Horizontal conveying mechanism capable of axially displacing in vacuum chamber

Abstract

The utility model discloses a horizontal transmission mechanism capable of axially shifting in a vacuum chamber, which comprises the vacuum chamber, a transmission wheel, a magnetic fluid, a sliding plate, an air cylinder, a synchronous pulley, a synchronous belt, a double-groove synchronous pulley and a motor, the air cylinder drives the sliding plate to drive the magnetic fluid to axially move, and the transmission wheel and the magnetic fluid are connected through a ball spline and a coupler. The ball spline is sleeved with a rotating sleeve, a bearing is installed outside the rotating sleeve, a welded corrugated pipe is arranged on the periphery of the connection portion of the ball spline and the magnetic fluid between the vacuum cavity and the sliding plate for sealing, a synchronous belt wheel is installed at the outer end of the magnetic fluid and connected with a double-groove synchronous belt wheel through a synchronous belt, and a motor drives the double-groove synchronous belt wheel. The synchronous belt drives the magnetofluid and the rotating shaft of the ball spline to rotate to drive the transmission wheel to rotate. The ball spline, the magnetic fluid and the welded corrugated pipe are matched for application, the vacuum sealing structure is stable, the production cost is reduced, and the service life is longer.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating equipment, in particular to a horizontal transmission mechanism capable of axial displacement in a vacuum chamber. Background Art

[0002] Vacuum coating equipment often includes winding systems, cold roller systems, arc roller systems, etc., and most of the power devices of these systems need to be installed externally on the atmospheric side. On the one hand, it is easy to install and maintain, and on the other hand, it can improve the stability of the equipment and greatly reduce the cost of the equipment. The power device is on the atmospheric side and the transmission roller is on the vacuum side. There is a pressure difference between the two. A transmission device that strictly guarantees the rotary dynamic seal is required, and the structural requirements are high. In vacuum equipment, the transmission seal is mainly to prevent gas leakage from adjacent joint surfaces, thereby destroying the vacuum environment in the equipment and failing to reach the vacuum pressure value required by the process. Vacuum equipment widely uses magnetic fluid sealing transmission devices to ensure transmission sealing.

[0003] like Figure 1 As shown, the horizontal transmission mechanism in the existing vacuum chamber includes a vacuum chamber 101, a transmission wheel 102, a magnetic fluid 103, a sealing ring 104, an oil-free bushing 105, a cylinder 106, a slide plate 107, a synchronous pulley 108, a synchronous belt 109, a double-groove synchronous pulley 110, and a motor 111; the magnetic fluid 103 itself is a rotary seal of the transmission shaft, and the outer shell of the magnetic fluid 103 is used as a guide shaft, and is positioned and guided by a worry-free bushing 105 or a similar guide kit, and is guided by the sealing ring 10 4 is sealed to realize the pressure maintenance and leakage prevention of the vacuum chamber. The magnetic fluid 103 is installed on the slide plate 107 and driven by the cylinder 106 to drive the magnetic fluid 103 to move axially, gradually realizing the axial displacement of the transmission wheel 102; multiple sets of similar mechanisms can be installed and connected in series through the synchronous pulley 108, the double-groove synchronous pulley 110 and the synchronous belt 109. The motor 111 drives each synchronous pulley and the synchronous belt to rotate, and the torque is transmitted through the rotating shaft of the magnetic fluid 103 to realize the rotation of the transmission wheel 102. The sealing ring of this structural design is easily damaged by friction and has a short service life. The cost of the magnetic fluid will be relatively high, and the cavity processing accuracy requirements are high. Utility Model Content

[0004] In view of the above problems, the utility model provides a low-cost, long-life, horizontal transmission mechanism capable of axial displacement in a vacuum chamber.

[0005] In order to solve the above technical problems, the technical scheme adopted by the utility model is: a horizontal transmission mechanism capable of axial displacement in a vacuum chamber, comprising a vacuum chamber, a transmission wheel, a magnetic fluid, a slide plate, a cylinder, a synchronous pulley, a synchronous belt, a double-groove synchronous pulley, and a motor. The cylinder is fixedly mounted on the vacuum chamber, the cylinder head is fixedly connected to the slide plate, the magnetic fluid is mounted on the slide plate, the cylinder drives the slide plate to drive the magnetic fluid to move axially, the transmission wheel and the magnetic fluid are connected through a ball spline and a coupling, the ball spline is provided with a rotating sleeve on the outer sleeve, a bearing is installed on the outer sleeve, and the rotating sleeve is fixed to the vacuum chamber as a whole through a bearing end cover, the ball spline passes through the vacuum chamber, the ball spline and the magnetic fluid are connected between the vacuum chamber and the slide plate. The periphery is provided with a welded bellows for sealing, a synchronous pulley is installed on the outer end of the magnetic fluid, the synchronous pulley is connected to the double-groove synchronous pulley through a synchronous belt, the motor drives the double-groove synchronous pulley, and the rotating shaft of the magnetic fluid and the ball spline is driven to rotate through the synchronous belt, thereby driving the rotation of the transmission wheel.

[0006] Furthermore, the motor is fixedly mounted on the slide plate and moves synchronously with the slide plate.

[0007] Furthermore, the cylinder is replaced with a driving element with displacement monitoring to achieve axial multi-point displacement.

[0008] Furthermore, according to the length of the workpiece and the transmission requirements, multiple sets of horizontal transmission mechanisms are set up, and are connected in series through synchronous pulleys, double-groove synchronous pulleys and synchronous belts, and the motor drives each synchronous pulley and synchronous belt to rotate.

[0009] From the above description of the structure of the utility model, it can be seen that compared with the prior art, the utility model has the following advantages:

[0010] This practical bearing replaces the bushing, has low rotational friction and no wear problem. The coordinated application of ball splines, magnetic fluid and welded bellows makes vacuum chamber processing easier and reduces production costs. The vacuum sealing structure is stable and has a longer service life. The rotation and axial movement of the working unit in the vacuum chamber can be achieved and the structure is suitable for transmission and displacement of the drive wheel in the vacuum chamber. When this structure is installed in the vertical direction, it can be used to drive the rotating lifting mechanism of the turntable in the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0012] Figure 1 It is a schematic diagram of the structure of the horizontal transmission mechanism in the existing vacuum chamber.

[0013] Figure 2It is a structural schematic diagram of a horizontal transmission mechanism capable of axial displacement in a vacuum chamber of the utility model. DETAILED DESCRIPTION

[0014] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0015] Example

[0016] refer to Figure 2 A horizontal transmission mechanism capable of axial displacement in a vacuum chamber comprises a vacuum chamber 101, a transmission wheel 102, a magnetic fluid 109, a slide plate 110, a cylinder 111, a synchronous pulley 112, a synchronous belt 113, a double-groove synchronous pulley 114, and a motor 115. The cylinder 111 is fixedly mounted on the vacuum chamber 101, the cylinder head is fixedly connected to the slide plate, the magnetic fluid 109 is mounted on the slide plate 110, the cylinder 111 drives the slide plate 110 to drive the magnetic fluid 109 to move axially, the transmission wheel 102 and the magnetic fluid 109 are connected by a ball spline 103 and a coupling 108, and the ball spline 103 is provided with a rotating The sleeve 105 is provided with a bearing 106 on the outside of the rotating sleeve 105, and is fixed on the vacuum chamber 101 as a whole through a bearing end cover 104. The ball spline 103 passes through the vacuum chamber 101. The ball spline 103 and the magnetic fluid 109 between the vacuum chamber 101 and the slide plate 110 are connected and a welded bellows 107 is provided on the periphery for sealing. A synchronous pulley 112 is installed on the outer end of the magnetic fluid. The synchronous pulley 112 is connected to a double-groove synchronous pulley 114 through a synchronous belt. The motor 115 drives the double-groove synchronous pulley 114, and drives the magnetic fluid 109 and the rotating shaft of the ball spline 103 to rotate through the synchronous belt 113, thereby driving the rotation of the transmission wheel 102.

[0017] The motor 115 is fixedly mounted on the slide plate and moves synchronously with the slide plate 110 .

[0018] The cylinder 111 is replaced with a driving element with displacement monitoring to achieve axial multi-point displacement.

[0019] According to the length of the workpiece and the transmission requirements, multiple sets of horizontal transmission mechanisms are set up, and are connected in series through the synchronous pulley 112, the double-groove synchronous pulley 114 and the synchronous belt 113, and the motor 115 drives each synchronous pulley and synchronous belt to rotate.

[0020] This practical bearing replaces the bushing, has low rotational friction and no wear problem. The coordinated application of ball splines, magnetic fluid and welded bellows makes vacuum chamber processing easier and reduces production costs. The vacuum sealing structure is stable and has a longer service life. The rotation and axial movement of the working unit in the vacuum chamber can be achieved and the structure is suitable for transmission and displacement of the drive wheel in the vacuum chamber. When this structure is installed in the vertical direction, it can be used to drive the rotating lifting mechanism of the turntable in the chamber.

[0021] When the practical structure is installed in the vertical direction in conjunction with a servo motor or other drivers, torque monitoring, angle encoders and other components, it can be used to monitor the characteristics of workpieces inside a chamber, such as detecting the torque of a rotating component in the chamber.

[0022] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A horizontal transmission mechanism capable of axial displacement in a vacuum chamber, comprising a vacuum chamber (101), a transmission wheel (102), a magnetic fluid (109), a slide plate (110), a cylinder (111), a synchronous pulley (112), a synchronous belt (113), a double-groove synchronous pulley (114), and a motor (115), wherein the cylinder (111) is fixedly mounted on the vacuum chamber (101), the cylinder head is fixedly connected to the slide plate (110), the magnetic fluid (109) is mounted on the slide plate (110), the cylinder (111) drives the slide plate (110) to drive the magnetic fluid (109) to move axially, and the characteristics are as follows: The transmission wheel (102) and the magnetic fluid (109) are connected via a ball spline (103) and a coupling (108); a rotating sleeve (105) is mounted on the outer surface of the ball spline (103); a bearing (106) is mounted on the outer surface of the rotating sleeve (105) and the rotating sleeve (105) is integrally fixed to the vacuum chamber (101) via a bearing end cover (104); the ball spline (103) passes through the vacuum chamber (101); and the ball spline between the vacuum chamber (101) and the slide plate (110) is The outer periphery of the connection between the magnetic fluid (103) and the magnetic fluid (109) is provided with a welded bellows (107) for sealing; a synchronous pulley (112) is installed at the outer end of the magnetic fluid (109); the synchronous pulley (112) is connected to a double-groove synchronous pulley (114) through a synchronous belt (113); a motor (115) drives the double-groove synchronous pulley (114), and drives the magnetic fluid (109) and the rotating shaft of the ball spline (103) to rotate through the synchronous belt (113), thereby driving the rotation of the transmission wheel (102).

2. According to claim 1, a horizontal transmission mechanism capable of axial displacement in a vacuum chamber, characterized in that: The motor (115) is fixedly mounted on the slide plate (110) and moves synchronously with the slide plate (110).

3. The horizontal transmission mechanism capable of axial displacement in a vacuum chamber according to claim 1, characterized in that: The cylinder (111) is replaced by a drive element with displacement monitoring.

4. The horizontal transmission mechanism capable of axial displacement in a vacuum chamber according to claim 1, characterized in that: According to the length of the workpiece and the transmission requirements, multiple groups of horizontal transmission mechanisms are arranged, and are connected in series through a synchronous pulley (112), a double-groove synchronous pulley (114) and a synchronous belt (113), and a motor (115) drives each synchronous pulley (112) and synchronous belt (113) to rotate.

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