Multi-station quartz crucible automatic detection device

Abstract

The utility model relates to the field of quartz crucible detection, and particularly discloses a multi-station quartz crucible automatic detection device, which comprises a supporting mechanism, a detection mechanism and a detection mechanism, and is characterized in that the supporting mechanism comprises a supporting assembly, a glass dish arranged on the supporting assembly and a detection assembly arranged on the supporting assembly; the rotary lifting mechanism comprises a multi-station rotary support assembly clamped and embedded in the supporting assembly in a sliding mode and an electric push rod fixedly connected with the multi-station rotary support assembly. According to the utility model, the electric push rod is controlled to work, so that the multi-station rotating bracket assembly moves downwards, the quartz crucible is immersed in strong acid, the electric push rod is controlled to work, so that the multi-station rotating bracket assembly moves upwards, and after the quartz crucible is separated from the strong acid, the quartz crucible is immersed in the strong acid. The quartz crucibles can be sequentially photographed and uploaded through the detection assembly, the corrosion degree can be detected, the quartz crucibles can be subjected to pickling operation in batches through the multi-station rotating support assembly, and meanwhile, the subsequent detection operation of the detection assembly is also facilitated.

Description

Technical Field

[0001] The utility model belongs to the field of quartz crucible detection, in particular to a multi-station quartz crucible automatic detection device. Background Art

[0002] Quartz crucible is a sub-product of quartz glass products. It is made of high-purity quartz sand through a mold and made by arc method at high temperature. It has the characteristics of high temperature resistance, long service life and high purity. Quartz crucible is mainly used as an auxiliary consumable for drawing high-purity single crystal silicon rods for semiconductors. It is a key disposable consumable for holding molten silicon liquid in the process of drawing single crystal silicon rods.

[0003] The quartz crucible should have good acid and alkali resistance. The staff can test its acid and alkali resistance by soaking it in strong acid and observing the surface corrosion.

[0004] The existing Chinese patent CN116952967B discloses a quartz crucible detection device, comprising a support frame; a placement plate, the placement plate is fixedly connected to the side wall of the support frame; a crucible body, the crucible body is arranged on the upper end surface of the placement plate; a connecting rod, the connecting rod is fixedly connected to the side wall of the support frame; an LED lamp, the LED lamp is arranged on the side wall of the connecting rod, and the light of the LED lamp is directed toward the crucible body; when working, the quartz crucible to be detected is placed above the placement plate, and then the LED lamp is turned on to irradiate the surface of the crucible body, and the surface of the crucible is detected by a pair of detection lamps to detect whether there are foreign objects, cracks, and open bubbles on the outer surface. During the detection process, the crucible body can be rotated by controlling the adjustment mechanism, which solves the problem in the prior art that the contact surface between the bottom surface of the quartz crucible and the detection platform cannot be detected, which is beneficial to the subsequent use of the quartz crucible.

[0005] The above detection device can only detect the appearance of the quartz crucible, but cannot detect the acid and alkali resistance of the quartz crucible. At the same time, the existing detection device is inefficient when detecting multiple quartz crucibles, and the entire detection process needs to be manually operated. Utility Model Content

[0006] In order to solve the above technical problems, the utility model provides a multi-station quartz crucible automatic detection device to solve the problems of low efficiency when simultaneously detecting multiple quartz crucibles in the prior art.

[0007] A multi-station quartz crucible automatic detection device comprises: a support mechanism, including a support assembly, a glass dish arranged on the support assembly, and a detection assembly installed on the support assembly; a rotary lifting mechanism, including a multi-station rotary bracket assembly slidably embedded on the support assembly, and an electric push rod fixedly connected to the multi-station rotary bracket assembly, wherein the electric push rod can drive the multi-station rotary bracket assembly to move up and down.

[0008] Preferably, the multi-station rotating bracket assembly includes a support plate, a rotating shaft and a motor, the bottom of the rotating shaft is fixedly connected to the multi-station bracket, a plurality of conical cylinders are evenly fixedly connected to the multi-station bracket, the upper end of the motor is also fixedly connected to gear 1, and the upper end of the rotating shaft is also fixedly connected to gear 2.

[0009] Preferably, the support assembly includes a support base, the upper end of the support base is fixedly connected to a vertical arm, a guide rod is provided in the middle of the vertical arm, and the upper end of one side of the vertical arm is fixedly connected to a fixing plate.

[0010] Preferably, the rotating shaft is fixedly mounted on the support plate through a bearing, the motor is fixedly mounted on the support plate, the gear one and the gear two are meshed with each other, the support plate is slidably embedded in the guide rod, the upper end of the electric push rod is fixedly connected to the fixed plate, and the lower end of the electric push rod is fixedly connected to the support plate.

[0011] Preferably, the detection component comprises an L-shaped bracket, and a camera is fixedly connected to the L-shaped bracket.

[0012] Preferably, the camera is fixedly mounted on an L-shaped bracket, and the bottom of the camera faces the upper side of a conical cylinder.

[0013] Compared with the prior art, the utility model has the following beneficial effects: by controlling the operation of the electric push rod, the multi-station rotating bracket assembly can be moved downward, so that the quartz crucible is immersed in strong acid; after a period of time, the electric push rod is controlled to move the multi-station rotating bracket assembly upward; after the quartz crucible is separated from the strong acid, the multi-station rotating bracket assembly is controlled to rotate several quartz crucibles, and the detection assembly is connected to an external detection system; through the detection assembly, several quartz crucibles can be photographed and uploaded in turn to detect the degree of corrosion; the multi-station rotating bracket assembly can be used to perform acid immersion operations on quartz crucibles in batches, and the subsequent detection operation of the detection assembly is also convenient, which greatly improves the operating efficiency of the staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2It is a schematic diagram of the exploded structure of the utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the rotary lifting mechanism of the utility model;

[0017] Figure 4 For this utility model Figure 3 A magnified view of middle;

[0018] Figure 5 It is a structural schematic diagram of the support mechanism of the utility model.

[0019] In the figure: 1. Support mechanism; 11. Support assembly; 111. Support base; 112. Vertical arm; 113. Guide rod; 114. Fixed plate; 12. Glass dish; 13. Detection assembly; 131. L-shaped bracket; 132. Camera; 2. Rotary lifting mechanism; 21. Multi-station rotary bracket assembly; 211. Support plate; 212. Rotating shaft; 213. Motor; 214. Multi-station bracket; 215. Conical cylinder; 216. Gear 1; 217. Gear 2; 22. Electric push rod; 3. Quartz crucible. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] like Figures 1 to 5 As shown:

[0022] Embodiment 1: The utility model provides a multi-station quartz crucible automatic detection device, comprising: a support mechanism 1, comprising a support assembly 11, a glass dish 12 arranged on the support assembly 11, and a detection assembly 13 installed on the support assembly 11; a rotary lifting mechanism 2, comprising a multi-station rotary support assembly 21 slidably embedded on the support assembly 11, and an electric push rod 22 fixedly connected to the multi-station rotary support assembly 21, wherein the electric push rod 22 can drive the multi-station rotary support assembly 21 to move up and down;

[0023] Among them, several quartz crucibles 3 to be tested are placed upside down on the multi-station rotating bracket assembly 21, and then strong acid is poured into the glass dish 12. The multi-station rotating bracket assembly 21 can be moved downward by controlling the electric push rod 22 to make the quartz crucible 3 immersed in the strong acid. After a period of time, the electric push rod 22 is controlled to move the multi-station rotating bracket assembly 21 upward. After the quartz crucible 3 is separated from the strong acid, the multi-station rotating bracket assembly 21 is controlled to rotate several quartz crucibles 3, and the detection assembly 13 is connected to the external detection system. Through the detection assembly 13, several quartz crucibles 3 can be photographed and uploaded in turn to detect the degree of corrosion. The multi-station rotating bracket assembly 21 can be used to perform acid immersion operations on the quartz crucibles 3 in batches, and it is also convenient for subsequent detection operations of the detection assembly 13.

[0024] Specifically, the multi-station rotating bracket assembly 21 includes a support plate 211, a rotating shaft 212 and a motor 213. The bottom of the rotating shaft 212 is fixedly connected to a multi-station bracket 214, and a plurality of conical cylinders 215 are evenly fixedly connected to the multi-station bracket 214. The upper end of the motor 213 is also fixedly connected to a gear 1 216, and the upper end of the rotating shaft 212 is also fixedly connected to a gear 2 217.

[0025] Specifically, the support assembly 11 includes a support base 111 , the upper end of the support base 111 is fixedly connected to a vertical arm 112 , a guide rod 113 is disposed in the middle of the vertical arm 112 , and the upper end of one side of the vertical arm 112 is fixedly connected to a fixing plate 114 .

[0026] Specifically, the rotating shaft 212 is fixedly mounted on the support plate 211 through a bearing, the motor 213 is fixedly mounted on the support plate 211, the gear 1 216 and the gear 2 217 are meshed with each other, the support plate 211 is slidably embedded in the guide rod 113, the upper end of the electric push rod 22 is fixedly connected to the fixed plate 114, and the lower end of the electric push rod 22 is fixedly connected to the support plate 211.

[0027] As can be seen from the above, a number of quartz crucibles 3 are placed upside down on the conical tube 215, and the electric push rod 22 is controlled to work so that the fixed installation support plate 211 moves downward along the guide rod 113, so that the several quartz crucibles 3 are immersed in the strong acid. After soaking for a period of time, the electric push rod 22 is controlled to work so that the fixed installation support plate 211 moves downward, so that the several quartz crucibles 3 are separated from the strong acid. The motor 213 is controlled to work so that the gear 1 216 drives the gear 2 217 to rotate. The rotation of the gear 2 217 causes the rotating shaft 212 to drive the multi-station bracket 214 to rotate. The rotation of the multi-station bracket 214 causes the several quartz crucibles 3 upside down on the conical tube 215 to rotate accordingly, thereby facilitating the detection of the detection component 13.

[0028] Embodiment 2: This embodiment is basically the same as the previous embodiment, except that the detection component 13 includes an L-shaped bracket 131 , and a camera 132 is fixedly connected to the L-shaped bracket 131 .

[0029] Specifically, the camera 132 is fixedly mounted on the L-shaped bracket 131 , and the bottom of the camera 132 faces the upper side of a conical tube 215 .

[0030] As can be seen from the above, after the camera 132 is connected to the external detection system, the quartz crucible 3 can be photographed by the camera 132, so that the staff can collect images of the quartz crucible 3 and detect whether the quartz crucible 3 is damaged.

[0031] The standard parts used in this utility model can be purchased from the market, and the special-shaped parts can be customized according to the description and the drawings. The specific connection methods of each part adopt the conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0032] In the description of the present utility model, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. The meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0035] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0036] In the drawings of the embodiments disclosed in the present utility model, only the structures related to the embodiments disclosed in the present utility model are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other.

[0037] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art may still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-station quartz crucible automatic detection device, characterized in that: include: A support mechanism (1) comprises a support component (11), a glass dish (12) arranged on the support component (11), and a detection component (13) installed on the support component (11); The rotary lifting mechanism (2) comprises a multi-station rotary support assembly (21) slidably embedded on the support assembly (11), and an electric push rod (22) fixedly connected to the multi-station rotary support assembly (21), wherein the electric push rod (22) can drive the multi-station rotary support assembly (21) to move up and down.

2. A multi-station quartz crucible automatic detection device as claimed in claim 1, characterized in that: The multi-station rotating bracket assembly (21) comprises a support plate (211), a rotating shaft (212) and a motor (213); the bottom of the rotating shaft (212) is fixedly connected to a multi-station bracket (214); a plurality of conical cylinders (215) are evenly fixedly connected to the multi-station bracket (214); the upper end of the motor (213) is fixedly connected to a gear 1 (216); and the upper end of the rotating shaft (212) is fixedly connected to a gear 2 (217).

3. A multi-station quartz crucible automatic detection device as claimed in claim 2, characterized in that: The support assembly (11) comprises a support base (111), the upper end of the support base (111) is fixedly connected to a vertical arm (112), a guide rod (113) is arranged in the middle of the vertical arm (112), and the upper end of one side of the vertical arm (112) is fixedly connected to a fixing plate (114).

4. A multi-station quartz crucible automatic detection device as claimed in claim 3, characterized in that: The rotating shaft (212) is fixedly mounted on the support plate (211) via a bearing, the motor (213) is fixedly mounted on the support plate (211), the gear 1 (216) and the gear 2 (217) are meshed with each other, the support plate (211) is slidably engaged on the guide rod (113), the upper end of the electric push rod (22) is fixedly connected to the fixed plate (114), and the lower end of the electric push rod (22) is fixedly connected to the support plate (211).

5. A multi-station quartz crucible automatic detection device as claimed in claim 3, characterized in that: The detection component (13) comprises an L-shaped bracket (131), and a camera (132) is fixedly connected to the L-shaped bracket (131).

6. A multi-station quartz crucible automatic detection device as claimed in claim 5, characterized in that: The camera (132) is fixedly mounted on the L-shaped bracket (131), and the bottom of the camera (132) faces the upper side of a conical cylinder (215).

Images