Off-axis parabolic reflector surface shape detection device

Abstract

The utility model discloses an off-axis parabolic reflector surface shape detection device which comprises a base and a second sliding track, a first sliding track is arranged on the base, a first fixing block is arranged on the first sliding track in a sliding mode, an installation clamp used for horizontally clamping an off-axis parabolic reflector is arranged on the first fixing block, and a second fixing block used for horizontally clamping the off-axis parabolic reflector is arranged on the second sliding track. One end of the second sliding rail is rotatably connected to the base, a second fixing block is arranged on the second sliding rail in a sliding mode, and a concave mirror used for reflecting light rays reflected by the off-axis parabolic mirror is arranged on the second fixing block; the device has the advantages of being convenient to operate, simple in structure and high in precision.

Description

Technical Field

[0001] The utility model belongs to the technical field of mirror surface detection, and particularly relates to an off-axis paraboloid mirror surface shape detection device. Background Art

[0002] The measurement principle of an interferometer is based on the interference phenomenon of waves. When two or more coherent light beams (with the same frequency, the same vibration direction, and a constant phase difference) meet at a certain place in space, they will superpose on each other to produce an interference phenomenon, forming bright and dark interference fringes. The position and shape of these interference fringes depend on the phase difference between each light beam, and the phase difference is related to the physical quantity to be measured (such as optical path difference, geometric length, refractive index). Therefore, by measuring the change of the interference fringes, the change of the physical quantity to be measured can be indirectly measured.

[0003] Taking a laser interferometer as an example, its basic working principle is that a laser emits a laser beam, which is split into two or more coherent light beams by a beam splitter. These light beams re-converge and interfere after passing through different paths in space. When the object to be measured undergoes displacement or shape change, it will change the optical path of one or more of these light beams, resulting in the movement or change of the interference fringes. By detecting the change of the interference fringes with a detector and through signal processing, the displacement amount and shape change parameters of the object to be measured can be calculated. An off-axis paraboloid mirror is usually a mirror with a metal reflective film plated on the base surface. Its reflective surface is a part intercepted from the mother paraboloid. Based on the principle of the geometric paraboloid, a parallel incident collimated light beam can be focused on the focus, and a point light source can also be collimated into a parallel light. The design feature of the off-axis paraboloid mirror is that the focus and the optical axis are not on the same straight line. Due to its off-axis design, the focus can be separated from the optical path, that is, the focus is separated outside the optical axis. This design enables the off-axis paraboloid mirror to have unique focusing and collimating capabilities.

[0004] After the off-axis paraboloid mirror is machined by a single-point diamond turning lathe, it is necessary to detect the surface shape accuracy of the machined surface, so as to make adjustments during the machining of the single-point diamond turning lathe and make compensations in terms of tool position, tool radius, and program to improve the surface quality of the off-axis paraboloid mirror.

[0005] The problems of the prior art are that the mirror surface shape of the off-axis paraboloid mirror is relatively complex and inconvenient to detect; it is difficult to debug when using an interferometer to detect the mirror surface shape of the off-axis paraboloid mirror. Summary of the Invention

[0006] The purpose of the utility model is to provide an off-axis paraboloid mirror surface shape detection device for the problems existing in the prior art, which has the advantages of convenient operation, simple structure, and high precision.

[0007] To achieve the above object, the technical solution adopted by the present utility model is as follows: An off-axis paraboloid mirror surface shape detection device includes a base and a second sliding track. A first sliding track is provided on the base. A first fixing block is slidably arranged on the first sliding track. An installation fixture for horizontally clamping the off-axis paraboloid mirror is provided on the first fixing block. One end of the second sliding track is rotatably connected to the base. A second fixing block is slidably arranged on the second sliding track. A concave mirror for reflecting the light reflected by the off-axis paraboloid mirror is provided on the second fixing block.

[0008] In the above solution, the base is used to support and position the first sliding track and the second sliding track. The installation fixture on the first fixing block can detachably connect the off-axis paraboloid mirror, which is convenient for connection and positioning. The first fixing block can slide along the first sliding track to adjust the position of the off-axis paraboloid mirror and the optical path of the reflected light. One end of the second sliding track is rotatably connected to the base and slidably connected to the second fixing block, which can conveniently adjust the angle and linear position of the concave mirror on the second fixing block, so as to reflect the light reflected by the off-axis paraboloid mirror back to the off-axis paraboloid mirror and the interferometer, and then the surface shape of the off-axis paraboloid mirror can be tested by the interferometer.

[0009] Further, it includes an interferometer. The lens of the interferometer faces the mirror surface of the off-axis paraboloid mirror. The first sliding track is parallel to the light emission direction of the interferometer.

[0010] The mirror surface of the off-axis paraboloid mirror is detected by the light emitted by the interferometer. The light reaches the concave mirror after being reflected by the off-axis paraboloid mirror. The direction of the first sliding track is parallel to the light emission direction to ensure that the off-axis paraboloid mirror can always receive the emitted light of the interferometer during the movement process.

[0011] Further, the installation fixture includes an installation sleeve. A connection groove is provided on the installation sleeve. The off-axis paraboloid mirror is snap-fitted in the connection groove.

[0012] The off-axis paraboloid mirror is snap-fitted through the connection groove provided on the installation sleeve, which is convenient for connection and has a simple structure.

[0013] Further, a first threaded hole is provided on the installation sleeve. A first locking screw for locking the off-axis paraboloid mirror is screwed at the first threaded hole.

[0014] The off-axis paraboloid mirror is locked by the first locking screw to make the connection stable and ensure the test accuracy.

[0015] Further, a connecting shaft is provided on the first fixing block. A bearing is provided on the connecting shaft. The installation sleeve is rotatably connected to the bearing.

[0016] The bearing is connected by a connecting shaft, and the mounting sleeve is rotationally adjusted by the bearing, which is convenient for hitting the reflected light of the off-axis paraboloid mirror onto the concave mirror.

[0017] Furthermore, a second threaded hole is provided on the mounting sleeve, and a locking screw two for cooperating with the connecting shaft is screwed at the second threaded hole.

[0018] The second threaded hole is provided for screwing the locking screw two, and the angle of the mounting sleeve is locked by the locking screw two to ensure the stability and test accuracy of the test.

[0019] Furthermore, a round table is provided at one end of the second sliding track, an annular scale corresponding to the outer ring of the round table is provided on the base, a marking line for cooperating with the annular scale is provided on the round table, and a scale line for cooperating with the second fixing block is provided on the second sliding track.

[0020] By providing an annular scale on the top surface of the base to cooperate with the marking line on the round table, it is convenient to read the angular position of the second sliding track. The scale line on the second sliding track is used to read the position of the second fixing block on the second sliding track, which is convenient for visually observing the position information of the concave mirror, providing a reference for the surface shape of the off-axis paraboloid mirror, and facilitating the quick adjustment of the positions of the first fixing block and the second fixing block.

[0021] Furthermore, both the first sliding track and the second sliding track include sliding rods, and the first fixing block and the second fixing block are slidably connected to the sliding rods.

[0022] The first sliding track and the second sliding track include sliding rods, and sliding holes for slidably cooperating with the sliding rods are provided on the first fixing block and the second fixing block to achieve sliding connection.

[0023] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0024] 1. The first fixing block is slidably arranged on the base, and the off-axis paraboloid mirror is detachably connected and positioned and linearly adjusted through the mounting fixture on the first fixing block. The concave mirror on the second sliding track can be rotationally adjusted and spaced adjusted relative to the off-axis paraboloid mirror, which is convenient and fast for debugging the optical path and easy to operate;

[0025] 2. The fixing block is slidably connected through the sliding track, the off-axis paraboloid mirror is detachably connected through the mounting fixture, and the second sliding track is rotationally connected to the base. The overall structure is simple and convenient to manufacture;

[0026] 3. The surface shape of the off-axis paraboloid mirror is detected by the interferometer in cooperation with the concave mirror, and the test accuracy is high. Description of the Drawings

[0027] Figure 1Stereoscopic structure diagram of an off-axis paraboloid mirror surface shape detection device according to Embodiment 1 of the present utility model;

[0028] Figure 2 Structural sectional view at the installation sleeve in Embodiment 1 of the present utility model;

[0029] Figure 3 Optical path diagram in Embodiment 1 of the present utility model;

[0030] In the figure: 1, base; 2, first sliding track; 3, second sliding track; 4, first fixing block; 5, second fixing block; 6, installation sleeve; 7, connection groove; 8, concave mirror; 9, interferometer; 10, first locking screw; 11, second locking screw; 12, connecting shaft; 13, bearing; 14, sliding rod; 15, frustum; 16, annular scale; 17, marking line; 18, graduation line; 19, off-axis paraboloid mirror. Specific implementation mode

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work conditions belong to the scope of protection of the present utility model. In the description of the present utility model, it should be noted that the terms such as front, rear, left, and right indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship when the product of the present utility model is usually placed. It is only for the convenience of describing the present utility model or simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. Embodiment 1

[0032] As Figures 1-3 shown, an off-axis paraboloid mirror surface shape detection device includes a base 1 and a second sliding track 3. A first sliding track 2 is provided on the base 1. A first fixing block 4 is slidably provided on the first sliding track 2. An installation fixture for horizontally clamping the off-axis paraboloid mirror 19 is provided on the first fixing block 4. One end of the second sliding track 3 is rotatably connected to the base 1. A second fixing block 5 is slidably provided on the second sliding track 3. A concave mirror 8 for reflecting the light reflected by the off-axis paraboloid mirror 19 is provided on the second fixing block 5.

[0033] In the above solution, the base 1 supports and positions the first sliding track 2 and the second sliding track 3. The mounting fixture on the first fixing block 4 can detachably connect the off-axis paraboloid mirror 19, which is convenient for connection and positioning. The first fixing block 4 can slide along the first sliding track 2 to adjust the position of the off-axis paraboloid mirror 19 and the optical path of the reflected light. One end of the second sliding track 3 is rotatably connected to the base 1 and slidably connects the second fixing block 5, which can conveniently adjust the angle and linear position of the concave mirror 8 on the second fixing block 5, so as to reflect the light reflected by the off-axis paraboloid mirror 19 back to the off-axis paraboloid mirror 19 and the interferometer 9, and then the interferometer 9 can measure the surface shape of the off-axis paraboloid mirror 19.

[0034] The off-axis paraboloid mirror surface shape detection device in this solution is a detection tooling that can quickly clamp and adjust the off-axis paraboloid mirror 19. The off-axis paraboloid mirror 19 to be detected is installed on the first fixing block 4, and the angle can be manually rotated and adjusted so that the focal point is at a suitable position in front of the concave mirror, which is convenient for light reflection. The second fixing block 5 can slide along the second sliding track 3 to meet the detection of off-axis paraboloid mirrors 19 with different lengths. The first fixing block 4 used for detection can also slide and can adjust the angle to meet the detection of off-axis paraboloid mirrors 19 with different focal lengths and off-axis angles, and at the same time has the characteristics of simple and convenient debugging and controllable angle.

[0035] Furthermore, it includes an interferometer 9. The lens of the interferometer 9 faces the mirror surface of the off-axis paraboloid mirror 19, and the first sliding track 2 is parallel to the light emission direction of the interferometer 9.

[0036] The mirror surface of the off-axis paraboloid mirror 19 is detected by the light emitted by the interferometer 9. The light reaches the concave mirror 8 after being reflected by the off-axis paraboloid mirror 19. The direction of the first sliding track 2 is parallel to the light emission direction to ensure that the off-axis paraboloid mirror 19 can always receive the emitted light of the interferometer 9 during the movement.

[0037] The interferometer 9 is connected to the base 1 through a support rod.

[0038] Furthermore, the mounting fixture includes a mounting sleeve 6. A connection groove 7 is opened on the mounting sleeve 6, and the off-axis paraboloid mirror 19 is snap-fitted in the connection groove 7.

[0039] The off-axis paraboloid mirror 19 is snap-fitted through the connection groove 7 opened on the mounting sleeve 6, which is convenient for connection and has a simple structure.

[0040] The cylinder provided at the end of the off-axis paraboloid mirror 19 has the same shape as the connection groove 7, which is convenient for snap-fitting and positioning. The installation depth of the off-axis paraboloid mirror 19 is limited by the depth of the connection groove 7.

[0041] Further, a first threaded hole is formed in the mounting sleeve 6, and a first locking screw 10 for locking the off-axis parabolic mirror 19 is screwed into the first threaded hole.

[0042] The off-axis parabolic mirror 19 is locked by the locking screw, so that the connection is stable and the test accuracy is guaranteed.

[0043] Further, a connecting shaft 12 is arranged on the first fixing block 4, a bearing 13 is arranged on the connecting shaft 12, and the mounting sleeve 6 is rotatably connected to the bearing 13.

[0044] The connecting shaft 12 is used to connect the bearing, and the mounting sleeve 6 is rotationally adjusted through the bearing 13, which is convenient for hitting the reflected light of the off-axis parabolic mirror 19 onto the concave mirror 8.

[0045] The bearing 13 and the mounting sleeve 6 can be in interference fit or connected by screws.

[0046] Further, a second threaded hole is formed in the mounting sleeve 6, and a second locking screw 11 for cooperating with the connecting shaft 12 is screwed into the second threaded hole.

[0047] The second threaded hole is opened for screwing the second locking screw 11, and the angle of the mounting sleeve 6 is locked by the second locking screw 11, so as to ensure the stability and accuracy of the test.

[0048] Further, a frustum 15 is arranged at one end of the second sliding rail 3, an annular scale 16 corresponding to the outer ring of the frustum 15 is arranged on the base 1, a marking line 17 for cooperating with the annular scale 16 is arranged on the frustum 15, and a scale line 18 for cooperating with the second fixing block 5 is arranged on the second sliding rail 3.

[0049] By arranging the annular scale 16 on the top surface of the base 1 to cooperate with the marking line 17 on the frustum 15, it is convenient to read the angular position of the second sliding rail 3. The scale line 18 on the second sliding rail 3 is used to read the position of the second fixing block 5 on the second sliding rail 3, which is convenient for visually observing the position information of the concave mirror 8, providing a reference for the surface shape, focal length, and off-axis angle of the off-axis parabolic mirror 19, and facilitating the quick adjustment of the positions of the first fixing block 4 and the second fixing block 5.

[0050] When detecting different off-axis parabolic mirrors 19, the central position of the off-axis parabolic mirror 19 always corresponds to the side position of the frustum 15 to ensure the consistency of the readings of the annular scale 16 and the scale line 18.

[0051] Further, both the first sliding rail 2 and the second sliding rail 3 include sliding rods 14, and the first fixing block 4 and the second fixing block 5 are slidably connected to the sliding rods 14.

[0052] The first sliding rail 2 and the second sliding rail 3 include sliding rods 14, and the first fixing block 4 and the second fixing block 5 are provided with sliding holes slidably matched with the sliding rods 14 to achieve sliding connection.

[0053] The first sliding rail 2 includes two mounting blocks, the two mounting blocks are connected to the base 1 by screws, two sliding rods 14 are arranged between the two mounting blocks, the second sliding rail 3 includes a movable block, and two sliding rods 14 are arranged between the movable block and the frustum 15.

[0054] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An off-axis parabolic reflector surface shape detection device, characterized in that: It comprises a base and a sliding track 2, wherein the base is provided with a sliding track 1, a fixed block 1 is slidably provided on the sliding track 1, a mounting fixture for horizontally clamping an off-axis parabolic reflector is provided on the fixed block 1, one end of the sliding track 2 is rotatably connected to the base, a fixed block 2 is slidably provided on the sliding track 2, and a concave mirror for reflecting light reflected by the off-axis parabolic reflector is provided on the fixed block 2.

2. The off-axis parabolic reflector surface shape detection device according to claim 1, characterized in that: It comprises an interferometer, the lens of the interferometer faces the mirror surface of the off-axis parabolic reflector, and the sliding track 1 is parallel to the light emitting direction of the interferometer.

3. The off-axis parabolic reflector surface shape detection device according to claim 1, characterized in that: The mounting fixture comprises a mounting sleeve, a connecting groove is formed on the mounting sleeve, and the off-axis parabolic reflector is snap-connected in the connecting groove.

4. The off-axis parabolic reflector surface shape detection device according to claim 3, characterized in that: A threaded hole is provided on the installation sleeve, and a locking screw for locking the off-axis parabolic reflector is threadedly connected to one of the threaded holes.

5. The off-axis parabolic reflector surface shape detection device according to claim 3, characterized in that: The fixing block is provided with a connecting shaft, the connecting shaft is provided with a bearing, and the bearing is rotatably connected to the mounting sleeve.

6. The off-axis parabolic reflector surface shape detection device according to claim 5, characterized in that: The installation sleeve is provided with a second threaded hole, and a second locking screw for cooperating with the connecting shaft is threadedly connected at the second threaded hole.

7. The off-axis parabolic reflector surface shape detection device according to claim 1, characterized in that: A truncated cone is provided at one end of the second sliding track, an annular scale corresponding to the outer ring of the truncated cone is provided on the base, marking lines for cooperating with the annular scale are provided on the truncated cone, and scale lines for cooperating with the second fixed block are provided on the second sliding track.

8. The off-axis parabolic reflector surface shape detection device according to claim 1, characterized in that: The sliding track 1 and the sliding track 2 both include a sliding rod, and the fixed block 1 and the fixed block 2 are slidably connected to the sliding rod.

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