Equipment for loading and unloading double chambers of coating equipment
By using magnet-type separable connection structures with magnetic connectors and electromagnet connectors in dual-chamber vacuum coating equipment, the problems of unstable loading and unloading and high failure rates are solved, and more efficient coating production is achieved.
Patent Information
- Application Number
- CN202421660190.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-15
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2034-07-15
AI Technical Summary
The existing dual-chamber vacuum coating equipment loading and unloading devices have insufficient magnetic transmission torque, magnetic arm shaking problems, and unstable rotating hook connections, resulting in unstable loading and unloading and high failure rates.
A magnet-type separable connection structure consisting of magnetic connectors and solenoid connectors is adopted, and combined with a vacuum cylinder and a plug-in valve driven by a servo motor, the stable movement and connection of the loading device between the dual chambers is achieved.
Improves the stability of loading and unloading, reduces the failure rate, and thus improves the coating production efficiency.
Smart Images
Figure CN222878054U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of vacuum coating, in particular to a device for loading and unloading double chambers of coating equipment. Background Art
[0002] The coating efficiency can be improved by setting up a dual chamber on the coating equipment. At present, the loading and unloading of the coated products between the chambers of the dual-chamber vacuum coating equipment adopts a loading and unloading device that combines a magnetic arm and a rotating hook. This loading and unloading device not only has insufficient magnetic transmission torque, but also the front end of the magnetic arm is prone to shaking after being extended, resulting in unstable loading and unloading, and is therefore prone to failure. In addition, a rotating hook is used to connect the magnetic arm to the substrate turntable trolley. This connection is a hard connection. If the rotating hook does not rotate into place, the loading and unloading of the entire substrate turntable trolley cannot be completed. This unstable structure increases the failure rate of the loading and unloading device. Summary of the Invention
[0003] The primary purpose of the present invention is to provide a device for loading and unloading a dual-chamber coating device, which can be used to solve the above-mentioned problems and improve the stability of loading and unloading.
[0004] The technical solutions adopted by the present utility model are specifically as follows.
[0005] A device for loading and unloading a dual-chamber coating device, characterized in that it includes a first chamber, a second chamber and a loading device for loading a workpiece to be coated, the loading device is movably installed between the first chamber and the second chamber, a connecting channel for the loading device to move is provided between the first chamber and the second chamber, a first adjusting device for adjusting the connectivity of the connecting channel is provided at the connecting channel, and a second adjusting device for adjusting the movement of the loading device between the first chamber and the second chamber is also provided, the loading device has a first connecting part, the second adjusting device has a second connecting part, one of the first connecting part and the second connecting part is composed of an electromagnet connecting part, and the other is composed of a magnetic connecting part, and a magnetic-type detachable connecting structure is formed between the magnetic connecting part and the electromagnet connecting part.
[0006] A further solution is that a first sensor and a second sensor for detecting the position of the loading device are respectively provided in the first chamber and the second chamber.
[0007] The second chamber is a coating chamber, and a third sensor for detecting the position of the first connecting portion is further provided in the first chamber.
[0008] The second adjusting device is provided with a fourth sensor for detecting the connection state between the first connecting part and the second connecting part.
[0009] The first connecting part is composed of an electromagnet connecting part, and the second connecting part is composed of a magnetic connecting part.
[0010] The magnetic connector is made of iron blocks.
[0011] The first connecting part is installed on the loading device in a floating manner along a first direction by a spring. The first direction is the distance direction between the first connecting part and the second connecting part. The spring drives the first connecting part to move toward a side close to the second connecting part.
[0012] The second adjusting device is composed of a vacuum electric cylinder, which is assembled on the first chamber. The first chamber is located between the second chamber and the vacuum electric cylinder. The piston rod of the vacuum electric cylinder is arranged along the first direction, and the second connecting part and the fourth sensor are installed at the pushing end of the piston rod.
[0013] The first regulating device is composed of a gate valve arranged on the connecting channel. The first chamber is a loading chamber for loading the workpiece to be coated onto the loading device. A servo motor is used on the vacuum cylinder to drive the loading device to move.
[0014] The above solution provided by the present invention adopts a magnet-type detachable connection structure formed between a magnetic connector and an electromagnet connector. This structure is more stable, reduces the failure rate of the loading and unloading device, and thus improves the coating production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a structural diagram of the present utility model.
[0016] Figure 2 It is a schematic diagram of the assembly of the second adjusting device and the loading device.
[0017] The correspondence between the figure numbers and components is: 11-first chamber, 12-second chamber, 13-first adjusting device, 14-second adjusting device, 15-servo motor, 21-first sensor, 22-second sensor, 23-third sensor, 24-fourth sensor, 30-loading device, 31-magnetic connector, 32-spring, 41-electromagnet connector. DETAILED DESCRIPTION
[0018] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is described in detail below with reference to the following embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention and does not strictly limit the scope of protection of the present invention.
[0019] like Figure 1 、 2As shown, a device for loading and unloading a dual-chamber coating device includes a first chamber 11, a second chamber 12, and a loading device 30 for loading a workpiece to be coated. The loading device 30 is movably installed between the first chamber 11 and the second chamber 12. A connecting channel for the loading device 30 to move is provided between the first chamber 11 and the second chamber 12. The connecting channel is provided with a first adjustment device 13 for adjusting the connectivity of the connecting channel. A second adjustment device 14 is also provided for adjusting the movement of the loading device 30 between the first chamber 11 and the second chamber 12. The loading device 30 has a first connecting portion, and the second adjustment device 14 has a second connecting portion. One of the first connecting portion and the second connecting portion is composed of an electromagnet connector 41, and the other is composed of a magnetic connector 31. The magnetic connector 31 and the electromagnet connector 41 form a magnetic detachable connection structure. The magnetic connector 31 refers to a part that can be attracted by an electromagnet.
[0020] The above solution provided by the present invention adopts a magnetic type detachable connection structure formed between the magnetic connector 31 and the electromagnet connector 41. This structure is more stable, reduces the failure rate of the loading and unloading device, and thus improves the coating production efficiency.
[0021] A further solution is as follows: a first sensor 21 and a second sensor 22 are respectively provided in the first chamber 11 and the second chamber 12 for detecting the position of the loading device 30. The second chamber 12 is a coating chamber, and a third sensor 23 is also provided in the first chamber 11 for detecting the position of the first connecting portion. A fourth sensor 24 is provided on the second adjustment device 14 for detecting the connection between the first and second connecting portions. The first connecting portion is formed by an electromagnet connector 41, and the second connecting portion is formed by a magnetic connector 31. The magnetic connector 31 is formed by an iron block. The first sensor 21, the second sensor 22, the third sensor 23, and the fourth sensor 24 are all contact sensors. The loading device 30 can specifically be a substrate turntable trolley, which can be mounted either slidably or rollably. For example, a slide rail or a travel track can be provided between the first chamber 11 and the second chamber 12, and a gap is provided on the slide rail or the travel track corresponding to the first adjustment device 13, thereby reliably and conveniently adjusting the sliding or travel of the loading device 30. The first chamber 11 and the second chamber 12 may be provided with a first locking assembly and a second locking assembly respectively to lock the loading device 30 after it is moved into position. Alternatively, a locking structure may be directly provided on the loading device 30 to lock the loading device 30 into position through the locking structure.
[0022] Furthermore, the first connecting portion is mounted on the loading device 30 in a floating manner along a first direction via a spring 32. The first direction is the spacing direction between the first connecting portion and the second connecting portion. The spring 32 drives the first connecting portion to move toward the side closer to the second connecting portion. The spacing direction between the first chamber 11 and the second chamber 12 is consistent with the first direction. The second adjustment device 14 is composed of a vacuum cylinder, which is assembled on the first chamber 11. The first chamber 11 is located between the second chamber 12 and the vacuum cylinder. The piston rod of the vacuum cylinder is arranged along the first direction, and the second connecting portion and the fourth sensor 24 are mounted on the pushing end of the piston rod. The first adjustment device 13 is composed of a gate valve installed on the connecting channel. The first chamber 11 is the loading chamber for loading the workpiece to be coated onto the loading device 30. A servo motor 15 is used on the vacuum cylinder to drive the loading device 30 to move. Driven by a servo motor 15, the loading device 30 precisely reciprocates between the first chamber 11 and the second chamber 12. An electromagnetic connector 41, specifically a high-strength electromagnet, is mounted at the front end of the vacuum cylinder's piston rod. When energized, this connector generates a magnetic force to attract an iron block on the loading device 30 (substrate turntable carriage). The iron block is attached to the loading device 30 via a spring 32, avoiding a rigid assembly connection. The elastic connection provides good deformation and shock resistance within a certain range. A fourth sensor 24 (a contact sensor) at the front end of the vacuum cylinder detects whether the electromagnetic connector 41 and the iron block are fully attracted. This arrangement of the vacuum cylinder, the electromagnetic connector 41, and multiple sensors enables loading and unloading of the substrate turntable carriage between the loading chamber and the coating chamber.
[0023] The above-mentioned method for loading and unloading the dual chambers of the coating equipment includes the following operations: first, assemble the workpiece to be coated on the loading device 30 located in the first chamber 11, adjust the first adjustment device 13 so that the connecting channel is in a connected state, energize the electromagnet connector 41 and assemble and connect it with the magnetic connector 31, and when it is detected that the assembly and connection of the electromagnet connector 41 and the magnetic connector 31 are completed, adjust the second adjustment device 14 to move the loading device 30 into the second chamber 12, and when it is detected that the loading device 30 has moved into place, de-energize the electromagnet connector 41 and separate it from the magnetic connector 31, adjust the electromagnet connector 41 to move it into the first chamber 11, and when it is detected that the electromagnet connector 41 has moved into place, adjust the first adjustment device 13 so that the connecting channel is in a closed state, and then coat the workpiece on the loading device 30 located in the second chamber 12. When the workpiece is finished coating, the first adjusting device 13 is adjusted so that the connecting channel is in a connected state, and the second adjusting device 14 is started so that the electromagnet connector 41 is moved into the second chamber 12. When it is detected that the electromagnet connector 41 has moved into place, the electromagnet connector 41 is energized and assembled and connected with the magnetic connector 31. When it is detected that the assembly connection of the electromagnet connector 41 and the magnetic connector 31 is completed, the second adjusting device 14 is started to move the loading device 30 into the first chamber 11. When it is detected that the loading device 30 has moved into place, the first adjusting device 13 is adjusted so that the connecting channel is in a closed state, and the workpiece after coating is unloaded.
[0024] In detail, when the workpiece (coated product) needs to be loaded for coating, the workpiece is first loaded onto the loading device 30 (substrate turntable trolley). At this time, the loading device 30 is in the loading chamber, and the first sensor 21 detects that the loading device 30 is in the preset position in the loading chamber, and the vacuum cylinder is in the initial position. When the product loading button is pressed, the gate valve between the loading chamber and the coating chamber opens, and the electromagnetic connector 41 at the front end of the vacuum cylinder is energized to attract the loading device 30. At the same time, the fourth sensor 24 at the front end of the vacuum cylinder detects that the electromagnetic connector 41 and the loading device 30 are completely attracted. Driven by the servo motor 15, the vacuum cylinder begins to push the loading device 30 forward and gradually leaves the loading chamber. When the loading device 30 moves into the coating chamber and the second sensor 22 in the coating chamber detects that the loading device 30 has moved into place, the vacuum cylinder stops. At this time, the electromagnetic connector 41 loses power and loses its magnetic force. The vacuum cylinder begins to adjust the loading device 30 to move backward and return to its initial position. After the third sensor 21 detects that the first connection part (electromagnet connector 41) has returned to its initial position, the vacuum cylinder stops, closes the gate valve, and the loading of the loading device 30 is completed. When the workpiece needs to be unloaded after coating, the product unloading button is pressed. The second sensor 22 detects that the loading device 30 is in the coating chamber, adjusts the gate valve to open, activates the vacuum cylinder, and adjusts the electromagnetic connector 41 to move toward the coating chamber. When the electromagnetic connector moves into position, the electromagnetic connector 41 is energized to attract the loading device 30. The fourth sensor 24 detects that the electromagnetic connector 41 is fully attracted to the iron block and activates the vacuum cylinder, which pulls the loading device 30 from the coating chamber back to the loading chamber. When the first sensor 21 detects that the loading device 30 has returned to its position and the third sensor 23 detects that the electromagnetic connector 41 has returned to its position, the vacuum cylinder stops, closes the gate valve, and the coated workpiece on the loading device 30 is unloaded. The servo motor 15 is part of the vacuum cylinder and serves as its power source, driving its movement. The servo motor 15 drives the rotation of a thread, which in turn moves the cylinder's piston rod. Linear motion is achieved through the rotation of the servo motor 15. The electromagnet connector 41 is attached to the front end of the cylinder's piston rod via a threaded mechanism and moves with it. The electromagnet connector 42 itself contains an electromagnetic coil, which is powered on and off by a programmable logic controller (PLC). When powered on, the coil generates magnetic force, and when powered off, the force disappears.
[0025] The above solution provided by the present invention adopts a magnetic type detachable connection structure formed between the magnetic connector 31 and the electromagnet connector 41. This structure is more stable, reduces the failure rate of the loading and unloading device, and thus improves the coating production efficiency.
[0026] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, mechanisms, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.
Claims
1. A device for loading and unloading double chambers of a coating device, characterized in that: The invention comprises a first chamber, a second chamber and a loading device for loading a workpiece to be coated, wherein the loading device is movably installed between the first chamber and the second chamber, a connecting passage for the loading device to move is arranged between the first chamber and the second chamber, a first adjusting device for adjusting the connectivity state of the connecting passage is arranged at the connecting passage, and a second adjusting device for adjusting the movement of the loading device between the first chamber and the second chamber is also arranged, the loading device has a first connecting part, the second adjusting device has a second connecting part, one of the first connecting part and the second connecting part is composed of an electromagnet connecting part, and the other is composed of a magnetic connecting part, and a magnet-type detachable connecting structure is formed between the magnetic connecting part and the electromagnet connecting part.
2. The equipment for loading and unloading double chambers of coating equipment according to claim 1, characterized in that: A first sensor and a second sensor for detecting the position of the loading device are respectively disposed in the first chamber and the second chamber.
3. The equipment for loading and unloading double chambers of coating equipment according to claim 1, characterized in that: The second chamber is a coating chamber, and a third sensor for detecting the position of the first connecting portion is also arranged in the first chamber.
4. The equipment for loading and unloading double chambers of coating equipment according to claim 1, characterized in that: The second adjusting device is provided with a fourth sensor for detecting the connection state between the first connecting part and the second connecting part.
5. The equipment for loading and unloading double chambers of coating equipment according to claim 1, 2, 3 or 4, characterized in that: The first connection part is composed of an electromagnet connection part, and the second connection part is composed of a magnetic connection part.
6. The equipment for loading and unloading double chambers of coating equipment according to claim 1, 2, 3 or 4, characterized in that: The magnetic connector is made of iron blocks.
7. The equipment for loading and unloading double chambers of coating equipment according to claim 6, characterized in that: The first connection part is installed on the loading device in a floating manner along a first direction by a spring. The first direction is the spacing direction between the first connection part and the second connection part. The spring drives the first connection part to move toward a side close to the second connection part.
8. The equipment for loading and unloading double chambers of coating equipment according to claim 3, characterized in that: The second adjusting device is composed of a vacuum electric cylinder, which is assembled on the first chamber. The first chamber is located between the second chamber and the vacuum electric cylinder. The piston rod of the vacuum electric cylinder is arranged along the first direction. The second connecting part and the fourth sensor are installed at the pushing end of the piston rod.
9. The equipment for loading and unloading double chambers of coating equipment according to claim 8, characterized in that: The first regulating device is composed of a gate valve arranged on the connecting channel.
10. The equipment for loading and unloading double chambers of coating equipment according to claim 8, characterized in that: The first chamber is a loading chamber for loading the workpiece to be coated onto the loading device, and a servo motor is used on the vacuum cylinder to drive the loading device to move.