Clamp for wafer box and robot

Abstract

The utility model relates to the technical field of clamps, and discloses a clamp for a wafer cassette and a robot, the clamp comprises a mounting bracket, a driving assembly, a clamping jaw assembly and a transmission assembly, the mounting bracket comprises a first mounting plate arranged along the horizontal direction; the driving assembly is arranged in the mounting support and comprises a driving motor, a first driving block and a second driving block, and the first driving block and the second driving block are arranged on the side face of the driving motor in a sliding mode in the vertical direction; the clamping jaw assembly comprises a first clamping jaw and a second clamping jaw; the transmission assembly comprises a first transmission part and a second transmission part, the first transmission part and the second transmission part are both slidably connected with the first mounting plate, and the driving motor is used for driving the first driving block and the second driving block to move in the directions close to each other or away from each other, so that the first transmission part and the second transmission part slide along the first mounting plate. The utility model aims to solve the technical problem that a driving component of a clamp is easy to damage due to overlarge stress as a main stress component.

Description

Technical Field

[0001] The utility model relates to the technical field of fixtures, in particular to a fixture for a wafer cassette and a robot. Background Art

[0002] During the wafer processing, the wafer cassette, as a wafer carrier, can play a role in placing and transporting wafers. The inside of the wafer cassette is designed with symmetrical grooves of uniform size for supporting and fixing both sides of the wafer. Usually, a wafer cassette can hold many wafers.

[0003] In the related art, a robot is used to pick up or place the wafer cassette. During the clamping process of the wafer cassette, the driving component of the fixture, as the main force-bearing component, needs to bear a large external force, and is prone to damage due to excessive force, and will also cause damage to the wafer. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a fixture for a wafer cassette to solve the technical problem that the driving component of the fixture, as the main force-bearing component, is prone to damage due to excessive force.

[0005] To achieve the above purpose, the utility model provides a fixture for a wafer cassette, which comprises:

[0006] An installation bracket, including a first installation plate arranged in the horizontal direction;

[0007] A driving component, arranged inside the installation bracket, the driving component includes a driving motor, a first driving block and a second driving block, and the first driving block and the second driving block are slidably arranged on the side of the driving motor in the vertical direction;

[0008] A jaw component, including a first jaw and a second jaw;

[0009] A transmission component, including a first transmission member and a second transmission member, both the first transmission member and the second transmission member are slidably connected to the first installation plate, one end of the first transmission member close to the second transmission member is fixedly connected to the first driving block, one end of the first transmission member far from the second transmission member is connected to the first jaw, one end of the second transmission member close to the first transmission member is fixedly connected to the second driving block, and the other end of the second transmission member far from the first transmission member is connected to the second jaw;

[0010] Wherein, the driving motor is used to drive the first driving block and the second driving block to move in the direction of approaching or departing from each other, so that the first transmission member and the second transmission member slide along the first installation plate.

[0011] In the fixture of the present application, the transmission assembly includes two sliders. A slide rail is provided on the top surface of the first mounting plate, and the two sliders are slidably arranged on the slide rail. The first transmission member and the second transmission member are respectively fixedly connected to one of the sliders.

[0012] In the fixture of the present application, the first jaw and the second jaw have the same structure. The first jaw includes a first clamping rod and a second clamping rod. The first clamping rod extends in the vertical direction, and the second clamping rod extends in a direction away from the first mounting plate. The second clamping rod is connected to the first clamping rod to form an L-shaped structure.

[0013] In the fixture of the present application, pressure detection devices are provided on the opposite sides of the first jaw and the second jaw facing each other. The pressure detection devices are used to abut against the side wall of the wafer cassette.

[0014] In the fixture of the present application, plastic parts are provided on the opposite sides of the first jaw and the second jaw facing each other. Card slots are provided on the plastic parts, and the card slots are used to embed the side wall of the wafer cassette.

[0015] In the fixture of the present application, a material detection device is provided in the middle of the top surface of the first mounting plate. The material detection device is used to detect whether there is a wafer cassette in front of the first jaw and the second jaw.

[0016] In the fixture of the present application, a bellows cover is provided between the first transmission member and the second transmission member. One end of the bellows cover is connected to the first transmission member, and the other end of the bellows cover is connected to the second transmission member.

[0017] In the fixture of the present application, the fixture further includes a control component. The control component is arranged inside the mounting bracket, and the driving motor is electrically connected to the control component.

[0018] In the fixture of the present application, the mounting bracket includes a second mounting plate and a third mounting plate. The second mounting plate is spaced below the first mounting plate. The third mounting plate is respectively connected to the first mounting plate and the second mounting plate. The third mounting plate is provided with mounting holes for connecting to the manipulator of the robot.

[0019] In a second aspect, the present utility model provides a robot, which includes a manipulator and the fixture, and the fixture is connected to the manipulator.

[0020] The present utility model provides a fixture for a wafer cassette, and its beneficial effects are as follows:

[0021] In this utility model, the two ends of the first transmission member are respectively connected to the first driving block and the first jaw, and the two ends of the second transmission member are respectively connected to the second driving block and the second jaw. When the driving motor drives the first driving block and the second driving block to move in the direction of approaching or departing from each other, the first driving block drives the first transmission member to move synchronously, and the second driving block drives the second transmission member to move synchronously. The first transmission member and the second transmission member slide along the first mounting plate, so that the first transmission member drives the first jaw to move, and the second transmission member drives the second jaw to move. The first jaw and the second jaw approach or depart from each other, realizing the clamping or placing function of the fixture. Therefore, in this utility model, the driving block and the jaw are indirectly connected through the first transmission member and the second transmission member. When the first jaw and the second jaw approach each other, they will clamp the wafer cassette; when they depart from each other, they will release the wafer cassette. During the whole clamping and releasing process, the main force-bearing bodies are the first transmission member and the second transmission member, rather than directly acting on the driving block. The first driving block and the second driving block, as the power sources, are not affected, avoiding damage to the first driving block and the second driving block due to excessive force, thereby improving the service life of the driving assembly and the fixture. Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of the wafer cassette provided by the embodiment of this utility model;

[0023] Figure 2 It is a schematic structural diagram of the fixture provided by the embodiment of this utility model;

[0024] Figure 3 It is another schematic structural diagram of the fixture provided by the embodiment of this utility model;

[0025] Figure 4 It is a schematic internal structure diagram of the fixture provided by the embodiment of this utility model;

[0026] Figure 5 It is an exploded schematic diagram of the fixture provided by the embodiment of this utility model;

[0027] Figure 6 It is a schematic structural diagram of the first jaw provided by the embodiment of this utility model;

[0028] Figure 7 It is a bottom view of the fixture provided by the embodiment of this utility model;

[0029] Figure 8 is Figure 7 a partial enlarged schematic diagram at position A in

[0030] Figure 9 It is a schematic application scenario diagram of the fixture provided by the embodiment of this utility model;

[0031] Figure 10Another application scenario schematic diagram of the fixture provided by the embodiment of the present utility model.

[0032] The markings in the figure are as follows:

[0033] 10. Mounting bracket; 11. First mounting plate; 12. Second mounting plate; 13. Third mounting plate; 14. Mounting hole; 20. Driving assembly; 21. First driving block; 22. Second driving block; 23. Driving motor; 30. Jaw assembly; 31. First jaw; 32. Second jaw; 33. First clamping rod; 34. Second clamping rod; 35. Plastic part; 36. Card slot; 40. Transmission assembly; 41. First transmission part; 42. Second transmission part; 43. Slide block; 44. Slide rail; 45. Bellows cover; 50. Pressure detection device; 51. Pressure sensing block; 52. Stroke spring; 53. Macro sensor; 54. Guide pin; 55. Sensor mounting block; 60. Material detection device; 70. Control assembly; 100. Fixture; 200. Wafer cassette. Detailed implementation manners

[0034] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present utility model. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0035] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer", etc. in the present utility model is based on the positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the devices and elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0036] In the description of the present utility model, it should be understood that the terms "first", "second", etc. are used in the present utility model to describe various information, but these information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present utility model, the "first" information may also be referred to as the "second" information, and similarly, the "second" information may also be referred to as the "first" information.

[0037] Figure 1 As shown in the structure of the wafer cassette 200, such as Figures 2 to 10As shown in the figure, an embodiment of the present utility model provides a fixture 100 for a wafer cassette 200. The fixture 100 includes a mounting bracket 10, a driving assembly 20, a jaw assembly 30, and a transmission assembly 40. The mounting bracket 10 includes a first mounting plate 11 disposed in the horizontal direction. The driving assembly 20 is disposed inside the mounting bracket 10. The driving assembly 20 includes a driving motor 23, a first driving block 21, and a second driving block 22. The first driving block 21 and the second driving block 22 are slidably disposed on the side of the driving motor 23 in the vertical direction. The jaw assembly 30 includes a first jaw 31 and a second jaw 32. The transmission assembly 40 includes a first transmission member 41 and a second transmission member 42. Both the first transmission member 41 and the second transmission member 42 are slidably connected to the first mounting plate 11. One end of the first transmission member 41 close to the second transmission member 42 is fixedly connected to the first driving block 21. One end of the first transmission member 41 away from the second transmission member 42 is connected to the first jaw 31. One end of the second transmission member 42 close to the first transmission member 41 is fixedly connected to the second driving block 22. The other end of the second transmission member 42 away from the first transmission member 41 is connected to the second jaw 32. Wherein, the driving motor 23 is used to drive the first driving block 21 and the second driving block 22 to move in the direction of approaching or departing from each other, so that the first transmission member 41 and the second transmission member 42 slide along the first mounting plate 11.

[0038] In the related art, the driving assembly 20 directly connects the jaws through the driving blocks. When the jaws hold the wafer cassette, especially when holding a larger or heavier wafer cassette, the force borne by the jaws will be very large. If this force is directly transmitted to the driving motor 23 through the driving blocks, it will cause the driving blocks and the motor to bear excessive torque or pressure, resulting in damage to the driving blocks or the motor. Since the driving blocks and the motor often bear excessive forces, their service life will also be greatly shortened.

[0039] Based on the above technical solution, in this embodiment, the two ends of the first transmission member 41 are respectively connected to the first driving block 21 and the first jaw 31, and the two ends of the second transmission member 42 are respectively connected to the second driving block 22 and the second jaw 32. When the driving motor 23 drives the first driving block 21 and the second driving block 22 to move in the direction of approaching or departing from each other, the first driving block 21 drives the first transmission member 41 to move synchronously, and the second driving block 22 drives the second transmission member 42 to move synchronously. The first transmission member 41 and the second transmission member 42 slide along the first mounting plate 11, so that the first transmission member 41 drives the first jaw 31 to move, and the second transmission member 42 drives the second jaw 32 to move. The first jaw 31 and the second jaw 32 approach or depart from each other, realizing the clamping or placing function of the fixture 100. Therefore, in this embodiment, the first transmission member 41 and the second transmission member 42 are used to indirectly connect the driving block and the jaw. When the first jaw 31 and the second jaw 32 approach each other, they will clamp the wafer cassette 200; when they depart from each other, they will release the wafer cassette 200. During the entire clamping and releasing process, the main force-bearing bodies are the first transmission member 41 and the second transmission member 42, rather than directly acting on the driving block. The first driving block 21 and the second driving block 22, as the power sources, are not affected, avoiding damage to the first driving block 21 and the second driving block 22 due to excessive force, thereby improving the service life of the driving assembly 20 and the fixture 100.

[0040] In this embodiment, the shape and structure of the first jaw 31 and the second jaw 32 are not specifically limited. They can have the same structure or different structures. According to the specific shape, size and clamping requirements of the wafer cassette 200, the structure of the jaws can be flexibly selected or designed, so that the fixture 100 can be applied to more different specifications and types of wafer cassettes 200, increasing the versatility and application range of the fixture 100. When the shape or size of the wafer cassette 200 is relatively special, jaws with different shapes are required to ensure the stability and accuracy of clamping, ensuring that the fixture 100 can tightly and stably clamp various wafer cassettes 200, reducing the risk of shaking of the wafer cassette 200 during the clamping process.

[0041] As an implementation manner, as Figure 4 and Figure 5 shown, the transmission assembly 40 includes two sliders 43. A slide rail 44 is provided on the top surface of the first mounting plate 11. The two sliders 43 are slidably arranged on the slide rail 44. The first transmission member 41 and the second transmission member 42 are respectively fixedly connected to one of the sliders 43.

[0042] Specifically, a long slide rail 44 is provided on the top surface of the first mounting plate 11. Slidable sliders 43 are respectively provided on the left and right sides of the slide rail 44. The first transmission member 41 is fixedly connected to the left slider 43, and the second transmission member 42 is fixedly connected to the right slider 43. When the first driving block 21 drives the first transmission member 41 to move synchronously and the second driving block 22 drives the second transmission member 42 to move synchronously, the first transmission member 41 and the second transmission member 42 can slide on the first mounting plate 11. At this time, the first driving block 21 and the second driving block 22 serve as power sources, while the first transmission member 41, the second transmission member 42, the sliders 43 and the slide rail 44 are components that bear the external force of the gripper. In this way, the function of clamping and releasing the wafer cassette 200 can be realized, and at the same time, the first driving block 21 and the second driving block 22 can be prevented from being damaged due to excessive force.

[0043] As an implementation manner, as Figure 6 shown, the structures of the first gripper 31 and the second gripper 32 are the same. The first gripper 31 includes a first clamping rod 33 and a second clamping rod 34. The first clamping rod 33 extends in the vertical direction, and the second clamping rod 34 extends in a direction away from the first mounting plate 11. The second clamping rod 34 is connected to the first clamping rod 33 to form an L-shaped structure.

[0044] In this embodiment, the wafer cassette 200 is an open wafer cassette. As Figure 9 shown, sometimes the wafer cassette 200 is placed with its opening facing upward, or as Figure 10 shown, sometimes the wafer cassette 200 is placed with its opening facing forward. In order to be able to stably clamp the wafer cassette 200, in this embodiment, the first gripper 31 (or the second gripper 32) is designed into an L-shaped structure. By the first clamping rod 33 and the second clamping rod 34 that extend in different directions on the same plane, the contact area between the gripper and the wafer cassette 200 is increased, so that the gripper can more stably fix the wafer cassette when clamping the wafer cassette, especially when the wafer cassette is placed with its opening facing upward or forward. Through the multi-directional clamping force, the loosening and dropping of the wafer cassette during the clamping process are effectively prevented.

[0045] As an implementation manner, as Figure 2 、 Figure 3 and Figure 7 shown, pressure detection devices 50 are provided on the opposite sides of the first gripper 31 and the second gripper 32. The pressure detection devices 50 are used to abut against the side wall of the wafer cassette 200.

[0046] Specifically, in this embodiment, a pressure detection device 50 is provided such that when the first jaw 31 and the second jaw 32 grip the wafer cassette 200, the magnitude of the gripping force can be monitored in real time, which is crucial for ensuring the safety of the wafer cassette during the processes of gripping, transporting, and placing. If the gripping force is too large, the wafer cassette 200 or the wafers therein may be damaged, while if the gripping force is too small, the wafer cassette 200 may become loose during movement, which may also cause damage to the wafers. Therefore, through the feedback of the pressure detection device 50, the gripping force of the first jaw 31 and the second jaw 32 can be precisely adjusted to ensure that the wafer cassette 200 can be stably gripped.

[0047] In this embodiment, as Figure 8 shown, the pressure detection device 50 includes a pressure sensing block 51, a travel spring 52, a micro sensor 53, a guide pin 54, and a sensor mounting block 55. The sensor mounting block 55 fixes the micro sensor 53 to the outside of the first jaw 31. The guide pin 54 passes through the first jaw 31 and is sleeved with the pressure sensing block 51 on the inner side of the first jaw 31. The travel spring 52 is sleeved on the outer periphery of the guide pin 54. When the wafer cassette 200 is not being gripped, the pressure sensing block 51 slightly protrudes from the first jaw 31. When the jaws grip the wafer cassette 200, the pressure sensing block 51 is subjected to pressure, driving the guide pin 54 to move until the micro sensor 53 is triggered. The sensing travel of the micro sensor 53 is small and the triggering feedback is sensitive. When the jaws release the wafer cassette 200 due to misoperation, the pressure received by the micro sensor 53 becomes smaller, automatically stopping the action of the jaws to prevent the wafer cassette 200 from becoming loose during movement.

[0048] As an implementation manner, as Figure 6 shown, plastic parts 35 are provided on the opposing sides of the first jaw 31 and the second jaw 32. A card slot 36 is provided on the plastic part 35 for embedding the side wall of the wafer cassette 200.

[0049] Specifically, by embedding the side wall of the wafer cassette 200 into the card slot 36 provided on the plastic part 35, the connection between the jaws and the wafer cassette 200 is made more stable, thereby improving the gripping stability and ensuring that the wafer cassette 200 does not shake or fall off during the transfer process. Among them, the plastic part 35 has better wear resistance and shock absorption performance compared to the metal jaws. During the process of gripping and moving the wafer cassette 200, the plastic part 35 can reduce the friction and collision between the jaws and the wafer cassette 200, and the softness and elasticity of the plastic part 35 can protect the surface of the wafer cassette 200 from wear.

[0050] As an implementation manner, as Figure 2 and Figure 4 shown, a material detection device 60 is provided in the middle of the top surface of the first mounting plate 11. The material detection device 60 is used to detect whether there is a wafer cassette 200 in front of the first jaw 31 and the second jaw 32.

[0051] Specifically, before the first jaw 31 and the second jaw 32 perform the clamping operation, the material detection device 60 accurately determines whether there is a wafer cassette 200 in front, avoiding the empty clamping or incorrect clamping of the jaws caused by misjudgment. When there is no wafer cassette, the clamping action of the jaws is stopped, thus avoiding potential damage to surrounding equipment or personnel by the jaws and enhancing the safety of the operation process. If there is a wafer cassette 200 in front of the first jaw 31 and the second jaw 32, the material detection device 60 responds quickly, and the jaws will quickly perform the clamping operation after detecting the wafer cassette 200, thereby shortening the waiting and judgment time and improving the clamping efficiency.

[0052] As an implementation manner, as Figure 4 and Figure 5 shown, a bellows cover 45 is provided between the first transmission member 41 and the second transmission member 42. One end of the bellows cover 45 is connected to the first transmission member 41, and the other end of the bellows cover 45 is connected to the second transmission member 42.

[0053] Specifically, the bellows cover 45, also known as a telescopic cover, corrugated pipe cover or telescopic hose, is a telescopic tubular structure made of flexible materials such as rubber, plastic or metal bellows. Its shape is similar to the structure of an accordion and can expand or contract with the change of external pressure.

[0054] In this embodiment, during the opening and closing process of the first jaw 31 and the second jaw 32, a gap is generated between the first transmission member 41 and the second transmission member 42, and this gap easily causes dust to enter the mounting bracket 10, affecting the internal electrical system. Connecting the bellows cover 45 between the first transmission member 41 and the second transmission member 42 provides a protective barrier to make the fixture 100 more airtight and prevent the fixture 100 from being polluted, damaged or having potential safety hazards during operation by the external environment.

[0055] As an implementation manner, as Figure 4 and Figure 5 shown, the fixture 100 further includes a control component 70. The control component 70 is arranged inside the mounting bracket 10, and the driving motor 23 is electrically connected to the control component 70.

[0056] In the related art, the control component 70 is arranged on the robot body, and it is necessary to wind electrical wires outside the manipulator and route them to the fixture 100. Since the manipulator rotates continuously during clamping, it is easy to cause interference between the electrical wires and the manipulator, which may lead to damage, breakage or entanglement of the electrical wires, and further affect the normal operation of the fixture 100 or even the robot.

[0057] Based on this, in this embodiment, the control component 70 is integrated inside the mounting bracket 10 (i.e., inside the fixture 100), which simplifies the wiring process of the electrical wires, can better utilize the internal space of the fixture 100, and optimizes the overall spatial layout. This can not only reduce the occupation of the external space, but also improve the compactness and aesthetics of the fixture 100.

[0058] As an implementation manner, as Figure 3 and Figure 4 shown, the mounting bracket 10 includes a second mounting plate 12 and a third mounting plate 13. The second mounting plate 12 is spaced below the first mounting plate 11. The third mounting plate 13 is respectively connected to the first mounting plate 11 and the second mounting plate 12. The third mounting plate 13 is provided with a mounting hole 14 for connecting to the manipulator of the robot.

[0059] Specifically, the first mounting plate 11, the second mounting plate 12 and the third mounting plate 13 can form an accommodating space for installing and placing components such as the driving component 20 and the control component 70. The manipulator of the robot is connected to the mounting hole 14 of the third mounting plate 13, and the fixture 100 is controlled by the manipulator to realize its clamping function.

[0060] In a second aspect, an embodiment of the present invention provides a robot (not shown in the drawings), which includes a manipulator and a fixture 100, and the fixture 100 is connected to the manipulator.

[0061] Specifically, after the robot is equipped with a manipulator and a fixture 100, it can perform more diverse tasks. The fixture 100 can be designed with different shapes, sizes and functions according to needs to adapt to different working environments and materials. This design enables the robot to handle more types of materials, such as grasping, placing, rotating, fastening, etc., thus greatly improving the functionality and flexibility of the robot.

[0062] In this embodiment, the fixture 100 is specifically used for clamping the wafer cassette 200. Through the combination of the fixture 100 and the manipulator, the robot can automatically complete tasks such as clamping, transporting and placing the wafer cassette. The fixture 100 can tightly and stably clamp various wafer cassettes 200, reducing the risk of shaking of the wafer cassette 200 during the clamping process.

[0063] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A fixture for a wafer box, characterized in that: include: The mounting bracket comprises a first mounting plate arranged in a horizontal direction; A driving assembly is arranged inside the mounting bracket, the driving assembly comprises a driving motor, a first driving block and a second driving block, the first driving block and the second driving block are slidably arranged on the side of the driving motor along a vertical direction; A clamping jaw assembly, comprising a first clamping jaw and a second clamping jaw; A transmission assembly, comprising a first transmission member and a second transmission member, wherein the first transmission member and the second transmission member are both slidably connected to the first mounting plate, an end of the first transmission member close to the second transmission member is fixedly connected to the first driving block, an end of the first transmission member away from the second transmission member is connected to the first clamping claw, an end of the second transmission member close to the first transmission member is fixedly connected to the second driving block, and the other end of the second transmission member away from the first transmission member is connected to the second clamping claw; The driving motor is used to drive the first driving block and the second driving block to move in directions approaching or moving away from each other, so that the first transmission member and the second transmission member slide along the first mounting plate.

2. The fixture for a wafer box according to claim 1, characterized in that: The transmission assembly includes two sliders. The top surface of the first mounting plate is provided with a slide rail. The two sliders are slidably arranged on the slide rail. The first transmission member and the second transmission member are respectively fixedly connected to one of the sliders.

3. The fixture for a wafer box according to claim 1, characterized in that: The first clamping jaw has the same structure as the second clamping jaw. The first clamping jaw includes a first clamping rod and a second clamping rod. The first clamping rod extends in a vertical direction, and the second clamping rod extends in a direction away from the first mounting plate. The second clamping rod is connected to the first clamping rod to form an L-shaped structure.

4. The fixture for a wafer box according to claim 1, characterized in that: The sides of the first clamping jaw and the second clamping jaw facing each other are both provided with pressure detection devices, and the pressure detection devices are used to abut against the side walls of the wafer box.

5. The fixture for a wafer box according to claim 4, characterized in that: The sides of the first clamping jaw and the second clamping jaw facing each other are both provided with plastic parts, and the plastic parts are provided with a card slot, and the card slot is used to be embedded in the side wall of the wafer box.

6. The fixture for a wafer box according to claim 1, characterized in that: A material detection device is provided in the middle of the top surface of the first mounting plate, and the material detection device is used to detect whether there is a wafer box in front of the first clamping jaw and the second clamping jaw.

7. The fixture for a wafer box according to claim 1, characterized in that: An accordion cover is provided between the first transmission member and the second transmission member, one end of the accordion cover is connected to the first transmission member, and the other end of the accordion cover is connected to the second transmission member.

8. The fixture for a wafer box according to claim 1, characterized in that: The clamp further comprises a control component, wherein the control component is arranged inside the mounting bracket, and the driving motor is electrically connected to the control component.

9. The fixture for a wafer box according to claim 1, characterized in that: The mounting bracket includes a second mounting plate and a third mounting plate, the second mounting plate is spaced below the first mounting plate, the third mounting plate is respectively connected to the first mounting plate and the second mounting plate, and the third mounting plate is provided with a mounting hole connected to the manipulator of the robot.

10. A robot, characterized in that: The invention comprises a robot arm and a clamp for a wafer box according to any one of claims 1 to 9, wherein the clamp is connected to the robot arm.

Images