Semiconductor processing equipment

Abstract

The utility model discloses semiconductor processing equipment, which relates to the field of semiconductors and comprises a processing table and a frame, a driving assembly is arranged at the bottom of the processing table, the output end of the driving assembly is connected with a sliding rod, the other end of the sliding rod penetrates to the top of the processing table and is connected with a turntable, and a plurality of groups of processing cylinders are uniformly arranged on the turntable. And a machining mechanism is correspondingly arranged in the frame, a sliding sleeve is arranged on the outer wall of a sliding rod, a supporting plate is arranged in the machining cylinder, and a protruding part is arranged at the top of the driving assembly. The top of the stepping motor is provided with the protruding part, so that the sliding sleeve can be located at the lowest end during processing, the semiconductor can be conveniently limited and processed by the processing cylinder, meanwhile, the stepping motor rotates reversely after processing is completed, the sliding sleeve can be jacked to the topmost end, and the processed semiconductor can be jacked out of the processing cylinder in cooperation with the supporting plate. And a worker can conveniently take out the device.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to semiconductor processing equipment. Background Art

[0002] Semiconductor refers to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. Whether from the perspective of science and technology or economic development, the importance of semiconductors is enormous. The core units of most electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors.

[0003] Most of the existing semiconductor processing equipment is manually operated by workers. The workers place the semiconductor to be processed in a processing cylinder, which is then processed by a processing mechanism and taken out after the processing is completed. However, the inner diameter of the processing cylinder is small, which makes it inconvenient for the workers to take it out, thereby increasing the workload of the workers and reducing the overall processing efficiency.

[0004] In summary, after the processing of the above structure is completed, it is inconvenient for the staff to take it out due to the small inner diameter of the processing cylinder, which will increase the workload of the staff and reduce the overall processing efficiency. Utility Model Content

[0005] Based on this, the purpose of the utility model is to provide a semiconductor processing equipment to solve the technical problem that after the processing of the above structure is completed, the inner diameter of the processing cylinder is small, which makes it inconvenient for the staff to take it out, thereby increasing the workload of the staff and reducing the overall processing efficiency.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a semiconductor processing equipment, including a processing table and a frame, a driving assembly is arranged at the bottom of the processing table, the output end of the driving assembly is connected to a slide bar, the other end of the slide bar passes through the top of the processing table and is connected to a turntable, an array of processing cylinders are evenly arranged on the turntable, and one end of the processing cylinder is located at the bottom of the processing table, a processing mechanism is correspondingly arranged inside the frame, a sliding sleeve is arranged on the outer wall of the sliding rod for sliding up and down, and a support plate cooperating with the sliding sleeve is arranged inside the processing cylinder, a protrusion is arranged on the top of the driving assembly, and a vertical rod cooperating with the protrusion is arranged at the bottom of the sliding sleeve.

[0007] By adopting the above technical solution, the sliding sleeve will rotate with the sliding rod during the rotation process. Since a protrusion is provided on the top of the stepper motor, the sliding sleeve will be driven to slide up and down through the cooperation of the roller and the vertical rod, thereby achieving that the sliding sleeve will be at the lowest end during processing, which is convenient for the processing cylinder to limit the semiconductor. At the same time, after the processing is completed, the stepper motor will reverse and push the sliding sleeve to the top, and cooperate with the support plate to push the processed semiconductor out of the processing cylinder, which is convenient for the staff to take it out. In this process, the workload of the staff is reduced and the overall processing efficiency is improved.

[0008] The utility model is further configured that the driving component is a stepping motor, and the stepping motor is used to drive the sliding rod at the output end to rotate.

[0009] By adopting the above technical solution, the sliding rod can be driven to rotate forward and reversely under the action of the stepping motor, so that the staff can adjust the position of the processing cylinder conveniently.

[0010] The utility model is further configured that an array of support rods is correspondingly arranged on the outer wall of the sliding sleeve, and the other end of the support rod is connected to the support plate.

[0011] By adopting the above technical solution, when the sleeve slides up and down under the action of the bottom vertical rod, it will drive the support rod of the outer wall to move, so that the support plate in the processing cylinder drives the semiconductor to slide up and down.

[0012] The utility model is further configured that a roller is rotatably arranged at the bottom of the vertical rod, and the outer wall of the roller is arranged in a smooth shape.

[0013] By adopting the above technical solution, under the action of the roller, the sliding friction between the vertical rod and the protrusion is changed into rolling friction, which further reduces the friction between the two, thereby facilitating the sliding sleeve to slide up and down on the outer wall of the sliding rod.

[0014] The utility model is further configured that the processing table is provided with a slot for the processing cylinder to rotate.

[0015] By adopting the above technical solution, when the stepper motor rotates under the action of the slotting, the turntable can drive the processing cylinder to rotate on the processing table.

[0016] The utility model is further configured that the processing mechanism includes a cylinder, a processing motor and a processing head, the cylinder is arranged at the bottom of the frame, and the processing motor is connected to the output end of the cylinder, and one end of the processing motor is connected to the processing head.

[0017] By adopting the above technical solution, the processing motor is driven downward by the action of the cylinder, and the processing head is cooperated to realize the processing of the semiconductor. During this process, no manual operation is required, which improves the overall processing efficiency.

[0018] The utility model is further configured that the sliding sleeve and the sliding rod are provided with a limiting mechanism in the horizontal direction.

[0019] By adopting the above technical solution, it is further ensured that the sliding rod rotates during the rotation of the stepping motor, so that the sliding sleeve of the outer wall is also driven to rotate when the sliding rod rotates.

[0020] The utility model is further configured that the groove and the outer wall of the processing cylinder are configured in a rough shape.

[0021] By adopting the above technical solution, the rough setting further improves the friction between the two, ensuring that the co-processing cylinder will not shake during the processing, and further improving the stability of the overall processing.

[0022] In summary, the utility model mainly has the following beneficial effects:

[0023] The utility model provides a stepper motor at the bottom of the processing table, and the stepper motor drives the turntable on the top of the processing table to rotate. During the rotation, the sliding sleeve rotates along with the sliding rod. Since a protrusion is provided on the top of the stepper motor, the sliding sleeve is driven to slide up and down through the cooperation of the roller and the vertical rod, thereby achieving that the sliding sleeve is at the lowest end during processing, which is convenient for the processing cylinder to limit the semiconductor. At the same time, after the processing is completed, the stepper motor is reversed to push the sliding sleeve to the top, and cooperates with the support plate to push the processed semiconductor out of the processing cylinder, which is convenient for the staff to take it out. In this process, the workload of the staff is reduced and the overall processing efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a three-dimensional diagram of the utility model;

[0025] Figure 2 It is an internal view of the utility model;

[0026] Figure 3 It is a bottom view of the utility model;

[0027] Figure 4 For this utility model Figure 2 A is an enlarged view of the middle image.

[0028] In the figure: 1. processing table; 2. frame; 3. processing mechanism; 4. turntable; 5. slotting; 6. processing cylinder; 7. support rod; 8. sliding sleeve; 9. stepping motor; 10. sliding rod; 11. support plate; 12. vertical rod; 13. roller; 14. protrusion. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model.

[0030] The following describes an embodiment of the utility model based on its overall structure.

[0031] Embodiment 1

[0032] A semiconductor processing equipment, such as Figure 1-Figure 4 As shown, it includes a processing table 1, a frame 2, a processing mechanism 3, a supporting mechanism and an adjusting mechanism. A stepper motor 9 is arranged at the bottom of the processing table 1. The output end of the stepper motor 9 is connected to a slide bar 10, and the other end of the slide bar 10 passes through the top of the processing table 1 and is connected to a turntable 4, wherein four groups of processing cylinders 6 are evenly arranged on the turntable 4, thereby realizing that the device can process four groups of semiconductors at the same time when working, and four groups are arranged on the top of the processing table 1 on the frame 2, and one by one corresponds to the processing cylinder 6. The staff places the semiconductor to be processed in the processing cylinder 6, and processes it through the processing mechanism 3 corresponding to the top. After the processing is completed, the turntable 4 is driven to rotate a certain angle under the action of the stepper motor 9. Since a slot 5 for the processing cylinder 6 to rotate is provided on the processing table 1, when the stepper motor 9 rotates under the action of the slot 5, the turntable 4 can drive the processing cylinder 6 to rotate on the processing table 1, thereby realizing that the processing cylinder 6 is rotated to the side of the frame 2, and at this time, the shielding of the processed semiconductor by the processing mechanism 3 is released;

[0033] The slide 8 is provided with a sliding sleeve 8 which slides up and down on the outer wall of the slide rod 10, and a support plate 11 which cooperates with the sliding sleeve 8 is provided in the processing cylinder 6. A protrusion 14 is provided on the top of the stepping motor 9, and a vertical rod 12 which cooperates with the protrusion 14 is provided at the bottom of the sliding sleeve 8. In the subsequent rotation process, the vertical rod 12 will be pushed up by the action of the protrusion 14, so that the sliding sleeve 8 can slide upward on the outer wall of the sliding rod 10. Since an array of support rods 7 are correspondingly provided on the outer wall of the sliding sleeve 8, and the other end of the support rod 7 is connected to the support plate 11, when the sliding sleeve 8 slides up and down under the action of the bottom vertical rod 12, the support rod 7 of the outer wall will be driven to move, so that the support plate 11 in the processing cylinder 6 drives the semiconductor to slide up and down, and realizes that the semiconductor after processing is ejected out of the processing cylinder 6, which is convenient for the staff to take it out. In this process, the workload of the staff is reduced and the overall processing efficiency is improved.

[0034] See also Figure 2 The processing mechanism 3 includes a cylinder, a processing motor and a processing head. A cylinder is arranged at the bottom of the frame 2, and a processing motor is connected to the output end of the cylinder, and one end of the processing motor is connected to the processing head. The processing motor is driven downward by the cylinder, and the processing head is cooperated with to process the semiconductor. No manual operation is required in this process, thereby improving the overall processing efficiency.

[0035] See also Figure 2 A limit mechanism is provided in the horizontal direction between the sliding sleeve 8 and the sliding rod 10, which further ensures that the sliding rod 10 rotates when the stepping motor 9 rotates, so that the sliding sleeve 8 of the outer wall is also driven to rotate when the sliding rod 10 rotates.

[0036] Embodiment 2

[0037] like Figure 4 A semiconductor processing equipment is shown, and its overall structure is similar to that of the first embodiment, wherein a roller 13 is rotatably arranged at the bottom of the vertical rod 12, and the outer wall of the roller 13 is arranged in a smooth shape. Under the action of the roller 13, the sliding friction between the vertical rod 12 and the raised portion 14 is changed into rolling friction, thereby further reducing the friction between the two, thereby facilitating the sliding sleeve 8 to slide up and down on the outer wall of the sliding rod 10, thereby improving the stability of the overall adjustment.

[0038] The working principle of the utility model is as follows: when in use, the staff places the semiconductor to be processed in the processing cylinder 6, and then processes the semiconductor through the processing mechanism 3. After the processing is completed, the stepper motor 9 will drive the turntable to rotate at a certain angle, so that the processing cylinder 6 deviates from the frame 2, which is convenient for subsequent staff to take it out, and during the rotation of the stepper motor 9, the slide bar 10 will be driven to rotate accordingly. During this process, the roller 13 will slide on the raised part 14 on the top of the stepper motor 9, thereby realizing that the vertical rod 12 lifts the sliding sleeve 8, so that the support plate 11 pushes out the semiconductor after processing in the processing cylinder 6, which is convenient for the staff to take it out. In this process, the workload of the staff is reduced and the overall processing efficiency is improved.

[0039] Although an embodiment of the utility model has been shown and described, this specific embodiment is only an explanation of the utility model and is not a limitation of the utility model. The specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions and variations to the embodiments without creative contribution as needed without departing from the principles and purpose of the utility model. However, as long as they are within the scope of the claims of the utility model, they are protected by patent law.

Claims

1. A semiconductor processing device, comprising a processing table (1) and a frame (2), characterized in that: A driving assembly is provided at the bottom of the processing table (1), and a sliding rod (10) is connected to the output end of the driving assembly. The other end of the sliding rod (10) passes through the top of the processing table (1) and is connected to a turntable (4). An array of processing cylinders (6) are evenly arranged on the turntable (4), and one end of the processing cylinder (6) is located at the bottom of the processing table (1). A processing mechanism (3) is correspondingly arranged inside the frame (2). A sliding sleeve (8) is provided on the outer wall of the sliding rod (10) so as to slide up and down, and a support plate (11) cooperating with the sliding sleeve (8) is provided inside the processing cylinder (6). A protrusion (14) is provided on the top of the driving assembly, and a vertical rod (12) cooperating with the protrusion (14) is provided at the bottom of the sliding sleeve (8).

2. A semiconductor processing equipment according to claim 1, characterized in that: The driving component is a stepping motor (9), and the stepping motor (9) is used to drive the sliding rod (10) at the output end to rotate.

3. A semiconductor processing equipment according to claim 1, characterized in that: An array of support rods (7) is correspondingly arranged on the outer wall of the sliding sleeve (8), and the other end of the support rod (7) is connected to the support plate (11).

4. A semiconductor processing equipment according to claim 1, characterized in that: A roller (13) is rotatably arranged at the bottom of the vertical rod (12), and the outer wall of the roller (13) is arranged in a smooth shape.

5. The semiconductor processing equipment according to claim 1, characterized in that: The processing table (1) is provided with a slot (5) for the processing cylinder (6) to rotate.

6. The semiconductor processing equipment according to claim 1, characterized in that: The processing mechanism (3) comprises a cylinder, a processing motor and a processing head. The bottom of the frame (2) is provided with a cylinder, and the output end of the cylinder is connected to the processing motor. One end of the processing motor is connected to the processing head.

7. The semiconductor processing equipment according to claim 1, characterized in that: The sliding sleeve (8) and the sliding rod (10) are provided with a limiting mechanism in the horizontal direction.

8. The semiconductor processing equipment according to claim 5, characterized in that: The groove (5) and the outer wall of the processing cylinder (6) are arranged in a rough shape.

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