Absolute pressure vacuum pressure switch

Abstract

The utility model relates to an absolute pressure vacuum pressure switch which comprises a hollow body with two open ends, one end of the body is connected with a lower connecting body, and the other end of the body is connected with a hollow cover plate. A diaphragm, a piston, a piston rod, a disc spring, a microswitch, a switch positioning sleeve and a vacuum gland are arranged in a cavity of the body; the diaphragm is arranged at an opening in one side, close to the lower connecting body, of the cavity; one end of the piston is connected with the diaphragm, the other end of the piston is connected with one end of the piston rod, the other end of the piston rod is connected with the microswitch, the microswitch is arranged in the switch positioning sleeve, and the switch positioning sleeve is matched with the inner wall of the cavity of the body in shape and fixedly arranged on the inner wall of the cavity of the body; one end of the cover plate is connected with the body, and the other end is provided with a serial port connector. The pressure control device is reasonable in structural design, high in stability and quick in response, can be widely applied to scenes with high requirements on pressure control, such as semiconductor manufacturing and vacuum equipment, and has a wide application prospect.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure switches, in particular to an absolute pressure vacuum pressure switch. Background Art

[0002] In certain specific industrial fields, such as semiconductor manufacturing, high vacuum equipment, etc., there are extremely high requirements for precise control and detection of pressure. Traditional pressure switches may have problems such as poor stability and susceptibility to contamination in a high-purity vacuum environment, and cannot meet the needs of these fields. The utility model is proposed based on the above background, and aims to provide an absolute pressure vacuum pressure switch to meet the high-precision use requirements. Utility Model Content

[0003] In order to overcome the above-mentioned deficiencies of the pressure switches in the prior art, the purpose of the utility model is to provide an absolute pressure vacuum pressure switch, which has a reasonable structural design, high stability, and rapid response, and can be widely used in semiconductor manufacturing, vacuum equipment and other scenarios with high requirements for pressure control, and has broad application prospects.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] An absolute pressure vacuum pressure switch, the absolute pressure vacuum pressure switch comprises a hollow body with openings at both ends, one end of the body is connected to a lower connecting body, and the other end is connected to a hollow cover plate; a diaphragm, a piston, a piston rod, a disc spring, a micro switch, a switch positioning sleeve, and a vacuum pressure cover are arranged in the cavity of the body; the diaphragm is arranged at an opening on one side of the cavity close to the lower connecting body; one end of the piston is connected to the diaphragm, the other end of the piston is connected to one end of the piston rod, and the other end of the piston rod is connected to the micro switch, the micro switch is arranged in the switch positioning sleeve, the switch positioning sleeve matches the shape of the inner wall of the cavity of the body and is fixedly arranged on the inner wall of the cavity of the body; the vacuum pressure cover is connected to the switch positioning sleeve and is fixed at the other opening close to the body; one end of the cover plate is connected to the body, and the other end is provided with a serial port connector.

[0006] As a further optimization of the above solution, one end of the disc spring is connected to the piston rod, and the other end is also provided with a pressure regulating nut, and the pressure regulating nut is also connected to the switch positioning sleeve.

[0007] As a further optimization of the above solution, an induction space is further provided between the switch positioning sleeve and the pressure regulating nut, and a diaphragm is further provided in the induction space.

[0008] As a further optimization of the above solution, the body is connected to the cover plate by snap-fitting.

[0009] The use of the absolute pressure vacuum pressure switch of the utility model has the following beneficial effects:

[0010] The number of disc springs in the utility model can be reasonably adjusted according to the actual design and use needs. The preload force of the disc spring on the piston rod can be adjusted by the pressure regulating nut, thereby changing the sensing threshold of the pressure switch. The micro switch is aligned with the piston rod to monitor the pressure changes in the system. By adopting the unique disc spring structure, it has high precision, high stability, fast response, etc., and can be widely used in scenes with high requirements for pressure control such as semiconductor manufacturing and vacuum equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Attached Figure 1 The utility model is a schematic diagram of the overall structure of an absolute pressure vacuum pressure switch.

[0012] Attached Figure 2 The utility model is a schematic diagram of the cross-sectional structure of an absolute pressure vacuum pressure switch.

[0013] Attached Figure 3 The utility model is a schematic diagram of the disassembled structure of an absolute pressure vacuum pressure switch. DETAILED DESCRIPTION

[0014] The following is combined with Figure 1-3 The structure and working mode of an absolute pressure vacuum pressure switch of the utility model are described in detail.

[0015] An absolute pressure vacuum pressure switch, comprising a hollow body (1) with openings at both ends, one end of the body being connected to a lower connecting body (2), and the other end being connected to a hollow cover plate (7); a diaphragm (4), a piston (5), a piston rod (13), a disc spring (11), a micro switch (6), a switch positioning sleeve (8), and a vacuum pressure cover (14) are arranged in the cavity of the body; the diaphragm is arranged at an opening on one side of the cavity close to the lower connecting body; one end of the piston is connected to the diaphragm, the other end of the piston is connected to one end of the piston rod, the other end of the piston rod is connected to the micro switch, the micro switch is arranged in the switch positioning sleeve, the switch positioning sleeve matches the shape of the inner wall of the cavity of the body and is fixedly arranged on the inner wall of the cavity of the body; the vacuum pressure cover is connected to the switch positioning sleeve and is fixed at the opening on the other side close to the body; one end of the cover plate is connected to the body, and the other end is provided with a serial port connector (9). One end of the disc spring is connected to the piston rod, and the other end is provided with a pressure regulating nut (12), which is also connected to the switch positioning sleeve. An induction space (10) is provided between the switch positioning sleeve and the pressure regulating nut, and a diaphragm is also provided in the induction space. The body is connected to the cover plate by clamping.

[0016] The operation method of the absolute pressure vacuum pressure gauge of the utility model is as follows:

[0017] Before using the absolute vacuum pressure switch, you must first ensure that the vacuum space inside the body reaches a high-purity vacuum state. Connect the connector of the pressure switch to the system that needs to monitor the pressure. When the pressure in the system changes (taking the following two cases of pressure increase and pressure decrease as examples for explanation):

[0018] 1. Pressure rise: The pressure in the joint rises accordingly, and a pressure difference is generated on both sides of the diaphragm. Under the action of the pressure difference, the diaphragm moves toward the inside of the body, thereby pushing the piston rod. When the pressure is greater than the preload of the disc spring, the piston rod continues to move and pushes the micro switch, which is turned on and sends a corresponding signal to monitor the rise in system pressure.

[0019] 2. Pressure reduction: When the pressure in the system drops to the normal range, the elastic force of the disc spring pushes the piston rod downward, the diaphragm returns to its initial state, the micro switch contacts are disconnected, and the signal transmission is interrupted.

[0020] Through the above structure and operation method, the absolute pressure vacuum pressure switch adopted by the utility model can accurately and stably detect and control pressure in a high-purity vacuum environment, meeting the high requirements for pressure control in related fields.

[0021] The main structural characteristics of the absolute pressure vacuum pressure gauge of the utility model are described as follows:

[0022] 1. Main body: Made of stainless steel to ensure high internal vacuum and good sealing.

[0023] 2. Diaphragm: Located in the sensing space, it is made of a specific alloy material with high elasticity and good corrosion resistance. When the pressure in the sensing space changes, the diaphragm can produce corresponding displacement.

[0024] 3. Piston: connected to the diaphragm, it can move with the displacement of the diaphragm. The piston is equipped with a piston rod and a disc spring, etc., which are used to transmit the movement of the diaphragm, and the initial induction force of the switch is set by adjusting the preload of the disc spring.

[0025] 4. Micro switch: By setting it in alignment with the piston rod, when the piston rod moves to a certain position, the micro switch is triggered to output the signal. The switch type can be the SPDT switch commonly used in this field, and the switch contact capacity options include 5A 250VAC or 3A 28YDC, which can be selected according to the actual design and use needs.

[0026] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the application disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and embodiments are considered to be exemplary only, and the true scope and spirit of the present application are indicated by the following claims. It should be understood that the present application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is limited only by the appended claims.

Claims

1. An absolute vacuum pressure switch, characterized in that: The absolute pressure vacuum pressure switch comprises a hollow body (1) with openings at both ends, one end of the body being connected to a lower connecting body (2), and the other end being connected to a hollow cover plate (7); a diaphragm (4), a piston (5), a piston rod (13), a disc spring (11), a micro switch (6), a switch positioning sleeve (8), and a vacuum pressure cover (14) are arranged in the cavity of the body; the diaphragm is arranged at an opening on one side of the cavity close to the lower connecting body; one end of the piston is connected to the diaphragm, the other end of the piston is connected to one end of the piston rod, and the other end of the piston rod is connected to the micro switch, the micro switch is arranged in the switch positioning sleeve, the switch positioning sleeve matches the shape of the inner wall of the cavity of the body and is fixedly arranged on the inner wall of the cavity of the body; the vacuum pressure cover is connected to the switch positioning sleeve and is fixed at the opening on the other side close to the body; one end of the cover plate is connected to the body, and the other end is provided with a serial port connector (9).

2. The absolute pressure vacuum pressure switch according to claim 1, characterized in that: One end of the disc spring is connected to the piston rod, and the other end is provided with a pressure regulating nut (12), which is also connected to the switch positioning sleeve.

3. The absolute pressure vacuum pressure switch according to claim 2, characterized in that: An induction space (10) is also provided between the switch positioning sleeve and the pressure regulating nut, and a diaphragm is also provided in the induction space.

4. The absolute pressure vacuum pressure switch according to claim 1, characterized in that: The body is connected with the cover plate by snapping.

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