controlled to stop, thereby preventing the thermometer 6 from colliding with the top cover 11. Specifically, a first trigger member 42 is fixedly provided on the swing plate 41, and the first trigger member 42 is in a Z shape. Two first limit switches 43 are also provided on the housing of the first transmission mechanism 31, and the end of the first trigger member 42 is located between the two first limit switches 43. When the first trigger member 42 moves beyond the stroke, the first limit switch 43 will detect and control the first motor 21 to stop. A second trigger member 52 is fixedly arranged on the second transmission output shaft, and the second trigger member 52 is Z-shaped. Two second limit switches 53 are also arranged on the housing of the second transmission mechanism 32. The end of the second trigger member 52 is located between the two second limit switches 53. When the second trigger member 52 moves over the travel, the second limit switch 53 will detect it and control the second motor 22 to stop.

[0042] In Example 2 of the temperature measuring device for MPCVD equipment in the utility model: Regarding the setting of the mounting bracket, this embodiment proposes a new arrangement form. Different from Example 1, in this embodiment, the mounting bracket is no longer provided with a fixing hole, but the end of the mounting bracket is used for welding and fixing with the outer casing of the thermometer.

[0043] In Example 3 of the temperature measuring device for MPCVD equipment in the utility model: Regarding the setting of the mounting bracket, this embodiment proposes a new arrangement form. Different from Example 1, the mounting plate in this embodiment is set as a straight plate, and the side of the mounting plate is fixedly connected to the housing of the thermometer.

[0044] In the embodiment 4 of the temperature measuring device for MPCVD equipment of the utility model: for the setting of the mounting substrate, this embodiment proposes a new arrangement form. Different from the embodiment 1, the first mounting substrate of the mounting substrate in this embodiment is provided with a threaded hole, and the second mounting substrate is provided with a bolt through hole. Of course, in other embodiments, the first mounting substrate and the second mounting substrate can also be provided with bolt through holes, and fixed by inserting bolts and nuts.

[0045] In Example 5 of the temperature measuring device for MPCVD equipment in the utility model: Regarding the setting of the temperature measuring base, this embodiment proposes a new arrangement form. Different from Example 1, the temperature measuring base in this embodiment is a mounting block, and the thermometer is installed through the mounting block. At this time, the mounting hole is no longer required, and the mounting block is welded to the cavity and the thermometer respectively.

[0046] In the embodiment 6 of the temperature measuring device for MPCVD equipment of the utility model: for the setting of the mounting bracket, this embodiment proposes a new arrangement form. Different from the embodiment 1, in this embodiment, the mounting bracket is no longer provided with a second trigger, but a laser limit switch is provided. When the mounting bracket blocks the laser, the second motor does not stop, and when the mounting bracket blocks the laser, the second motor is controlled to stop. Of course, in other embodiments, the second limit switch may not be provided, and the rotation of the motor may be limited by a pre-set program.

[0047] In Example 7 of the temperature measuring device for MPCVD equipment in the utility model: Regarding the setting of the second power mechanism, this embodiment proposes a new arrangement form. Different from Example 1, in this embodiment, the second power mechanism is a hydraulic motor.

[0048] In the embodiment 8 of the temperature measuring device for MPCVD equipment of the utility model: for the setting of the second power mechanism, this embodiment proposes a new arrangement form. Different from the embodiment 1, the second power mechanism in this embodiment is a direct-acting mechanism, and the second power mechanism can be set as a cylinder or a hydraulic cylinder or an electric push rod. Of course, in other embodiments, the first power mechanism can also be set as a direct-acting mechanism, and the second power mechanism can be set as a rotary mechanism.

[0049] In the embodiment 9 of the temperature measuring device for MPCVD equipment of the utility model: for the setting of the swing plate, this embodiment proposes a new arrangement form. Different from the embodiment 1, the swing plate in this embodiment is no longer provided with a first trigger, but a laser limit switch is provided. When the swing plate blocks the laser, it does not stop, and when the mounting bracket blocks the laser, the second motor is controlled to stop. Of course, in other embodiments, the first limit switch may no longer be provided, and the rotation of the motor may be limited by a pre-set program.

[0050] In Example 10 of the temperature measuring device for MPCVD equipment in the utility model: Regarding the setting of the power mechanism, this embodiment proposes a new arrangement form. Different from Example 1, the power mechanisms in this embodiment are all direct-acting mechanisms, that is, the first power mechanism is a cylinder or a hydraulic cylinder or an electric push rod, and the second power mechanism is a cylinder or a hydraulic cylinder or an electric push rod. At this time, the output ends of the first power mechanism and the second power mechanism are arranged vertically.

[0051] In Example 11 of the temperature measuring device for MPCVD equipment in the utility model: Regarding the setting of the power mechanism, this embodiment proposes a new arrangement form. Different from Example 1, the power mechanism in this embodiment only includes the first motor and the second motor, and no longer includes the first transmission mechanism and the second transmission mechanism. At this time, the second motor is fixedly arranged on the first motor.

[0052] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. The patent protection scope of the present invention shall be based on the claims. All equivalent structural changes made using the description and drawings of the present invention shall be included in the protection scope of the present invention.

Claims

1. A temperature measuring device for MPCVD equipment, characterized in that: The invention comprises a temperature measuring base for being fixedly arranged on the cavity of the MPCVD device and a power mechanism for driving the temperature measuring instrument to automatically move, the power mechanism comprises a first power mechanism installed on the temperature measuring base, the first power mechanism has a first power output end for driving the temperature measuring instrument to measure the temperature of seed crystals in different rows, the power mechanism also comprises a second power mechanism installed on the first power output end, the second power mechanism has a second power output end for driving the temperature measuring instrument to measure the temperature of different seed crystals in the same row, the second power output end has a temperature measuring instrument installation structure for installing the temperature measuring instrument, the first power output end is a swing output end for outputting a swing action or the first power mechanism is set as a direct action mechanism, the The second power output end is a swing output end for outputting a swinging motion or the second power mechanism is a direct-acting mechanism, the first power mechanism also includes a first limit switch that cooperates with the first power output end to control its swing angle, the first limit switch has two and is respectively fixed on the housing of the first power mechanism, and a first trigger member located between the two first limit switches is fixed on the first power output end, and / or the second power mechanism also includes a second limit switch that cooperates with the second power output end to control its swing angle, the second limit switch has two and is respectively fixed on the housing of the second power mechanism, and a second trigger member located between the two second limit switches is fixed on the second power output end.

2. The temperature measuring device for MPCVD equipment according to claim 1, characterized in that: The temperature measuring base includes a mounting substrate, which includes a first mounting substrate and a second mounting substrate that are detachably connected together. The first power mechanism is mounted on the first mounting substrate or the second mounting substrate. The first mounting substrate and the second mounting substrate are respectively provided with arc-shaped notches to be assembled together to form a mounting hole for being mounted on and fixed to the outer periphery of the reduced diameter section of the top cover of the MPCVD equipment. The first mounting substrate and the second mounting substrate are respectively provided with corresponding bolt mounting holes to fix the two.

3. The temperature measuring device for MPCVD equipment according to claim 1, characterized in that: The thermometer mounting structure is an L-shaped mounting bracket, which includes a first bracket plate and a second bracket plate vertically connected to each other. The first bracket plate is used to be installed on the second power output end, and the second bracket plate is provided with a fixing hole for fixing the thermometer.

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