Graphite main heater

Abstract

The utility model belongs to the technical field of monocrystalline silicon production, and particularly relates to a graphite main heater. Comprising a heating ring body and a heating foot plate, and the heating ring body is erected on the top of the heating foot plate and is in threaded connection with the heating foot plate; the heating ring body and the heating foot plate are detachably arranged, replacement of the whole heater can be avoided by independently replacing parts, meanwhile, a more complex machining process needed by integrated design is avoided, and the production cost can be effectively reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon production, and in particular relates to a graphite main heater. Background Art

[0002] The graphite main heater is installed in the single crystal furnace for silicon single crystal pulling and serves as the main component for heating the thermal field in the furnace. It generates heat and heats the furnace through low voltage and high current.

[0003] Chinese patent number CN219042014U discloses a graphite thermal field heater and graphite thermal field. Two L-shaped mounting feet are attached to the lower end of the graphite body, forming an integrated structure with the graphite body. In this integrated structure, damage to any part may require replacement of the entire heater, increasing operating costs for the manufacturer. Furthermore, the integrated structure requires a more complex manufacturing process. Utility Model Content

[0004] The purpose of this utility model is to address the above-mentioned technical problems and provide a graphite main heater, in which the heating ring and the heating foot plate are detachable, so that the entire heater can be avoided from being replaced by replacing the parts separately, while also avoiding the more complicated processing technology required for the integrated design, which can effectively reduce the production cost.

[0005] In view of this, the utility model provides a graphite main heater, comprising a heating coil and a heating foot plate, wherein the heating coil is mounted on the top of the heating foot plate, and the heating coil and the heating foot plate are threadedly connected.

[0006] In this technical solution, a combination of a heater foot plate and a heater ring is adopted. When any component is damaged, the entire heater can be replaced by replacing the component separately. At the same time, the more complicated processing technology required for the integrated design is avoided, which can effectively reduce production costs and ensure production efficiency.

[0007] In the above technical solution, further, the two heating feet are symmetrically distributed about the axis of the heating ring, and a mounting structure is provided on the abutting side of the heating foot and the heating ring. The heating foot includes a support, and the support is folded inward on the side away from the heating ring to form a mounting block, and the mounting block is provided with an electrode hole.

[0008] In the above technical solution, further, the mounting structure includes mounting grooves arranged on both sides of the heating coil body, the mounting grooves are arranged on the side walls of the heating coil body along the circumferential direction of the heating coil body, and a first protrusion is arranged at the top of the pillar corresponding to the mounting groove, and the first protrusion is threadedly connected to the mounting groove.

[0009] In the above technical solution, further, a first connection hole is provided on the first bump, a second connection hole is provided on the side wall of the mounting groove corresponding to the first connection hole, and the first connection hole and the second connection hole are connected by a fastener.

[0010] In this technical solution, the two heating foot plates are symmetrically distributed with respect to the axis of the heating ring body, and the heating foot plates and the heating ring body are correspondingly provided with a mounting structure. The mounting structure further ensures the stable support of the heating foot plates for the heating ring body. At the same time, the symmetrically distributed foot plates and the tightly abutted mounting structure contribute to more uniform heat transfer inside the heater, thereby improving the heating efficiency.

[0011] In the above technical solution, further, the fastener is a bolt. The bolt passes through the first connection hole and is threadedly connected to the second connection hole. The first connection hole is a through hole, and the second connection hole is a threaded blind hole.

[0012] In this technical solution, the second connection hole is set as a threaded blind hole, and 2 - 3 mm is kept un-drilled during hole processing. This can effectively isolate the generation of silicon oxides during the production process and prevent them from entering the second connection hole to erode the internal thread, reduce the probability of cracks occurring at the second connection hole, extend the service life of the heater, and reduce the use cost.

[0013] In the above technical solution, further, the fastener is a bolt and a nut. The bolt passes through the first connection hole and is threadedly connected to the nut inside the second connection hole. Both the first connection hole and the second connection hole are through holes.

[0014] In this technical solution, the fastener is a bolt and a nut. The two are threadedly connected to complete the fixed connection of the heating foot plate and the heating ring body. The second connection hole is a through hole. With this setting, the bolt is not directly threadedly connected to the second connection hole, which can avoid cracks at the thread caused by the inconsistent thermal expansion coefficient and cooling rate between the bolt and graphite, extend the service life of the heater, and reduce the use cost.

[0015] In the above technical solution, further, the fastener is a carbon-carbon composite material.

[0016] In this technical solution, the carbon-carbon composite material has a very high melting point. At high temperatures, the carbon-carbon composite material exhibits excellent stability and does not soften or deform. The carbon-carbon composite material can provide a reliable fastening effect and has the properties of high strength and low thermal expansion.

[0017] In the above technical solution, further, the first bump is provided with four first connection holes arranged in a "field" shape through it, and the second connection hole and the fastener are correspondingly provided.

[0018] In this technical solution, the arrangement of multiple bolts and connection holes can disperse thermal stress, avoiding material fatigue or damage caused by local heat concentration. The multiple connection points arranged in a "field" shape can distribute the force more evenly, thus significantly improving the rigidity and stability of the entire structure.

[0019] The beneficial effects of the present utility model are as follows:

[0020] 1. By adopting the combination of a heater foot plate and a heater ring, when any component is damaged, it is possible to avoid replacing the entire heater by separately replacing the component. At the same time, it also avoids the more complex processing techniques required for an integrated design, effectively reducing production costs and ensuring production efficiency.

[0021] 2. The fastener is a bolt, and the bolt passes through the first connection hole and is threadedly connected to the second connection hole. The first connection hole is a through hole, and the second connection hole is a threaded blind hole, which can effectively isolate the generation of silicon oxide during the production process and prevent it from entering the second connection hole to erode the internal thread, reducing the probability of cracks occurring at the second connection hole, extending the service life of the heater, and reducing the usage cost.

[0022] 3. The fastener is a bolt and a nut. The bolt passes through the first connection hole and is threadedly connected to the nut within the second connection hole. Both the first connection hole and the second connection hole are through holes, and the bolt is not directly threadedly connected to the second connection hole, which can avoid cracks occurring at the thread due to the inconsistent thermal expansion coefficient and cooling rate between the bolt and graphite, extending the service life of the heater, and reducing the usage cost. Description of the Drawings [[ID=…]]

[0023] [[ID=…]] Figure 1 is a cross-sectional view of the first embodiment of the present utility model; [[ID=2...]]

[0024] [[ID=2...]] Figure 2 is Figure 1 [[ID=2...]] a partial enlarged view of A in

[0025] [[ID=2...]] Figure 3 is a cross-sectional view of the second embodiment of the present utility model; [[ID=3...]]

[0026] [[ID=3...]] Figure 4 is Figure 3 [[ID=3...]] a partial enlarged view of B in

[0027] [[ID=3...]] Figure 5 is a planar side view of the column.

[0028] The markings in the figure are shown as:

[0029] 1. Heating foot plate; 2. Heating ring body; 3. Support column; 4. Installation block; 5. Electrode hole; 6. Installation groove; 7. First convex block; 8. First connection hole; 9. Second connection hole; 10. Bolt; 11. Nut. Detailed Description of the Embodiment It should be noted that in the above translation, the ellipsis parts in the original text tags are retained as they are because they seem to be incomplete or incorrect tags in the original content. If there are specific corrections or additional information for these parts, the translation can be adjusted accordingly.

[0030] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of this application.

[0031] In the description of this application, it should be noted that the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the exemplary embodiments according to this application. For ease of description, the dimensions of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Technologies, methods and equipment known to ordinary technicians in the relevant fields may not be discussed in detail, but where appropriate, the technologies, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, so once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0032] It should be noted that the terms "first," "second," etc. in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than those illustrated or described herein, and that the objects distinguished by "first," "second," etc. are generally of the same type, and do not limit the number of objects. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0033] It should be noted that, in the description of this application, the directions or positional relationships indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description. Unless otherwise specified, these directional terms do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of this application; the directional terms "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0034] It should be noted that, in the present application, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the statement "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in the opposite order according to the functions involved. For example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0035] First embodiment:

[0036] like Figure 1 、 Figure 2 as well as Figure 5 As shown, this embodiment provides a graphite main heater, comprising a heating coil 2 and a heating base plate 1. The heating coil 2 is mounted on top of the heating base plate 1 and threadedly connected to the heating base plate 1. The heater base plate and heater coil combination allows for individual replacement of any component if damaged, avoiding the need to replace the entire heater. This also avoids the more complex processing required for an integrated design, effectively reducing production costs while ensuring production efficiency.

[0037] The two heating footplates 1 are symmetrically distributed about the axis of the heating coil 2. A mounting structure is provided on the side where the heating footplates 1 and the heating coil 2 abut. The heating footplates 1 include pillars 3. The pillars 3 are folded inward on the side away from the heating coil 2 to form mounting blocks 4. The mounting blocks 4 are provided with electrode holes 5. The mounting structure includes mounting grooves 6 provided on both sides of the heating coil 2. The mounting grooves 6 are provided on the side walls of the heating coil 2 along the circumferential direction of the heating coil 2. A first protrusion 7 is provided on the top of the pillars 3 corresponding to the mounting grooves 6. The first protrusion 7 is threadedly connected to the mounting groove 6. A first connecting hole 8 is provided on the first protrusion 7. A second connecting hole 9 is provided on the side wall of the mounting groove 6 corresponding to the first connecting hole 8. Fasteners are connected to the first connecting hole 8 and the second connecting hole 9. The two heating legs 1 are symmetrically distributed around the axis of the heating ring 2, and the heating legs 1 and the heating ring 2 are correspondingly provided with a mounting structure, which further ensures the stable support of the heating legs 1 to the heating ring 2. At the same time, the symmetrically distributed legs and the tightly abutted mounting structure help to transfer heat more evenly inside the heater, thereby improving the heating efficiency.

[0038] As shown Figure 2 in the figure, the fastener is a bolt 10. The bolt 10 passes through the first connection hole 8 and is threadedly connected to the second connection hole 9. The first connection hole 8 is a through hole, and the second connection hole 9 is a threaded blind hole. The second connection hole 9 is set as a threaded blind hole, and 2 - 3 mm is kept unopened during hole machining. This can effectively isolate the generation of silicon oxide during the production process and prevent it from entering the second connection hole 9 to erode the internal thread, reduce the probability of cracks occurring at the second connection hole 9, extend the service life of the heater, and reduce the use cost.

[0039] The fastener is a carbon - carbon composite material. The carbon - carbon composite material has a very high melting point. At high temperatures, the carbon - carbon composite material exhibits excellent stability, does not soften or deform, and can provide a reliable fastening effect, with the properties of high strength and low thermal expansion.

[0040] As shown Figure 1-5 in the figure, the first bump 7 is provided with four first connection holes 8 arranged in a "field" shape through it, and the second connection hole 9 and the fastener are correspondingly arranged. The setting of multiple bolts 10 and connection holes can disperse the thermal stress, avoid material fatigue or damage caused by local heat concentration. The multiple connection points arranged in a "field" shape can distribute the force more evenly, thus significantly improving the rigidity and stability of the entire structure.

[0041] Second Embodiment:

[0042] This embodiment provides a graphite main heater. In addition to including the technical solutions of the above - mentioned embodiment, it also has the following technical features.

[0043] As shown Figure 3 and Figure 4 in the figure, the fasteners are a bolt 10 and a nut 11. The bolt 10 passes through the first connection hole 8 and is threadedly connected to the nut 11 inside the second connection hole 9. Both the first connection hole 8 and the second connection hole 9 are through holes.

[0044] The fasteners are a bolt 10 and a nut 11, and their threaded connection completes the fixed connection of the heating foot plate 1 and the heating ring body 2. The second connection hole 9 is a through hole. With such a setting, the bolt 10 is not directly threadedly connected to the second connection hole 9, which can avoid cracks at the thread caused by the inconsistent thermal expansion coefficients and cooling rates of the bolt 10 and graphite, extend the service life of the heater, and reduce the use cost. <The embodiments of the present application are described above in conjunction with the accompanying drawings. Unless there is a conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A graphite main heater, characterized in that: It includes a heating ring body (2) and a heating foot plate (1). The heating ring body (2) is erected on the top of the heating foot plate (1), and the heating ring body (2) and the heating foot plate (1) are connected by threads. The two heating foot plates (1) are symmetrically distributed with respect to the axis of the heating ring body (2). An erection structure is provided on the abutting side of the heating foot plate (1) and the heating ring body (2). The heating foot plate (1) includes a support column (3). The side of the support column (3) away from the heating ring body (2) is folded inward to form a mounting block (4), and an electrode hole (5) is provided on the mounting block (4).

2. A graphite main heater according to claim 1, characterized in that: The erection structure includes mounting grooves (6) provided on both sides of the heating ring body (2). The mounting grooves (6) are arranged on the side wall of the heating ring body (2) along the circumferential direction of the heating ring body (2). A first convex block (7) is provided on the top of the support column (3) corresponding to the mounting groove (6), and the first convex block (7) and the mounting groove (6) are connected by threads.

3. A graphite main heater according to claim 2, characterized in that: A first connection hole (8) is provided on the first convex block (7), and a second connection hole (9) is provided on the side wall of the mounting groove (6) corresponding to the first connection hole (8). The first connection hole (8) and the second connection hole (9) are connected by a fastener.

4. A graphite main heater according to claim 3, characterized in that: The fastener is a bolt (10). The bolt (10) passes through the first connection hole (8) and is threadedly connected to the second connection hole (9). The first connection hole (8) is a through hole, and the second connection hole (9) is a threaded blind hole.

5. A graphite main heater according to claim 4, characterized in that: The fastener is a bolt (10) and a nut (11). The bolt (10) passes through the first connection hole (8) and is threadedly connected to the nut (11) in the second connection hole (9). Both the first connection hole (8) and the second connection hole (9) are through holes.

6. A graphite main heater according to claim 4 or 5, characterized in that: The fastener is a carbon-carbon composite material.

7. A graphite main heater according to claim 3, characterized in that: Four first connection holes (8) are provided through the first convex block (7) and are arranged in a "field" shape, and the second connection hole (9) and the fastener are correspondingly arranged.

Images