Valve interlocking device

Abstract

The utility model discloses a valve interlocking device. The valve interlocking device comprises a first valve assembly and a second valve assembly, the first valve assembly comprises a first pneumatic valve and a first pneumatic control valve, and the first pneumatic valve and the first pneumatic control valve are both used for being connected with a first diaphragm valve; the second valve assembly comprises a second pneumatic valve and a second pneumatic control valve, and the second pneumatic valve and the second pneumatic control valve are both used for being connected with a second diaphragm valve; wherein the first pneumatic valve is connected with the second pneumatic valve, the first pneumatic valve is connected with the second pneumatic valve, and the first pneumatic valve is connected with the second pneumatic valve, so that valve interlocking of the first diaphragm valve and the second diaphragm valve is achieved. According to the utility model, the valve interlocking of the first diaphragm valve and the second diaphragm valve is realized through the first pneumatic valve, the second pneumatic valve, the first pneumatic control valve and the second pneumatic control valve, and compared with the valve interlocking mode that the first diaphragm valve and the second diaphragm valve are mechanically interlocked only through the pneumatic valves in the prior art; and quick interlocking and frequent switching of the valve are ensured.

Description

Technical Field

[0001] The embodiments of the present utility model relate to the technical field of valves, and particularly to a valve interlock device. Background Art

[0002] To ensure the safety of the machine platform during the process, avoid cavity contamination or safety accidents, improve the reliability of the machine platform, and achieve effective long-distance interlock between diaphragm valves, it is particularly necessary to ensure reliable interlock. With the increase in process requirements and the development of coating technology, frequent valve switching is required during the process, which not only requires rapid valve response but also requires safety and reliability. In the prior art, the valve interlock between diaphragm valves is achieved by adding a normally open small pneumatic valve for mechanical interlock. However, in the case of long-distance and cross-box working conditions, the interlock between diaphragm valves will cause response delay, unable to achieve rapid interlock and frequent valve switching. Therefore, how to ensure rapid interlock and frequent switching of valves is an urgent problem to be solved. Summary of the Utility Model

[0003] The embodiments of the present utility model provide a valve interlock device, which can ensure rapid interlock and frequent switching of valves.

[0004] In a first aspect, the embodiments of the present utility model provide a valve interlock device, which includes: a first valve assembly, which includes a first pneumatic valve and a first air control valve, and both the first pneumatic valve and the first air control valve are used to connect with a first diaphragm valve; a second valve assembly, which includes a second pneumatic valve and a second air control valve, and both the second pneumatic valve and the second air control valve are used to connect with a second diaphragm valve; wherein, the first pneumatic valve is connected with the second air control valve, and the first air control valve is connected with the second pneumatic valve to achieve the valve interlock between the first diaphragm valve and the second diaphragm valve.

[0005] Further, a first intake sub-branch is provided in the first valve assembly, one end of the first intake sub-branch is connected with the first air control valve, and the other end is connected with the first intake branch in the first valve assembly.

[0006] Further, the first valve assembly further includes a first solenoid valve, one end of the first solenoid valve is connected with the first pneumatic valve, and the other end is connected with one end of a second intake sub-branch in the first valve assembly, and the other end of the second intake sub-branch is connected with the first intake branch.

[0007] Further, the first intake branch is connected with the main intake path in the valve interlock device.

[0008] Further, a third intake sub-branch is provided in the second valve assembly. One end of the third intake sub-branch is connected to the second pneumatic control valve, and the other end is connected to the second intake branch in the second valve assembly.

[0009] Further, the second valve assembly further includes a second solenoid valve. One end of the second solenoid valve is connected to the second pneumatic valve, and the other end is connected to one end of a fourth intake sub-branch in the second valve assembly. The other end of the fourth intake sub-branch is connected to the second intake branch.

[0010] Further, the second intake branch is connected to the main intake path in the valve interlock device.

[0011] Further, the first pneumatic valve and the second pneumatic valve are normally open pneumatic valves.

[0012] Further, the first pneumatic control valve and the second pneumatic control valve are normally closed pneumatic control valves.

[0013] Further, the first solenoid valve in the first valve assembly and the second solenoid valve in the second valve assembly are both valve island solenoid valves.

[0014] An embodiment of the present utility model provides a valve interlock device. Among them, the valve interlock device includes: a first valve assembly, which includes a first pneumatic valve and a first pneumatic control valve, and both the first pneumatic valve and the first pneumatic control valve are used to be connected to a first diaphragm valve; a second valve assembly, which includes a second pneumatic valve and a second pneumatic control valve, and both the second pneumatic valve and the second pneumatic control valve are used to be connected to a second diaphragm valve; wherein, the first pneumatic valve is connected to the second pneumatic control valve, and the first pneumatic control valve is connected to the second pneumatic valve to achieve valve interlock between the first diaphragm valve and the second diaphragm valve. The embodiment of the present utility model realizes valve interlock between the first diaphragm valve and the second diaphragm valve through the first pneumatic valve, the second pneumatic valve, the first pneumatic control valve and the second pneumatic control valve. Compared with the prior art's valve interlock method that only mechanically interlocks the first diaphragm valve and the second diaphragm valve through pneumatic valves, it ensures the quick interlock and frequent switching of the valves. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a schematic diagram of the valve interlock device provided by the embodiment of the present utility model;

[0017] Figure 2 Schematic flowchart of the valve control method provided by the embodiment of the present invention;

[0018] Figure 3 Schematic sub - flowchart of the valve control method provided by the embodiment of the present invention;

[0019] Figure 4 Schematic diagram of a thin - film deposition device provided by the embodiment of the present invention;

[0020] Figure 5 Schematic diagram of controlling a solenoid valve through a current control module provided by the embodiment of the present invention;

[0021] Figure 6 Schematic diagram of comparing the coil current in the embodiment of the present invention with the existing coil current;

[0022] Reference numerals:

[0023] 10, valve interlock device; 11, first valve assembly; 111, first pneumatic valve; 112, first air - controlled valve; 113, first solenoid valve; 114, first intake sub - branch; 115, second intake sub - branch; 116, first intake branch; 12, second valve assembly; 121, second pneumatic valve; 122, second air - controlled valve; 123, second solenoid valve; 124, third intake sub - branch; 125, fourth intake sub - branch; 126, second intake branch; 13, main intake path; 100, thin - film deposition device; 20, current control module; 30, first diaphragm valve; 40, second diaphragm valve; 21, signal control module; 22, controller; 23, duty - cycle control module; 24, constant voltage source. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0025] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0026] It should also be understood that the terms used in the description of the present utility model herein are merely for the purpose of describing specific embodiments and are not intended to limit the present utility model. As used in the description of the present utility model and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms.

[0027] It should be further understood that the term "and / or" used in the description of the present utility model and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0028] As used in this specification and the appended claims, the term "if" can be interpreted as "when", "once", "in response to determining" or "in response to detecting" depending on the context. Similarly, the phrase "if determined" or "if [the described condition or event] is detected" can be interpreted as meaning "once determined", "in response to determining", "once [the described condition or event] is detected" or "in response to detecting [the described condition or event]" depending on the context.

[0029] Please refer to Figure 1 , Figure 1 which is a schematic diagram of the valve interlocking device provided for the embodiment of the present utility model; as Figure 1 shown, the valve interlocking device 10 includes a first valve assembly 11 and a second valve assembly 12. Among them, the first valve assembly 11 includes a first pneumatic valve 111 and a first pneumatic control valve 112, and both the first pneumatic valve 111 and the first pneumatic control valve 112 are used to connect with a first diaphragm valve 30; the second valve assembly 12 includes a second pneumatic valve 121 and a second pneumatic control valve 122, and both the second pneumatic valve 121 and the second pneumatic control valve 122 are used to connect with a second diaphragm valve 40; wherein, the first pneumatic valve 111 is connected to the second pneumatic control valve 122, and the first pneumatic control valve 112 is connected to the second pneumatic valve 121 to achieve the valve interlocking of the first diaphragm valve 30 and the second diaphragm valve 40. It should be noted that in this embodiment, the interlocking of the first diaphragm valve 30 and the second diaphragm valve 40 is achieved through the first pneumatic valve 111, the second pneumatic valve 121, the first pneumatic control valve 112 and the second pneumatic control valve 122. Compared with the valve interlocking method in the prior art that only mechanically interlocks the first diaphragm valve 30 and the second diaphragm valve 40 through pneumatic valves, the rapid interlocking and frequent switching of the valves are ensured.

[0030] Please continue to refer to Figure 1, in this embodiment, a first air intake sub-branch 114 is provided in the first valve assembly 11. One end of the first air intake sub-branch 114 is connected to the first pneumatic control valve 112, and the other end is connected to the first air intake branch 116 in the first valve assembly 11. It should be noted that, in this embodiment, the first pneumatic control valve 112 is a normally closed pneumatic control valve and is a normally closed pneumatic control valve with a large flow rate; the first pneumatic valve 111 is a normally open pneumatic valve and is a normally open small pneumatic valve.

[0031] Please continue to refer to Figure 1 , in this embodiment, the first valve assembly 11 further includes a first solenoid valve 113. One end of the first solenoid valve 113 is connected to the first pneumatic valve 111, and the other end is connected to one end of a second air intake sub-branch 115 in the first valve assembly 11. The other end of the second air intake sub-branch 115 is connected to the first air intake branch 116. Specifically, the first air intake branch 116 is connected to the main air intake path 13 in the valve interlocking device 10. It should be noted that, in this embodiment, the first solenoid valve 113 is a valve island solenoid valve.

[0032] Please continue to refer to Figure 1 , in this embodiment, a third air intake sub-branch 124 is provided in the second valve assembly 12. One end of the third air intake sub-branch 124 is connected to the second pneumatic control valve 122, and the other end is connected to the second air intake branch 126 in the second valve assembly 12. It should be noted that, in this embodiment, the second pneumatic control valve 122 is a normally closed pneumatic control valve and is a normally closed pneumatic control valve with a large flow rate; the second pneumatic valve 121 is a normally open pneumatic valve and is a normally open small pneumatic valve.

[0033] Please continue to refer to Figure 1 , in this embodiment, the second valve assembly 12 further includes a second solenoid valve 123. One end of the second solenoid valve 123 is connected to the second pneumatic valve 121, and the other end is connected to one end of a fourth air intake sub-branch 125 in the second valve assembly 12. The other end of the fourth air intake sub-branch 125 is connected to the second air intake branch 126. It should be noted that, in this embodiment, the second air intake branch 126 is connected to the main air intake path 13 in the valve interlocking device 10.

[0034] For easy understanding, the detailed valve interlocking of the first diaphragm valve 30 and the second diaphragm valve 40 realized by the first valve assembly 11 and the second valve assembly 12 is introduced in detail as follows:

[0035] When the first solenoid valve 113 is powered on, the first pneumatic valve 111 opens, and the air source in the main intake passage 13 enters the first intake sub-branch 114 and the second intake sub-branch 115 through the first intake branch 116. The air source enters the first solenoid valve 113 through the second intake sub-branch 115, and enters the first pneumatic valve 111 from the first solenoid valve 113, causing the valve of the first pneumatic valve 111 to open. Furthermore, the valve of the first diaphragm valve 30 is opened. The air source enters the first pneumatic control valve 112 through the first intake sub-branch 114, causing the valve of the first pneumatic control valve 112 to open. After the valve of the first pneumatic control valve 112 is opened, air is supplied to the second pneumatic valve 121, effectively blocking the air source entering from the second solenoid valve 123, causing the valve of the second pneumatic valve 121 to close, and thus causing the valve of the second diaphragm valve 40 to close. At this time, the valve of the second pneumatic control valve 122 is closed, the second solenoid valve 123 is de-energized, the valve of the first diaphragm valve 30 is opened, and the valve of the second diaphragm valve 40 is closed, realizing valve interlock.

[0036] Understandably, when the second solenoid valve 123 is powered on, the second pneumatic valve 121 opens, and the air source in the main intake passage 13 enters the third intake sub-branch 124 and the fourth intake sub-branch 125 through the second intake branch 126. The air source enters the second solenoid valve 123 through the fourth intake sub-branch 125, and enters the second pneumatic valve 121 from the second solenoid valve 123, causing the valve of the second pneumatic valve 121 to open. Furthermore, the valve of the second diaphragm valve 40 is opened. The air source enters the second pneumatic control valve 122 through the third intake sub-branch, causing the valve of the second pneumatic control valve 122 to open. After the valve of the second pneumatic control valve 122 is opened, air is supplied to the first pneumatic valve 111, effectively blocking the air source entering from the first solenoid valve 113, causing the valve of the first pneumatic valve 111 to close, and thus causing the valve of the first diaphragm valve 30 to close. At this time, the valve of the first pneumatic control valve 112 is closed, the first solenoid valve 113 is de-energized, the valve of the first diaphragm valve 30 is closed, and the valve of the second diaphragm valve 40 is opened, realizing valve interlock.

[0037] It should be noted that in this embodiment, since both the first pneumatic control valve 112 and the second pneumatic control valve 122 are large-flow normally closed pneumatic control valves with relatively large air flow rates, compared with the prior art valve interlock method that only mechanically interlocks the first diaphragm valve 30 and the second diaphragm valve 40 through the first pneumatic valve 111 and the second pneumatic valve 121, the problem of valve interlock time delay of the first diaphragm valve 30 and the second diaphragm valve 40 can be effectively solved, and the valve can be quickly and frequently switched between open and closed states.

[0038] Please refer toFigure 2 , Figure 2 is a schematic flowchart of the valve control method provided by an embodiment of the present invention. The valve control method will be described in detail below. As Figure 2 shown, the method includes the following steps S110 - S120.

[0039] S110. If a square wave signal with a preset duty ratio is received, adjust the coil current according to the square wave signal;

[0040] S120. Control the opening and closing of the first solenoid valve and / or the second solenoid valve according to the adjusted coil current.

[0041] In this embodiment, the valve control method is applied to the first solenoid valve or the second solenoid valve in the above valve interlock device. If the first solenoid valve and / or the second solenoid valve receives a square wave signal with a preset duty ratio, the coil current is adjusted according to the square wave signal. Among them, the square wave signal with the preset duty ratio includes a square wave signal with a first preset duty ratio, a square wave signal with a second preset duty ratio, and a square wave signal with a third preset duty ratio. The coil current is the current of the coil in the first solenoid valve and / or the second solenoid valve. Understandably, after adjusting the coil current according to the square wave signal, control the opening and closing of the first solenoid valve and / or the second solenoid valve according to the adjusted coil current. It should be noted that in this embodiment, the square wave signal with the first preset duty ratio is a square wave signal with a duty ratio of 100%; the square wave signal with the second preset duty ratio is a square wave signal with a duty ratio of a%; the square wave signal with the third preset duty ratio is a square wave signal with a duty ratio of b%. Understandably, the specific values of a and b are determined according to the actual situation and are not specifically limited here. It should also be noted that in this embodiment, the opening of the first solenoid valve and / or the second solenoid valve is powered on, and the closing of the first solenoid valve and / or the second solenoid valve is powered off.

[0042] In some embodiments, such as this embodiment, as Figure 3 shown, the step S120 may include steps S121 - S123.

[0043] S121. If the adjusted coil current reaches the opening trigger current, control the first solenoid valve and / or the second solenoid valve to open;

[0044] S122. If the adjusted coil current reaches the holding current, maintain the opening of the first solenoid valve and / or the second solenoid valve;

[0045] S123. If the adjusted coil current reaches the closing trigger current, control the first solenoid valve and / or the second solenoid valve to close.

[0046] In this embodiment, if the square wave signal with the preset duty ratio received is the square wave signal with the first preset duty ratio, when the adjusted coil current reaches the turn-on trigger current, the first solenoid valve and / or the second solenoid valve is controlled to open; if the square wave signal with the preset duty ratio received is the square wave signal with the second preset duty ratio, when the adjusted coil current reaches the holding current, the first solenoid valve and / or the second solenoid valve is maintained open; if the square wave signal with the preset duty ratio received is the square wave signal with the third preset duty ratio, when the adjusted coil current reaches the turn-off trigger current, the first solenoid valve and / or the second solenoid valve is controlled to close.

[0047] It should be noted that, in this embodiment, as Figure 4 shown, the embodiment of the present invention further provides a thin film deposition device, which includes the above-mentioned valve interlocking device, current control module, first diaphragm valve and second diaphragm valve. The current control module is connected to the first solenoid valve and the second solenoid valve in the valve interlocking device to control the opening and closing of the first solenoid valve and the second solenoid valve. Specifically, the current control module includes a controller, a signal control module, a duty ratio control module and a constant voltage source. The controller is disposed between the signal control module and the duty ratio control module. The duty ratio control module is connected to the constant voltage source. The constant voltage source is connected to the first solenoid valve and the second solenoid valve. The first diaphragm valve is connected to the first pneumatic valve and the first pneumatic control valve in the valve interlocking device; the second diaphragm valve is connected to the second pneumatic valve and the second pneumatic control valve in the valve interlocking device. The signal control module includes a signal output module and a relay. The signal output module is connected to both the relay and the controller, and the relay is connected to the controller.

[0048] For easy understanding, the process of controlling the opening and closing of the first solenoid valve and / or the second solenoid valve by the current control module is introduced in detail as follows:

[0049] As Figure 5As shown, the signal control module outputs a control signal to the controller. The controller receives the control signal sent by the signal control module and, according to the control signal, triggers the duty cycle control module to output a square wave signal with a preset duty cycle to the constant voltage source. The constant voltage source outputs a corresponding voltage square wave to the coil of the first solenoid valve and / or the second solenoid valve according to the square wave signal with the preset duty cycle, so as to adjust the coil current of the first solenoid valve and / or the second solenoid valve, and control the opening and closing of the first solenoid valve and / or the second solenoid valve according to the adjusted coil current. Specifically, if the square wave signal with the preset duty cycle is the square wave signal with the first preset duty cycle, when the adjusted coil current reaches the opening trigger current, the first solenoid valve and / or the second solenoid valve is controlled to open; if the square wave signal with the preset duty cycle is the square wave signal with the second preset duty cycle, when the adjusted coil current reaches the holding current, the first solenoid valve and / or the second solenoid valve is maintained open; if the square wave signal with the preset duty cycle is the square wave signal with the third preset duty cycle, when the adjusted coil current reaches the closing trigger current, the first solenoid valve and / or the second solenoid valve is controlled to close. Assume that the adjusted coil current is I, the opening trigger current is I ton , the holding current is I hold , and the closing trigger current is I off . For the sake of simplicity in description, hereinafter, the first solenoid valve and the second solenoid valve are collectively referred to as the solenoid valve. When I > I ton , the solenoid valve opens. When I = I hold , the solenoid valve is maintained open. When I < I off , the solenoid valve closes.

[0050] Please refer to Figure 6 , I on is the holding current in the existing solenoid valve control method. Understandably, I on is greater than I hold . And the opening trigger current in the existing solenoid valve control method is greater than the opening trigger current in the solenoid valve control method of this embodiment. That is, in this embodiment, through the high startup and low maintenance of the first solenoid valve, the rapid opening and closing of the solenoid valve can be effectively realized, the valve response speed can be effectively improved, and the purpose of energy saving can be achieved, that is, the low energy consumption requirement during the opening process of the solenoid valve is satisfied.

[0051] In summary, in this embodiment, the valve interlock of the first diaphragm valve and the second diaphragm valve is achieved through the first pneumatic valve, the second pneumatic valve, the first pneumatic control valve and the second pneumatic control valve. Compared with the prior art in which only a single pneumatic valve is used for the mechanical interlock of the first diaphragm valve and the second diaphragm valve, the valve interlock method ensures the rapid valve interlock and frequent switching of the first diaphragm valve and the second diaphragm valve; by adopting a high-current opening solenoid valve and a low-current maintaining solenoid valve, the rapid response speed of the valve can be effectively improved, and the power can be reduced and the energy can be saved.

[0052] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A valve interlocking device, characterized in that: include: A first valve assembly, comprising a first pneumatic valve and a first air-controlled valve, wherein the first pneumatic valve and the first air-controlled valve are both used to be connected to the first diaphragm valve; A second valve assembly, comprising a second pneumatic valve and a second air-controlled valve, wherein the second pneumatic valve and the second air-controlled valve are both used to be connected to the second diaphragm valve; The first pneumatic valve is connected to the second pneumatic control valve, and the first pneumatic control valve is connected to the second pneumatic valve, so as to realize valve interlocking of the first diaphragm valve and the second diaphragm valve.

2. The valve interlocking device according to claim 1, characterized in that: A first air intake sub-branch is provided in the first valve assembly, one end of the first air intake sub-branch is connected to the first air control valve, and the other end is connected to the first air intake branch in the first valve assembly.

3. The valve interlocking device according to claim 2, characterized in that: The first valve assembly also includes a first solenoid valve, one end of which is connected to the first pneumatic valve, and the other end of which is connected to one end of a second intake sub-branch in the first valve assembly, and the other end of the second intake sub-branch is connected to the first intake branch.

4. The valve interlocking device according to claim 3, characterized in that: The first air intake branch is connected to the air intake main path in the valve interlocking device.

5. The valve interlocking device according to claim 1, characterized in that: A third air intake sub-branch is provided in the second valve assembly, one end of the third air intake sub-branch is connected to the second air control valve, and the other end of the third air intake sub-branch is connected to the second air intake branch in the second valve assembly.

6. The valve interlocking device according to claim 5, characterized in that: The second valve assembly also includes a second solenoid valve, one end of which is connected to the second pneumatic valve, and the other end of which is connected to one end of a fourth intake sub-branch in the second valve assembly, and the other end of the fourth intake sub-branch is connected to the second intake branch.

7. The valve interlocking device according to claim 6, characterized in that: The second air intake branch is connected to the air intake main path in the valve interlocking device.

8. The valve interlocking device according to any one of claims 1 to 7, characterized in that: The first pneumatic valve and the second pneumatic valve are normally open pneumatic valves.

9. The valve interlocking device according to any one of claims 1 to 7, characterized in that: The first air-controlled valve and the second air-controlled valve are normally closed air-controlled valves.

10. The valve interlocking device according to any one of claims 1 to 7, characterized in that: The first solenoid valve in the first valve assembly and the second solenoid valve in the second valve assembly are both valve island solenoid valves.

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