Interval control system of micro-nano optical fiber probe

Abstract

The utility model relates to the technical field of near-field optics, in particular to an interval control system of a micro-nano optical fiber probe. The utility model aims to solve the problems of redundant structure and difficult construction of an interval control system, and provides an interval control system of a micro-nano optical fiber probe, which comprises a micro-nano optical fiber probe connected with an incident light source, a probe displacement control device, a reflected light power monitoring device and a sample to be detected with a reflection interface, the micro-nano optical fiber probe is movably arranged on the probe displacement control device, the probe displacement control device is used for driving the micro-nano optical fiber probe to do lifting motion relative to a to-be-detected sample, and the micro-nano optical fiber probe is also used for collecting reflected light emitted after an incident light source is transmitted to the to-be-detected sample; the reflected light power monitoring device is connected with the micro-nano optical fiber probe and is used for monitoring the power of reflected light when the micro-nano optical fiber probe ascends and descends relative to the sample to be detected.

Description

Technical Field

[0001] The utility model relates to the technical field of near-field optics, and more specifically, to a spacing control system for a micro-nano optical fiber probe. Background Art

[0002] Scanning Near-field Optical Microscopy (SNOM) is developed from the Atomic Force Microscope (AFM). Because of its ultra-high optical resolution and spectral analysis ability up to the order of 10 nm, it has become a powerful optical characterization tool with high spatio-temporal resolution in the fields of physics, chemistry, materials science, and life science. The core of SNOM near-field monitoring is to use a micro-nano optical fiber probe with a sub-wavelength scale to collect the evanescent field information when the probe interacts with the sample and convert it into a detectable far-field signal. According to the working modes of different probes, SNOM can be divided into three categories, namely aperture type, scattering type, and metal micro-nano structure probes based on plasmonic scattering type.

[0003] Near-field nonlinear optics is one of the application scenarios of high-resolution SNOM technology. Nonlinear optical effects mean that when the incident light intensity reaches a certain level, the interaction relationship between light and matter no longer satisfies the linear relationship. However, the nonlinear polarizability of most traditional nonlinear optical materials is very small, and it is necessary to simultaneously meet the conditions of strong incident light and phase matching to produce nonlinear effects. The existence of these problems makes the nonlinear effects, system integration technology, and the manufacturing of nonlinear optical devices far from meeting the growing demand. In this context, monolayer / multilayer two-dimensional materials and nanowires of low-dimensional materials have been applied to the field of nonlinear optics due to their ultra-thin shape, ultra-wideband optical response, extremely high nonlinear optical coefficient, strong interlayer coupling and other physical properties. At the same time, when using an optical fiber probe with a tip diameter of sub-wavelength scale as the incident end of the incident laser, a huge local field enhancement can be generated at its tip, thus obtaining a nano-scale strong light source. Combining with the extremely high nonlinear coefficient of low-dimensional materials, enhanced nonlinear signals can be generated at the atomic scale through the interaction with the strong light source.

[0004] The key technologies in SNOM focus on the fabrication of the probe and the control of the probe-sample spacing. The current SNOM uses a tuning fork probe spacing control based on shear force feedback, which controls and monitors the shear force through phase feedback, and at the same time uses the proportional + integral (PI) technology to achieve the feedback control of the tuning fork probe amplitude, so that the probe amplitude remains constant during the scanning process. The spacing control based on the tuning fork shear force integrates multiple technologies, with high implementation difficulty and high cost, and is mainly sold in the form of finished all-in-one machines on the market. Summary of the Utility Model

[0005] The present utility model aims to overcome at least one defect of the above-mentioned prior art, and provides a spacing control system for a micro-nano optical fiber probe, which is used to solve the problems of redundant structure and difficult construction of the spacing control system.

[0006] The technical solution adopted by the present utility model is to provide a spacing control system for a micro-nano optical fiber probe, which includes a micro-nano optical fiber probe connected to an incident light source, a probe displacement control device, a reflected light power monitoring device, and a sample to be measured having a reflection interface;

[0007] The micro-nano optical fiber probe is movably disposed in the probe displacement control device. The probe displacement control device is used to drive the micro-nano optical fiber probe to move up and down relative to the sample to be measured. The micro-nano optical fiber probe is also used to collect the reflected light emitted after the incident light source propagates to the sample to be measured;

[0008] The reflected light power monitoring device is connected to the micro-nano optical fiber probe. The reflected light power monitoring device is used to monitor the power of the reflected light when the micro-nano optical fiber probe moves up and down relative to the sample to be measured.

[0009] Research shows that during the process of the probe displacement control device driving the micro-nano optical fiber probe to gradually approach the sample to be measured, the power of the reflected light collected by the micro-nano optical fiber probe shows a trend of first increasing and then decreasing. That is, there is a correlation between the distance between the micro-nano optical fiber probe and the sample to be measured and the power of the reflected light. This trend of the reflected light power first increasing and then decreasing can usually be explained as the result of some optical interaction between the micro-nano optical fiber probe and the sample to be measured, which may involve several factors:

[0010] 1. Near-field effects: When the micro-nano optical fiber probe is near the sample to be measured, the distance between the optical field and the sample surface is very close, entering the near-field region. In this region, the interaction between the electromagnetic field and the sample is very strong, which may cause some optical fields to be dissipated, thereby reducing the power of the emitted light received by the probe.

[0011] 2. Transmission and reflection: When the micro-nano optical fiber probe approaches the sample surface, part of the light will penetrate into the sample interior, and part of it will be reflected back by the sample surface. Therefore, when the distance between the micro-nano optical fiber probe and the sample is appropriate, the power of the reflected light may reach the maximum value. However, when the probe is too close to the sample surface, more light will be absorbed or scattered, resulting in a decrease in the power of the reflected light.

[0012] 3. Local refractive index change: There are small refractive index changes on the surface of the sample to be measured, such as unevenness on the surface or other substances attached to the surface. When the micro-nano optical fiber probe interacts with these local refractive index changes, it will affect the propagation and dissipation of the optical field, thereby affecting the power of the emitted light received by the probe.

[0013] Accordingly, this solution is linked with the probe displacement control device based on the reflected light power value measured by the reflected light power monitoring device, and then adjusts the lifting movement of the micro-nano optical fiber probe relative to the sample to be measured, so as to achieve the purpose of controlling the distance between the micro-nano optical fiber probe and the sample to be measured. In particular, due to the existence of the maximum reflected light power, if the distance between the micro-nano optical fiber probe and the sample to be measured when obtaining the maximum reflected light power is used as the end point of interval control, it is easy to achieve stable interval control of the micro-nano optical fiber probe. This solution only needs to control the lifting movement of the micro-nano optical fiber probe through the linkage between the probe displacement control device and the reflected light power monitoring device to achieve the purpose of interval control, greatly simplifying the structure of the interval control system and providing a potential opportunity for the application of micro-nano nonlinear optical devices.

[0014] Further, the probe displacement control device is a piezoelectric displacement stage.

[0015] This solution can improve the stability and accuracy of the lifting adjustment of the micro-nano optical fiber probe through the piezoelectric displacement stage, which helps to achieve high-repeatability and good-stability interval control between the micro-nano optical fiber probe and the sample to be measured.

[0016] Further, the reflected light power monitoring device is an optical fiber power meter.

[0017] Further, the probe displacement control device and the reflected light power monitoring device are signal-connected.

[0018] This solution can improve the efficiency of the linkage between the probe displacement control device and the reflected light power monitoring device, and enhance the efficiency and accuracy of interval control.

[0019] Further, the piezoelectric displacement stage is a three-axis piezoelectric displacement stage.

[0020] Through the three-axis piezoelectric displacement stage, the micro-nano optical fiber probe can not only move up and down relative to the sample to be measured on the z-axis, but also move on the x and y axes, so as to achieve the purpose of comprehensively scanning the sample to be measured.

[0021] Further, the cone angle of the micro-nano optical fiber probe is 12 - 15°.

[0022] Tests have found that setting the cone angle of this solution can enable the micro-nano optical fiber probe to have both good incident light emission performance and reflected light collection performance, which is convenient for the reflected light power monitoring device to obtain a larger reflected light power, helps to reduce system errors, and enhances the stability of interval control.

[0023] Further, the tip diameter of the micro-nano optical fiber probe is 150 - 250 nm.

[0024] Tests have found that setting the tip diameter of this solution can enable the micro-nano fiber probe to have good light transmission ability and improve the intensity of incident light and reflected light. In particular, in combination with the cone angle set as described above, the stability of the micro-nano fiber probe can also be improved to reduce the impact of vibrations caused by air flow on the power meter reading.

[0025] Furthermore, the sample to be measured is a non-linear optical device.

[0026] Furthermore, the reflective interface of the non-linear optical device is a monolayer of tungsten disulfide or a stacked structure of a monolayer of tungsten disulfide and a monolayer of gold.

[0027] Tests have found that using a monolayer of tungsten disulfide or a stacked structure of a monolayer of tungsten disulfide and a monolayer of gold as the reflective interface of the non-linear optical device can generate stable reflected light, and the reflected light power monitoring device can measure a stable power value turning point, which helps to achieve stable interval control.

[0028] Furthermore, an optical power amplifier is also provided. The input end of the optical power amplifier is connected to the incident light source, and the output end of the optical power amplifier is connected to the micro-nano fiber probe.

[0029] Furthermore, an optical fiber coupler is also provided. One end of the optical fiber coupler is connected to the incident light source and the reflected light power monitoring device respectively, and the other end of the optical fiber coupler is connected to the micro-nano fiber probe.

[0030] Based on the loop characteristics of the optical fiber coupler, this solution distributes the incident light and the reflected light, so only one optical fiber line needs to be connected to the micro-nano fiber probe, which can simplify the layout of the optical propagation line.

[0031] Furthermore, a sample base is also provided.

[0032] Furthermore, a probe observation device is also provided.

[0033] Preferably, the probe observation device is a coaxial light microscope.

[0034] In this solution, the coaxial light microscope can produce an upright three-dimensional spatial image when observing an object, with strong stereoscopic sense, clear and wide imaging, and a long working distance, which can improve the observation accuracy of the micro-nano fiber probe.

[0035] Furthermore, an observation device displacement control mechanism is also provided. The probe observation device is movably arranged on the observation device displacement control mechanism, and the observation device displacement control mechanism is used to drive the probe observation device to move relative to the micro-nano fiber probe.

[0036] Preferably, the observation device displacement control mechanism is a three-axis displacement stage.

[0037] Compared with the prior art, the beneficial effects of the present utility model are as follows: 1) The displacement of the micro-nano fiber probe is finely controlled by the piezoelectric displacement stage, and the reflected light is monitored in real time by the optical power meter. Based on the measurement result of the reflected light power, the piezoelectric displacement stage is linked, and then the stable interval control of the micro-nano fiber probe is achieved. The structure of the control system is simple, easy to assemble, and has high control precision; 2) By virtue of the excellent reflected light collection ability of the micro-nano fiber probe and the reasonable utilization of the loop characteristics of the fiber coupler, it helps to improve the stability of achieving interval control in the form of an optical system. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a structural diagram of the spacing control system for the micro-nano fiber probe.

[0039] Reference numerals: micro-nano fiber probe 1, probe fixture 2, probe base 3, sample to be measured 4, sample base 5, probe displacement control device 6, reflected light power monitoring device 7, continuous light laser 8, terminal control device 9, optical power amplifier 10, fiber coupler 11, probe observation device 12, observation device displacement control component 13. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0040] The drawings of the present utility model are only for illustrative purposes and cannot be construed as a limitation to the present utility model. For better illustration of the following embodiments, some components in the drawings will be omitted, enlarged or reduced, which do not represent the dimensions of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0041] Embodiment 1

[0042] As Figure 1 shown, this embodiment provides a spacing control system for a micro-nano fiber probe, including a micro-nano fiber probe 1 connected to an incident light source, a probe displacement control device 6, a reflected light power monitoring device 7, and a sample to be measured 4 with a reflection interface; the micro-nano fiber probe 1 is movably arranged in the probe displacement control device 6, and the probe displacement control device 6 is used to drive the micro-nano fiber probe 1 to move up and down relative to the sample to be measured 4. The micro-nano fiber probe 1 is also used to collect the reflected light emitted after the incident light source propagates to the sample to be measured 4; the reflected light power monitoring device 7 is connected to the micro-nano fiber probe 1, and the reflected light power monitoring device 7 is used to monitor the power of the reflected light when the micro-nano fiber probe 1 moves up and down relative to the sample to be measured 4.

[0043] Specifically in implementation, in order to obtain a stable light source, a continuous light laser 8 is used to provide the incident light. In order to improve the installation stability, the micro-nano fiber probe 1 is fixed to the probe base 3 through a customized probe fixture 2, and then the probe base 3 is movably arranged in the probe displacement control device 6. In order to better hold the sample to be measured 4, as Figure 1As shown, a sample base 5 is further provided. The sample base 5 is placed below the micro-nano optical fiber probe 1, facilitating the probe displacement control device 6 to control the micro-nano optical fiber probe 1 to achieve lifting movement relative to the sample to be measured 4.

[0044] In addition, in order to improve the intensity and stability of the generated reflected light, during implementation, the sample to be measured 4 is selected as a non-linear optical device. In a preferred implementation manner, the reflection interface of the non-linear optical device is a single-layer tungsten disulfide or a stacked structure of a single-layer tungsten disulfide and a single-layer gold. Tests have found that using a single-layer tungsten disulfide or a stacked structure of a single-layer tungsten disulfide and a single-layer gold as the reflection interface of the non-linear optical device can generate stable reflected light, and the reflected light power monitoring device 7 can measure a stable power value turning point, which helps to achieve stable interval control.

[0045] The working principle of the micro-nano optical fiber probe interval control system of the present utility model is as follows:

[0046] Refer to Figure 1 , research shows that during the process of the probe displacement control device 6 driving the micro-nano optical fiber probe 1 to gradually approach the sample to be measured 4, the reflected light power collected by the micro-nano optical fiber probe 1 shows a trend of first increasing and then decreasing. That is, there is a correlation between the distance between the micro-nano optical fiber probe 1 and the sample to be measured 4 and the reflected light power. Therefore, based on the reflected light power value measured by the reflected light power monitoring device 7 and the probe displacement control device 6 are linked, and then the lifting movement of the micro-nano optical fiber probe 1 relative to the sample to be measured 4 is adjusted, so as to achieve the purpose of controlling the distance between the micro-nano optical fiber probe 1 and the sample to be measured 4. In particular, based on the change trend of the reflected light power, it can be known that there is a maximum value of the reflected light power. If the distance between the micro-nano optical fiber probe 1 and the sample to be measured 4 when obtaining the maximum value of the reflected light power is used as the interval control end point, it is easy to achieve stable interval control of the micro-nano optical fiber probe 1. It is easy to understand that in this embodiment, only by linking the probe displacement control device 6 and the reflected light power monitoring device 7 to control the lifting movement of the micro-nano optical fiber probe 1, the purpose of interval control can be achieved.

[0047] In specific implementation, to improve the control accuracy, the probe displacement control device 6 uses a piezoelectric displacement stage. More preferably, a three-axis piezoelectric displacement stage is used. Specifically, a Thorlabs three-axis NanoMax311D displacement stage is adopted. For the convenience of disassembly, the probe holder 3 is magnetically attached to the three-axis NanoMax311D displacement stage. In addition, the NanoMax displacement stage of Thorlabs using a differential regulator provides a 4-mm coarse adjustment stroke and a 300-μm fine adjustment stroke. The coarse adjustment scale has a 10-μm graduation, and the fine adjustment has a 1-μm graduation. For the convenience of operation, the parameters that the three-axis piezoelectric displacement stage allows to adjust include the maximum output voltage, displacement interval, and displacement step, etc. During actual operation, the piezoelectric displacement stage is set to decrease in a certain displacement step by changing the voltage, presenting as the micro-nano optical fiber probe 1 moving uniformly in the negative Z-axis direction towards the sample to be measured 4 at a certain displacement step, so as to achieve stable control of gradually approaching the sample to be measured 4, which helps to achieve high-repeatability and good-stability interval control between the micro-nano optical fiber probe 1 and the sample to be measured 4.

[0048] It should be noted that the "certain displacement step" can be flexibly adjusted according to the actual equipment and samples. It is easy to understand that when the set displacement step is short, the time to obtain the maximum value of the reflected light power parameter will be extended, while when the displacement step is set too long, the error of the obtained parameter will increase. Exemplarily, the interval control end point is constructed at a distance of 250 nm between the micro-nano optical fiber probe 1 and the sample to be measured 4, and the "certain displacement step" is set between 20 - 28 nm, so as to balance the acquisition time of the interval control end point and the high accuracy and consistency of the spacing control.

[0049] In addition, the Thorlabs three-axis NanoMax311D displacement stage enables the micro-nano optical fiber probe 1 to not only move up and down relative to the sample to be measured 4 on the z-axis, but also realize the movement on the x and y axes, so as to achieve the purpose of comprehensively scanning the sample to be measured 4.

[0050] In specific implementation, the reflected light power monitoring device 7 is an optical fiber power meter. Specifically, an ILX Lightwave FPM8210H precision optical fiber power meter is used. The FPM8210H optical fiber power meter combines accurate and repeatable power measurement with low polarization correlation, and can provide repeatable measurement results up to +30 dBM in the wavelength range of 800 - 1650 nm, which can improve the detection accuracy of the reflected light power, thus promoting the accuracy and stability of the interval control. To intuitively understand the obtained reflected light power value, a terminal control device 9 is also connected to the reflected light power monitoring device 7. Specifically, the terminal control device 9 can be a laptop computer. In addition, the terminal control device 9 can also be connected to the probe displacement control device 6 to set the operating parameters of the probe displacement control device 6 through the terminal control device 9.

[0051] In specific settings, in order to improve the efficiency of interval control in this embodiment, the probe displacement control device 6 and the reflected light power monitoring device 7 are signal-connected, so as to improve the linkage efficiency between the probe displacement control device 6 and the reflected light power monitoring device 7, and further improve the efficiency and accuracy of interval control.

[0052] In order to improve the light emission / collection performance of the micro-nano optical fiber probe 1, in specific implementation, the cone angle of the micro-nano optical fiber probe 1 is 12-15°. Tests have found that setting the cone angle of this solution can enable the micro-nano optical fiber probe 1 to balance good incident light emission performance and reflected light collection performance, facilitate the reflected light power monitoring device 7 to obtain a larger reflected light power, help reduce system errors, and improve the stability of interval control. Preferably, the tip diameter of the micro-nano optical fiber probe 1 is set to 150-250 nm, which can enable the micro-nano optical fiber probe 1 to have good light passing ability and improve the intensity of incident light and reflected light. In particular, in combination with the above-set cone angle, the stability of the micro-nano optical fiber probe 1 can also be improved to reduce the influence of vibrations caused by air flow on the power meter reading.

[0053] As Figure 1 shown, there is also a power amplifier 10. The input end of the power amplifier 10 is connected to the incident light source, and the output end of the power amplifier 10 is connected to the micro-nano optical fiber probe 1. The power of the incident light source can be amplified through the power amplifier 10, so that the micro-nano optical fiber probe 1 emits high-intensity incident light to the sample to be measured 4, thereby increasing the reflected light intensity, facilitating the reflected light power monitoring device 7 to obtain a larger value of light power, reducing the system detection error, and helping to improve the accuracy of interval control.

[0054] As Figure 1 shown, there is also an optical fiber coupler 11. One end of the optical fiber coupler 11 is connected to the incident light source and the reflected light power monitoring device 7 respectively, and the other end of the optical fiber coupler 11 is connected to the micro-nano optical fiber probe 1. Based on the loop characteristics of the optical fiber coupler 11, the incident light and the reflected light are distributed. In this embodiment, only one optical fiber line needs to be connected to the micro-nano optical fiber probe 1, which can simplify the layout of the optical propagation line.

[0055] As Figure 1 shown, in order to observe the image of the micro-nano optical fiber probe 1 approaching the sample to be measured 4, there is also a probe observation device 12. Preferably, the probe observation device 12 is a coaxial light microscope. The coaxial light microscope can produce a positive three-dimensional spatial image when observing an object, with strong three-dimensional sense, clear and wide imaging, and a long working distance, which can improve the observation accuracy of the micro-nano optical fiber probe 1 and promote the control accuracy of the micro-nano optical fiber probe 1 in the follow-up. More preferably, a CCD camera is also connected to the eyepiece of the coaxial light microscope, which is used to convert the optical image observed by the coaxial light microscope into a digital signal and can ensure a high signal output consistency.

[0056] As Figure 1 shown, an observation device displacement control component 13 is further provided. The probe observation device 12 is movably arranged on the observation device displacement control component 13 and is used to drive the probe observation device 12 to move relative to the micro-nano optical fiber probe 1. In specific implementation, in order to achieve multi-directional displacement control, the observation device displacement control component 13 is a three-axis displacement stage, so that the probe observation device 12 can more accurately capture the needle insertion effect of the micro-nano optical fiber probe 1.

[0057] During actual operation, referring to Figure 1 , the solid arrow therein is the incident light propagation path, and the hollow arrow is the reflected light propagation path. Specifically, the incident light source emitted by the continuous light laser 8 is connected to the front port of the fiber optic coupler 11 after increasing the power through the optical power amplifier 10. After the rear port of the fiber optic coupler 11 is docked with the micro-nano optical fiber probe 1, the incident light irradiates the sample to be measured 4. The reflection interface of the sample to be measured 4 generates reflected light, and the reflected light returns to the fiber optic coupler 11 and propagates to the fiber optic power meter. During this process, the piezoelectric displacement stage is set to decrease at a certain step size by changing the voltage, and then it is presented that the micro-nano optical fiber probe 1 moves uniformly in the negative Z-axis direction towards the sample to be measured 4 at a certain displacement step size, so as to achieve stable control of gradually approaching the sample to be measured 4. The fiber optic power meter reads the reflected light power at the position of the corresponding micro-nano optical fiber probe 1 at a certain reading period until the fiber optic power meter reads the maximum reflected light power at the interval position between the micro-nano optical fiber probe 1 and the sample to be measured 4, then the piezoelectric displacement stage stops the displacement control of the micro-nano optical fiber probe 1. At this time, the interval control between the micro-nano optical fiber probe 1 and the sample to be measured 4 is completed.

[0058] Obviously, the above-mentioned embodiments of the present invention are only examples for clearly explaining the technical solutions of the present invention, rather than limitations on the specific implementation manners of the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the claims of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A micro-nano optical fiber probe interval control system, characterized in that: It includes a micro-nano optical fiber probe connected to an incident light source, a probe displacement control device, a reflected light power monitoring device, and a sample to be tested having a reflective interface; The micro-nano optical fiber probe can be movably arranged on the probe displacement control device, and the probe displacement control device is used to drive the micro-nano optical fiber probe to move up and down relative to the sample to be tested, and the micro-nano optical fiber probe is also used to collect the reflected light emitted after the incident light source is transmitted to the sample to be tested; The power monitoring device is connected to the micro-nano optical fiber probe, and is used to monitor the power of the reflected light when the micro-nano optical fiber probe moves up and down relative to the sample to be tested.

2. The interval control system of the micro-nano optical fiber probe according to claim 1, characterized in that: The probe displacement control device is a piezoelectric displacement stage; and / or, the reflected light power monitoring device is a fiber optic power meter; and / or, the probe displacement control device and the reflected light power monitoring device are signal-connected.

3. The interval control system of the micro-nano optical fiber probe according to claim 2, characterized in that: The piezoelectric displacement stage is a three-axis piezoelectric displacement stage.

4. The interval control system of the micro-nano optical fiber probe according to claim 1, characterized in that: The cone angle of the micro-nano optical fiber probe is 12-15°; and / or the tip diameter of the micro-nano optical fiber probe is 150-250 nm.

5. The interval control system of the micro-nano optical fiber probe according to claim 1, characterized in that: The sample to be tested is a nonlinear optical device.

6. The interval control system of the micro-nano optical fiber probe according to claim 5, characterized in that: The reflection interface of the nonlinear optical device is a single layer of tungsten disulfide or a stacked structure of a single layer of tungsten disulfide and a single layer of gold.

7. The interval control system of the micro-nano optical fiber probe according to any one of claims 1 to 6, characterized in that: An optical power amplifier is also provided, the input end of which is connected to the incident light source, and the output end of which is connected to the micro-nano optical fiber probe; and / or, an optical fiber coupler is also provided, one end of which is respectively connected to the incident light source and the reflected light power monitoring device, and the other end of which is connected to the micro-nano optical fiber probe; and / or, a probe observation device is also provided; and / or, a sample base is also provided.

8. The interval control system of the micro-nano optical fiber probe according to claim 7, characterized in that: The probe observation device is a coaxial light microscope.

9. The interval control system of the micro-nano optical fiber probe according to claim 7, characterized in that: An observation device displacement control mechanism is also provided, and the probe observation device can be movably arranged on the observation device displacement control mechanism, and the observation device displacement control mechanism is used to drive the probe observation device to move relative to the micro-nano optical fiber probe.

10. The interval control system of the micro-nano optical fiber probe according to claim 9, characterized in that: The displacement control mechanism of the observation device is a three-axis displacement platform.

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