Chemical cleaning cabinet

Abstract

The utility model provides a chemical cleaning cabinet which comprises a cabinet body, an operation space arranged in the cabinet body, a fan filter unit arranged in the cabinet body and located above the operation space, a liquid containing groove arranged below the operation space and communicated with the operation space, and an exhaust channel arranged on the rear side of the cabinet body and communicated with the liquid containing groove. The fan filter unit is arranged in the cabinet body, the window is arranged on the front side of the cabinet body and can move up and down and hover, the fan filter unit is fixed to the cabinet body through a fastener, it is ensured that air inlet airflow entering from a fan opening can completely enter an operation space after being filtered through a high-efficiency filter, and the filtering efficiency of the chemical cleaning cabinet is improved; stable clean air is provided for an operation space; the window moves upwards and hovers to form an air supplementing opening communicated with the operation space and the liquid containing groove, so that generation of an airflow dead zone or formation of turbulent flow in the operation space is avoided, and the window which is convenient to move up and down and hovers provides relatively convenient operability and relatively high safety for an operator to carry out experiment operation.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a chemical clean cabinet. Background Art

[0002] A chemical clean cabinet is a key tool in the semiconductor and electronics industries. It can create a controlled environment to protect chips from contaminants, chemicals, static electricity, and environmental fluctuations.

[0003] A fan filter unit is an important component of a chemical clean cabinet. It generates an incoming air flow through a centrifugal fan. The incoming air flow passes through a high-efficiency filter to continuously filter dust and particles in the air, providing highly clean air for the operating space. Among them, the high-efficiency filter can be a high-efficiency particulate air (HEPA) filter or an ultra-high-efficiency particulate air (ULPA) filter.

[0004] Currently, most fan filter units on the market are placed directly on the mounting plate above the clean cabinet in a placement form. Its fixing method is unstable. There is a relatively high air pressure below the fan filter unit, which easily causes a gap between the fan filter unit and the mounting plate, resulting in some of the filtered clean air leaking from the gap, affecting the air flow inside the clean cabinet, and thus reducing the filtration efficiency.

[0005] In view of this, it is necessary to improve the chemical clean cabinet in the prior art to solve the above problems. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a chemical clean cabinet to provide clean air with a stable high cleanliness level standard.

[0007] To achieve the above purpose, the utility model provides a chemical clean cabinet, including a cabinet body, an operating space arranged inside the cabinet body, a fan filter unit arranged inside the cabinet body and above the operating space, a liquid storage tank arranged below the operating space and communicated with the operating space, an exhaust passage arranged at the rear side of the cabinet body and communicated with the liquid storage tank, and a window arranged at the front side of the cabinet body and capable of moving up and down and hovering. Among them, the fan filter unit is fixed to the cabinet body through fasteners. When the window moves up and hovers, a supplementary air inlet communicated with the operating space and the liquid storage tank is formed.

[0008] As a further improvement of the utility model, a mounting plate is arranged above the operating space. An annular base is arranged on the mounting plate. The fan filter unit includes a hood-shaped housing and a fan and a high-efficiency filter arranged inside the housing. A fan port is arranged at the top of the housing. The bottom of the housing is attached to the upper surface of the base.

[0009] As a further improvement of the present utility model, a first connecting portion is provided on the oppositely arranged sides of the housing, a second connecting portion corresponding to the first connecting portion is provided on the side of the base, and the first connecting portion and the second connecting portion are fixedly connected by the fastener.

[0010] As a further improvement of the present utility model, a table board is provided at the bottom of the operation space, through holes are provided on the table board, and the through holes communicate the operation space with the liquid storage tank.

[0011] As a further improvement of the present utility model, an air inlet grille is provided on one side of the table board close to the viewing window, and the air inlet grille communicates the operation space with the liquid storage tank.

[0012] As a further improvement of the present utility model, counterweight structures are arranged on both sides of the viewing window. The counterweight structures include a synchronous belt and a counterweight block connected to one end of the synchronous belt far away from the viewing window, and the proximal end of the synchronous belt is connected to the viewing window.

[0013] As a further improvement of the present utility model, pulling blocks are arranged on both sides of the viewing window inward. The proximal end of the synchronous belt is connected to the pulling blocks, and at least two pulleys for transmission are arranged below the synchronous belt.

[0014] As a further improvement of the present utility model, a mounting plate is provided above the operation space, and the pulley is fixed on the mounting plate.

[0015] As a further improvement of the present utility model, a sensor is arranged on the side of the viewing window. When the height of the upward movement of the viewing window is greater than a preset height, the sensor emits a warning sound.

[0016] As a further improvement of the present utility model, the cabinet body, the exhaust air passage and the housing of the components placed in the cabinet body are all made of non-metallic materials, and a liquid leakage prevention tray is arranged at the bottom of the cabinet body.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0018] For the chemical clean cabinet provided by the present utility model, the fan filter unit therein is fixed to the cabinet body by fasteners, avoiding the problem of air flow loss caused by the unstable fixation of the fan filter unit, ensuring that the incoming air flow entering from the fan port can all enter the operation space after being filtered by the high-efficiency filter, improving the filtration efficiency of the chemical clean cabinet, and providing stable clean air with a high cleanliness level standard for the operation space.

[0019] The chemical clean cabinet provided by the present utility model is provided with a window that can move up and down and hover, forming an air supply opening that communicates with the operation space and the liquid storage tank, so as to avoid the generation of air dead zones or the formation of turbulent flows in the operation space. Moreover, the window that is convenient to move up and down and hover provides relatively convenient operability and high safety for the operator to conduct experiments. Brief Description of the Drawings

[0020] Figure 1 FIG. is a perspective view of a chemical clean cabinet provided by the present utility model;

[0021] Figure 2 is Figure 1 a perspective view of the chemical clean cabinet from another angle;

[0022] Figure 3 is Figure 1 a schematic diagram of the air flow direction in the chemical clean cabinet;

[0023] Figure 4 is Figure 1 a partial structural schematic diagram of the chemical clean cabinet;

[0024] Figure 5 is Figure 4 a partially enlarged schematic diagram of the fan filter unit and the counterweight structure in ; Detailed Embodiments

[0025] The present utility model will be described in detail below in conjunction with the various embodiments shown in the drawings. However, it should be noted that these embodiments are not limitations on the present utility model, and any equivalent transformation or substitution in terms of function, method, or structure made by those of ordinary skill in the art based on these embodiments shall fall within the protection scope of the present utility model.

[0026] Please refer to Figures 1 - 5As shown in the figure, an embodiment of the present utility model provides a chemical clean cabinet 100, which includes a cabinet body 10, an operation space 110 arranged inside the cabinet body 10, a fan filter unit 20 arranged inside the cabinet body 10 and above the operation space 110, a liquid storage tank 30 arranged below the operation space 110 and communicated with the operation space 110, an exhaust passage 40 arranged at the rear side of the cabinet body 10 and communicated with the liquid storage tank 30, and a window 11 arranged at the front side of the cabinet body 10 and capable of moving up and down and hovering. Among them, an air supply port 111 is arranged below the window 11 to avoid generating air dead zones or forming turbulent flows in the operation space 110. The clean air after being filtered by the fan filter unit 20 forms a uniformly distributed downward airflow and enters the operation space 110 in the form of vertical laminar flow. Due to the negative pressure, the air entering from the window 11 directly enters the operation space 110 and follows the downward airflow in the operation space 110 to flow to the exhaust passage 40 through the space constructed by the liquid storage tank 30, and is discharged by the exhaust passage 40. The chemical clean cabinet 100 provides a stable operation space 110 with a high clean grade standard for placing or conducting experiments or processing operations on semiconductor products (such as wafers or chips).

[0027] Combined Figures 2 to 4 As shown in the figure, in this embodiment, the fan filter unit 20 includes a hood-shaped housing 21, a fan 22 and a high-efficiency filter 23 arranged inside the housing 21, a dust-proof net (not shown) arranged above the fan 21, and a flow equalizing plate (not shown) arranged below the high-efficiency filter 23. A fan port 221 is arranged at the top of the housing 21, and the bottom of the housing 21 is annular. Alternatively, to enhance the filtering effect, a primary filter (not shown) is further arranged before the high-efficiency filter 23. The large-particle-size particulate matters in the airflow are removed by the primary filter to improve the filtering efficiency of the subsequent high-efficiency filter 23. Among them, the high-efficiency filter 23 can adopt a high-efficiency particulate air (HEPA) filter, and the filtering efficiency for particulate matters with a particle size greater than 0.3 μm is as high as 99.99%; or it can adopt an ultra-high-efficiency particulate air (ULPA) filter, and the filtering efficiency for dust particles such as particulate matters with a particle size greater than 0.1 μm, smoke, and microorganisms is as high as 99.99%.

[0028] An intake air flow is generated by the fan 22, and all of the intake air flow passes through the high-efficiency filter 23 for filtration. The intake air flow is filtered by the high-efficiency filter 23 into clean air meeting the high cleanliness level standard. For example, the intake air flow is filtered into clean air meeting the 100-class cleanliness level standard, that is, in a controlled environment of each cubic meter, the number of particles larger than 0.5 μm does not exceed 100; or, for filtration with a higher standard, the intake air flow is filtered into clean air meeting the 10-class cleanliness level standard, that is, in a controlled environment of each cubic meter, the number of particles larger than 0.5 μm does not exceed 10. In this way, clean air meeting the high cleanliness level standard is provided for the operation space 110 to prevent dust, dirt, and other particles from depositing on the wafer or chip and affecting the performance of the wafer or chip.

[0029] As Figure 4 shown Figure 5 in the figure, a mounting plate 12 is provided above the operation space 110 in the cabinet 10 for placing the fan filter unit 20. In order to stably fix the fan filter unit 20 in the cabinet 10, an annular base 13 is provided above the mounting plate 12. The shape of the base 13 is the same as the shape of the bottom of the housing 21, so that the bottom of the housing 21 is attached to the upper surface of the base 13 to enhance the connection sealing performance between the housing 21 and the base 13 and prevent the filtered air flow from leaking from the side of the fan filter unit 20. For example, if the bottom of the housing 21 of the fan filter unit 20 is a square or rectangular ring, the shape of the base 13 is also set as a square or rectangular ring, and the annular bottom of the housing 21 is completely attached to the annular upper surface of the base 13.

[0030] Furthermore, first connection parts 211 are provided on opposite sides of the housing 21, and second connection parts 131 corresponding to the first connection parts 211 are provided on the side of the base 13. The first connection parts 211 and the second connection parts 131 are fixedly connected by fasteners (not shown, such as bolts) to improve the assembly stability of the fan filter unit 20 in the cabinet 10. Ensure that the intake air flow entering from the fan outlet 221 all passes through the high-efficiency filter 23 and is evenly guided by the flow equalizing plate and then completely and evenly enters the operation space 110, so that the operation space 110 has continuous and stable clean air meeting the high cleanliness level standard. For example, in an embodiment, the first connection parts 211 are provided on the front and rear sides of the housing 21, and two symmetrical first connection parts 211 are provided on the same side, and the second connection parts 131 are provided corresponding to the first connection parts 211. Or, in order to further improve the connection firmness, the first connection parts 211 and the second connection parts 131 are provided on all four sides of the housing 21 and the base 13 for combined connection.

[0031] A tabletop 101 is provided at the bottom of the operation space 110. A plurality of through holes are provided on the tabletop 101, and the through holes communicate the operation space 110 and the liquid sump 30, so that gas (including the downward airflow and the airflow entering from the air supply opening 111) and liquid can flow from the operation space 110 to the liquid sump 30 below. Among them, the waste liquid received by the liquid sump 30 is discharged through the drain pipe 31. Various functional structures can be configured in the operation space 110. For example, a sink 101 is provided and embedded in the tabletop 101 for cleaning the placed objects; a storage rack 102 is configured on the side of the operation space 110 for placing the placed objects; an air gun (not shown) is configured on the side of the operation space 110 for dust removal of the placed objects.

[0032] On one side of the tabletop 101 close to the window 11, an air inlet grille (not shown) can be provided, and the air inlet grille communicates with both the operation space 110 and the liquid sump 30, so that the airflow entering from the air supply opening 111 can be better guided into the liquid sump 30.

[0033] Combined Figure 1 、 Figure 4 and Figure 5 As shown, in order to better isolate the operator from the operation space 110, the material of the window 11 needs to be selected as a better material and should have a certain thickness, which will result in a heavier weight of the window 11. If it is lifted manually, it will be more laborious, and during operation, the window 11 needs to stay at a preset height for a certain period of time. Therefore, in this embodiment, counterweight structures 14 are configured on both sides of the window 11, so that the window 11 can be set to be lifted and lowered easily and has a hovering function.

[0034] The counterweight structure 14 includes pull blocks (not shown) provided on the inner sides of the window 11, two groups of pulleys 141 provided on the mounting plate 12, and a synchronous belt 142 driven by the two groups of pulleys 141. The proximal end of the synchronous belt 142 is connected to the pull block, and the distal end of the synchronous belt 142 (i.e., the end far from the window 11) is connected to a counterweight block (not shown). Among them, each group of pulleys 141 is composed of at least one pulley 141 provided below the synchronous belt 142. The weight of the counterweight block is the same as the weight of the window 11. The hand applies force to push the window 11 to move up and down, and stepless speed change is achieved through the synchronous belt 142. Since the counterweight block and the window 11 can maintain relative balance at both ends of the synchronous belt 142, the window 11 can remain relatively stationary at any height. The two pull blocks and the counterweight block are symmetrically arranged along the central axis of the window 11 to ensure the stable center of gravity of the window 11 and prevent the window 11 from shifting and causing the window 11 to not open normally.

[0035] In order to further ensure the cleanliness of the air in the operation space 110 and the safety of the operation, the window 11 is only controlled to allow lifting to a certain height. Specifically, a sensor (not shown) is provided on the side of the window 11. When the lifting height of the window 11 is greater than the preset height, the sensor detects and generates a warning sound. For example, the preset height is set to 25 cm - 35 cm.

[0036] A storage space 50 is provided below the liquid storage tank 30 inside the cabinet body 10, and a cabinet door is provided corresponding to the front side of the storage space 50. A liquid leakage prevention tray 51 is provided at the bottom of the cabinet body 10, that is, the liquid leakage prevention tray 51 is located below the storage space 50. By providing the liquid leakage prevention tray 51, it is possible to prevent the liquid leakage inside the cabinet body 10 from leaking to the ground, causing pollution, or more dangerously, causing an explosion. A control system is provided below the window 11 on the front side of the cabinet body 10, including a variety of functional instruments and electrical structures. For example, a pressure gauge, a waste liquid alarm, a waterproof socket, and a display screen, etc.

[0037] The exhaust air channel 40 extends upward from the rear side of the liquid storage tank 30, and a regulating valve 41 is provided at the top of the exhaust air channel 40 to achieve the control of the air flow rate.

[0038] The chemical clean cabinet 100 provided in this embodiment has efficient and stable cleanliness performance. The cabinet body 10, the exhaust air channel 40, and all the casings of the components placed inside the cabinet body 10 are made of non-metallic materials (for example, non-metallic materials such as PP, PVC, and PVDF with chemical resistance and corrosion resistance) to avoid the corrosion of the cabinet body 10 and the gas channels.

[0039] The series of detailed descriptions listed above are only specific descriptions of the feasible implementation manners of the present invention, and they are not used to limit the protection scope of the present invention. Any equivalent implementation manners or changes made without departing from the technical spirit of the present invention should be included in the protection scope of the present invention.

[0040] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0041] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A chemical clean cabinet, characterized in that: It includes a cabinet, an operating space arranged in the cabinet, a fan filter unit arranged in the cabinet and located above the operating space, a liquid tank arranged below the operating space and connected with the operating space, an exhaust passage arranged on the rear side of the cabinet and connected with the liquid tank, and a window arranged on the front side of the cabinet and capable of moving up and down and hovering, wherein the fan filter unit is fixed to the cabinet by fasteners, and the window moves up and hovers to form an air supply port connected with the operating space and the liquid tank.

2. The chemical clean cabinet according to claim 1, characterized in that: A mounting plate is arranged above the operating space, an annular base is arranged on the mounting plate, the fan filter unit comprises a cover-shaped shell, and a fan and a high-efficiency filter arranged in the shell, a fan port is arranged on the top of the shell, and the bottom of the shell is arranged in contact with the upper surface of the base.

3. The chemical clean cabinet according to claim 2, characterized in that: A first connection part is arranged on the side surface of the shell that is arranged opposite to each other, and a second connection part corresponding to the first connection part is arranged on the side surface of the base, and the first connection part and the second connection part are fixedly connected by the fastener.

4. The chemical clean cabinet according to claim 1, characterized in that: A table panel is arranged at the bottom of the operation space, and a through hole is arranged on the table panel, and the through hole communicates the operation space with the liquid storage tank.

5. The chemical clean cabinet according to claim 4, characterized in that: An air inlet grille is arranged on one side of the table panel close to the window, and the air inlet grille is connected with the operating space and the liquid storage tank.

6. The chemical clean cabinet according to claim 1, characterized in that: A counterweight structure is arranged on both sides of the viewing window. The counterweight structure comprises a synchronous belt and a counterweight block connected to one end of the synchronous belt away from the viewing window. The proximal end of the synchronous belt is connected to the viewing window.

7. The chemical clean cabinet according to claim 6, characterized in that: Pull blocks are arranged on both sides of the window facing inwards, the proximal end of the synchronous belt is connected to the pull blocks, and at least two pulleys for transmission are arranged below the synchronous belt.

8. The chemical clean cabinet according to claim 7, characterized in that: A mounting plate is arranged above the operating space, and the pulley is fixed on the mounting plate.

9. The chemical clean cabinet according to claim 1, characterized in that: A sensor is arranged on the side of the window, and when the window moves upward to a height greater than a preset height, the sensor emits a warning sound.

10. The chemical clean cabinet according to claim 1, characterized in that: The cabinet, the exhaust passage and the shell in which the components are placed in the cabinet are all made of non-metallic materials, and a liquid leakage prevention tray is arranged at the bottom of the cabinet.

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