Silver-based composite fiber high-energy physical sputter coating platform

Abstract

The utility model relates to a silver-based composite fiber high-energy physical sputter coating platform, which effectively solves the problem that the coating angle and the coating position of a target material cannot be adjusted because the target material is only fixed at a proper position in the conventional equipment for clamping and fixing the target material, so that the coating efficiency is high. Therefore, the problem that the coating position of the target material is inconvenient to adjust is solved. According to the silver-based composite fiber high-energy physical sputter coating platform, through matched arrangement of the driving disc and the tray, the driving disc can be driven to rotate under driving of the auxiliary motor, then a clamped and fixed target material is rotated, and therefore the coating uniformity is guaranteed; adjustment to different degrees can be carried out according to the size of a target material, through matched arrangement of a main motor, a driving block and a fixing frame, the target material can be rotated away from the coating position after regular coating, and multiple layers of silver-based fibers with uniform silver layers are formed on the surface of the target material in cooperation with rotation of a driving disc.

Description

Technical Field

[0001] The utility model belongs to the technical field of sputtering coating, and in particular relates to a silver-based composite fiber high-energy physical sputtering coating platform. Background Art

[0002] Silver-based composite fibers usually refer to fiber materials containing silver nanoparticles. This type of fiber material usually has antibacterial and antifungal functions and can be used in medical, outdoor sportswear, socks, bedding and other fields. Silver nanoparticles can release antibacterial ions, which have a killing effect on bacteria, fungi and other microorganisms, making the fiber have better antibacterial properties.

[0003] High-energy physical sputtering coating is a technology used for surface coating. By bombarding the target material with high-energy ions, the atoms or molecules on the surface of the target material are peeled off and deposited onto the surface of the substrate to form a thin film. The main advantage of this technology is that it can prepare high-quality, dense and uniform films. It is widely used in optical devices, semiconductor devices, coatings, lenses and other fields.

[0004] The process of high-energy physical sputtering coating includes placing the target material in a vacuum chamber and bombarding the target material surface with high-power ions or ion cannons, so that the atoms or molecules on the target material surface leave and deposit on the substrate surface to form the desired thin film. However, the current equipment for clamping and fixing the target material often only fixes the target material in a suitable position and cannot adjust the coating angle and position of the target material. Therefore, it is not convenient to adjust the coating position of the target material, and the overall practicality is not high. Utility Model Content

[0005] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a silver-based composite fiber high-energy physical sputtering coating platform. The silver-based composite fiber high-energy physical sputtering coating platform can clamp and fix the target material with the help of the driving disk and the tray through the coordinated arrangement of the auxiliary motor, the driving disk and the tray, and under the drive of the auxiliary motor, the target material to be coated can be rotated to change the coating position of the target material, thereby improving the practicability of the device. At the same time, the uniform rotation can also ensure the uniformity of the coating.

[0006] The silver-based composite fiber high-energy physical sputtering coating platform comprises a base, the top of the base is fixedly connected with a supporting column, the top of the supporting column is connected with a main adjusting rod through a rotating shaft, the end of the main adjusting rod is connected with a secondary adjusting rod through a rotating shaft, the end of the secondary adjusting rod is connected with an adjusting seat through a rotating shaft, a main motor is fixedly installed at the bottom of the adjusting seat, the output end of the main motor is connected with a driving block through a key, the outer surface of the driving block is detachably connected with a fixing frame, the outer wall of the fixing frame is fixedly connected with a sleeve, the inner wall of the sleeve is slidably connected with a guide rod, the end of the guide rod is fixedly connected with a limiting frame, the outer surface of the limiting frame is fixedly installed with a secondary motor, the output end of the secondary motor is connected with a transmission rod through a key, the outer surface of the transmission rod is connected with a driving disk through a key, and the end of the fixing frame is rotatably connected with a tray.

[0007] Preferably, the outer wall of the support column is connected to a main hydraulic rod via a rotating shaft, and the end of the main hydraulic rod is connected to one side of the outer surface of the main adjusting rod via the rotating shaft.

[0008] Preferably, the other side of the outer surface of the main adjusting rod is connected to a secondary hydraulic rod via a rotating shaft, and the end of the secondary hydraulic rod is connected to the outer wall of the secondary adjusting rod via the rotating shaft.

[0009] Preferably, outer surfaces of the main adjustment rod, the auxiliary adjustment rod and the adjustment seat are all fixedly connected with rubber pads for increasing friction.

[0010] Preferably, a slot is provided on the top of the fixing frame, and an inner side wall of the slot is engaged with an outer surface of the driving block.

[0011] Preferably, a guide hole is formed on the inner wall of the sleeve, and the inner wall of the sleeve is rotatably connected to a threaded rod via a bearing.

[0012] Preferably, the inner wall of the guide hole is slidably connected to the outer wall of the guide rod, and the inner wall of the guide rod is threadedly connected to the outer surface of the threaded rod.

[0013] Preferably, a pressure rod is threadedly penetrated through the top of the sleeve, and one end of the pressure rod penetrates into the sleeve and presses against the outer wall of the guide rod, so that the guide rod is firmly connected to the inner wall of the guide hole.

[0014] The above technical solution has the following beneficial effects:

[0015] The silver-based composite fiber high-energy physical sputtering coating platform, through the coordinated arrangement of the driving disk and the tray, can drive the driving disk to rotate under the drive of the auxiliary motor, and then rotate the clamped target material, so as to ensure the uniformity of the coating. Through the coordinated arrangement of the sleeve and the guide rod, it can be adjusted to different degrees according to the size of the target material to improve the applicability of the device; through the coordinated arrangement of the main motor, the driving block and the fixed frame, the target material can be turned away from the coating position after regular coating, and with the rotation of the driving disk, a multi-layer silver-based fiber with a uniform silver layer is formed on the surface of the target material, and the coordinated arrangement of the support column, the main adjustment rod and the auxiliary adjustment rod can adjust the height and position of the fixed frame, so as to further improve the applicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the installation structure of the fixing frame of the utility model;

[0018] Figure 3 This is a schematic diagram of the explosion structure of the main regulating rod of the utility model;

[0019] Figure 4 This is a schematic diagram of the explosion structure of the guide rod of the utility model;

[0020] Figure 5 This is a schematic diagram of the base installation structure of the utility model;

[0021] Figure 6 It is a schematic diagram of the overall installation structure of the utility model.

[0022] In the figure: 1. base; 2. support column; 3. main adjusting rod; 4. auxiliary adjusting rod; 5. main hydraulic rod; 6. auxiliary hydraulic rod; 7. adjustment seat; 8. main motor; 9. drive block; 10. fixing frame; 11. slot; 12. sleeve; 13. guide hole; 14. threaded rod; 15. guide rod; 16. pressure rod; 17. limit frame; 18. auxiliary motor; 19. transmission rod; 20. drive disk; 21. tray. DETAILED DESCRIPTION

[0023] The above and other technical contents, features and functions of the present invention are described in detail below with reference to the attached Figures 1 to 6 The embodiments are described in detail.

[0024] The present embodiment provides a silver-based composite fiber high-energy physical sputtering coating platform, as shown in the accompanying drawings, including a base 1, a support column 2 is fixedly connected to the top of the base 1, a main adjustment rod 3 is connected to the top of the support column 2 through a rotating shaft, and the end of the main adjustment rod 3 is connected to the auxiliary adjustment rod 4 through a rotating shaft. The outer wall of the support column 2 is connected to a main hydraulic rod 5 through a rotating shaft, and the end of the main hydraulic rod 5 is connected to one side of the outer surface of the main adjustment rod 3 through a rotating shaft, and the other side of the outer surface of the main adjustment rod 3 is connected to a secondary hydraulic rod 6 through a rotating shaft, and the end of the secondary hydraulic rod 6 is connected to the outer wall of the auxiliary adjustment rod 4 through a rotating shaft. Through the coordinated arrangement of the support column 2 and the base 1, it can be fixed to the inner bottom wall of the vacuum chamber to ensure the overall installation stability, and the coordinated arrangement of the main adjustment rod 3 and the auxiliary adjustment rod 4 can be adjusted at different angles according to different usage requirements, and under the cooperation of the main hydraulic rod 5 and the auxiliary hydraulic rod 6, the relative angles and positions between the support column 2, the main adjustment rod 3 and the auxiliary adjustment rod 4 can be adjusted according to different target materials to improve the applicability of the device, such as Figure 5 and Figure 6 As shown, the device is installed as a whole in a vacuum cover and fixed with multiple targets, thereby realizing high-energy physical sputtering coating;

[0025] The end of the auxiliary adjusting rod 4 is connected to the adjusting seat 7 through a rotating shaft. The outer surfaces of the main adjusting rod 3, the auxiliary adjusting rod 4 and the adjusting seat 7 are fixedly connected with rubber pads for increasing friction. The bottom of the adjusting seat 7 is fixedly installed with a main motor 8. The output end of the main motor 8 is connected with a driving block 9 through a key. The outer surface of the driving block 9 is detachably connected with a fixing frame 10. A card slot 11 is provided on the top of the fixing frame 10. The inner side wall of the card slot 11 is carded with the outer surface of the driving block 9. Through the setting of the adjusting seat 7, after the main adjusting rod 3 and the auxiliary adjusting rod 4 are adjusted, the adjusting seat 7 can be adjusted separately to ensure that the adjusting seat 7 is in a relatively horizontal position. Then, the setting of the main motor 8 can drive the driving block 9 to rotate, and then cooperate with the card slot 11 to drive the fixing frame 10 to rotate, so that the target material can be regularly taken away from the coating position;

[0026] The outer wall of the fixing frame 10 is fixedly connected with a sleeve 12, and a guide hole 13 is opened on the inner wall of the sleeve 12. The inner wall of the sleeve 12 is rotatably connected with a threaded rod 14 through a bearing. The inner wall of the sleeve 12 is slidably connected with a guide rod 15. The inner wall of the guide hole 13 is slidably connected to the outer wall of the guide rod 15, and the inner wall of the guide rod 15 is threadedly connected to the outer surface of the threaded rod 14. A pressure rod 16 is threadedly penetrated through the top of the sleeve 12. One end of the pressure rod 16 penetrates into the sleeve 12 and presses against the outer wall of the guide rod 15, so that the guide rod 15 is tightly connected to the inner wall of the guide hole 13. Through the setting of the sleeve 12, the sliding of the guide rod 15 can be assisted and guided by means of the guide hole 13, and the setting of the threaded rod 14 can drive the guide rod 15 to be pushed by its own rotation under the cooperation of the thread to change the position between the sleeve 12 and the guide rod 15. After tightening the pressure rod 16, the stability of the guide rod 15 can be guaranteed.

[0027] The end of the guide rod 15 is fixedly connected to the limit frame 17, and the outer surface of the limit frame 17 is fixedly installed with an auxiliary motor 18. The output end of the auxiliary motor 18 is connected to the transmission rod 19 through a key, and the outer surface of the transmission rod 19 is connected to the driving disk 20 through a key. The end of the fixed frame 10 is rotatably connected to the tray 21. Through the setting of the limit frame 17, the transmission rod 19 can be driven to rotate under the drive of the auxiliary motor 18, thereby driving the driving disk 20 to rotate, and then cooperating with the tray 21, the target material can be fully clamped and fixed to ensure the stability of the target material during coating, and under the drive of the auxiliary motor 18, the target material can be rotated, thereby forming a uniform coating on the surface of the target material, and the main motor 8 and the auxiliary motor 18 are electrically connected to the external control unit.

[0028] In summary, the silver-based composite fiber high-energy physical sputtering coating platform has the following steps:

[0029] 1. First, the threaded rod 14 can be rotated to adjust the position between the driving disk 20 and the tray 21, and the target material can be installed between the driving disk 20 and the tray 21. The threaded rod 14 can be tightened to clamp and fix the target material. After the fixation is completed, the pressure rod 16 can be tightened to ensure the stability of the guide rod 15;

[0030] 2. Start the main hydraulic rod 5 and the auxiliary hydraulic rod 6, adjust and fix the angles between the support column 2, the main adjustment rod 3 and the auxiliary adjustment rod 4, and then adjust the adjustment seat 7;

[0031] 3. When starting the coating, the auxiliary motor 18 can be started to drive the target to rotate at a uniform speed. During the rotation, the target can be evenly coated. At the same time, the start and stop of the main motor 8 can be coordinated to regularly turn the target away;

[0032] 4. After the coating is completed, the threaded rod 14 can be rotated in the opposite direction to adjust the distance between the limit frame 17 and the fixed frame 10, and the target material can be removed.

[0033] The above description is only for illustrating the present invention, and it should be understood that the present invention is not limited to the above embodiments, and various variations that conform to the concept of the present invention are within the protection scope of the present invention.

Claims

1. A silver-based composite fiber high-energy physical sputtering coating platform, comprising a base (1), characterized in that: The top of the base (1) is fixedly connected to a support column (2), the top of the support column (2) is connected to a main adjustment rod (3) via a rotating shaft, the end of the main adjustment rod (3) is connected to a secondary adjustment rod (4) via a rotating shaft, the end of the secondary adjustment rod (4) is connected to an adjustment seat (7) via a rotating shaft, a main motor (8) is fixedly installed at the bottom of the adjustment seat (7), the output end of the main motor (8) is connected to a driving block (9) via a key, the outer surface of the driving block (9) is detachably connected to a fixing frame (10), the The outer wall of the fixed frame (10) is fixedly connected to a sleeve (12), the inner wall of the sleeve (12) is slidably connected to a guide rod (15), the end of the guide rod (15) is fixedly connected to a limit frame (17), the outer surface of the limit frame (17) is fixedly mounted with an auxiliary motor (18), the output end of the auxiliary motor (18) is connected to a transmission rod (19) via a key, the outer surface of the transmission rod (19) is connected to a driving disk (20) via a key, and the end of the fixed frame (10) is rotatably connected to a tray (21).

2. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 1 is characterized in that: The outer wall of the support column (2) is connected to a main hydraulic rod (5) via a rotating shaft, and the end of the main hydraulic rod (5) is connected to one side of the outer surface of the main adjustment rod (3) via a rotating shaft.

3. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 2 is characterized in that: The other side of the outer surface of the main adjusting rod (3) is connected to a secondary hydraulic rod (6) via a rotating shaft, and the end of the secondary hydraulic rod (6) is connected to the outer wall of the secondary adjusting rod (4) via a rotating shaft.

4. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 1 is characterized in that: The outer surfaces of the main adjustment rod (3), the auxiliary adjustment rod (4) and the adjustment seat (7) are all fixedly connected with rubber pads for increasing friction.

5. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 1 is characterized in that: A clamping slot (11) is provided on the top of the fixing frame (10), and the inner side wall of the clamping slot (11) is clamped with the outer surface of the driving block (9).

6. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 1 is characterized in that: The inner wall of the sleeve (12) is provided with a guide hole (13), and the inner wall of the sleeve (12) is rotatably connected to a threaded rod (14) via a bearing.

7. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 6 is characterized in that: The inner wall of the guide hole (13) is slidably connected to the outer wall of the guide rod (15), and the inner wall of the guide rod (15) is threadedly connected to the outer surface of the threaded rod (14).

8. The silver-based composite fiber high-energy physical sputtering coating platform according to claim 1 is characterized in that: A pressure rod (16) is threadedly inserted into the top of the sleeve (12), and one end of the pressure rod (16) penetrates into the sleeve (12) and presses against the outer wall of the guide rod (15), so that the guide rod (15) is firmly connected to the inner wall of the guide hole (13).

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