Auxiliary main shaft on multi-silicon wafer station carrying mechanism

Abstract

The utility model discloses an auxiliary main shaft on a multi-silicon-wafer-station carrying mechanism, and the auxiliary main shaft comprises an auxiliary main shaft screw rod which is disposed below a main shaft and is used for overcoming the attraction force of a magnet at the inner ring of a DD motor; the screw rod nut is sleeved on the auxiliary main shaft screw rod; the auxiliary seat is used for clamping the auxiliary main shaft screw rod; the fastening nut is positioned at the bottom of the auxiliary seat, sleeves the auxiliary main shaft screw rod and is used for fixing the auxiliary main shaft screw rod; and the switching base is connected with the screw rod nut and is embedded in the inner ring of the DD motor, and the upper part of the auxiliary main shaft screw rod extends into the switching base. The auxiliary main shaft overcomes the attraction force of the DD motor inner ring magnet, the rigidity of the main shaft is increased, deformation is avoided, and the inner ring and the outer ring of the DD motor are prevented from making contact to generate friction. The design of the auxiliary main shaft ingeniously fuses the structural characteristics of the lead screw nut and the lead screw, and maximization of space utilization is achieved. The screw rod is ingeniously arranged in the inner ring of the DD motor, so that the Z-direction size of the spindle main shaft is remarkably reduced, and the whole structure is more compact and light.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an auxiliary spindle on a multi-silicon wafer workstation transport mechanism. Background Art

[0002] The multi-wafer handling mechanism in the PECVD process chamber, namely the Spindle, can ensure that the multi-wafers can move synchronously during the deposition process and be transposed according to the process requirements to maintain the uniformity of the deposited film. The power of the multi-wafer handling mechanism comes from the DD motor. Currently, the connection between the spindle and the DD motor is achieved through the base. Although this method simplifies the structure, it also has some significant defects.

[0003] The original intention of the base design is to be tightly connected with the inner ring of the DD motor. Its inner hole is used to install the expansion sleeve, and the main shaft and the base are firmly tightened and fixed through the conical surface structure of the expansion sleeve. However, the shaft-hole connection method does not use keyways or couplings, so its stability is completely dependent on the tightening effect of the conical surface of the expansion sleeve. The defects of this method are:

[0004] The up and down position of the inner ring of the DD motor is difficult to control accurately during the assembly process, which depends entirely on the assembly worker's operating skills. This uncertainty makes it impossible to guarantee the relative position of the inner ring and outer ring of the DD motor, which may affect the maximization of the DD motor's output torque.

[0005] The expansion sleeve is locked by six evenly distributed screws. However, this locking method may lead to uneven force, that is, one side is subject to greater force and the other side is subject to less force, which in turn causes the eccentricity of the spindle and has an adverse effect on the stability and accuracy of the system. Utility Model Content

[0006] The purpose of the utility model is to provide an auxiliary spindle on a multi-wafer workstation handling mechanism to overcome the suction force of the inner ring magnet of the DD motor, increase the rigidity of the spindle, avoid deformation, and prevent the inner and outer rings of the DD motor from contacting and generating friction.

[0007] To achieve the above purpose, the technical solution of the present application is: an auxiliary spindle on a multi-wafer workstation transport mechanism, comprising:

[0008] The auxiliary spindle screw is set under the spindle to overcome the suction force of the inner ring magnet of the DD motor and prevent the spindle from deforming;

[0009] The screw nut is sleeved on the auxiliary spindle screw;

[0010] Auxiliary seat, used for clamping the auxiliary spindle screw;

[0011] A fastening nut is located at the bottom of the auxiliary seat and is sleeved on the auxiliary spindle screw rod, and is used to fix the auxiliary spindle screw rod;

[0012] The adapter base is connected to the lead screw nut and is nested in the inner ring of the DD motor. The upper part of the auxiliary spindle lead screw extends into the adapter base.

[0013] In one of the embodiments, a ball bearing is provided between the screw nut and the adapter base; the ball bearing is located on a bearing inner sleeve, and the bearing inner sleeve is fixed on the screw nut.

[0014] In one of the embodiments, a retaining spring is provided under the ball bearing and is embedded in a groove of the adapter base.

[0015] In one of the embodiments, a multifunctional shaft end locking nut is provided in the groove at the top of the adapter base, and the multifunctional shaft end locking nut is sleeved on the main shaft to lock the main shaft.

[0016] In one of the embodiments, a pair of radial ball bearings sleeved on the main shaft are provided above the multifunctional shaft end locking nut.

[0017] In one of the embodiments, a washer is provided between the inner ring of the radial ball bearing located below and the multifunctional shaft end locking nut.

[0018] In one embodiment, the outer ring of the radial ball bearing located below is clamped onto the bearing stop.

[0019] In one of the embodiments, the multifunctional shaft end locking nut is connected to the adapter base through a plurality of fastening bolts.

[0020] In one of the embodiments, the outer ring of the multifunctional shaft end locking nut is provided with a plurality of tightening grooves, and an adjustment gap is provided on the multifunctional shaft end locking nut.

[0021] In one of the embodiments, the multifunctional shaft end locking nut is laterally provided with a clamping step hole, and when the multifunctional shaft end locking nut is locked to the main shaft, the clamping screw is placed in the clamping step hole.

[0022] The utility model adopts the above technical solution, and can achieve the following technical effects:

[0023] The auxiliary spindle overcomes the suction force of the inner ring magnet of the DD motor, increases the rigidity of the spindle, avoids deformation, and prevents friction caused by contact between the inner and outer rings of the DD motor. The design of the auxiliary spindle cleverly combines the structural characteristics of the screw nut and the screw itself to maximize space utilization. By cleverly placing the screw inside the inner ring of the DD motor, the Z-direction dimension of the spindle spindle is significantly reduced, making the overall structure more compact and lightweight.

[0024] The inner ring of the DD motor is connected to the spindle through an adapter base, which reduces the error accumulation during the transmission process, thereby ensuring the accuracy of the spindle movement. There is no need to go through a complex transmission mechanism, thereby reducing energy loss during the transmission process and improving overall efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 It is a cross-sectional view of a multi-wafer workstation transport mechanism;

[0027] Figure 2 This is a partial enlarged view of the multi-wafer workstation handling mechanism;

[0028] Figure 3 This is the appearance diagram of the multi-wafer station handling mechanism;

[0029] Figure 4 This is a schematic diagram of the connection of the auxiliary spindle;

[0030] Figure 5 This is a schematic diagram of the connection between the adapter base and the auxiliary spindle screw;

[0031] Figure 6 This is a cross-sectional view of the connection between the adapter base and the auxiliary spindle screw;

[0032] Figure 7 This is the appearance drawing of the multifunctional shaft end locking nut;

[0033] Figure 8 It is a cross-sectional view of the multi-functional shaft end locking nut.

[0034] Explanation of the serial numbers in the figure: 1. Spindle; 2. Multi-function shaft end locking nut; 3. DD motor inner ring; 4. Adapter base; 5. Auxiliary seat; 6. Fastening nut; 7. Radial ball bearing; 8. Washer; 9. Bearing block; 10. Bearing inner sleeve; 11. Ball bearing; 12. Retaining spring; 13. DD motor outer ring; 14. Screw spacer; 15. Screw nut; 16. Auxiliary spindle screw; 17. Tightening groove; 18. Adjustment gap; 19. Clamping step hole. DETAILED DESCRIPTION

[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0037] In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0038] In the description of the present application, it should be understood that the terms "center", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0039] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] See also Figure 1-6 This embodiment provides an auxiliary spindle on a multi-wafer workstation transport mechanism, including:

[0041] The auxiliary spindle screw is set under the spindle and the upper part extends into the adapter base. This innovative design is to effectively offset the strong suction force generated by the inner ring magnet of the DD motor, avoid unnecessary deformation of the spindle due to magnetic force, and ensure the long-term stability and processing accuracy of the spindle;

[0042] A screw nut is sleeved on the auxiliary spindle screw, and a screw pad is provided on the screw nut;

[0043] Auxiliary seat, used to clamp the auxiliary spindle screw, enhancing the stability of the overall structure;

[0044] The fastening nut is located at the bottom of the auxiliary seat and is sleeved on the auxiliary spindle screw, which effectively fixes the position of the screw to prevent it from moving during operation and enhances stability;

[0045] The adapter base is connected to the lead screw nut and is nested in the inner ring of the DD motor. The upper part of the auxiliary spindle lead screw extends into the adapter base, which not only effectively transmits the driving force from the DD motor, but also ensures the stability and coaxiality of the connection structure;

[0046] In order to effectively reduce energy loss and wear between components and extend service life, a ball bearing is provided between the screw nut and the adapter base; the ball bearing is located on a bearing inner sleeve, and the bearing inner sleeve is fixed on the screw nut.

[0047] In order to prevent the ball bearing from accidentally falling off during operation, a retaining spring is provided under the ball bearing and is embedded in the groove of the adapter base.

[0048] A multifunctional shaft end locking nut is provided in the groove at the top of the adapter base, which can firmly lock the spindle to prevent it from loosening or deflecting, and also take into account the compactness of the structure and the convenience of maintenance;

[0049] In order to further enhance the supporting effect of the spindle, a pair of radial ball bearings are added above the multi-functional shaft end locking nut. The bearings are tightly fitted on the spindle, which effectively disperses the axial load during the operation of the spindle and improves the durability and precision of the spindle system.

[0050] In this embodiment, a washer is provided between the inner ring of the radial ball bearing located below and the multifunctional shaft end locking nut to optimize the contact state between the two and reduce wear. The outer ring of the radial ball bearing located below is clamped on the bearing stopper to ensure the stable installation and positioning of the bearing.

[0051] like Figure 7-8 As shown in the figure, multiple fastening bolts are used to tightly connect the multifunctional shaft end locking nut and the adapter base, which significantly enhances the locking effect and ensures the stability of the spindle under high-speed operation. At the same time, the outer ring of the multifunctional shaft end locking nut is designed with multiple tightening grooves for easy operation, and an adjustment gap is opened on the nut to meet the fine-tuning requirements under different working conditions. A clamping step hole is also designed horizontally on the multifunctional shaft end locking nut; when the nut is locked on the spindle, the clamping screw can be placed in the hole to further strengthen the locking effect and ensure the safety and stability of the spindle.

[0052] Since the suction force of the inner ring magnet of the DD motor is relatively large, the rigidity of the single-sided connected spindle is insufficient, which can easily cause the inner ring to be non-concentric and the spindle to bend, causing the inner ring (mover) of the DD motor and the outer ring (stator) of the DD motor to contact and generate friction. The utility model adds an auxiliary spindle to overcome the suction force of the inner ring magnet of the DD motor, increase the rigidity of the spindle, and avoid deformation; and prevent the inner ring and outer ring of the DD motor from contacting and generating friction. This auxiliary spindle is realized with the help of a screw nut and a screw design, placing the screw inside the inner ring of the DD motor to reduce the Z-direction dimension of the spindle spindle. The overall structure is more compact, the stability is better, and the functions are more complete.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. The auxiliary spindle on the multi-wafer station handling mechanism is characterized by: include: Auxiliary spindle screw, set under the spindle, used to overcome the suction force of the inner ring magnet of the DD motor; The screw nut is sleeved on the auxiliary spindle screw; Auxiliary seat, used for clamping the auxiliary spindle screw; A fastening nut is located at the bottom of the auxiliary seat and is sleeved on the auxiliary spindle screw rod, and is used to fix the auxiliary spindle screw rod; The adapter base is connected to the lead screw nut and is nested in the inner ring of the DD motor. The upper part of the auxiliary spindle lead screw extends into the adapter base.

2. The auxiliary spindle on the multi-wafer workstation handling mechanism according to claim 1 is characterized in that: A ball bearing is arranged between the screw nut and the adapter base; the ball bearing is located on a bearing inner sleeve, and the bearing inner sleeve is fixed on the screw nut.

3. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 2 is characterized in that: A retaining spring is arranged under the ball bearing and is embedded in the groove of the adapter base.

4. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 1 is characterized in that: A multifunctional shaft end locking nut is arranged in the groove at the top of the adapter base, and the multifunctional shaft end locking nut is sleeved on the main shaft to lock the main shaft.

5. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 4, characterized in that: A pair of radial ball bearings sleeved on the main shaft are arranged above the locking nut at the multifunctional shaft end.

6. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 5, characterized in that: A washer is arranged between the inner ring of the radial ball bearing located below and the multifunctional shaft end locking nut.

7. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 5, characterized in that: The outer ring of the radial ball bearing located below is clamped onto the bearing stop.

8. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 4, characterized in that: The multifunctional shaft end locking nut is connected to the adapter base through a plurality of fastening bolts.

9. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 4, characterized in that: The outer ring of the multifunctional shaft end locking nut is provided with a plurality of tightening grooves, and an adjustment gap is opened on the multifunctional shaft end locking nut.

10. The auxiliary spindle on the multi-wafer workstation transport mechanism according to claim 4, characterized in that: The multifunctional shaft end locking nut is laterally provided with a clamping step hole. When the multifunctional shaft end locking nut is locked to the main shaft, the clamping screw is placed in the clamping step hole.

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