Device integrating power supply and balanced air supply

Abstract

The utility model relates to an integrated power supply and balanced gas supply device, which comprises a power supply unit, a gas supply unit and a gas supply unit, the power supply unit comprises a power supply main pipeline and a plurality of power supply branches connected with the power supply main pipeline, and the plurality of power supply branches are arranged in parallel; each power supply branch is provided with a first pressure regulating valve and a first pressure gauge connected with the first pressure regulating valve; the balance air supply unit comprises an air supply main pipeline and a plurality of air supply branches connected with the air supply main pipeline, the air supply branches are arranged in parallel, and each air supply branch is provided with a second pressure regulating valve and a second pressure gauge connected with the second pressure regulating valve; wherein a pressure release valve and a flow controller are arranged on an air supply branch for providing pressure balance for a barrel and / or a storage tank in the semiconductor equipment; the device can solve the problems of power supply and balanced air supply at the same time, can be prefabricated in advance, is convenient to install, saves project implementation time, and improves working efficiency.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing, and particularly relates to a device integrating power supply and balanced air supplement. Background Art

[0002] With the development of the semiconductor industry, various corrosive liquids such as stripping liquids, etching liquids, acid liquids, and alkali liquids have begun to be widely used. Various semiconductor devices have emerged, including dilution devices, mixing devices, transfer devices, etc. All kinds of devices need to use barrels, TANKS (storage tanks), etc. to store chemical liquids. When taking chemical liquids from the storage barrels and TANKS, air needs to be supplemented to maintain internal pressure balance. The supply of chemical liquids also requires a pneumatic diaphragm pump, and the pneumatic diaphragm pump requires CDA (compressed air) as a power source.

[0003] In the existing liquid supply system, although there are a power supply unit and an air supplement unit, due to different project requirements, the structures of the power supply unit and the air supplement unit are different, and they need to be designed and installed separately according to project requirements, which increases the project implementation time and affects the project progress; moreover, the power supply unit and the air supplement unit are generally designed separately in the liquid supply system, which increases the installation difficulty and affects the work efficiency. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a device integrating power supply and balanced air supplement that can be prefabricated in advance and is convenient for installation, which can not only solve the problems of power supply and balanced air supplement simultaneously, but also save project implementation time and improve work efficiency.

[0005] The technical solution of the utility model is a device integrating power supply and balanced air supplement, including:

[0006] A power supply unit, including a main power supply pipeline and a plurality of power supply branch pipelines connected to the main power supply pipeline. The plurality of power supply branch pipelines are arranged in parallel, and each power supply branch pipeline is provided with a first pressure regulating valve and a first pressure gauge connected to the first pressure regulating valve;

[0007] A balanced air supplement unit, including a main air supplement pipeline and a plurality of air supplement branch pipelines connected to the main air supplement pipeline. The plurality of air supplement branch pipelines are arranged in parallel, and each air supplement branch pipeline is provided with a second pressure regulating valve and a second pressure gauge connected to the second pressure regulating valve; wherein, a pressure relief valve and a flow controller are arranged on the air supplement branch pipeline for providing pressure balance to the barrels and / or storage tanks in the semiconductor device.

[0008] Preferably, a first pressure sensor is arranged on the main power supply pipeline, and a second pressure sensor is arranged on the main air supplement pipeline.

[0009] Preferably, there are four power supply branches. Among them, three power supply branches are used to supply power to the pneumatic diaphragm pump in the semiconductor device, and one power supply branch is used to supply power to the pneumatic diaphragm valve in the semiconductor device.

[0010] Preferably, there are three air replenishment branches. Among them, two air replenishment branches are used to provide pressure balance for the barrels and / or storage tanks in the semiconductor device, and one air replenishment branch is used to provide positive pressure protection for the semiconductor device.

[0011] Preferably, it further includes a housing, and the power supply unit and the balanced air replenishment unit are fixed in the housing.

[0012] Preferably, the housing includes:

[0013] A bottom mounting plate, on which the power supply unit and the balanced air replenishment unit are fixed;

[0014] A front control panel, on which the first pressure gauge, the second pressure gauge, the flow controller, the first pressure sensor, the second pressure sensor, and the adjusting elements of the first pressure regulating valve and the second pressure regulating valve are arranged;

[0015] A back panel, on which the air replenishment interfaces of the air replenishment branches and the pressure relief ports of the pressure relief valves are arranged;

[0016] Side panels, fixed on both sides of the housing, and the power supply interfaces of the power supply branches are arranged on the side panel on one side;

[0017] A top plate, fixed on the top of the housing and hollowed out in the middle, so that an opening is formed at the top of the housing; the first air source inlet of the main power supply pipeline and the second air source inlet of the main air replenishment pipeline are both arranged on the top plate;

[0018] A cover plate, covering the opening and fixed to the top plate by screws.

[0019] Compared with the prior art, the beneficial effects of the present utility model are:

[0020] ⑴ This device is integrated and has complete functions. It can solve two problems of power supply and balanced air replenishment at the same time, and can be prefabricated in advance. By integrating the design of the power supply unit and the balanced air replenishment unit and manufacturing them centrally, it is convenient for installation, saves project implementation time, and improves work efficiency.

[0021] ⑵ This device integrates the design of the power supply unit and the balanced air replenishment unit, improves the standardization degree of the power supply unit and the balanced air replenishment unit, unifies the structural design and functional layout of the power supply unit and the balanced air replenishment unit, reduces the design difficulty, improves the design work efficiency, and reduces the manufacturing difficulty.

[0022] ⑶ By setting multiple power supply branches and multiple air supplement branches, the power source requirements in different projects and the air supplement requirements for different numbers of liquid storage facilities such as barrels and storage tanks can be met, improving the applicability of the device.

[0023] ⑷ Each power supply branch is provided with a first pressure regulating valve to separately control the CDA pressure of each power supply branch, provide a power source for the pneumatic diaphragm pump and pneumatic diaphragm valve, and ensure the accuracy of real-time pressure control of each power supply branch through the first pressure gauge.

[0024] ⑸ Each air supplement branch is provided with a second pressure regulating valve to separately control the N2 pressure of each air supplement branch, and ensure the accuracy of real-time pressure control of each power supply branch through the second pressure gauge; among them, a pressure relief valve and a flow controller are provided on the air supplement branch used to provide pressure balance to the barrels and storage tanks in the semiconductor equipment. The N2 flow rate is controlled through the flow controller to provide N2 air supplement to the barrels and storage tanks in the semiconductor equipment, preventing situations such as barrel clogging; when the pressure in the barrel or storage tank is too high, pressure relief is carried out through the pressure relief valve. Description of the Drawings

[0025] Figure 1 is a schematic structural diagram of the device for integrated power supply and balanced air supplement of the present utility model;

[0026] Figure 2 is Figure 1 a three-dimensional view from another angle;

[0027] Figure 3 is an exploded schematic diagram of the device for integrated power supply and balanced air supplement of the present utility model;

[0028] Figure 4 is a schematic structural diagram of the power supply unit of the present utility model;

[0029] Figure 5 is a schematic structural diagram of the balanced air supplement unit of the present utility model.

[0030] Description of the Main Component Symbols:

[0031] Power supply unit 1; main power supply pipeline 11; first air source inlet 111; power supply branch 12; power source interface 121 for pneumatic diaphragm pump; power source interface 122 for pneumatic diaphragm valve; first pressure regulating valve 13; first pressure gauge 14; first pressure sensor 15; balance air supply unit 2; main air supply pipeline 21; second air source inlet 211; air supply branch 22; balance air supply interface 221; positive pressure protection interface 222; second pressure regulating valve 23; second pressure gauge 24; pressure relief valve 25; pressure relief port 251; flow controller 26; second pressure sensor 27; housing 3; bottom mounting plate 31; front control panel 32; back panel 33; side panel 34; top panel 35; opening 351; cover plate 36. Detailed implementation mode

[0032] The present utility model will be further described in detail below with reference to the accompanying drawings:

[0033] Please refer to Figures 1 to 3 As shown, the present utility model provides a device integrating power supply and balance air supply, including: a power supply unit 1 and a balance air supply unit 2. The power supply unit 1 provides power for a pneumatic diaphragm pump and a pneumatic diaphragm valve in a semiconductor device by controlling the pressure of CDA (compressed air), and the balance air supply unit 2 supplies air to liquid storage facilities such as barrels and storage tanks in the semiconductor device by controlling the pressure of N2 (nitrogen) to prevent the barrels from collapsing.

[0034] Please refer to Figure 3 、 Figure 4 As shown, the power supply unit 1 includes a main power supply pipeline 11 and a plurality of power supply branches 12 connected to the main power supply pipeline 11. The plurality of power supply branches 12 are arranged in parallel, and each power supply branch 12 is provided with a first pressure regulating valve 13 and a first pressure gauge 14 connected to the first pressure regulating valve 13; CDA enters from the first air source inlet 111 of the main power supply pipeline 11, is dispersed into the plurality of power supply branches 12 through the main power supply pipeline 11, and the power of each power supply branch 12 is controlled separately by the first pressure regulating valve 13. The first pressure gauge 14 displays the pressure after being adjusted by the first pressure regulating valve 13, and the accuracy of real-time pressure control of each power supply branch 12 is ensured through the first pressure gauge 14. By providing a plurality of power supply branches 12 to meet the power source requirements in different projects, the applicability of the present device is improved.

[0035] Furthermore, a first pressure sensor 15 is provided on the main power supply pipeline 11, preferably a digital display vacuum positive and negative pressure sensor, and the first pressure sensor 15 real-time detects the CDA inlet pressure entering from the first air source inlet 111.

[0036] In this embodiment, please refer to Figure 4As shown in the figure, the power supply unit 1 is provided with four power supply branches 12. Among them, three power supply branches 12 are used to supply power to the pneumatic diaphragm pump in the semiconductor device, and one power supply branch 12 is used to supply power to the pneumatic diaphragm valve in the semiconductor device, so that the power supply unit 1 forms 3 pneumatic diaphragm pump power source interfaces 121 and 1 pneumatic diaphragm valve power source interface 122.

[0037] In this embodiment, a digital display vacuum positive and negative pressure sensor is provided on the main power supply pipeline 11. The digital display vacuum positive and negative pressure sensor detects the CDA inlet pressure in real time. A first pressure regulating valve 13 is provided on each power supply branch 12 to separately control the power of each power supply branch 12; each first pressure regulating valve 13 is connected to a first pressure gauge 14 at opposite positions through a hose. The first pressure gauge 14 displays the pressure adjusted by the first pressure regulating valve 13, and the accuracy of real-time pressure control of the power supply branch 12 is ensured through the first pressure gauge 14.

[0038] Please refer to Figure 3 、 Figure 5 As shown in the figure, the balance air supplement unit 2 includes an air supplement main pipeline 21 and a plurality of air supplement branches 22 connected to the air supplement main pipeline 21. The plurality of air supplement branches 22 are arranged in parallel. Each air supplement branch 22 is provided with a second pressure regulating valve 23 and a second pressure gauge 24 connected to the second pressure regulating valve 23; N2 enters from the second air source inlet 211 of the air supplement main pipeline 21, is dispersed to the plurality of air supplement branches 22 through the air supplement main pipeline 21, and the pressure of each air supplement branch 22 is separately controlled through the second pressure regulating valve 23. The second pressure gauge 24 displays the pressure adjusted by the second pressure regulating valve 23, and the accuracy of real-time pressure control of each air supplement branch 22 is ensured through the second pressure gauge 24. By providing a plurality of air supplement branches 22 to meet the air supplement requirements of different numbers of liquid storage facilities such as barrels and storage tanks, the applicability of the device is improved.

[0039] As Figure 5 As shown in the figure, a pressure relief valve 25 and a flow controller 26 are provided on the air supplement branch 22 for providing pressure balance to the barrels and storage tanks in the semiconductor device. The pressure relief valve 25 is preferably a spring type pressure relief valve. During the balance air supplement process, when the pressure in the barrel or storage tank in the semiconductor device is too high and exceeds the preset pressure threshold, pressure relief is carried out through the pressure relief port 251 of the pressure relief valve 25. The setting of the pressure relief valve 25 is also to prevent the failure of the second pressure regulating valve 23; the flow controller 26 is preferably a mechanical flow controller for controlling the N2 flow rate output by the air supplement branch 22.

[0040] Furthermore, a second pressure sensor 27, preferably a digital display vacuum positive and negative pressure sensor, is provided on the air supplement main pipeline 21. The second pressure sensor 27 detects the N2 inlet pressure in real time.

[0041] In this embodiment, please refer to Figure 5 As shown, the balanced air supplement unit 2 is provided with three air supplement branches 22. Among them, two air supplement branches 22 are used to provide pressure balance for the barrels and storage tanks in the semiconductor equipment, and one air supplement branch 22 is used to provide positive pressure protection for the semiconductor equipment, so that the balanced air supplement unit 2 forms 2 balanced air supplement interfaces 221 and 1 positive pressure protection interface 222.

[0042] In this embodiment, a digital display vacuum positive and negative pressure sensor is arranged on the main air supplement pipeline 21. The digital display vacuum positive and negative pressure sensor detects the N2 inlet pressure in real time. A second pressure regulating valve 23 is arranged on each air supplement branch 22 to separately control the pressure of each air supplement branch 22; the second pressure regulating valve 23 is connected with a second pressure gauge 24 at opposite positions through a hose. The second pressure gauge 24 displays the pressure adjusted by the second pressure regulating valve 23, and the accuracy of the real-time pressure control of the air supplement branch 22 is ensured through the second pressure gauge 24.

[0043] In this embodiment, spring-type pressure relief valves and mechanical flow controllers are arranged on the two air supplement branches for providing pressure balance for the barrels and storage tanks in the semiconductor equipment. The spring-type pressure relief valves are connected with the second pressure regulating valve 23. During the balanced air supplement process, when the pressure in the barrel or storage tank in the semiconductor equipment is too high and exceeds the preset pressure threshold, both air supplement branches can relieve pressure through the pressure relief ports 251 of the spring-type pressure relief valves; the mechanical flow controllers are connected with the second pressure regulating valve 23, and the N2 flow rate output from the balanced air supplement interface 222 of the air supplement branch is separately controlled by adjusting the mechanical flow controller.

[0044] Please refer to Figures 1 to 3 As shown, the device integrating power supply and balanced air supplement further includes a housing 3. The power supply unit 1 and the balanced air supplement unit 2 are fixed in the housing 3. The housing 3 includes: a bottom mounting plate 31, a front control panel 32, a back panel 33, side panels 34, a top plate 35, and a cover plate 36. The bottom mounting plate 31 is located at the bottom of the housing 3, and the power supply unit 1 and the balanced air supplement unit 2 are fixed on the bottom mounting plate 31; the front control panel 32 is located on the front of the housing 3. As Figure 1 shown, the first pressure gauge 14, the second pressure gauge 24, the flow controller 26, the first pressure sensor 15, the second pressure sensor 27, and the adjusting elements of the first pressure regulating valve 13 and the second pressure regulating valve 23 are all arranged on the front control panel 32; the back panel 33 is located on the back of the housing 3. As Figure 2 shown, the air supplement interfaces of the air supplement branch 22 and the pressure relief ports 251 of the pressure relief valve 25 are all arranged on the back panel 33. In this embodiment, the air supplement interfaces include 2 balanced air supplement interfaces 221 and 1 positive pressure protection interface 222; the side panels 34 are located on both sides of the housing 3. As Figure 2As shown, the power supply interface of the power supply branch 12 is arranged on the side panel 34 on one side. In this embodiment, the power supply interface includes 3 pneumatic diaphragm pump power source interfaces 121 and 1 pneumatic diaphragm valve power source interface 122, both of which are located on the side panel 34 on the left side of the housing; the top plate 35 is fixed to the top of the housing 3 and is hollowed out in the middle, so that an opening 351 is formed at the top of the housing 3; as Figure 1 , Figure 2 shown, the first air source inlet 111 of the main power supply pipeline 11 and the second air source inlet 211 of the main air replenishment pipeline 21 are both arranged on the top plate 35; the cover plate 36 covers the opening 351, and its size is adapted to the opening 351. The cover plate 36 is fixed to the top plate 35 by screws. By disassembling and assembling the cover plate 36, it is convenient to maintain the power supply unit 1 and the balanced air replenishment unit 2 in the housing.

[0045] The above are only the preferred embodiments of the present invention. All equivalent changes and modifications made according to the scope of the claims of the present invention shall fall within the scope covered by the claims of the present invention.

Claims

1. A device integrating power supply and balanced air supply, characterized in that: include: A power supply unit, comprising a power supply main line and a plurality of power supply branches connected to the power supply main line, wherein the plurality of power supply branches are arranged in parallel, and each power supply branch is provided with a first pressure regulating valve and a first pressure gauge connected to the first pressure regulating valve; A balanced air supply unit comprises an air supply main line and a plurality of air supply branches connected to the air supply main line, wherein the plurality of air supply branches are arranged in parallel, and each air supply branch is provided with a second pressure regulating valve and a second pressure gauge connected to the second pressure regulating valve; wherein a pressure relief valve and a flow controller are provided on the air supply branch for providing pressure balance to barrels and / or storage tanks in semiconductor equipment.

2. The integrated power supply and balanced air supply device according to claim 1, characterized in that: The power supply main line is provided with a first pressure sensor, and the air supply main line is provided with a second pressure sensor.

3. The integrated power supply and balanced air supply device according to claim 1 or 2, characterized in that: The power supply branches include four branches, three of which are used to provide power to the pneumatic diaphragm pumps in the semiconductor device, and one power supply branch is used to provide power to the pneumatic diaphragm valve in the semiconductor device.

4. The integrated power supply and balanced air supply device according to claim 1 or 2, characterized in that: There are three air supply branches, two of which are used to provide pressure balance to barrels and / or storage tanks in semiconductor equipment, and one air supply branch is used to provide positive pressure protection to the semiconductor equipment.

5. The integrated power supply and balanced air supply device according to claim 2, characterized in that: It also includes a shell, in which the power supply unit and the balanced air supply unit are fixed.

6. The integrated power supply and balanced air supply device according to claim 5, characterized in that: The housing comprises: A bottom mounting plate, on which the power supply unit and the balanced air supply unit are fixed; A front control panel, on which the first pressure gauge, the second pressure gauge, the flow controller, the first pressure sensor, the second pressure sensor, and the regulating elements of the first pressure regulating valve and the second pressure regulating valve are all arranged; A back panel, on which the air supply interface of the air supply branch and the pressure relief port of the pressure relief valve are arranged; Side panels are fixed on both sides of the housing, and a power supply interface of a power supply branch is arranged on one of the side panels; A top plate is fixed on the top of the shell and is hollowed out in the middle so that an opening is formed on the top of the shell; a first air source inlet of the power supply main line and a second air source inlet of the air supply main line are both arranged on the top plate; A cover plate is covered on the opening and fixed to the top plate by screws.

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