Air supply device for pneumatic valve of czochralski furnace

What is AI technical title?
AI technical title is built by Patsnap AI team. It summarizes the technical point description of the patent document.
By designing an air supply device for a straight-pull pneumatic valve, including a drying unit, a switch valve, a pressure sensor and a controller, the problem of air supply interruption of the pneumatic valve caused by a drying unit failure or power loss is solved, and the stable air supply of the pneumatic valve and product data are guaranteed.

CN222880891UActive Publication Date: 2025-05-16INNER MONGOLIA ZHONGHUAN ADVANCED SEMICON MATERIALS CO LTD +1

View PDF 0 Cites 0 Cited by

Patent Information

Application Number: CN202421713346.1
Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner
Filing Date: 2024-07-18
Publication Date: 2025-05-16
Estimated Expiration: 2034-07-18

AI Technical Summary

Technical Problem

In the direct-pull furnace pneumatic valve system, when the drying unit fails or loses power, the normal supply of compressed air cannot be guaranteed, resulting in the failure of the pneumatic valve and affecting product data.

Method used

An air supply device is designed, including a drying unit, a switching valve, a first pressure sensor and a controller. When the drying unit is working normally, the switch valve is closed; when the drying unit fails or loses power and the pressure sensor monitors the pressure drop, the controller controls the switch valve to open to realize direct air supply in the bypass pipeline.

Benefits of technology

The device can automatically switch the bypass pipeline gas supply when the drying unit fails or loses power, ensuring stable gas supply of the pneumatic valve of the direct-pull furnace and avoid affecting product data.

✦ Generated by Eureka AI based on patent content.

Smart Images

Figure CN222880891U_ABST

Patent Text Reader

Abstract

The utility model discloses an air supply device for a pneumatic valve of a czochralski furnace, which comprises a drying unit, a switch valve, a first pressure sensor and a controller, and compressed air is supplied to the pneumatic valve of the czochralski furnace after passing through the drying unit; the switch valve is connected in parallel with the drying unit through a bypass pipeline; the first pressure sensor is arranged at the downstream of the switch valve; the controller is in communication connection with the first pressure sensor and the switch valve. When the drying unit works normally, the switch valve is closed; when the drying unit breaks down or loses power, and the first pressure sensor monitors that the pressure value drops to be lower than the preset pressure value, the controller controls the switch valve to be opened. Compressed air can be supplied through the drying unit, moisture in the compressed air is prevented from entering the pneumatic valve of the czochralski furnace, the bypass pipeline can be automatically switched for direct air supply when the drying unit breaks down or is shut down due to power loss, the problem that air use of the pneumatic valve of the czochralski furnace is affected due to power loss or faults of the drying unit is solved, and stable air supply of the pneumatic valve of the czochralski furnace is achieved.

Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of pneumatic control of a vertical pulling furnace, in particular to an air supply device for a pneumatic valve of a vertical pulling furnace. Background Art

[0002] Compressed air is an important gas for controlling the pneumatic valve of the vertical pulling furnace. In order to improve the stable operation of the pneumatic valve during the crystal pulling process, ensure the product data of monocrystalline silicon and polycrystalline silicon, and meet customer needs, compressed air is an indispensable gas. At present, the compressed air generated by the air compressor is supplied to the pneumatic valve of the vertical pulling furnace through the gas storage tank and the dryer. When the external network is disconnected or the dryer fails, the dryer will shut down or fail to pass air, and it is impossible to ensure the normal supply of air to the pneumatic valve of the vertical pulling furnace. The pneumatic valve of the vertical pulling furnace fails, affecting the product data. Utility Model Content

[0003] The purpose of the utility model is to overcome the above-mentioned technical problems and provide an air supply device for the pneumatic valve of a vertical pulling furnace, which can avoid the impact of power failure or failure of the drying unit on the air use of the pneumatic valve of the vertical pulling furnace, ensure product quality, and meet gas demand.

[0004] To achieve the above objectives, this application provides the following technical solutions:

[0005] A gas supply device for a pneumatic valve of a vertical pulling furnace, comprising:

[0006] A drying unit, through which the compressed air is supplied to the pneumatic valve of the vertical pulling furnace;

[0007] A switch valve, wherein the switch valve is connected in parallel with the drying unit through a bypass pipeline;

[0008] A first pressure sensor, which is disposed downstream of the switch valve and is used to monitor the pressure of the air outlet of the drying unit;

[0009] A controller, the controller being communicatively connected with the first pressure sensor and the switch valve respectively;

[0010] When the drying unit operates normally, the switch valve is closed; when the drying unit fails or loses power, and the pressure value monitored by the first pressure sensor drops below a preset pressure value, the controller controls the switch valve to open.

[0011] Optionally, the drying unit is connected to the pneumatic unit and the pneumatic valve of the vertical pulling furnace through an air inlet pipe and an air outlet pipe respectively, and both ends of the bypass pipe are connected to the air inlet pipe and the air outlet pipe respectively.

[0012] Optionally, the drying unit comprises a refrigerated dryer and an adsorption dryer connected in series, an air inlet end of the refrigerated dryer is connected to the air inlet pipe, and an air outlet end of the adsorption dryer is connected to the air outlet pipe.

[0013] Optionally, a first main valve is provided on the air inlet pipeline upstream of the bypass pipeline, and a second main valve is provided on the air outlet pipeline downstream of the bypass pipeline.

[0014] Optionally, a second pressure sensor is provided on the air inlet pipeline downstream of the second main valve, and the second pressure sensor is used to monitor the compressed air pressure supplied to the pneumatic valve of the vertical pulling furnace.

[0015] Optionally, the first main valve and / or the second main valve is a manual valve.

[0016] Optionally, the first pressure sensor is arranged on the bypass pipe.

[0017] Optionally, the switch valve is an electromagnetic pneumatic valve.

[0018] Optionally, it also includes a power supply module, which uses a UPS uninterruptible power supply to supply power to the drying unit and the switch valve.

[0019] Optionally, the bypass pipe is made of stainless steel.

[0020] In summary, the utility model has at least the following technical effects and advantages:

[0021] The present application can not only realize the compressed air supply through the drying unit to prevent moisture in the compressed air from entering the pneumatic valve of the vertical pulling furnace, but also realize the automatic switching of the bypass pipeline to directly supply air when the drying unit fails or shuts down due to power failure, thereby improving the product data problems caused by power failure or failure of the drying unit affecting the air consumption of the pneumatic valve of the vertical pulling furnace, and realizing stable air supply to the pneumatic valve of the vertical pulling furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 This is a schematic diagram of an air supply device for a pneumatic valve of a vertical pulling furnace in one embodiment of the utility model;

[0024] Figure 2 This is a schematic diagram of UPS power supply in one embodiment of the utility model.

[0025] In the figure:

[0026] 1. First pressure sensor; 2. Vertical pulling furnace pneumatic valve; 3. Bypass pipe; 4. Air inlet pipe; 5. Air outlet pipe; 6. Refrigeration dryer; 7. Adsorption dryer; 8. First main valve; 9. Second main valve; 10. Second pressure sensor; 11. Solenoid pneumatic valve. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0031] This embodiment provides a gas supply device for a pneumatic valve of a vertical pulling furnace, such as Figure 1 and Figure 2As shown, it includes a drying unit, a switch valve, a first pressure sensor 1 and a controller. Compressed air is supplied to the pneumatic valve 2 of the vertical pulling furnace after passing through the drying unit; the drying unit is used to remove moisture from the compressed air. The switch valve is connected in parallel with the drying unit through a bypass pipe 3. The first pressure sensor 1 is arranged downstream of the switch valve, and the first pressure sensor 1 is used to monitor the pressure of the outlet gas of the drying unit. The controller is respectively connected to the first pressure sensor 1 and the switch valve for communication. When the drying unit works normally, the switch valve is closed, and the switch valve will not affect the air supply of the drying unit; when the drying unit fails or loses power, the pressure of the outlet gas of the drying unit will drop. When the pressure value monitored by the first pressure sensor 1 drops to a value lower than the preset pressure value in the controller, the controller controls the switch valve to open, and compressed air is supplied to the pneumatic valve 2 of the vertical pulling furnace through the bypass pipe 3. The pneumatic valve 2 of the vertical pulling furnace can be one or more.

[0032] The present embodiment can not only realize the compressed air supply through the drying unit to prevent moisture in the compressed air from entering the pneumatic valve 2 of the vertical pulling furnace, but also realize the automatic switching of the bypass pipe 3 to directly supply air when the drying unit fails or shuts down due to power failure, thereby improving the product data problem caused by the power failure or failure of the drying unit affecting the air consumption of the pneumatic valve 2 of the vertical pulling furnace, and realizing stable air supply to the pneumatic valve 2 of the vertical pulling furnace.

[0033] Optionally, the drying unit is connected to the pneumatic unit and the pneumatic valve 2 of the vertical pulling furnace through the air inlet pipe 4 and the air outlet pipe 5, respectively, and the two ends of the bypass pipe 3 are connected to the air inlet pipe 4 and the air outlet pipe 5, respectively. Optionally, the bypass pipe 3 is made of stainless steel, such as 304 stainless steel. In this embodiment, the pneumatic unit belongs to the prior art, including an air compressor and an air storage tank, which are used to provide compressed air to the air supply device.

[0034] Optionally, the drying unit includes a refrigerated dryer 6 and an adsorption dryer 7 connected in series, the air inlet end of the refrigerated dryer 6 is connected to the air inlet pipe 4, and the air outlet end of the adsorption dryer 7 is connected to the air outlet pipe 5. The refrigerated dryer 6 is used to freeze the water in the compressed air to below the dew point so that it is precipitated from the air; the adsorption dryer 7 is used to adsorb the water molecules in the compressed air into the molecular sieve particles, which can further dry the compressed air.

[0035] Optionally, a first main valve 8 is provided on the air inlet pipe 4 at the upstream of the bypass pipe 3, and a second main valve 9 is provided on the air outlet pipe 5 at the downstream of the bypass pipe 3. The first main valve 8 is used to control the entry of compressed air, and the second main valve 9 is used to control the supply of compressed air to the pneumatic valve 2 of the vertical pull furnace in the workshop. In this embodiment, the first main valve 8 and / or the second main valve 9 can be manual valves.

[0036] Optionally, a second pressure sensor 10 is provided on the air inlet pipe 4 downstream of the second main valve 9 , and the second pressure sensor 10 is used to monitor the compressed air pressure supplied to the pneumatic valve 2 of the vertical pulling furnace.

[0037] Optionally, the first pressure sensor 1 is disposed on the bypass pipe 3. The first pressure sensor 1 is closer to the air outlet of the drying unit than the second pressure sensor 10. The first pressure sensor 1 can detect the pressure drop in the pipe in time, and can provide feedback to the controller in time to open the switch valve. When the drying unit fails or loses power, the switch valve can open the air supply in time. In this embodiment, the bypass pipe 3 downstream of the switch valve is short, so the specific setting position of the first pressure sensor 1 in the bypass pipe 3 is not specifically limited, and the air outlet pressure of the drying unit can be monitored in time.

[0038] Optionally, the switch valve adopts an electromagnetic pneumatic valve 11 , and the controller adopts a PLC controller. The electromagnetic pneumatic valve 11 is controlled by PLC programming. When the refrigerated dryer 6 and the adsorption dryer 7 are working normally, the electromagnetic pneumatic valve 11 is in a closed state, the bypass pipe 3 is blocked, and the compressed air is supplied to the vertical pull furnace pneumatic valve 2 after passing through the drying unit; when the refrigerated dryer 6 or the adsorption dryer 7 fails or loses power, the drying unit cannot be ventilated, and the pressure of the outlet gas of the drying unit drops. When the pressure monitored by the first pressure sensor 1 is lower than the preset pressure value, the PLC controls the electromagnetic pneumatic valve 11 to open automatically, and the contactor controlling the electromagnetic pneumatic valve 11 will remain energized and attracted after receiving the command of the PLC, so that the electromagnetic pneumatic valve 11 is always in an open state, even if the pressure monitored by the first pressure sensor 1 is greater than or equal to the preset pressure value, the electromagnetic pneumatic valve 11 is still in an open state, so that the compressed air is supplied normally through the bypass pipe 3; when the refrigerated dryer 6 and the adsorption dryer 7 are ventilated normally, the electromagnetic pneumatic valve 11 needs to be manually closed; the simultaneous operation of the drying unit and the electromagnetic pneumatic valve 11 does not affect the pressure in the pipeline. The PLC controller controls the electromagnetic pneumatic valve 11 to open according to the pressure, which is a conventional technology in the field of automatic control and will not be described in detail here. In this embodiment, the preset pressure value in the controller is set according to the on-site pressure requirement, for example, in this embodiment, the preset pressure value is set to 0.68Mpa.

[0039] Alternatively, if Figure 2 As shown, this embodiment also includes a power module, and the power module uses a UPS uninterruptible power supply to supply power to the drying unit and the switch valve. The UPS uninterruptible power supply can avoid the shutdown of the drying unit caused by power failure.

[0040] In summary, the air supply device, bypass pipe and switch valve for the pneumatic valve of the vertical pulling furnace provided in this embodiment will not affect the air supply pressure when the drying unit is operating normally. When the drying unit fails or loses power, the first pressure sensor can monitor the pressure drop of the outlet air of the drying unit. When the pressure is lower than the preset pressure value, the controller controls the switch valve to open, and compressed air is supplied to the pneumatic valve of the vertical pulling furnace through the bypass pipe, so as to avoid the air consumption of the pneumatic valve of the vertical pulling furnace being affected by power failure or failure of the drying unit, thereby ensuring product quality and meeting gas demand.

[0041] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A gas supply device for a pneumatic valve of a vertical pulling furnace, characterized in that: include: A drying unit, through which the compressed air is supplied to the pneumatic valve of the vertical pulling furnace; A switch valve, wherein the switch valve is connected in parallel with the drying unit through a bypass pipeline; A first pressure sensor, which is disposed downstream of the switch valve and is used to monitor the pressure of the outlet gas of the drying unit; A controller, the controller being communicatively connected with the first pressure sensor and the switch valve respectively; When the drying unit operates normally, the switch valve is closed; when the drying unit fails or loses power, and the pressure value monitored by the first pressure sensor drops below a preset pressure value, the controller controls the switch valve to open.

2. The gas supply device for the pneumatic valve of the vertical pulling furnace according to claim 1, characterized in that: The drying unit is connected to the pneumatic unit and the pneumatic valve of the vertical pulling furnace through an air inlet pipe and an air outlet pipe respectively, and both ends of the bypass pipe are connected to the air inlet pipe and the air outlet pipe respectively.

3. The gas supply device for the pneumatic valve of the vertical pulling furnace according to claim 2, characterized in that: The drying unit comprises a refrigerated dryer and an adsorption dryer connected in series, the air inlet end of the refrigerated dryer is connected to the air inlet pipeline, and the air outlet end of the adsorption dryer is connected to the air outlet pipeline.

4. The gas supply device for the pneumatic valve of the vertical pulling furnace according to claim 2 or 3, characterized in that: A first main valve is provided on the air inlet pipeline and located upstream of the bypass pipeline, and a second main valve is provided on the air outlet pipeline and located downstream of the bypass pipeline.

5. The gas supply device for the pneumatic valve of the vertical pulling furnace according to claim 4, characterized in that: A second pressure sensor is provided on the air inlet pipeline downstream of the second main valve, and the second pressure sensor is used to monitor the compressed air pressure supplied to the pneumatic valve of the vertical pulling furnace.

6. The gas supply device for the pneumatic valve of the vertical pulling furnace according to claim 4, characterized in that: The first main valve and / or the second main valve are manual valves.

7. The gas supply device for a pneumatic valve of a vertical pulling furnace according to any one of claims 1-3, 5-6, characterized in that: The first pressure sensor is arranged on the bypass pipeline.

8. The gas supply device for a pneumatic valve of a vertical pulling furnace according to any one of claims 1-3, 5-6, characterized in that: The switch valve adopts an electromagnetic pneumatic valve.

9. The gas supply device for a pneumatic valve of a vertical pulling furnace according to any one of claims 1-3, 5-6, characterized in that: It also includes a power supply module, which uses a UPS uninterruptible power supply to supply power to the drying unit and the switch valve.

10. The gas supply device for a pneumatic valve of a vertical pulling furnace according to any one of claims 1-3, 5-6, characterized in that: The bypass pipeline is made of stainless steel.