Guide rail mechanism capable of adapting to different wafer dimensions

Abstract

The utility model relates to the technical field of wafer processing, in particular to a guide rail mechanism capable of adapting to different wafer sizes and specifications, which comprises a first row of left guide rails, a first row of right guide rails, a second row of left guide rails and a second row of right guide rails, the bottoms of the first column of left guide rails and the second column of left guide rails are fixedly connected with left transmission plates, and the bottoms of the first column of right guide rails and the second column of right guide rails are fixedly connected with right transmission plates; in the prior art, when wafers are transferred during processing, the wafers need to be embedded in the guide rails to be guided and moved, but the wafers of various types and different specifications need to be adjusted by an operator to adjust the guide rails and adjust the distance between the adjacent guide rails to a proper distance, but when multiple groups of guide rails are adjusted, on one hand, the operation is tedious, and the working efficiency is high. On the other hand, precision errors are prone to occurring in operation, and consequently transmission is not smooth.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a guide rail mechanism which can adapt to wafers of different sizes. Background Art

[0002] In electronics, chips are a way of miniaturizing circuits and are often manufactured on the surface of semiconductor wafers. During the processing of chips, they need to be processed by various equipment. The guide rails are necessary workpieces in the production process. They mainly drive the movement of chips and transfer them to new processes.

[0003] When dealing with the transfer required for chip processing, the existing device needs to embed the chip in the guide rail for guided movement, but there are many types of chips, and chips of different specifications require the operator to adjust the guide rails and adjust the spacing between adjacent guide rails to the appropriate distance. However, when adjusting multiple sets of guide rails, on the one hand, the operation is more cumbersome, and on the other hand, the operation is prone to precision errors, resulting in unsmooth transmission.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a guide rail mechanism that can adapt to different chip size specifications is proposed, in order to achieve a more practical purpose. Utility Model Content

[0005] The utility model aims to provide a guide rail mechanism which can adapt to different wafer sizes and specifications, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a guide rail mechanism that can adapt to different wafer size specifications, including a first row of left-type guide rails, a left-type transmission plate and a transmission gear, a first row of right-type guide rails are arranged on one side of the outer side of the first row of left-type guide rails, and a second row of left-type guide rails are arranged on the other side of the first row of right-type guide rails, and a second row of right-type guide rails are arranged on the other side of the second row of left-type guide rails, the first row of left-type guide rails, the second row of left-type guide rails and the second row of right-type guide rails are arranged in parallel, the bottoms of the first row of left-type guide rails and the second row of left-type guide rails are fixedly connected with a left-type transmission plate, the bottoms of the first row of right-type guide rails and the second row of right-type guide rails are fixedly connected with a right-type transmission plate, and the inner sides of the left-type transmission plate and the right-type transmission plate are meshed and connected with a transmission gear;

[0007] A rack is arranged on the inner side of the left transmission plate, and a fixing bolt is installed inside the left transmission plate, and the other end of the fixing bolt is fixed inside the first column of left guide rails and the second column of left guide rails;

[0008] The first column left-type guide rail comprises a guide rail base, an adjustment plate and an adjustment bolt group. The adjustment plate is installed on one side of the upper part of the guide rail base, and the adjustment bolt group is arranged at the adjacent connection between the guide rail base and the adjustment plate.

[0009] Furthermore, a limit plate is disposed at the top raised end of the guide rail base, and an anti-wear strip is disposed on the inner side of the limit plate.

[0010] Furthermore, a transmission shaft is sleeved and installed in the middle of the transmission gear.

[0011] Furthermore, the transmission gear forms a gear-rack meshing transmission structure through the rack and the left transmission plate.

[0012] Furthermore, the guide rail base forms a detachable structure through the adjustment bolt group and the adjustment plate, and the sizes of the guide rail base and the adjustment plate match each other.

[0013] Furthermore, the left-type transmission plate forms a detachable structure with the first column of left-type guide rails and the second column of left-type guide rails respectively through multiple groups of the fixing bolts.

[0014] Furthermore, the left-type transmission plate also includes an inner slide block and an outer slide rail. The inner slide block is installed on one side of the bottom of the left-type transmission plate, and the outer slide rail is embedded in the outer wall of the inner slide block.

[0015] The utility model provides a guide rail mechanism that can adapt to different wafer sizes and specifications, and has the following

[0016] Beneficial effects:

[0017] 1. The utility model supports the synchronous installation of multiple sets of guide rails, which is convenient for adjusting different numbers of guide rail channels according to needs, and is convenient for coordinating different wafer production processes and synchronously transmitting different numbers of wafers, so as to better meet the wafer production and manufacturing needs;

[0018] 2. The utility model can drive the single-side guide rail in each set of guide rails to move synchronously through the cooperation of the gear and the rack, and drive the racks on both sides to move synchronously to both sides through the cooperation of the middle end gear structure, so as to realize the synchronous adjustment of the spacing between each set of guide rails;

[0019] 3. In the utility model, the guide rail base can be fine-tuned by adjusting the bolt group on the adjustment plate, and the inner guide rail base can be adaptively adjusted separately, so as to support each set of guide rails to be suitable for chips of different sizes and specifications, better adapt to chip production, and have high equipment reliability and stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The disclosure of the present invention will become easier to understand with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only used to illustrate the technical solution of the present invention and are not intended to limit the scope of protection of the present invention. In the drawings:

[0021] Figure 1 This is a three-dimensional top view structural schematic diagram of a guide rail mechanism that can adapt to different wafer size specifications of the utility model;

[0022] Figure 2 This is a three-dimensional bottom-up structural schematic diagram of a guide rail mechanism that can adapt to different wafer size specifications of the utility model;

[0023] Figure 3 This is a three-dimensional structural diagram of a left-type transmission plate of a guide rail mechanism that can adapt to different wafer size specifications of the utility model;

[0024] Figure 4 The utility model is a schematic diagram of a top view of a guide rail mechanism that can adapt to different wafer size specifications.

[0025] In the figure: 1. left guide rail in the first row; 101. guide rail base; 102. adjustment plate; 103. limit plate; 104. adjustment bolt group; 105. anti-wear strip; 2. right guide rail in the first row; 3. left guide rail in the second row; 4. right guide rail in the second row; 5. left transmission plate; 501. rack; 502. fixing bolt; 503. inner slide block; 504. outer slide rail; 6. right transmission plate; 7. transmission gear; 8. transmission shaft. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] See also Figure 1-3The utility model provides a technical solution: a guide rail mechanism that can adapt to different wafer size specifications, including a first row of left guide rails 1, a left transmission plate 5 and a transmission gear 7, a first row of right guide rails 2 are arranged on one side of the outside of the first row of left guide rails 1, and a second row of left guide rails 3 are arranged on the other side of the first row of right guide rails 2, and a second row of right guide rails 4 are arranged on the other side of the second row of left guide rails 3, the first row of left guide rails 1, the first row of right guide rails 2, the second row of left guide rails 3 and the second row of right guide rails 4 are arranged in parallel, the first row of left guide rails 1 and the second row of left guide rails 3 are fixedly connected with a left transmission plate 5 at the bottom, the first row of right guide rails 2 and the second row of right guide rails 4 are fixedly connected with a right transmission plate 6 at the bottom, and the left transmission plate 5 and the right transmission plate 6 are meshed and connected with a transmission gear 7 on the inner side;

[0028] A rack 501 is provided on the inner side of the left transmission plate 5, and a fixing bolt 502 is installed inside the left transmission plate 5, and the other end of the fixing bolt 502 is fixed inside the first column of left guide rails 1 and the second column of left guide rails 3;

[0029] The first row of left-type guide rails 1 includes a guide rail base 101, an adjustment plate 102 and an adjustment bolt group 104. The adjustment plate 102 is installed on one side of the upper part of the guide rail base 101, and the adjustment bolt group 104 is provided at the adjacent connection between the guide rail base 101 and the adjustment plate 102; a limit plate 103 is provided at the top protruding end of the guide rail base 101, and an anti-wear strip 105 is provided on the inner side of the limit plate 103; a transmission shaft 8 is installed in the middle of the transmission gear 7; the transmission gear 7 is connected to the left-type transmission plate 5 through a rack 501 to form a gear The gear rack meshing transmission structure; the guide rail base 101 forms a detachable structure with the adjustment bolt group 104 and the adjustment plate 102, and the sizes of the guide rail base 101 and the adjustment plate 102 match each other; the left-type transmission plate 5 forms a detachable structure with the first column of left-type guide rails 1 and the second column of left-type guide rails 3 through multiple groups of fixing bolts 502; the left-type transmission plate 5 also includes an inner slider 503 and an outer slide rail 504, and the inner slider 503 is installed on one side of the bottom of the left-type transmission plate 5, and the outer slide rail 504 is embedded in the outer wall of the inner slider 503;

[0030] Each group of wafers is matched with two groups of guide rails, so that the wafers are placed inside the two groups of guide rails for embedding and sliding, and the limiters on both sides of the guide rails are used to ensure the stability of the wafers during the sliding process, and the bottom contact surface is provided with anti-wear strips 105 to reduce the contact friction with the wafers and reduce the loss of the wafer contact surface;

[0031] The entire guide rail mechanism supports the simultaneous installation of multiple sets of guide rails, which is convenient for adjusting different numbers of guide rail channels according to needs, facilitating the simultaneous transmission of different numbers of wafers in coordination with different wafer production processes, and better meeting the wafer production and manufacturing needs;

[0032] Through the coordination of gears and racks, the single-side guide rail in each set of guide rails can be driven to move synchronously, and the middle-end gear structure can be coordinated to drive the racks on both sides to move synchronously to both sides, thereby realizing the synchronous adjustment of the spacing between each set of guide rails;

[0033] The adjusting plate 102 can fine-tune the guide rail base 101 through the adjusting bolt group 104, and the inner guide rail base 101 can be individually adaptively adjusted, so that each group of guide rails can be suitable for wafers of different sizes and specifications, and better adapt to wafer production;

[0034] Among the first row of left-type guide rails 1, the first row of right-type guide rails 2, the second row of left-type guide rails 3 and the second row of right-type guide rails 4, the first row of left-type guide rails 1 and the second row of left-type guide rails 3 are arranged in the same group and can move driven by the bottom rack. Similarly, the first row of right-type guide rails 2 and the second row of right-type guide rails 4 can also move driven by the rack at the other end.

[0035] In addition, an inner slide block 503 and an outer slide rail 504 are provided at the bottom of each set of guide rails. The sliding adjustment between the inner slide block 503 and the outer slide rail 504 is utilized to ensure the stability of the entire guide rail structure during horizontal sliding.

[0036] Working principle: For this type of guide rail mechanism that can adapt to different wafer sizes, first install a transmission device, such as a drive motor, through the transmission shaft 8 at the bottom of the transmission gear 7 to provide a rotational driving force for the transmission gear 7. When the wafer is transmitted, the wafer needs to be placed on the anti-wear strip 105 of the guide rail base 101 to limit the wafer by the limiting plates 103 on both sides to control the horizontal position of the wafer. When the corresponding wafer sizes are different, by controlling the rotation of the transmission gear 7, when the transmission gear 7 is driven to rotate outward, the left transmission plate 5 and the right transmission plate 5 that are meshed on the outside will be engaged. The movable plate 6 moves outward synchronously, thereby pulling the guide rails on the top thereof to move outward respectively, so that the first column left guide rail 1 and the second column left guide rail 3 move to the left, and the first column right guide rail 2 and the second column right guide rail 4 move to the right, to synchronously expand the inner gap. When the wafer sizes are slightly different and a single guide rail needs to be moved, the horizontal position of the guide rail base 101 on the adjustment plate 102 can be adjusted by adjusting the bolt group 104. The horizontal position of the guide rail base 101 can be fine-tuned to meet the transmission of wafers of different specifications and adapt to the wafer production needs.

[0037] The above description is only a specific implementation method of the utility model, but the protection scope of the utility model is not limited to this. Any changes or substitutions that can be thought of by any technician familiar with the field within the technical scope disclosed by the utility model without creative work should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope defined in the claims.

Claims

1. A guide rail mechanism that can adapt to different wafer size specifications, comprising a first row of left-type guide rails (1), a left-type transmission plate (5) and a transmission gear (7), wherein a first row of right-type guide rails (2) are arranged on one side of the outside of the first row of left-type guide rails (1), and a second row of left-type guide rails (3) are arranged on the other side of the first row of right-type guide rails (2), and a second row of right-type guide rails (4) are arranged on the other side of the second row of left-type guide rails (3), characterized in that: The first row of left-type guide rails (1), the first row of right-type guide rails (2), the second row of left-type guide rails (3) and the second row of right-type guide rails (4) are arranged in parallel; the bottoms of the first row of left-type guide rails (1) and the second row of left-type guide rails (3) are fixedly connected with a left-type transmission plate (5); the bottoms of the first row of right-type guide rails (2) and the second row of right-type guide rails (4) are fixedly connected with a right-type transmission plate (6); the inner sides of the left-type transmission plate (5) and the right-type transmission plate (6) are meshedly connected with a transmission gear (7); A rack (501) is provided on the inner side of the left transmission plate (5), and a fixing bolt (502) is installed inside the left transmission plate (5), and the other end of the fixing bolt (502) is fixed inside the first column of left guide rails (1) and the second column of left guide rails (3); The first row of left-type guide rails (1) comprises a guide rail base (101), an adjustment plate (102) and an adjustment bolt group (104); the adjustment plate (102) is installed on one side of the upper part of the guide rail base (101), and the adjustment bolt group (104) is arranged at the adjacent connection between the guide rail base (101) and the adjustment plate (102).

2. The guide rail mechanism that can adapt to different wafer sizes according to claim 1 is characterized in that: A limit plate (103) is provided at the top raised end of the guide rail base (101), and an anti-wear strip (105) is provided on the inner side of the limit plate (103).

3. The guide rail mechanism that can adapt to different wafer sizes according to claim 1 is characterized in that: A transmission shaft (8) is sleeved and installed in the middle of the transmission gear (7).

4. The guide rail mechanism that can adapt to different wafer sizes according to claim 1 is characterized in that: The transmission gear (7) forms a gear-rack meshing transmission structure through the rack (501) and the left transmission plate (5).

5. The guide rail mechanism that can adapt to different wafer sizes according to claim 1 is characterized in that: The guide rail base (101) forms a detachable structure through the adjustment bolt group (104) and the adjustment plate (102), and the sizes of the guide rail base (101) and the adjustment plate (102) match each other.

6. The guide rail mechanism that can adapt to different wafer sizes according to claim 1 is characterized in that: The left-type transmission plate (5) forms a detachable structure with the first column of left-type guide rails (1) and the second column of left-type guide rails (3) respectively through a plurality of sets of fixing bolts (502).

7. The guide rail mechanism that can adapt to different wafer sizes according to claim 1 is characterized in that: The left-type transmission plate (5) further comprises an inner slide block (503) and an outer slide rail (504); the inner slide block (503) is installed on one side of the bottom of the left-type transmission plate (5), and the outer slide rail (504) is embedded in the outer wall of the inner slide block (503).

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