Auxiliary tool for bonding crystal ingot

Abstract

The utility model relates to the technical field of semiconductors. A crystal ingot bonding auxiliary tool comprises a base, a vertical plate, a micrometer, a pressing plate and a compression bolt. The base is provided with a connecting part used for being detachably connected with a crystal ingot fixing base. The front side and the rear side of the base are provided with inserting holes used for longitudinally inserting the vertical plates. The vertical plate is provided with at least three micrometers, and the vertical plate is provided with through holes used for left-right telescopic movement of measuring heads of the micrometers. The vertical plate and the pressing plate are detachably connected through a bolt and located on the two sides of the crystal ingot in the thickness direction, and the pressing plate is in threaded connection with a pressing bolt. A measuring head of the micrometer and the compression bolt abut against the two sides of the crystal ingot in the thickness direction respectively. According to the utility model, a positioning reference surface is formed through the measuring head of the micrometer, so that the perpendicularity of the crystal ingot relative to the crystal ingot fixing base when the crystal ingot is placed can be conveniently controlled, and the crystal ingot is pressed and positioned through the pressing plate and the pressing bolt, so that the crystal ingot can be conveniently positioned and maintained when the crystal ingot is bonded and fixed on the crystal ingot fixing base.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a tool for pasting crystal ingots. Background Art

[0002] Single crystal silicon carbide (SiC) has the characteristics of large bandgap, high critical breakdown strength, high electron mobility, high thermal conductivity, etc., and plays a unique role in the fields of microelectronics and optoelectronics.

[0003] Silicon carbide is a typical hard and brittle material. Its cutting process is extremely difficult, and silicon carbide crystals have their own crystal orientation requirements, which requires controlling the verticality of the crystal ingot pasted on the fixed base.

[0004] How to improve the positioning accuracy of the crystal ingot bonded to the fixed base affects the subsequent cutting quality of the crystal ingot.

[0005] Currently, there is a lack of an auxiliary tooling that can improve the positioning accuracy of the crystal ingot bonded to the fixed base. Utility Model Content

[0006] In view of the problems existing in the prior art, the utility model provides an ingot bonding auxiliary tooling, which has solved at least one of the above-mentioned technical problems.

[0007] The technical solution of the utility model is: an ingot bonding auxiliary tooling, characterized in that it comprises a base, a vertical plate, a micrometer, a pressure plate and a clamping bolt;

[0008] The base is provided with a connection portion for detachably connecting to a crystal ingot fixing base;

[0009] The front and rear sides of the base are provided with plugging holes for longitudinally plugging the vertical board;

[0010] At least three micrometers are installed on the vertical plate, and a through hole is provided on the vertical plate for the micrometer probe to extend and retract left and right;

[0011] The vertical plate and the pressing plate are detachably connected by bolts, and the vertical plate and the pressing plate are located on both sides in the thickness direction of the ingot, and the pressing plate is threadedly connected with a clamping bolt;

[0012] The measuring head of the micrometer and the clamping bolt respectively press against two sides of the ingot in the thickness direction.

[0013] The utility model forms a positioning reference surface through the probe of the micrometer, which is convenient for controlling the verticality of the crystal ingot relative to the crystal ingot fixing base when it is placed, and the crystal ingot is clamped and positioned by the clamping plate and the clamping bolt, which is convenient for maintaining the positioning of the crystal ingot when it is bonded and fixed on the crystal ingot fixing base.

[0014] Further preferably, the connecting portion is a dovetail groove penetrating and conducting from left to right, and the dovetail groove is slidably connected to the ingot fixing base.

[0015] Further preferably, the vertical board includes a board body, and vertical columns are arranged on the front and rear sides of the board body;

[0016] The upright column is longitudinally plugged into the plug hole.

[0017] Further preferably, the plug hole comprises an inclined surface and a vertical surface which are arranged opposite to each other on the left and right sides, and the distance between the inclined surface and the vertical surface decreases from top to bottom;

[0018] The bottom of the column includes a left side surface and a right side surface which are arranged on the left and right sides. The left side surface is inclined downward from left to right, and the right side surface is arranged vertically.

[0019] The processing size accuracy of the column and the plug hole is reduced while ensuring the verticality of the column.

[0020] Further preferably, the inclined surface and the left side surface are inclined 5° to the right from top to bottom.

[0021] Further preferably, the plug hole on the front side of the base runs through from top to bottom and has an opening at the front end;

[0022] The plug-in hole on the rear side of the base runs through from top to bottom and has an opening at the rear end.

[0023] Further preferably, a resin support strip is glued and fixed on the top of the crystal ingot fixing base, and the resin support strip is glued and fixed to the crystal ingot.

[0024] Further preferably, a rubber block is provided at the end of the clamping bolt.

[0025] Easy access to the ingot.

[0026] Further preferably, at least three plugging holes arranged from left to right are provided on both the front and rear sides of the base.

[0027] Compared with the prior art, the utility model has the following beneficial effects:

[0028] 1) This device is suitable for auxiliary positioning of silicon carbide ingots. The vertical surface of the silicon carbide ingot is directly based on the ingot fixing base to prevent the accumulation of errors;

[0029] 2) Using three points to determine a plane, the verticality between the ingot pasting surface and the ingot fixing base can be adjusted;

[0030] 3) The crystal ingot is pressed onto the desired plane by the clamping bolts. The ends of the bolts are provided with rubber blocks to facilitate clamping and prevent loosening.

[0031] 4) It has multiple plug-in holes, which is convenient for adjusting the plug-in position, and can add columns to fix multiple ingots;

[0032] 5) Save space required for tooling;

[0033] 6) One side of the connection between the column and the base is perpendicular to the base, and the other side is inclined at 5°, which ensures the verticality of the column while reducing the processing dimensional accuracy of the column and the socket hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a structural schematic diagram of a specific embodiment 1 of the utility model;

[0035] Figure 2 It is a structural schematic diagram of another viewing angle of the specific embodiment 1 of the utility model;

[0036] Figure 3 It is a structural schematic diagram of another viewing angle of the specific embodiment 1 of the utility model;

[0037] Figure 4 This is an exploded view of the specific embodiment 1 of the utility model;

[0038] Figure 5 This is an exploded view of the specific embodiment 1 of the utility model from another perspective.

[0039] In the figure, 1 is a crystal ingot fixing base, 2 is a resin support bar, 3 is a crystal ingot, 4 is a base, 5 is a vertical plate, 6 is a micrometer, 7 is a pressure plate, 8 is a tightening bolt, and 9 is a bolt. DETAILED DESCRIPTION

[0040] See also Figures 1 to 5 Specific embodiment 1, an ingot bonding auxiliary tooling, including a base 4, a vertical plate 5, a micrometer 6, a pressure plate 7 and a clamping bolt 8; the base 4 is provided with a connection part for detachably connecting the ingot fixing base 1; the front and rear sides of the base 4 are provided with plug-in holes for longitudinally plugging the vertical plate 5; at least three micrometers 6 are installed on the vertical plate 5, and a through hole for the probe of the micrometer 6 to move left and right is opened on the vertical plate 5; the vertical plate 5 and the pressure plate 7 are detachably connected by bolts 9, and the vertical plate 5 and the pressure plate 7 are located on both sides of the thickness direction of the ingot 3, and the clamping bolt 8 is threadedly connected on the pressure plate 7; the probe of the micrometer 6 and the clamping bolt 8 respectively press against both sides of the thickness direction of the ingot 3. The utility model forms a positioning reference surface through the probe of the micrometer 6, which is convenient for controlling the verticality of the ingot 3 relative to the ingot fixing base 1 when it is placed, and the ingot is clamped and positioned by the pressure plate 7 and the clamping bolt 8, so as to facilitate the positioning and maintenance of the ingot when it is bonded and fixed on the ingot fixing base 1. A micrometer is detachably connected to the vertical plate, and the telescopic direction of the probe of the micrometer is left and right.

[0041] The connection part is a dovetail groove that penetrates and conducts from left to right, and the dovetail groove is slidably connected to the ingot fixing base 1 .

[0042] The vertical plate 5 includes a plate body, and vertical columns are arranged on the front and rear sides of the plate body; the columns are longitudinally plugged into the plug hole. The plug hole includes inclined surfaces and vertical surfaces arranged opposite to each other on the left and right sides, and the spacing between the inclined surfaces and the vertical surfaces decreases from top to bottom; the bottom of the column includes a left side surface and a right side surface arranged on the left and right sides, the left side surface is inclined downward from left to right, and the right side surface is arranged vertically. While ensuring the verticality of the column, the processing dimensional accuracy of the column and the plug hole is reduced.

[0043] The inclined surface and the left side surface are inclined 5° to the right from top to bottom.

[0044] The plugging hole on the front side of the base 4 penetrates up and down, and the front end is open; the plugging hole on the rear side of the base 4 penetrates up and down, and the rear end is open.

[0045] A resin support strip 2 is adhered and fixed to the top of the crystal ingot fixing base 1 , and the resin support strip 2 is adhered and fixed to the crystal ingot.

[0046] The end of the clamping bolt 8 is provided with a rubber block to facilitate contact with the ingot.

[0047] At least three plugging holes arranged from left to right are provided on both the front and rear sides of the base 4 .

[0048] Four micrometers are installed on the pressure plate, and the center lines connecting any three of the four micrometers are all triangles.

[0049] The four corners of the plate-like body are provided with threaded holes for threaded connection bolts. The clamping bolt is located in the center of the pressing plate.

[0050] Directions:

[0051] 1) After cleaning the ingot 3, the resin support bar 2, and the ingot fixing base 1, connect the base 4, the vertical plate 5, and the micrometer 6;

[0052] 2) Use the angle positioning tool to assist the micrometer 6 in determining the required plane, and adjust the probes of all micrometers 6 to match the plane where they are located with the required verticality of the ingot 3. Remove the angle positioning tool.

[0053] 3) Install the pressing plate 7 on the vertical plate 5 and install the clamping bolts 8 (the distance between the pressing plate 7 and the vertical column is greater than the width of the crystal ingot, which is convenient for placing the crystal ingot 3);

[0054] 4) Prepare glue, apply the prepared glue to the bonding area of ​​the ingot fixing base 1, place the resin support strip 2 on the bonding area, then apply glue on the arc surface of the resin support strip 2, and place the ingot on the resin support strip 2, and between the pressing plate 7 and the column;

[0055] 5) Tighten the bolts 8, press the ingot onto the vertical plane determined by the adjusted micrometer 6, and wait for the glue to harden.

[0056] The above are only preferred implementations of the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A crystal ingot bonding auxiliary tool, characterized in that: It includes a base, a vertical plate, a micrometer, a pressure plate and a tightening bolt; The base is provided with a connection portion for detachably connecting to a crystal ingot fixing base; The front and rear sides of the base are provided with plugging holes for longitudinally plugging the vertical board; At least three micrometers are installed on the vertical plate, and a through hole is provided on the vertical plate for the micrometer probe to extend and retract left and right; The vertical plate and the pressing plate are detachably connected by bolts, and the vertical plate and the pressing plate are located on both sides in the thickness direction of the ingot, and the pressing plate is threadedly connected with the clamping bolts; The measuring head of the micrometer and the clamping bolt respectively press against two sides of the ingot in the thickness direction.

2. The ingot bonding auxiliary tooling according to claim 1, characterized in that: The connecting portion is a dovetail groove that penetrates and conducts from left to right, and the dovetail groove is slidably connected to the ingot fixing base.

3. The ingot bonding auxiliary tooling according to claim 1, characterized in that: The vertical board includes a board body, and vertical columns are arranged on the front and rear sides of the board body; The upright column is longitudinally plugged into the plug hole.

4. The ingot bonding auxiliary tooling according to claim 3, characterized in that: The plug hole comprises an inclined surface and a vertical surface which are arranged opposite to each other on the left and right sides, and the distance between the inclined surface and the vertical surface decreases from top to bottom; The bottom of the column includes a left side surface and a right side surface which are arranged on the left and right sides. The left side surface is inclined downward from left to right, and the right side surface is arranged vertically.

5. The ingot bonding auxiliary tooling according to claim 4, characterized in that: The inclined surface and the left side surface are inclined 5° to the right from top to bottom.

6. The ingot bonding auxiliary tooling according to claim 1, characterized in that: The plug-in hole on the front side of the base runs through from top to bottom and has an opening at the front end; The plug-in hole on the rear side of the base runs through from top to bottom and has an opening at the rear end.

7. The ingot bonding auxiliary tooling according to claim 1, characterized in that: A resin support strip is pasted and fixed on the top of the crystal ingot fixing base, and the resin support strip is pasted and fixed to the crystal ingot.

8. The ingot bonding auxiliary tooling according to claim 1, characterized in that: A rubber block is arranged at the end of the clamping bolt.

9. The ingot bonding auxiliary tooling according to claim 1, characterized in that: Four micrometers are installed on the pressure plate, and the center lines connecting any three of the four micrometers are all triangles.

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