Graphite thermal field cleaning device

Abstract

The graphite thermal field cleaning device comprises a dust collection room, a mechanical arm, a rotary table, a positioning column and a graphite thermal field, the mechanical arm and the rotary table are arranged in the dust collection room, a laser cleaner is arranged on a driving arm of the mechanical arm, the rotary table is located on the side face of the mechanical arm and provided with a rotary disc, and the graphite thermal field is movably arranged on the top face of the rotary disc. The graphite thermal field is provided with installation feet, installation holes are formed in the installation feet, a positioning column used for positioning the graphite thermal field is fixedly arranged on the top face of the rotary disc, and a fastening assembly used for fastening the installation feet is further arranged on the top face of the rotary disc. The mechanical arm is adopted to drive the laser cleaner to shift, the inner side and the outer side of the thermal field are cleaned by changing the position of the laser cleaner, meanwhile, the dead angles of the thermal field can be cleaned by changing various angles, and the surface of the thermal field can be thoroughly cleaned.

Description

Technical Field

[0001] This application relates to the technical field of graphite thermal fields, and particularly to a graphite thermal field cleaning device. Background Art

[0002] The graphite thermal field is an important part inside the single crystal furnace, mainly used for temperature control during the melting of silicon materials and the growth of single crystals. Due to its good high-temperature resistance and thermal conductivity, traditional graphite thermal fields are widely used in various high-temperature processing technologies. During use, the graphite thermal field reacts with oxygen and oxidizes. The oxides contaminate the single crystal production. Therefore, the graphite thermal field needs to be cleaned regularly.

[0003] Existing thermal field cleaning devices can only clean the outer side of the thermal field, and there are no measures to change the angle of the cleaner, resulting in poor cleaning effects for dead corners. Summary of the Invention

[0004] The purpose of this application is to provide a graphite thermal field cleaning device to solve the above problems. By adopting the measure of driving the laser cleaner to change positions, the inner and outer sides and dead corners of the thermal field can be cleaned, and the surface of the thermal field can be thoroughly cleaned.

[0005] This application realizes the above purpose through the following technical solutions:

[0006] A graphite thermal field cleaning device includes a dust collection chamber, a robotic arm, a turntable, a positioning column, and a graphite thermal field. The robotic arm and the turntable are arranged inside the dust collection chamber. A laser cleaner is arranged on the driving arm of the robotic arm. The turntable is located on the side of the robotic arm. The turntable has a rotating disk. The graphite thermal field is movably arranged on the top surface of the rotating disk. The graphite thermal field has mounting feet, and mounting holes are opened on the mounting feet. A positioning column for positioning the graphite thermal field is fixedly arranged on the top surface of the rotating disk. A fastening component for fastening the mounting feet is also arranged on the top surface of the rotating disk.

[0007] Further, the fastening component includes a cover plate, a support, and a limiting plate. The first end of the cover plate is hinged to the support for pressing the mounting feet, and the support is fixedly connected to the top surface of the rotating disk. A through hole for the sliding column to pass through is arranged at the second end of the cover plate, and the sliding column is slidably matched with the cover plate. A handle is fixedly connected to the first end of the sliding column. A spring is sleeved outside the sliding column and is located between the handle and the cover plate. A locking block is fixedly connected to the second end of the sliding column. The limiting plate is fixedly connected to the top surface of the rotating disk, and the locking block has an opening through which the limiting plate can pass.

[0008] Further, the cover plate is L-shaped, and one of the bent arms is vertically upward so that the sliding column can be horizontally connected to the cover plate.

[0009] Further, the sliding column is a multi-sided column body.

[0010] Further, the limiting plate is L-shaped. The first arm of the limiting plate is fixedly connected to the turntable perpendicularly, and the second arm of the limiting plate faces away from the sliding column.

[0011] Further, there are two sets of fastening components.

[0012] Compared with the prior art, the present application uses a robotic arm to drive the laser cleaner to change its position, cleaning the inner and outer sides of the heat field by changing the position of the laser cleaner. At the same time, it can also change various angles to clean the dead corners of the heat field, and can thoroughly clean the surface of the heat field. Description of the Drawings

[0013] The drawings are used to provide a further understanding of the present application and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present application, but do not constitute a limitation to the present application. In the drawings:

[0014] Figure 1 is a schematic structural diagram of the present application;

[0015] Figure 2 is a schematic structural diagram of the robotic arm of the present application;

[0016] Figure 3 is a schematic structural diagram of the turntable of the present application;

[0017] Figure 4 is a schematic structural diagram of the fastening component of the present application.

[0018] The description of the reference numerals is as follows:

[0019] 1, dust collection chamber; 2, robotic arm; 3, turntable; 31, turntable; 4, positioning column; 5, cover plate; 6, support; 7, limiting plate; 8, sliding column; 9, lock block; 10, handle; 11, spring; 12, graphite heat field; 121, mounting foot; 122, mounting hole; 13, laser cleaner. Specific Embodiments

[0020] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.

[0021] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. are all based on the attached Figure 1 , and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present application.

[0022] Such asFigures 1-4 As shown in the figure, a graphite thermal field cleaning device includes a dust suction chamber 1, a robotic arm 2, a turntable 3, positioning columns 4, and a graphite thermal field 12. The robotic arm 2 and the turntable 3 are arranged inside the dust suction chamber 1. A laser cleaner 13 is provided on the driving arm of the robotic arm 2. The turntable 3 is located on the side of the robotic arm 2. The turntable 3 has a turntable 31. The graphite thermal field 12 is movably arranged on the top surface of the turntable 31. The graphite thermal field 12 has mounting feet 121, and mounting holes 122 are provided on the mounting feet 121. Positioning columns 4 for positioning the graphite thermal field 12 are fixedly arranged on the top surface of the turntable 31. A fastening assembly for fastening the mounting feet 121 is also arranged on the top surface of the turntable 31.

[0023] Specifically, the robotic arm 2 drives the laser cleaner 13 to change its position so that the laser cleaner 13 can clean different parts of the graphite thermal field 12. When dust and the like generated during cleaning are sucked and processed by the dust suction mechanism on the dust suction chamber 1. The graphite thermal field 12 is placed on the turntable 31, and at the same time, the positioning columns 4 on the turntable 31 are inserted into the mounting holes 122 on the mounting feet 121 to achieve positioning.

[0024] Furthermore, the fastening assembly includes a cover plate 5, a support 6, and a limit plate 7. The first end of the cover plate 5 is hinged to the support 6 for pressing the mounting feet 121, and the support 6 is fixedly connected to the top surface of the turntable 31. A through hole for a sliding column 8 to pass through is provided at the second end of the cover plate 5, and the sliding column 8 is slidably matched with the cover plate 5. A handle 10 is fixedly connected to the first end of the sliding column 8. A spring 11 is sleeved outside the sliding column 8 and is located between the handle 10 and the cover plate 5. A locking block 9 is fixedly connected to the second end of the sliding column 8. The limit plate 7 is fixedly connected to the top surface of the turntable 31, and the locking block 9 has an opening through which the limit plate 7 can pass.

[0025] Specifically, the cover plate 5 rotates on the support 6, and then presses or releases the mounting feet 121. When pressing the mounting feet 121, the handle 10 is used to push the sliding column 8 to deflect, thereby pushing the locking block 9, and at the same time squeezing the spring 11. After the cover plate 5 supports the locking block 9 and rotates close to the limit plate 7, the limit plate 7 can pass through the locking block 9. Then the handle 10 is released, and the spring 11 restores its elasticity to push the handle 10 to drive the sliding column 8 to deflect away from the locking block 9, thereby driving the locking block 9 to deflect. Then the locking block 9 is stuck on the limit plate 7 to limit the locking block 9, so that the cover plate 5 cannot rotate to press and fix the mounting feet 121.

[0026] Furthermore, the cover plate 5 is L-shaped, and one of the bent arms is perpendicular upward so that the sliding column 8 can be horizontally connected to the cover plate 5.

[0027] Furthermore, the sliding column 8 is a multi-sided prism to prevent the sliding column 8 from rotating during sliding.

[0028] Furthermore, the limit plate 7 is L-shaped. The first arm of the limit plate 7 is perpendicularly fixedly connected to the turntable 31, and the second arm of the limit plate 7 faces away from the sliding column 8.

[0029] Specifically, after the limit plate 7 passes through the opening in the lock block 9, the spring 11 pushes the lock block 9 to shift, enabling the lock block 9 to be stuck on the limit plate 7.

[0030] Furthermore, there are two sets of fastening components for fastening the two mounting feet 121.

[0031] In the above structure, the staff places the graphite thermal field 12 on the turntable 31. At the same time, the positioning posts 4 on the turntable 31 are inserted into the mounting holes 122 on the mounting feet 121 for positioning. When it is necessary to fasten the mounting feet 121, the cover plate 5 is rotated to cover the mounting feet 121. The handle 10 is used to push the sliding column 8 while squeezing the spring 11, thereby pushing the lock block 9, enabling the limit plate 7 to pass through the lock block 9. Then the handle 10 is released, and the spring 11 restores its elasticity to push the handle 10 to drive the sliding column 8 to shift away from the lock block 9, thereby driving the lock block 9 to shift. Then the limit plate 7 limits the lock block 9, thus fixing the mounting feet 121. When it is necessary to loosen the mounting feet 121, repeat the above steps to withdraw the limit plate 7 from the inside of the lock block 9. After the staff withdraws, the door of the dust collection chamber 1 closes, and the dust removal mechanism on the dust collection chamber 1 starts to operate. The robotic arm 2 starts to operate to drive the laser cleaner 13 to change its position to clean different parts of the graphite thermal field 12. For the positions that cannot be cleaned, the laser cleaner 13 drives the turntable 31 to rotate to adjust the graphite thermal field 12, facilitating the robotic arm 2 to drive the laser cleaner 13 to clean different parts of the graphite thermal field 12. After the cleaning is completed, the staff enters the dust collection chamber 1 to take away the graphite thermal field 12.

[0032] The above shows and describes the basic principles, main features, and advantages of the present application. Those skilled in the art should understand that the present application is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present application. Without departing from the spirit and scope of the present application, the present application will have various changes and improvements, and these changes and improvements all fall within the scope of the present application claimed. The scope of protection claimed by the present application is defined by the appended claims and their equivalents.

Claims

1. A graphite thermal field cleaning device, characterized in that: The invention comprises a dust collection room (1), a mechanical arm (2), a turntable (3), a positioning column (4), and a graphite thermal field (12). The mechanical arm (2) and the turntable (3) are arranged in the dust collection room (1). A laser cleaner (13) is arranged on the driving arm of the mechanical arm (2). The turntable (3) is located on the side of the mechanical arm (2). The turntable (3) has a turntable (31). The graphite thermal field (12) is movably arranged on the top surface of the turntable (31). The graphite thermal field (12) has a mounting foot (121). The mounting foot (121) is provided with a mounting hole (122). A positioning column (4) for positioning the graphite thermal field (12) is fixedly arranged on the top surface of the turntable (31). A fastening component for fastening the mounting foot (121) is also arranged on the top surface of the turntable (31).

2. A graphite thermal field cleaning device according to claim 1, characterized in that: The fastening assembly comprises a cover plate (5), a support (6), and a limit plate (7); a first end of the cover plate (5) is hingedly connected to the support (6) for pressing the mounting foot (121), and the support (6) is fixedly connected to the top surface of the turntable (31); a second end of the cover plate (5) is provided with a through hole for a slide column (8) to pass through, and the slide column (8) and the cover plate (5) are slidably matched; a first end of the slide column (8) is fixedly connected to a handle (10), an outer sleeve of the slide column (8) is provided with a spring (11) located between the handle (10) and the cover plate (5); a second end of the slide column (8) is fixedly connected to a locking block (9), the limit plate (7) is fixedly connected to the top surface of the turntable (31), and the locking block (9) has an opening through which the limit plate (7) can pass.

3. A graphite thermal field cleaning device according to claim 2, characterized in that: The cover plate (5) is L-shaped, and one of the bent arms is vertically upward so that the sliding column (8) can be horizontally connected to the cover plate (5).

4. A graphite thermal field cleaning device according to claim 2 or 3, characterized in that: The sliding column (8) is a polygonal column.

5. The graphite thermal field cleaning device according to claim 2, characterized in that: The limiting plate (7) is L-shaped, a first arm of the limiting plate (7) is vertically fixedly connected to the rotating disk (31), and a second arm of the limiting plate (7) faces away from the sliding column (8).

6. The graphite thermal field cleaning device according to claim 1, characterized in that: The fastening components are divided into two groups.

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