Vapor deposition crucible lining structure and vapor deposition device

Abstract

The utility model relates to the technical field of evaporation, and discloses an evaporation crucible lining structure and an evaporation device.The evaporation crucible lining structure comprises a lining, the lining is arranged on the periphery of a heating source of the evaporation device in a surrounding mode and provided with a top opening and a bottom opening, and the heating source is located at the bottom opening. And a gap is reserved between the side wall of the bottom opening and the peripheral side wall of the heating source. The top plate is arranged at the top opening and abuts against the top of the lining, evaporation holes are formed in the top plate and are opposite to the heating source, and the roughness of the position, close to the evaporation holes and opposite to the heating source, of the plate face, facing the heating source, of the top plate is lower than that of other positions of the top plate. According to the utility model, the problems that the coating efficiency and the coating quality are influenced due to the pollution of an evaporation material caused by the falling object attached to the lining falling into a heating source are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation, and in particular to an evaporation crucible lining structure and an evaporation device. Background Art

[0002] Evaporation is a process that uses heating and evaporation to vaporize the coating material and make the coating material fly to the substrate surface and condense into a film. The evaporation device generally includes an evaporation crucible, which is used to hold the coating material and provide a heat source for the coating material to vaporize the coating material.

[0003] In the related art, it is usually necessary to limit the diffusion range of the vapor of the coating material volatilized from the heating source. Therefore, an inner lining is usually provided just above the coating, which is arranged around the heating source and has an opening on the upper side facing the coated part, so as to reduce the diffusion of the coating material and adhere to other structures of the equipment, affecting the normal use of other structures, and concentrate the steam to the coated part, thereby improving the coating efficiency and reducing material waste.

[0004] However, during the use of the above-mentioned lining, the coating material will adhere around the opening on the top side of the lining. When the material adheres to a certain thickness, it may fall off and fall into the heating source, causing contamination of the evaporation material at the heating source, affecting the coating efficiency and quality. Utility Model Content

[0005] In view of this, the utility model provides an evaporation crucible lining structure and an evaporation device to solve the problem that the detached objects attached to the lining fall into the heating source and cause the evaporation material to be contaminated, thereby affecting the coating efficiency and coating quality.

[0006] In the first aspect, the utility model provides a liner structure for an evaporation crucible, comprising: a sleeve, which is arranged around the heating source of the evaporation device and has a top opening and a bottom opening, the heating source is located at the bottom opening, and a gap is left between the side wall at the bottom opening and the side wall around the heating source. A top plate, which is arranged at the top opening and abuts against the top of the sleeve, and the top plate is provided with an evaporation hole, the evaporation hole is arranged opposite to the heating source, and on the plate surface of the top plate facing the heating source, the roughness of the position close to the evaporation hole and opposite to the heating source is lower than the roughness of other positions of the top plate.

[0007] Beneficial effect: By setting the bushing and the top plate, the bushing and the top plate are arranged around the side and top of the heating source, which plays the role of concentrating the vapor of the coating material and protecting other parts of the equipment. Since the roughness of the position near the evaporation hole on the top plate is lower than that of other positions, the vapor of the evaporation material is less likely to adhere to the position near the evaporation hole of the top plate. The vapor that is not attached to the top plate either escapes from the evaporation hole and adheres to the plated object, or attaches to the position of the top plate away from the evaporation hole, which reduces the situation where the evaporation material attached to the top plate falls into the heating source and causes pollution. At the same time, when the material attached to the top plate away from the heating source falls, it falls into the gap between the side wall of the heating source and the side wall of the bottom opening, so that it is discharged or collected, avoiding the situation where the material falls into the heating source, thereby improving the coating efficiency and coating quality.

[0008] In an optional embodiment, a first separation membrane is provided on the inner side wall of the bushing, and the first separation membrane can be separated from the bushing.

[0009] Beneficial effect: By setting up the first separation membrane, when the vapor of the evaporation material adheres to the inner wall of the bushing and accumulates to a certain thickness, the staff can separate the first separation membrane from the bushing to remove the attachments accumulated on the inner wall of the bushing, further reducing the possibility of contamination of the coating material at the heating source.

[0010] In an optional embodiment, a bottom is provided between the side wall of the bottom opening of the bushing and the side wall of the heating source, the bottom is arranged around the heating source, and the outer side of the bottom is connected to the side wall of the bottom opening, the inner side of the bottom is bent upward and abuts against the peripheral side wall of the heating source, and the bottom and the bushing form a accommodating space at the bottom opening.

[0011] Beneficial effect: By setting a bottom that bends upward near the heating source, the bottom of the bottom and the bottom of the bushing form a containing space to collect and contain attachments that fall off the top plate and the inner wall of the bushing, avoiding material overflow that is difficult to clean or causes environmental pollution.

[0012] In an optional embodiment, the end portion of the upwardly bent end of the bottom is flush with the top end of the heating source.

[0013] Beneficial effect: By bending the end of the bottom of the hood upwards to be flush with the top of the heating source, the side wall of the heating source is shielded, which can not only reduce the situation where attachments dropped from the top plate are attached to the side wall of the heating source and are difficult to clean, but also avoid the situation where the bent part of the bottom of the hood is higher than the heating source, causing the vapor of the coating material to adhere to the bottom of the hood and accumulate attachments above the heating source.

[0014] In an optional embodiment, the bottom end of the inner side wall of the bushing is inclined toward the direction close to the side wall of the heating source, and the bottom end of the bushing is lower than the top end of the heating source.

[0015] Beneficial effect: By tilting the side wall of the bushing, the attachments that fall off from the top plate are guided and concentrated for easy storage or collection. At the same time, since the bottom end of the bushing is lower than the top end of the heating source, the detached objects are prevented from entering the heating source during the guiding process, causing contamination of the coating material.

[0016] In an optional embodiment, a second separation membrane is provided on the side of the bottom of the bag facing the accommodating space, and the second separation membrane can be separated from the bottom of the bag.

[0017] Beneficial effect: By setting up the second separation membrane, when the attachments that fall off the top plate and fall into the bottom of the basket accumulate to a certain level, the staff can remove the second separation membrane from the bottom of the basket to quickly clean the attachments in the bottom of the basket. The cleaning efficiency is high and the cleaning degree is thorough, which can shorten the downtime of equipment maintenance and improve production capacity. The operation is simple and fast.

[0018] In an optional embodiment, the top plate is extended upward in a direction close to the evaporation hole.

[0019] Beneficial effect: By extending the top plate upward in the direction close to the evaporation hole, the top plate is formed into a shape similar to a conical sleeve. When the attachments near the evaporation hole accumulate to a certain extent, they may fall directly vertically, or they may slide down along the inclined direction of the top plate due to the adhesion of the attachments at the adjacent position of the top plate, thereby further reducing the possibility that the detached attachments fall into the heating source and cause contamination of the evaporation material.

[0020] In an optional embodiment, the roughness of the plate surface of the top plate facing the heating source gradually decreases along a direction approaching the evaporation hole.

[0021] Beneficial effect: Since the roughness of the top plate in the direction close to the evaporation hole gradually decreases, when the evaporated material is attached to the top plate, the attachment amount gradually decreases in the direction close to the evaporation hole, which not only reduces the attachment amount of the evaporated material near the evaporation hole to reduce the situation of falling off and falling into the heating source, but also due to the gradual decrease in the attachment amount and the weaker bonding force between the attachments and the top plate near the evaporation hole under the influence of the gradual change in roughness, when the attachments fall off, the bonding force between the attachments at the position far away from the evaporation hole and the top plate is greater, and the attachments near the evaporation hole are affected by the adhesion effect of the attachments far away from the evaporation hole and flip over and fall or slide in the direction away from the evaporation hole, further keeping the fallen objects away from the heating source.

[0022] In an optional embodiment, the top plate is detachably connected to the bushing.

[0023] Beneficial effect: Through the detachable connection between the top plate and the liner, when the staff needs to clean the adhered attachments or the detached attachments inside the liner structure, the top plate is separated from the liner, which makes it easier to operate the interior, and it is also easier to separate the first separation membrane and the second separation membrane, and to set a new first separation membrane and second separation membrane.

[0024] In a second aspect, the utility model further provides an evaporation device, comprising: a heating source, a top of which is provided with a receiving cavity for receiving a coating material; the above-mentioned evaporation crucible lining structure, wherein the lining is arranged around the circumference of the heating source.

[0025] Beneficial effect: By adopting the above-mentioned evaporation crucible lining structure in the evaporation device, during the evaporation process, the evaporation material attached to the lining structure is reduced from falling into the lining structure, thereby reducing the possibility of contamination of the coating material and improving the coating efficiency and coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 This is a cross-sectional view of the overall structure of an evaporation crucible lining structure according to an embodiment of the utility model;

[0028] Figure 2 This is a cross-sectional view of the overall structure of an evaporation crucible lining structure with a bottom cover according to an embodiment of the utility model;

[0029] Figure 3 This is a cross-sectional view of the overall structure of another evaporation crucible lining structure according to an embodiment of the present utility model.

[0030] Description of reference numerals:

[0031] 100, bushing; 101, top opening; 102, bottom opening; 103, first separation membrane; 200, top plate; 201, evaporation hole; 300, heating source; 400, bottom cover; 401, second separation membrane. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0033] Combine the following Figures 1 to 3 , describing an embodiment of the utility model.

[0034] According to an embodiment of the present invention, on the one hand, a liner structure of an evaporation crucible is provided, see Figure 1 , comprising: a sleeve 100, which is arranged around the heating source 300 of the evaporation device and has a top opening 101 and a bottom opening 102, the heating source 300 is located at the bottom opening 102, and a gap is left between the side wall at the bottom opening 102 and the side wall around the heating source 300. A top plate 200, which is arranged at the top opening 101 and abuts against the top of the sleeve 100, is provided with an evaporation hole 201 on the top plate 200, and the evaporation hole 201 is arranged opposite to the heating source 300. On the plate surface of the top plate 200 facing the heating source 300, the roughness of the position close to the evaporation hole 201 and opposite to the heating source 300 is lower than the roughness of other positions of the top plate 200.

[0035] In this embodiment, the bushing 100 and the top plate 200 are arranged so as to surround the heating source 300 and the top thereof, so as to concentrate the vapor of the coating material and protect other parts of the equipment. Since the roughness of the top plate 200 near the evaporation hole 201 is lower than that of other positions, the vapor of the evaporation material is less likely to adhere to the top plate 200 near the evaporation hole 201. The vapor not attached to the top plate 200 either escapes from the evaporation hole 201 and adheres to the plated object, or adheres to the top plate 200 away from the evaporation hole 201, thereby reducing the possibility of the evaporation material attached to the top plate 200 falling into the heating source 300 and causing pollution. At the same time, when the material attached to the top plate 200 away from the heating source 300 falls, it falls into the gap between the side walls of the heating source 300 and the side walls at the bottom opening 102, and is thereby discharged or collected, thereby preventing the material from falling into the heating source 300, thereby improving the coating efficiency and coating quality.

[0036] In the above embodiment, specifically, it can also include a storage structure arranged in the gap between the side wall at the bottom opening 102 and the side wall around the heating source 300, which is used to collect the fallen attachments to prevent environmental pollution. The storage structure can be arranged in the gap or below the gap.

[0037] In addition, specifically, the above embodiments do not limit the specific structure of the top plate 200. The top plate 200 may be a flat plate structure, or a conical tube structure extending upward near the evaporation hole 201, or a structure of other shapes.

[0038] In the above embodiment, it should be noted that the position on the top plate 200 close to the evaporation hole 201 and opposite to the heating source 300 specifically refers to the portion where the projections of the top plate 200 and the heating source 300 overlap when the device is viewed from above during operation. It should be additionally noted that the portion of the top plate 200 with a roughness lower than that of other positions may be limited to the portion directly opposite to the heating source 300, or may be larger than the portion directly opposite to the heating source 300. On the top plate 200, along the direction close to the evaporation hole 201, the roughness of the surface of the top plate 200 may be sudden or gradual. Exemplarily, the roughness may range from Ra3 to Ra3.8.

[0039] In one embodiment, see Figure 1 A first separation membrane 103 is provided on the inner wall of the bushing 100 , and the first separation membrane 103 can be separated from the bushing 100 .

[0040] Specifically, the first separation membrane 103 is made of a peelable blue glue made of chlorovinyl resin and is set on the inner wall of the bushing 100 by screen printing.

[0041] In this embodiment, by setting the first separation membrane 103, when the vapor of the evaporation material adheres to the inner wall of the bushing 100 and accumulates to a certain thickness, the staff can separate the first separation membrane 103 from the bushing 100, thereby removing the attachments accumulated on the inner wall of the bushing 100, further reducing the possibility of contamination of the coating material at the heating source 300.

[0042] In one embodiment, see Figure 2 A bottom 400 is provided between the side wall of the bottom opening 102 of the bushing 100 and the side wall of the heating source 300. The bottom 400 is arranged around the heating source 300, and the outer side of the bottom 400 is connected to the side wall of the bottom opening 102. The inner side of the bottom 400 is bent upward and abuts against the surrounding side wall of the heating source 300. The bottom 400 and the bushing 100 form a accommodating space at the bottom opening 102.

[0043] Specifically, the bottom cover 400 and the bushing 100 may be integrally formed. In some embodiments not shown, the bottom cover 400 and the bushing 100 may be separately provided and detachably connected by fasteners such as screws and bolts.

[0044] In this embodiment, a bottom 400 that is bent upward near the heating source 300 is provided so that the bottom 400 and the bottom end of the bushing 100 together form a accommodating space to collect and accommodate attachments that fall off from the top plate 200 and the inner wall of the bushing 100, thereby preventing materials from overflowing and being difficult to clean or causing environmental pollution.

[0045] In one embodiment, see Figure 2 The end of one end of the bottom cover 400 bent upward is flush with the top of the heating source 300.

[0046] In this embodiment, the upwardly bent end of the bottom 400 is flush with the top of the heating source 300, thereby shielding the side wall of the heating source 300. This can reduce the situation where attachments dropped from the top plate 200 are attached to the side wall of the heating source 300 and are difficult to clean, and can also prevent the bent portion of the bottom 400 from being higher than the heating source 300, resulting in the deposition of coating material vapor on the bottom 400 and the accumulation of attachments above the heating source 300.

[0047] In one embodiment, see Figure 2 The bottom end of the inner side wall of the bushing 100 is inclined toward the side wall of the heating source 300 , and the bottom end of the bushing 100 is lower than the top end of the heating source 300 .

[0048] In this embodiment, the side wall of the bushing 100 is tilted to guide the attachments that fall off from the top plate 200, so that the attachments are concentrated for easy storage or collection. At the same time, since the bottom end of the bushing 100 is lower than the top end of the heating source 300, the detached objects are prevented from entering the heating source 300 during the guiding process, causing contamination of the coating material.

[0049] In one embodiment, see Figure 2 A second separation membrane 401 is provided on the side of the bottom 400 facing the receiving space, and the second separation membrane 401 can be separated from the bottom 400 .

[0050] Specifically, the second separation membrane 401 is made of a peelable blue glue made of chlorovinyl resin and is set on the inner wall of the bushing 100 by screen printing. It should be noted that the second separation membrane 401 and the first separation membrane 103 in some of the above embodiments can be integrally formed and set on the bushing 100 and the bottom 400, or they can be independent of each other and set on the bushing 100 or the bottom 400 respectively.

[0051] In this embodiment, by providing a second separation membrane 401, after the attachments that fall off the top plate 200 and fall into the bottom 400 accumulate to a certain level, the staff can remove the second separation membrane 401 from the bottom 400 to quickly clean the attachments in the bottom 400. The cleaning efficiency is high and the cleaning degree is thorough, which can shorten the downtime of equipment maintenance and improve production capacity. The operation is simple and fast.

[0052] In one embodiment, see Figure 3 The top plate 200 is extended upward in a direction close to the evaporation holes 201 .

[0053] In this embodiment, the top plate 200 is extended upward in the direction close to the evaporation hole 201, so that the top plate 200 is formed into a shape similar to a conical sleeve. It should be noted that, depending on the specific form of the top plate 200, the conical sleeve may be conical or pyramidal. When the attachments near the evaporation hole 201 accumulate to a certain extent, they may fall directly vertically, or they may slide down along the inclined direction of the top plate 200 due to the adhesion of the attachments at the adjacent position of the top plate 200, thereby further reducing the situation where the detached attachments fall into the heating source 300 and cause contamination of the evaporation material.

[0054] In one embodiment, the roughness of the plate surface of the top plate 200 facing the heating source 300 gradually decreases along the direction close to the evaporation holes 201 .

[0055] In this embodiment, since the roughness of the top plate 200 in the direction close to the evaporation hole 201 gradually decreases, when the evaporation material is attached to the top plate 200, the attachment amount gradually decreases in the direction close to the evaporation hole 201, which not only reduces the attachment amount of the evaporation material near the evaporation hole 201 to reduce the situation of falling off and falling into the heating source 300, but also due to the gradual decrease in the attachment amount and the weaker bonding force between the attachments and the top plate 200 near the evaporation hole 201 under the influence of the gradual change in roughness, when the attachments fall off, the bonding force between the attachments and the top plate 200 at the position far away from the evaporation hole 201 is greater, and the attachments near the evaporation hole 201 are affected by the adhesion effect of the attachments far away from the evaporation hole 201 and flip over and fall or slide in the direction away from the evaporation hole 201, further making the fallen objects away from the heating source 300.

[0056] In one embodiment, the top plate 200 is detachably connected to the bushing 100 .

[0057] Specifically, the top plate 200 and the bushing 100 are detachably connected by means of connecting members such as screws and bolts.

[0058] In this embodiment, the top plate 200 and the sleeve 100 are detachably connected. When the staff needs to clean the attached objects or the attached objects that have fallen off inside the lining structure, the top plate 200 is separated from the sleeve 100, which makes it easier to operate the interior, separate the first separation membrane 103 and the second separation membrane 401, and install a new first separation membrane 103 and the second separation membrane 401.

[0059] According to an embodiment of the present invention, on the other hand, an evaporation device is provided, including: a heating source 300, with a receiving cavity for receiving a coating material on the top; the above-mentioned evaporation crucible lining structure, with a liner 100 arranged around the heating source 300.

[0060] In this embodiment, the evaporation crucible lining structure is adopted in the evaporation device to reduce the evaporation material attached to the lining structure from falling into the lining structure during the evaporation process, thereby reducing the possibility of the coating material being contaminated and improving the coating efficiency and coating quality.

[0061] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A lining structure for an evaporation crucible, characterized in that: include: A bushing (100) is arranged around a heating source (300) of a vapor deposition device and has a top opening (101) and a bottom opening (102); the heating source (300) is located at the bottom opening (102), and a gap is left between a side wall at the bottom opening (102) and a side wall around the heating source (300); A top plate (200) is arranged at the top opening (101) and abuts against the top of the bushing (100); an evaporation hole (201) is arranged on the top plate (200); the evaporation hole (201) is arranged opposite to the heating source (300); and on the plate surface of the top plate (200) facing the heating source (300), the roughness of the position close to the evaporation hole (201) and opposite to the heating source (300) is lower than the roughness of other positions of the top plate (200).

2. The evaporation crucible lining structure according to claim 1, characterized in that: A first separation membrane (103) is provided on the inner side wall of the bushing (100), and the first separation membrane (103) can be separated from the bushing (100).

3. The evaporation crucible lining structure according to claim 1, characterized in that: A bottom pocket (400) is provided between the side wall at the bottom opening (102) of the bushing (100) and the side wall of the heating source (300); the bottom pocket (400) is arranged around the heating source (300), and the outer side of the bottom pocket (400) is connected to the side wall at the bottom opening (102); the inner side of the bottom pocket (400) is bent upward and abuts against the peripheral side wall of the heating source (300); the bottom pocket (400) and the bushing (100) form a receiving space at the bottom opening (102).

4. The evaporation crucible lining structure according to claim 3, characterized in that: The end portion of one end of the bottom (400) that is bent upward is flush with the top end of the heating source (300).

5. The evaporation crucible lining structure according to claim 4, characterized in that: The bottom end of the inner side wall of the bushing (100) is inclined toward the side wall of the heating source (300), and the bottom end of the bushing (100) is lower than the top end of the heating source (300).

6. The evaporation crucible lining structure according to claim 4, characterized in that: A second separation membrane (401) is provided on the side of the bottom (400) facing the accommodating space, and the second separation membrane (401) can be separated from the bottom (400).

7. The evaporation crucible lining structure according to any one of claims 1 to 6, characterized in that: The top plate (200) is arranged to extend upward in a direction close to the evaporation hole (201).

8. The evaporation crucible lining structure according to claim 7, characterized in that: The roughness of the plate surface of the top plate (200) facing the heating source (300) gradually decreases in a direction close to the evaporation hole (201).

9. The evaporation crucible lining structure according to any one of claims 1 to 6, characterized in that: The top plate (200) is detachably connected to the bushing (100).

10. A vapor deposition device, characterized in that: include: A heating source (300) is provided with a receiving cavity on the top for receiving the coating material; In the evaporation crucible lining structure according to any one of claims 1 to 9, the lining (100) is arranged around the circumference of the heating source (300).

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