Control valve for preventing bubble precipitation of saturated carbonic acid solution and control system thereof

Abstract

The utility model discloses a control valve for preventing bubble precipitation of a saturated carbonic acid solution and a control system of the control valve. The control valve comprises a valve body, a water inlet, a water outlet, a gas dissolving film water inlet end, a bypass water inlet end, a gas dissolving film water outlet end and a bypass water outlet end, the pore diameter of the air dissolving film water outlet end is smaller than that of the air dissolving film water inlet end, the pore diameter of the bypass water outlet end is smaller than that of the bypass water inlet end, and the sum of the pore diameter of the air dissolving film water outlet end and the pore diameter of the bypass water outlet end is equal to the pore diameter of the water outlet so that the relation between a fluid channel in the valve body and the pore diameter can be accurately controlled. The device is compact and reasonable in structure and convenient to operate, gas can be prevented from being separated out to the maximum extent, gas can be effectively prevented from being separated out in the mixing and conveying process of a carbonated solution by accurately controlling the relation between a fluid channel in the valve body and the aperture, and it is ensured that no bubble is generated in a pipeline.

Description

Technical Field

[0001] The utility model relates to the technical field of carbonic acid solution preparation, in particular to a control valve for preventing gas bubbles from precipitating in a saturated carbonic acid solution and its control system. Background Art

[0002] In the semiconductor manufacturing process, wafer cleaning is a crucial step, which directly relates to the quality and performance of the final product. To effectively remove static electricity on the wafer surface, the industry has developed a process device using a saturated carbonic acid solution. This device generates a carbonic acid solution by injecting pure water and carbon dioxide gas into the gas-liquid dissolution membrane simultaneously, and realizes the effective removal of static electricity by adjusting the concentration of carbon dioxide in the ultrapure water according to actual needs.

[0003] However, in the actual production application and the long-term use process by the client, some obvious defects have emerged in this technology. Specifically, when the saturated carbonic acid solution output from the gas-liquid dissolution membrane is mixed with pure water, gas precipitation is likely to occur, resulting in the generation of bubbles in the pipeline. These bubbles not only interfere with the uniformity of the solution, but also may cause contamination to the wafer surface, affecting the cleaning effect and product quality.

[0004] In addition, in the traditional equipment design, carbon dioxide gas continuously precipitates in the outlet pipeline, which not only wastes valuable resources, but also may interfere with subsequent process steps, affecting the stability and efficiency of the entire production line. Therefore, how to solve these problems and improve the performance and reliability of the saturated carbonic acid solution process device has become an urgent technical problem to be solved.

[0005] For this reason, we propose a control valve for preventing gas bubbles from precipitating in a saturated carbonic acid solution and its control system. Summary of the Utility Model

[0006] The applicant of the present utility model aims at the above-mentioned disadvantages in the existing production technology, and provides a control valve for preventing gas bubbles from precipitating in a saturated carbonic acid solution and its control system, which can effectively avoid gas precipitation during the mixing and transportation of the saturated carbonic acid solution.

[0007] The technical solution adopted by the present utility model is as follows:

[0008] A control valve for preventing gas bubbles from precipitating in a saturated carbonic acid solution includes a valve body and the following components arranged on the valve body:

[0009] Inlet and outlet ports, which are located on the same side of the valve body and are used for receiving pure water and outputting carbonic acid solution;

[0010] Gas-liquid dissolution membrane water inlet end, which is connected to the inlet port and guides pure water into the gas-liquid dissolution membrane;

[0011] Bypass water inlet end, which is simultaneously docked with the gas-liquid dissolution membrane water inlet end and the inlet port to realize the diversion of pure water;

[0012] The outlet end of the dissolved air membrane, which is connected to the dissolved air membrane and is used to lead out the generated saturated carbonic acid solution;

[0013] The bypass outlet end, which is respectively communicated with the outlet end of the dissolved air membrane and the water outlet, to realize the outlet of excess pure water;

[0014] The aperture of the outlet end of the dissolved air membrane is smaller than that of the inlet end of the dissolved air membrane, the aperture of the bypass outlet end is smaller than that of the bypass inlet end, and the sum of the aperture of the outlet end of the dissolved air membrane and the aperture of the bypass outlet end is equal to the aperture of the water outlet, which is used to avoid the precipitation of gas during the mixing and transportation of the saturated carbonic acid solution by precisely controlling the relationship between the fluid channels and apertures inside the valve body.

[0015] Furthermore, the apertures of the water inlet and the water outlet are the same.

[0016] Furthermore, it also includes a process hole, which is in a blocked state during use.

[0017] A control system for preventing bubble precipitation in a saturated carbonic acid solution, which includes the above-mentioned control valve.

[0018] Furthermore, it also includes:

[0019] The dissolved air membrane, which is respectively connected to the outlet end and the inlet end of the dissolved air membrane on the valve body through pipelines, and a carbon dioxide inlet and outlet are arranged on the dissolved air membrane, and the flow direction of carbon dioxide is opposite to that of pure water, so that carbon dioxide gas and pure water can contact and mix more fully;

[0020] The valve, which is arranged on the connecting pipeline between the dissolved air membrane and the outlet end of the dissolved air membrane, and is used to control the amount of pure water entering the dissolved air membrane, so as to further control the generation speed and concentration of the saturated carbonic acid solution.

[0021] Furthermore, the valve is a needle valve.

[0022] Furthermore, the water inlet uses full-pipe transportation of pure water to ensure that the water flow and pressure in the dissolved air membrane are in the best state.

[0023] The beneficial effects of the present utility model are as follows:

[0024] The structure of the present utility model is compact and reasonable, and the operation is convenient. It can avoid gas precipitation to the greatest extent. By precisely controlling the relationship between the fluid channels and apertures inside the valve body, it can effectively avoid the precipitation of gas during the mixing and transportation of the saturated carbonic acid solution, ensuring that no bubbles are generated in the pipeline. This not only improves the uniformity and stability of the solution, but also reduces the interference and damage risks to the wafer cleaning process. Description of the Drawings

[0025] Figure 1This is a schematic structural diagram of the present utility model.

[0026] Figure 2 This is a schematic diagram of the connection structure between the control valve and the dissolved air membrane of the present utility model.

[0027] Among them:

[0028] 100, control valve; 200, dissolved air membrane; 300, valve;

[0029] 101, valve body; 102, water inlet; 103, dissolved air membrane water inlet end; 104, bypass water inlet end; 105, dissolved air membrane water outlet end; 106, bypass water outlet end; 107, water outlet; 108, process hole. Specific embodiments

[0030] The following combines with the attached drawings to illustrate the specific embodiments of the present utility model.

[0031] Embodiment 1

[0032] In this embodiment, as Figure 1 shown, a control valve for preventing gas bubbles from precipitating in a saturated carbonic acid solution is disclosed. The design of the control valve 100 aims to solve the problem that in the prior art, gas is easily precipitated during the mixing and transportation of saturated carbonic acid solution, resulting in the generation of gas bubbles in the pipeline. By precisely controlling the relationship between the fluid channels and pore diameters inside the valve body, the control valve 100 in this embodiment can effectively avoid gas precipitation and ensure the smooth progress of the wafer cleaning process.

[0033] Specifically, the control valve 100 includes a valve body 101, a water inlet 102, a dissolved air membrane water inlet end 103, a bypass water inlet end 104, a dissolved air membrane water outlet end 105, a bypass water outlet end 106, and a water outlet 107. These components together constitute a complex fluid control system, and through precise regulation of the water flow and pressure in each channel, comprehensive control of the generation and transportation process of saturated carbonic acid solution is achieved.

[0034] The valve body 101 is the main part of the control valve.

[0035] The water inlet 102 and the water outlet 107 are both arranged on the same side of the valve body 101. The water inlet 102 is used to receive pure water, and the water outlet 107 is used to output carbonic acid solution, and the pore diameters of both are the same to ensure the smoothness of fluid passage.

[0036] The dissolved air membrane water inlet end 103 is connected to the water inlet 102 and is used to introduce pure water into the dissolved air membrane 200.

[0037] The bypass water inlet end 104 is simultaneously docked with the dissolved air membrane water inlet end 103 and the water inlet 102 to achieve the diversion of pure water.

[0038] The water outlet end 105 of the dissolved air membrane is connected to the dissolved air membrane 200 and is used to guide out the generated saturated carbonic acid solution. The pore size of the water outlet end 105 of the dissolved air membrane is smaller than the pore size of the water inlet end 103 of the dissolved air membrane.

[0039] The bypass water outlet 106 is respectively connected to the dissolved air membrane water outlet 105 and the water outlet 107 to achieve the outlet of excess pure water, and its aperture is smaller than the aperture of the bypass water inlet 104 .

[0040] The process hole 108 is in a blocked state when in use for possible process adjustment or maintenance.

[0041] Through the above structure, the relationship between the fluid channel and the aperture inside the valve body 101 is accurately controlled, effectively preventing the saturated carbonic acid solution from precipitating gas during the mixing and transportation process.

[0042] Example 2

[0043] like Figure 2 As shown, this embodiment discloses a control system for preventing bubble precipitation of a saturated carbonate solution, which is constructed based on the control valve of Example 1 and also includes the following components:

[0044] The dissolved air membrane 200 is connected to the dissolved air membrane water outlet 105 and the dissolved air membrane water inlet 103 on the valve body 101 through pipelines. The dissolved air membrane 200 is provided with a carbon dioxide inlet and outlet, and the flow direction of carbon dioxide is opposite to that of pure water, so that carbon dioxide gas and pure water can contact and mix more fully.

[0045] The valve 300, specifically a needle valve, is disposed on the connecting pipe between the dissolved air membrane 200 and the dissolved air membrane water outlet 105, and is used to control the amount of pure water entering the dissolved air membrane 200, thereby further controlling the generation speed and concentration of the saturated carbonate solution.

[0046] In practical applications, the water inlet 102 uses a full pipe to transport pure water to ensure that the water flow and pressure in the dissolved air membrane 200 are in the best state. By adjusting the opening of the valve 300, the amount of pure water entering the dissolved air membrane 200 can be accurately controlled, thereby controlling the generation speed and concentration of the saturated carbonate solution. The entire control system works in coordination to effectively prevent the saturated carbonate solution from precipitating gas during mixing and transportation, thereby improving the stability and reliability of the system.

[0047] In this embodiment, pure water enters the valve body 101 from the water inlet 102 and enters the gas dissolution membrane 200 through the gas dissolution membrane water inlet end 103. The gas dissolution membrane 200 is a key component for realizing the fusion of pure water and carbon dioxide gas. It can effectively combine these two substances to generate a saturated carbonic acid solution. To further improve the dissolution rate of carbon dioxide, a carbon dioxide inlet and outlet are also provided on the gas dissolution membrane 200, and the flow direction of carbon dioxide is opposite to that of pure water. This design enables the carbon dioxide gas and pure water to come into contact and mix more fully.

[0048] On the connecting pipe between the gas dissolution membrane 200 and the gas dissolution membrane water outlet end 105, a valve 300 is also connected. This valve 300 is designed as a needle valve in this embodiment, and its main function is to control the flow rate. By adjusting the opening degree of the valve 300, the amount of pure water entering the gas dissolution membrane 200 can be precisely controlled, thereby further controlling the generation rate and concentration of the saturated carbonic acid solution.

[0049] At the same time, a bypass pipe is also provided inside the valve body 101, which includes a bypass water inlet end 104 and a bypass water outlet end 106. The bypass water inlet end 104 is connected to both the gas dissolution membrane water inlet end 103 and the water inlet 102 at the same time, realizing the diversion of pure water. Since the water inlet 102 transports pure water in a full pipe, and the gas dissolution membrane 200 does not require too much water inflow, part of the water flow can be diverted through the bypass pipe to ensure that the water flow and pressure inside the gas dissolution membrane 200 are in the best state.

[0050] The bypass water outlet end 106 is respectively connected to the gas dissolution membrane water outlet end 105 and the water outlet 107, realizing the discharge of excess pure water. This design makes the fluid channels inside the valve body 101 form a complex network. By precisely regulating the water flow and pressure in each channel, the entire process of generating and transporting the saturated carbonic acid solution can be comprehensively controlled.

[0051] The biggest feature of this embodiment lies in the precise control of the aperture relationship among the gas dissolution membrane water outlet end 105, the bypass water outlet end 106, and the water outlet 107. According to Bernoulli's principle, the narrower the pipe diameter, the smaller the water pressure; and the smaller the water pressure, the lower the solubility of carbon dioxide. Therefore, in this embodiment, the aperture of the gas dissolution membrane water outlet end 105 is designed to be smaller than that of the gas dissolution membrane water inlet end 103, and at the same time, the aperture of the bypass water outlet end 106 is also smaller than that of the bypass water inlet end 104. This design makes the water outlet pressure of the carbonic acid solution smaller, thereby dissolving a limited amount of carbon dioxide gas. When the carbonic acid solution converges to the water outlet 107 with a larger aperture, the water pressure increases, which can increase the dissolution rate of carbon dioxide.

[0052] In addition, since the sum of the pore diameters of the outlet end 105 of the dissolved air membrane and the outlet end 106 of the bypass is exactly equal to the pore diameter of the water outlet 107, this balances the pressure inside the pipe and enables the water outlet 107 to convey water with a full pipe. This design not only avoids the precipitation of carbon dioxide but also ensures the uniformity and stability of the saturated carbonic acid solution.

[0053] During actual use, the process hole 108 is in a blocked state to ensure that the fluid passage inside the valve body 101 is in a closed state, preventing external impurities or gases from entering and affecting the generation and transportation of the saturated carbonic acid solution.

[0054] In summary, the control valve for preventing bubble precipitation in the saturated carbonic acid solution in this embodiment can maximize the avoidance of gas precipitation. By precisely controlling the relationship between the fluid passage and the pore diameter inside the valve body, the control valve in this embodiment can effectively prevent gas from precipitating during the mixing and transportation of the saturated carbonic acid solution, ensuring that no bubbles are generated in the pipeline. This not only improves the uniformity and stability of the solution but also reduces the risk of interference and damage to the wafer cleaning process.

[0055] To increase the carbon dioxide dissolution rate, in this embodiment, by optimizing the fluid passage design, when the carbonic acid solution converges to the water outlet with a larger pore diameter, the water pressure increases, thereby increasing the carbon dioxide dissolution rate. This helps to generate a higher-quality saturated carbonic acid solution and improve the wafer cleaning effect.

[0056] The above description is an explanation of the present invention, not a limitation thereof. For the scope defined by the present invention, refer to the claims. Any form of modification can be made within the protection scope of the present invention.

Claims

1. A control valve for preventing bubble precipitation in saturated carbonic acid solution, characterized in that: It includes a valve body and the following components arranged on the valve body: The water inlet and outlet are located on the same side of the valve body and are used to receive pure water and output carbonated solution; The water inlet end of the dissolved air membrane is connected to the water inlet and introduces pure water into the dissolved air membrane; The bypass water inlet is connected to the dissolved air membrane water inlet and the water inlet at the same time to achieve the diversion of pure water; A water outlet of the dissolved air membrane, which is connected to the dissolved air membrane and is used to guide out the generated saturated carbonic acid solution; The bypass water outlet is connected to the dissolved air membrane water outlet and the water outlet respectively to realize the outlet of excess pure water; The aperture of the water outlet of the dissolved air membrane is smaller than that of the water inlet of the dissolved air membrane, the aperture of the water outlet of the bypass is smaller than that of the water inlet of the bypass, and the sum of the aperture of the water outlet of the dissolved air membrane and the aperture of the bypass water outlet is equal to the aperture of the water outlet, which is used to avoid the precipitation of gas from the saturated carbonate solution during the mixing and transportation process by accurately controlling the relationship between the fluid channel and the aperture inside the valve body.

2. A control valve for preventing bubble precipitation of saturated carbonic acid solution as claimed in claim 1, characterized in that: The water inlet and the water outlet have the same aperture.

3. A control valve for preventing bubble precipitation of saturated carbonic acid solution as claimed in claim 1, characterized in that: It also includes a process hole, which is in a blocked state when in use.

4. A control system for preventing bubble precipitation of saturated carbonic acid solution, characterized in that: It comprises the control valve according to any one of claims 1-3.

5. A control system for preventing bubble precipitation of saturated carbonated solution as claimed in claim 4, characterized in that: Also includes: The dissolved air membrane is connected to the dissolved air membrane water outlet and dissolved air membrane water inlet on the valve body through pipelines, and a carbon dioxide inlet and outlet are arranged on the dissolved air membrane, and the flow direction of carbon dioxide is opposite to that of pure water, so that carbon dioxide gas and pure water can contact and mix more fully; The valve is arranged on the connecting pipe between the dissolved air membrane and the water outlet of the dissolved air membrane, and is used to control the amount of pure water entering the dissolved air membrane, thereby further controlling the generation speed and concentration of the saturated carbonic acid solution.

6. A control system for preventing bubble precipitation of saturated carbonated solution as claimed in claim 5, characterized in that: The valve is a needle valve.

7. A control system for preventing bubble precipitation of saturated carbonated solution as claimed in claim 6, characterized in that: The water inlet adopts a full pipe to transport pure water to ensure that the water flow and pressure in the dissolved air membrane are in the best state.

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