Special gas proportioning system

Abstract

The utility model discloses a special gas proportioning system. The special gas proportioning system comprises a plurality of mutually independent gas inlet pipelines and gas outlet pipelines, each air inlet pipeline is provided with an air inlet port and an air outlet end, the air inlet port is used for being connected with air supply equipment, and each air inlet pipeline is provided with a flow control assembly; the gas outlet pipeline is connected with gas using equipment through a gas outlet joint; and the gas outlet ends of the gas inlet pipelines are connected with the gas outlet pipeline. According to the special gas proportioning system disclosed by the embodiment of the utility model, the plurality of mutually independent gas inlet pipelines are arranged, the gas inlet ports of the gas inlet pipelines are connected with the gas supply equipment, and the gas outlet ports of the gas outlet pipelines are connected with the gas outlet pipelines, so that each gas inlet pipeline can independently control the flow and is not interfered by other branches; moreover, the flow control assembly is arranged on the gas inlet pipeline, so that the mass flow of the special gas in the single gas inlet pipeline can be more accurately measured and controlled, the proportion of each gas in the mixed gas is more accurate, and the high-precision requirement is met.

Description

Technical Field

[0001] The utility model relates to the field of special gas equipment, in particular to a special gas proportioning system. Background Art

[0002] Special gases are special gases, which are usually of high purity and need to be proportioned and mixed before being put into production to meet specific process requirements. In related technologies, a special gas proportioning system is usually used to proportion and mix special gases. However, when the special gas proportioning system mixes and distributes multiple gases, the gas flow or pressure is easily affected by the bypass, making it difficult for the special gas proportioning system to control the ratio between different special gases, which needs to be improved. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to propose a special gas proportioning system, which has multiple independent air intake pipelines, the air intake port of the air intake pipeline is connected to the air supply equipment, and the air outlet port of the air outlet pipeline is connected to the air outlet pipeline, so that each air intake pipeline can control the flow independently without being interfered by other branches; and the special gas proportioning system is arranged on the air intake pipeline, which can more accurately measure and control the mass flow of the special gas in a single air intake pipeline, ensure that the ratio of each gas in the final mixed gas is more accurate, and meet the high-precision requirements.

[0004] According to the special gas proportioning system of the embodiment of the utility model, it includes: a plurality of independent air inlet pipelines, each of the air inlet pipelines has an air inlet port and an air outlet end, the air inlet port is used to be connected to the air supply equipment, and each of the air inlet pipelines is provided with a flow control component; an air outlet pipeline, the air outlet pipeline has an air outlet joint, the air outlet joint is used to be connected to the gas-using equipment, and the air outlet ends of the air inlet pipelines are all connected to the air outlet pipelines.

[0005] According to the special gas proportioning system of the embodiment of the utility model, by having multiple independent air intake pipelines, the air intake ports of the air intake pipelines are connected to the air supply equipment, and the air outlet ports of the air outlet pipelines are connected to the air outlet pipelines, so that each air intake pipeline can control the flow independently without being interfered by other branches; and, a special gas proportioning system is arranged on the air intake pipeline, which can more accurately measure and control the mass flow rate of the special gas in a single air intake pipeline, thereby ensuring that the proportions of each gas in the final mixed gas are more accurate and meet the high-precision requirements.

[0006] According to some embodiments of the present invention, the flow control component is adjacent to the air outlet.

[0007] According to some embodiments of the present invention, the flow control component includes a mass flow meter.

[0008] According to some embodiments of the present invention, the flow control component further includes an air control valve, and the air control valve is arranged in series with the mass flow meter.

[0009] According to some embodiments of the present invention, the gas control valve is located on the downstream side of the mass flow meter.

[0010] According to some embodiments of the utility model, each of the air intake pipelines is provided with a pressure reducing valve, and the pressure reducing valve is located on the upstream side of the flow control component; and / or, a diaphragm valve is provided on the air intake pipeline, and the diaphragm valve is adjacent to the air intake port.

[0011] According to some embodiments of the utility model, each of the intake pipes is provided with a filter, and the filter is located on the upstream side of the flow control component; and / or each of the intake pipes is provided with a one-way valve, and the one-way valve is located on the upstream side of the flow control component.

[0012] According to some embodiments of the utility model, each of the air intake pipelines is provided with the filter and the one-way valve, and the one-way valve is located between the filter and the flow control component.

[0013] According to some embodiments of the utility model, each of the air intake pipelines is provided with the one-way valve and the pressure reducing valve, and the pressure reducing valve is located between the one-way valve and the flow control component.

[0014] According to some embodiments of the utility model, a mounting plate is included, wherein the mounting plate has a mounting surface, the air inlet pipeline and the air outlet pipeline are both mounted on the mounting surface, the air inlet port and the air outlet connector are located on the same side of the mounting plate along a first direction, a plurality of the air inlet pipelines are stacked within the mounting surface, and one of the adjacent air inlet pipelines surrounds the periphery of another air inlet pipeline.

[0015] According to some embodiments of the present utility model, each of the air intake pipelines comprises a first pipeline section, a second pipeline section, a third pipeline section, and a fourth pipeline section which are connected in sequence, the first pipeline section and the third pipeline section both extend along the first direction, the second pipeline section and the fourth pipeline section both extend along the second direction, the second direction intersects with the first direction, the first pipeline section has the air intake port, and the fourth pipeline section has the air outlet end;

[0016] Among them, multiple first pipeline sections of the intake pipelines are arranged along the second direction, multiple third pipeline sections of the intake pipelines are arranged along the second direction, multiple second pipeline sections of the intake pipelines are arranged along the first direction, multiple fourth pipeline sections of the intake pipelines are arranged along the first direction, and the outlet pipeline extends along the first direction and is located between the first pipeline section and the fourth pipeline section.

[0017] According to some embodiments of the utility model, at least one of the intake pipelines includes a main intake pipeline and two intake branches, one end of the main intake pipeline has the intake port, one end of each of the intake branches is connected to the other end of the main intake pipeline, the other end of each of the intake branches constitutes the outlet end, and the flow control component is arranged on the intake branch.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 It is a special gas proportioning system according to some embodiments of the utility model;

[0021] Figure 2 yes Figure 1 Schematic diagram of the second air intake pipeline;

[0022] Figure 3 yes Figure 1 Schematic diagram of the center outlet gas pipeline.

[0023] Reference numerals:

[0024] 100. Special gas proportioning system;

[0025] 10. Inlet pipeline; 11. Inlet port; 12. Outlet end; 13. Flow control assembly; 14. Mass flow meter; 15. Air control valve; 16. Pressure reducing valve; 17. Diaphragm valve; 18. Filter; 19. One-way valve; 20. First pipeline section; 21. Second pipeline section; 22. Third pipeline section; 23. Fourth pipeline section; 24. First inlet pipeline; 25. Second inlet pipeline; 26. Third inlet pipeline; 27. Barometer; 28. Inlet main pipeline; 29. ​​Inlet branch pipeline;

[0026] 30. Air outlet pipeline; 31. Air outlet connector;

[0027] 40. mounting plate; 41. mounting surface;

[0028] 50. Fasteners. DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] Reference below Figure 1-Figure 3 A special gas proportioning system 100 according to an embodiment of the present invention is described.

[0031] According to the embodiment of the utility model, the special gas ratio system 100 includes: an air inlet pipeline 10 and an air outlet pipeline 30. There can be multiple air inlet pipelines 10, and the multiple air inlet pipelines 10 are independent of each other. Figure 1 The special gas proportioning system 100 has three intake pipes 10, namely the first intake pipe 24, the second intake pipe 25 and the third intake pipe 26, and the three intake pipes 10 are independent of each other. By making the multiple intake pipes 10 independent of each other, different types of special gases can flow through each intake pipe 10, so that different types of special gases can be regulated separately; and the flow rate and air pressure between each intake pipe 10 will not affect each other, so that a single intake pipe 10 can independently control the flow rate and air pressure of the intake pipe 10, so that when multiple special gases are finally mixed, the ratio between each special gas in the mixed gas is more accurate.

[0032] Optionally, the material of the air intake pipeline 10 is high-purity stainless steel, which can ensure the purity of the special gas.

[0033] refer to Figure 1 Each air inlet pipeline 10 has an air inlet port 11 and an air outlet 12, and the air inlet port 11 is used to connect with the air supply device. For example, the air inlet port 11 can be connected with the air supply device using a VCR plus claw gasket. The gasket can be a disposable gasket to ensure the air tightness of the pipeline and prevent the pipeline from being contaminated by internal and external leakage.

[0034] refer to Figure 1 , each air intake pipeline 10 is provided with a flow control component 13. By providing the flow control component 13 on the air intake pipeline 10, the flow of the gas on the air intake pipeline 10 can be accurately detected and controlled, so that when multiple special gases are mixed in the special gas proportioning system 100, the mass ratio between each special gas is more accurate. For example, in the process, two special gases need to be mixed in a specific ratio, such as 1:2. The flow control component 13 can be adjusted so that the ratio of the mass flow values ​​of the special gases in the two air intake pipelines 10 is 1:2, so that when the two special gases are finally mixed in the special gas proportioning system 100, the mass flow ratio is 1:2, so that the mass ratio of the two special gases is 1:2.

[0035] Optionally, an FVCR connector is provided at the upstream end of the flow control assembly 13 to connect to the air intake line 10 .

[0036] Optionally, the flow control assembly 13 is connected to the air intake pipe 10 via a ferrule joint or a welding joint.

[0037] For example, refer to Figure 1 and Figure 2 The special gas proportioning system 100 includes a pressure gauge 27 , which is disposed on the air intake pipeline 10 and can monitor the pressure of the gas in the air intake pipeline 10 .

[0038] For example, the special gas proportioning system 100 includes a PLC and a human-machine interface, the PLC is electrically connected to the human-machine interface, and the PLC and the human-machine interface are electrically connected to the barometer 27 and the flow control component 13 to achieve different logical outputs. The signal is transmitted to the PLC through the barometer 27, and the PLC then transmits the signal to the human-machine interface. Relevant personnel can operate on the human-machine interface to drive the flow control component 13 to control the flow of the special gas in the intake pipeline 10.

[0039] refer to Figure 3 The outlet pipeline 30 has an outlet connector 31, which is used to connect to the gas-using equipment, and the outlet ends 12 of the inlet pipelines 10 are all connected to the outlet pipeline 30. For example, the outlet connector 31 is a KF connector. By connecting the outlet ends 12 of the inlet pipelines 10 to the outlet pipeline 30, the gases flowing out of different inlet pipelines 10 can be mixed in the outlet pipeline 30 according to the set ratio to meet the process requirements.

[0040] According to the special gas proportioning system 100 of the embodiment of the utility model, by having multiple independent air intake pipelines 10, the air intake port 11 of the air intake pipeline 10 is connected to the air supply equipment, and the air outlet end 12 of the air outlet pipeline 30 is connected to the air outlet pipeline 30, so that each air intake pipeline 10 can control the flow independently without being interfered by other branches; and a flow control component 13 is provided on the air intake pipeline 10, which can more accurately measure and control the mass flow of the special gas in a single air intake pipeline 10, thereby ensuring that the proportion of each gas in the final mixed gas is more accurate and meets the high-precision requirements.

[0041] According to some embodiments of the present invention, reference Figure 1 , the flow control component 13 is adjacent to the gas outlet end 12. By placing the flow control component 13 adjacent to the gas outlet end 12, the special gas can flow into the gas outlet pipeline 30 from the gas outlet end 12 as quickly as possible after the flow control component 13 controls the flow rate, and mix with other special gases, thereby ensuring that the ratio between the special gases from different gas inlet pipelines 10 in the mixed gas is more accurate.

[0042] According to some embodiments of the present invention, reference Figure 1 and Figure 2 The flow control component 13 includes a mass flow meter 14 (Mass Flow Controller, MFC). The mass flow meter can more accurately measure the mass flow of the special gas in the intake pipe, ensuring that the proportion of each gas in the final mixed gas is more accurate and meets the high-precision requirements.

[0043] According to some embodiments of the present invention, reference Figure 1 and Figure 2 The flow control assembly 13 further includes an air control valve 15, which is arranged in series with the mass flow meter 14. The air control valve 15 can adjust the pressure and flow of the special gas. By arranging the air control valve 15 in series with the mass flow meter 14, the air intake pipeline 10 can not only detect the mass flow by using the mass flow meter 14, but also adjust the mass flow and air pressure by using the air control valve 15 to ensure that the mass flow and air pressure of the special gas in the air intake pipeline 10 reach specific values.

[0044] Optionally, the gas control valve 15 is connected to the mass flow meter 14 in the form of FVCR.

[0045] Optionally, the air control valve 15 is connected to the air intake pipeline 10 via a ferrule joint or a welding joint.

[0046] According to some embodiments of the present invention, reference Figure 1 , the air control valve 15 is located at the downstream side of the mass flow meter 14. By locating the air control valve 15 at the downstream of the mass flow meter 14, the air control valve 15 can be closer to the gas outlet end 12, and the gas regulated by the air control valve 15 can flow into the gas outlet pipeline 30 from the gas outlet end 12 as quickly as possible, so that the ratio between the special gases from different gas inlet pipelines 10 in the mixed gas is more accurate.

[0047] According to some embodiments of the present invention, reference Figure 1 and Figure 2 , each air inlet pipeline 10 is provided with a pressure reducing valve 16, and the pressure reducing valve 16 is located on the upstream side of the flow control component 13. By arranging the pressure reducing valve 16 upstream of the flow control component 13, the air pressure can be pre-adjusted before the special gas passes through the flow control component 13, so that the air pressure can reach the working pressure difference range of the mass flow meter 14, so as to ensure that the mass flow meter 14 measures the gas accurately.

[0048] Optionally, FVCR connectors are provided at both upstream and downstream ends of the pressure reducing valve 16 , which can be connected to the air intake pipeline 10 .

[0049] Optionally, the pressure reducing valve 16 is connected to the air intake pipe 10 via a ferrule joint or a welding joint.

[0050] According to some embodiments of the present invention, reference Figure 1 and Figure 2 , a diaphragm valve 17 is provided on the air intake pipeline 10, and the diaphragm valve 17 is adjacent to the air intake port 11. The diaphragm valve 17 can be used as an opening and closing member of the air intake pipeline 10. When the diaphragm valve 17 is opened, the air intake pipeline 10 is unobstructed, and the special gas can flow from the gas supply device into the air intake pipeline 10 and completely pass through the air intake pipeline 10; when the diaphragm valve 17 is closed, the air intake pipeline 10 is blocked, and the special gas cannot flow into the downstream side of the diaphragm valve 17. The operating mechanism of the diaphragm valve 17 is separated from the medium passage, so that the sealing performance of the diaphragm valve 17 is better. By providing the diaphragm valve 17 on the air intake pipeline 10, the air intake pipeline 10 can be opened or closed while ensuring the sealing performance.

[0051] Optionally, a FVCR connector is provided on the downstream side of the diaphragm valve 17 , which can be connected to the air intake pipeline 10 .

[0052] Optionally, the diaphragm valve 17 is connected to the air intake pipe 10 via a ferrule joint or a welding joint.

[0053] According to some embodiments of the present invention, reference Figure 1 and Figure 2 , each air intake pipeline 10 is provided with a filter 18, and the filter 18 is located on the upstream side of the flow control assembly 13. The filter 18 can filter solid or liquid impurities in the special gas. By arranging the filter 18 on the upstream side of the air intake pipeline 10, it is possible to prevent impurities from flowing into other downstream components and damaging or corroding the components, and it is also possible to ensure the purity of the special gas and reduce solid or liquid impurities in the final mixed gas.

[0054] Optionally, MVCR joints are provided at both upstream and downstream ends of the filter 18 , and the filter 18 can be connected to the air intake pipeline 10 through the MVCR joints.

[0055] Optionally, the filter 18 is connected to the air intake pipe 10 via a ferrule joint or a welding joint.

[0056] According to some embodiments of the present invention, reference Figure 1 , each air inlet pipeline 10 is provided with a one-way valve 19, and the one-way valve 19 is located on the upstream side of the flow control component 13. The opening of the one-way valve 19 faces the downstream side, so that the special gas can only flow from the air inlet port 11 of the air inlet pipeline 10 to the air outlet port 12, and the special gas in the air inlet pipeline 10 is prevented from flowing back into the air supply equipment. By arranging the one-way valve 19 on the upstream side of the flow control component 13, it is possible to prevent the gas adjusted by the mass flow meter 14 from flowing back into the air supply equipment to pollute the gas source of the air supply equipment, and the purity of the gas in the air supply equipment can be ensured.

[0057] Optionally, FVCR connectors are provided at both upstream and downstream ends of the one-way valve 19 , and the one-way valve 19 can be connected to the air intake pipeline 10 through the FVCR connectors.

[0058] Optionally, the one-way valve 19 is connected to the air intake pipe 10 via a ferrule joint or a welding joint.

[0059] For example, refer to Figure 2 Each air intake pipeline 10 of the special gas proportioning system 100 includes a diaphragm valve 17, a filter 18, a one-way valve 19, a pressure reducing valve 16 and a pressure gauge 27. From the upstream of the air intake pipeline 10 to the downstream of the air intake pipeline 10, the air intake port, the diaphragm valve 17, the filter 18, the one-way valve 19, the pressure reducing valve 16, the pressure gauge 27 and the flow control component 13 are arranged respectively.

[0060] Optionally, refer to Figure 1 A three-way interface is provided on the pipeline connecting the pressure reducing valve 16 and the mass flow meter 14, one end of the three-way interface is connected to the pressure gauge 27 in a threaded manner, and the other two ends are respectively connected to the pressure reducing valve 16 and the mass flow meter 14.

[0061] According to some embodiments of the present invention, reference Figure 1 and Figure 2 The special gas proportioning system 100 includes a mounting plate 40, the mounting plate 40 has a mounting surface 41, and the air inlet pipeline 10 and the air outlet pipeline 30 are both mounted on the mounting surface 41. For example, the air inlet pipeline 10 and the air outlet pipeline 30 are both mounted on the same side of the mounting plate 40. By mounting the air inlet pipeline 10 and the air outlet pipeline 30 on the mounting surface 41, it is convenient for employees to monitor and measure the flow or pressure data of the special gas, and operate the valve to adjust the flow or pressure of the special gas.

[0062] For example, the air intake pipe 10 is mounted on the mounting plate 40 by means of the fasteners 50 , so that the position of the air intake pipe 10 can be fixed.

[0063] The air inlet port 11 and the air outlet connector 31 are located on the same side of the mounting plate 40 along the first direction (e.g., direction e1 in the figure). By locating the air inlet port 11 and the air outlet connector 31 on the same side of the mounting plate 40 along the first direction, when the flow control component 13 is connected to other components such as a gas supply device or a gas-using device, the connection interfaces are on the same side, which makes the connection more convenient.

[0064] Multiple intake pipes 10 are stacked in the mounting surface 41, and one of the adjacent intake pipes 10 surrounds the periphery of another intake pipe 10. By stacking the intake pipes 10 in the mounting surface 41, the area of ​​the mounting surface 41 occupied by the intake pipes 10 can be reduced, and the structure of the special gas proportioning system 100 is more compact, which can save space.

[0065] According to some embodiments of the present invention, reference Figure 1 Each air intake pipeline 10 includes a first pipeline section 20, a second pipeline section 21, a third pipeline section 22, and a fourth pipeline section 23 which are connected in sequence. The first pipeline section 20 and the third pipeline section 22 extend in a first direction, the second pipeline section 21 and the fourth pipeline section 23 extend in a second direction (for example, the e2 direction in the figure), the second direction intersects the first direction, the first pipeline section 20 has an air intake port 11, and the fourth pipeline section 23 has an air outlet port 12. By making the air intake pipeline 10 include the first pipeline section 20, the second pipeline section 21, the third pipeline section 22, and the fourth pipeline section 23 which are connected in sequence, and making the first pipeline section 20 and the third pipeline section 22 extend in the first direction, and the second pipeline section 21 and the fourth pipeline section 23 extend in the second direction, the area occupied by the air intake pipeline 10 on the installation surface 41 can be reduced, and the structure of the special gas proportioning system 100 is more compact, which can save space. By providing the first pipeline section 20 with an air inlet port 11, the air inlet port 11 can be located at the edge of the air inlet pipeline 10, and the air inlet port 11 can be located at the edge of the special gas matching system 100, so that the special gas matching system 100 can be connected and matched with other equipment such as gas supply equipment. By providing the fourth pipeline section 23 with an air outlet end 12, the air outlet end 12 can be connected in parallel with the air outlet pipeline, so that the special gas can be gathered and mixed in the air outlet pipeline.

[0066] Among them, the first pipeline sections 20 of multiple air intake pipelines 10 are arranged along the second direction, the third pipeline sections 22 of multiple air intake pipelines 10 are arranged along the second direction, the second pipeline sections 21 of multiple air intake pipelines 10 are arranged along the first direction, and the fourth pipeline sections 23 of multiple air intake pipelines 10 are arranged along the first direction. The air outlet pipeline 30 extends along the first direction and is located between the first pipeline section 20 and the fourth pipeline section 23. The area of ​​the installation surface 41 occupied by the special gas proportioning system 100 can be reduced, and the structure of the special gas proportioning system 100 is more compact, which can save space.

[0067] According to some embodiments of the present invention, reference Figure 1, at least one air intake pipeline 10 includes an air intake main path 28 and two air intake branches 29, one end of the air intake main path 28 has an air intake port 11, one end of each air intake branch 29 is connected to the other end of the air intake main path 28, the other end of each air intake branch 29 constitutes an air outlet 12, and a flow control component 13 is arranged on the air intake branch 29. For example, the first air intake pipeline 24 includes an air intake main path 28 and two air intake branches 29. By making at least one air intake pipeline 10 include an air intake main path 28 and two air intake branches 29, the air intake pipeline 10 can select different air intake branches 29 according to different range and graduation value requirements, thereby ensuring that the measured mass flow data is relatively accurate. By connecting one end of each air intake branch 29 to the other end of the air intake main line 28, the other end of each air intake branch 29 constitutes the air outlet end 12, and the flow control component 13 is arranged on the air intake branch 29, the special gas can enter any air intake branch 29 and pass through the flow control component 13, and the flow of the special gas can be detected and adjusted.

[0068] In the description of the present invention, the term "plurality" refers to two or more than two. In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0069] In the description of the present invention, a first feature being “above” or “below” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact but are in contact with each other via another feature therebetween.

[0070] In the description of the present invention, "first feature" or "second feature" may include one or more of the features.

[0071] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0072] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A special gas proportioning system, characterized in that: include: A plurality of independent air inlet pipelines, each of which has an air inlet port and an air outlet, the air inlet port is used to connect to an air supply device, and each of which is provided with a flow control component; An air outlet pipeline is provided with an air outlet connector, and the air outlet connector is used to be connected to a gas-using device, and the air outlet ends of the air inlet pipeline are all connected to the air outlet pipeline.

2. The special gas proportioning system according to claim 1, characterized in that: The flow control component is adjacent to the air outlet.

3. The special gas proportioning system according to claim 1, characterized in that: The flow control assembly includes a mass flow meter.

4. The special gas proportioning system according to claim 3, characterized in that: The flow control component also includes an air control valve, which is arranged in series with the mass flow meter.

5. The special gas proportioning system according to claim 4, characterized in that: The gas control valve is located on the downstream side of the mass flow meter.

6. The special gas proportioning system according to claim 1, characterized in that: A pressure reducing valve is provided on each of the air inlet pipelines, and the pressure reducing valve is located on the upstream side of the flow control component; and / or a diaphragm valve is provided on the air inlet pipeline, and the diaphragm valve is adjacent to the air inlet port.

7. The special gas proportioning system according to claim 1, characterized in that: Each of the air intake pipelines is provided with a filter, and the filter is located on the upstream side of the flow control component; and / or each of the air intake pipelines is provided with a one-way valve, and the one-way valve is located on the upstream side of the flow control component.

8. The special gas proportioning system according to claim 7, characterized in that: The filter and the one-way valve are arranged on each of the air intake pipelines, and the one-way valve is located between the filter and the flow control component.

9. The special gas proportioning system according to claim 7, characterized in that: The one-way valve and the pressure reducing valve are arranged on each of the air intake pipelines, and the pressure reducing valve is located between the one-way valve and the flow control assembly.

10. The special gas proportioning system according to claim 1, characterized in that: It includes a mounting plate, which has a mounting surface, the air inlet pipeline and the air outlet pipeline are both mounted on the mounting surface, the air inlet port and the air outlet connector are located on the same side of the mounting plate along a first direction, a plurality of the air inlet pipelines are stacked in the mounting surface, and one of the adjacent air inlet pipelines surrounds the periphery of another air inlet pipeline.

11. The special gas proportioning system according to claim 10, characterized in that: Each of the air inlet pipelines comprises a first pipeline section, a second pipeline section, a third pipeline section, and a fourth pipeline section which are connected in sequence, the first pipeline section and the third pipeline section both extend along the first direction, the second pipeline section and the fourth pipeline section both extend along the second direction, the second direction intersects the first direction, the first pipeline section has the air inlet port, and the fourth pipeline section has the air outlet port; Among them, multiple first pipeline sections of the intake pipelines are arranged along the second direction, multiple third pipeline sections of the intake pipelines are arranged along the second direction, multiple second pipeline sections of the intake pipelines are arranged along the first direction, multiple fourth pipeline sections of the intake pipelines are arranged along the first direction, and the outlet pipeline extends along the first direction and is located between the first pipeline section and the fourth pipeline section.

12. The special gas proportioning system according to any one of claims 1 to 11, characterized in that: At least one of the intake pipelines includes a main intake pipeline and two intake branches, one end of the main intake pipeline has the intake port, one end of each of the intake branches is connected to the other end of the main intake pipeline, the other end of each of the intake branches constitutes the outlet end, and the flow control component is arranged on the intake branch.

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