Cooling system and high-temperature furnace

Abstract

The utility model provides a cooling system and a high-temperature furnace, the cooling system is used for cooling a heating cavity of the high-temperature furnace, and the cooling system comprises a cavity body and a cooling pipeline. The cavity is configured to surround the heating cavity; the cooling pipeline comprises a first pipeline and a second pipeline arranged around the first pipeline; the first pipeline is configured to be communicated between the cavity and an air suction device; and the second pipeline is configured to allow the cooling liquid to pass through. In the cooling system, the cavity surrounds the periphery of the heating cavity, gas in the cavity directly absorbs heat of the heating cavity, the gas in the cavity is discharged through the cooling pipeline under the action of the gas suction device, the gas in the cavity absorbs the heat of the heating cavity, and the heat of the gas is absorbed by the cooling liquid in the first pipeline entering the cooling pipeline; and the cooling speed of the heating cavity is accelerated. Compared with natural heat dissipation in the prior art, the gas in the cavity is continuously and rapidly exhausted, and the cooling liquid continuously cools the gas, so that the cooling efficiency of the heating cavity is improved, and the processing efficiency of the workpiece is improved.

Description

Technical Field

[0001] Embodiments of the present application relate to the technical field of liquid cooling and temperature reduction, and in particular, to a cooling system and a high-temperature furnace. Background Art

[0002] High-temperature furnaces in the prior art (such as diffusion furnaces used in processes such as phosphorus diffusion and boron diffusion) need to be heated to above 800 degrees. However, after the process is completed, the furnace body needs to be cooled by about 300 degrees before the furnace can be opened. High-temperature furnaces usually adopt the natural cooling method. Due to the influence of the thermal insulation material, the natural cooling is very slow, and the cooling rate is about 0.5 - 2.5 degrees per minute, resulting in a large amount of time wasted waiting for cooling and low product manufacturing efficiency. Utility Model Content

[0003] In view of this, the present application provides a cooling system that improves cooling efficiency.

[0004] In a first aspect, the present application provides a cooling system. The cooling system is used to cool the heating chamber of a high-temperature furnace. The cooling system includes a cavity and cooling pipes. The cavity is configured to surround the heating chamber; the cooling pipes include a first pipe and a second pipe surrounding the first pipe; the first pipe is configured to be connected between the cavity and a suction device; the second pipe is configured to allow a coolant to pass through.

[0005] In the above cooling system, the cavity surrounds the outer periphery of the heating chamber. The gas in the cavity directly absorbs the heat of the heating chamber. The gas in the cavity is discharged through the cooling pipes under the action of the suction device. The gas in the cavity absorbs the heat of the heating chamber, and the heat of the gas is absorbed by the coolant in the first pipe of the cooling pipes, accelerating the cooling rate of the heating chamber. Compared with natural heat dissipation in the prior art, the gas in the cavity is continuously and rapidly discharged, and the coolant continuously cools the gas, thereby improving the cooling efficiency of the heating chamber and being beneficial to improving the manufacturing efficiency of workpieces.

[0006] In a possible implementation manner, the cooling system further includes an auxiliary pipe. The auxiliary pipe is connected to the first pipe and is configured to allow a small amount of coolant to pass through, so that the coolant in the auxiliary pipe enters the first pipe and vaporizes.

[0007] In the above implementation manner, a small amount of coolant enters the first pipe, absorbs the heat of the high-temperature gas in the first pipe and vaporizes. Vaporization absorbs a large amount of heat, thereby effectively reducing the temperature of the gas in the first pipe.

[0008] In a possible implementation manner, the cooling system further includes a first on-off valve and a first probe; the first probe is configured to be located in the end region of the first pipe far from the heating chamber and monitor the temperature in the first pipe; the first on-off valve is configured to connect the auxiliary pipe and the first pipe when the temperature measured by the first probe is greater than or equal to a first set value.

[0009] In the above-described embodiment, when the temperature measured by the first probe is below the first set value, it indicates that the temperature is too high. The subsequent condenser pipe and condenser fins may not be able to cool the gas to meet the emission requirements within a certain period of time. Therefore, it is necessary to strengthen the gas cooling measures in the first pipe, that is, to introduce a small amount of coolant through the auxiliary pipe, so that the coolant vaporizes and absorbs a large amount of heat, thereby reducing the temperature of the gas entering the housing, which is beneficial to improving the reliability of the cooling system.

[0010] In a possible embodiment, the first on-off valve is configured to control the flow rate of the coolant entering the first pipe through the auxiliary pipe to be less than or equal to 0.6 L / min.

[0011] In the above-described embodiment, the flow rate controlled by the first on-off valve helps to ensure an appropriate amount of coolant required for vaporization, and is beneficial to controlling the amount of gas generated by the coolant in a short time, reducing the excessive increase in the air pressure in the first pipe in a short time, and thereby reducing the pressure resistance requirements for the first pipe.

[0012] In a possible embodiment, the cooling pipe further includes a housing, a condenser pipe, and a plurality of condenser fins; an air cavity is provided inside the housing, the air cavity communicates with the first pipe, the condenser pipe communicates with the second pipe, and is arranged in the air cavity along a serpentine path, and forms a plurality of branch pipelines arranged in the first direction, each branch pipeline extends in the second direction, and the first direction intersects with the second direction; the plurality of condenser fins are arranged in the air cavity at intervals in the second direction and are attached to the outer wall of each branch pipeline.

[0013] In the above-described embodiment, the plurality of condenser fins are arranged in the housing at intervals in the second direction and are attached to the outer wall of each branch pipeline. The condenser fins absorb the heat of the condenser pipe, and the condenser fins neutralize the temperatures of the plurality of branch pipelines, improving the utilization rate of the cold quantity of the coolant in the condenser pipe, so as to improve the cooling effect on the gas. The arrangement of the condenser pipe, the condenser fins, and the housing is beneficial to shortening the single-layer length of the cooling pipe, and thereby beneficial to reducing the occupied area of the cooling system.

[0014] In a possible embodiment, the cooling pipe is provided with a liquid inlet and a liquid outlet. The liquid inlet is located at one end of the second pipe far from the condenser pipe, and the liquid outlet is located at one end of the condenser pipe far from the second pipe.

[0015] In the above-described embodiment, the liquid inlet is closer to the heating cavity than the liquid outlet. The relatively cold coolant at the liquid inlet absorbs a large amount of heat and then continues to flow along the cooling pipe, which is beneficial to reducing the heat resistance requirements of the cooling pipe.

[0016] In a possible embodiment, the cooling system further includes a flow meter and a liquid inlet pipe. The liquid inlet pipe communicates with the liquid inlet, and the flow meter is arranged on the liquid inlet pipe to measure the flow rate of the coolant entering the second pipe.

[0017] In the above-described embodiments, when the flow rate of the coolant measured by the flow meter is less than the set flow rate, it indicates that only a small amount of coolant enters the cooling pipe, and the cooling effect is insufficient to meet the requirement of reaching the discharge temperature before discharge. At this time, it is necessary to repair the structure of the coolant flow rate entering the second pipe to increase the amount of coolant entering the cooling pipe to improve the cooling effect. When necessary, the suction device needs to be stopped. The setting of the flow meter is beneficial to improving the safety of the cooling system.

[0018] In a possible embodiment, the cooling system further includes a second probe configured to be located on the side of the suction device facing the cooling pipe to measure the temperature of the gas before it is discharged from the suction device; when the temperature measured by the second probe is greater than or equal to the second set value, the suction device stops.

[0019] In the above-described embodiments, when the temperature of the gas before it is discharged from the suction device has not dropped to the second set value, it indicates that the temperature of the gas discharged to the outside after passing through the suction device is likely not to meet the discharge requirement. At this time, it is necessary to close the suction device so that the gas cannot be discharged to the outside. This situation may occur at the initial stage of cooling when the gas temperature still needs some time to drop to meet the requirement; it may also occur when the coolant in the cooling pipe decreases, resulting in a poor cooling effect and other abnormal situations in the cooling system. The setting of the second probe avoids or reduces the risk of discharging gas that does not meet the discharge requirement to the outside due to various reasons, thereby improving the reliability of the cooling system.

[0020] In a possible embodiment, the first pipe is of a corrugated pipe structure, and the second pipe is of a corrugated pipe structure.

[0021] In the above-described embodiments, the corrugations of the first pipe can increase the heat transfer area of the high-temperature gas in contact with the inner wall of the first pipe, and the corrugations can increase the heat transfer area of the first pipe and the second pipe in contact with the coolant. The inner wall of the first pipe absorbs the heat of the high-temperature gas, and the outer wall of the first pipe conducts the heat to the coolant; the inner wall of the second pipe absorbs the heat of the coolant, and the outer wall of the second pipe contacts the relatively cold air outside to conduct the heat to the relatively cold air. When the area of the inner and outer walls of the corrugated pipe structures of the first pipe and the second pipe is set as a multiple of the area of the smooth surface of the pipe wall, the heat conduction efficiency can be increased several times, thereby improving the cooling efficiency. In addition, the corrugated pipe wall of the first pipe enables the high-temperature gas to quickly transition from laminar flow to turbulent flow, and the heat transfer coefficient of turbulent flow is much greater than that of laminar flow, significantly improving the cooling efficiency of the high-temperature gas in the first pipe.

[0022] In a second aspect, the present application also provides a high-temperature furnace, which includes a furnace body and a cooling system. The furnace body is provided with a heating chamber. The cooling system is used to cool the heating chamber of the high-temperature furnace, and the cooling system includes a cavity and cooling pipes. The cavity is configured to surround the heating chamber; the cooling pipes include a first pipe and a second pipe surrounding the first pipe; the first pipe is configured to be connected between the cavity and a suction device; the second pipe is configured to allow a coolant to pass through.

[0023] In the above high-temperature furnace, the cavity surrounds the outer periphery of the heating chamber. The gas in the cavity directly absorbs the heat of the heating chamber. The gas in the cavity is discharged through the cooling pipes under the action of the suction device. The gas in the cavity absorbs the heat of the heating chamber, and the heat of the gas is absorbed by the coolant in the first pipe of the cooling pipes, accelerating the cooling rate of the heating chamber. Compared with natural heat dissipation in the prior art, the gas in the cavity is continuously and rapidly discharged, and the coolant continuously cools the gas, thereby improving the cooling efficiency of the heating chamber and being beneficial to improving the manufacturing process efficiency of workpieces. Description of the Drawings

[0024] Figure 1 It is a schematic diagram of a high-temperature furnace provided by an embodiment of the present application.

[0025] Figure 2 It is Figure 1 A partial enlarged schematic diagram of the high-temperature furnace shown at A.

[0026] Figure 3 It is Figure 1 A partial enlarged schematic diagram of the high-temperature furnace shown at B.

[0027] Figure 4 It is Figure 1 A partial enlarged schematic diagram of the high-temperature furnace shown at C.

[0028] Figure 5 It is Figure 1 A working flow chart of the cooling system of the high-temperature furnace shown.

[0029] Description of the Main Component Symbols

[0030] 200, high-temperature furnace; 2001, furnace body; 2011, heating chamber; 2003, thermal insulation layer; 2005, heating element; 100, cooling system; 10, cavity; 20, cooling pipes; 21, first pipe; 22, second pipe; 23, condensate pipe; 231, branch pipe; 233, zigzag pipe; 24, housing; 2401, gas chamber; 25, condensate sheet; 201, liquid inlet; 202, liquid outlet; 30, auxiliary pipe; 40, first on-off valve; 50, first probe; 60, flowmeter; 70, second probe; 80, second on-off valve; 30, liquid inlet pipe; X, first direction; Y, second direction; 300, suction device.

[0031] The following specific embodiments will further illustrate the present application in conjunction with the above-mentioned drawings. Specific Embodiments

[0032] To further elaborate on the technical means and effects adopted by the present application to achieve the intended application purpose, the following is in conjunction with the drawings and embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present application belongs. The terms used in the description of the present application in this specification are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0034] Some embodiments of the present application provide a cooling system. The cooling system is used to cool the heating cavity of a high-temperature furnace. The cooling system includes a cavity and cooling pipes. The cavity is configured to surround the heating cavity; the cooling pipes include a first pipe and a second pipe surrounding the first pipe; the first pipe is configured to be connected between the cavity and a suction device; the second pipe is configured to allow a coolant to pass through.

[0035] In the above cooling system, the cavity surrounds the outer periphery of the heating cavity. The gas in the cavity directly absorbs the heat of the heating cavity. The gas in the cavity is discharged through the cooling pipes under the action of the suction device. The gas in the cavity absorbs the heat of the heating cavity, and the heat of the gas is absorbed by the coolant in the first pipe of the cooling pipes, accelerating the cooling rate of the heating cavity. Compared with natural heat dissipation in the prior art, the gas in the cavity is continuously and rapidly discharged, and the coolant continuously cools the gas, thereby improving the cooling efficiency of the heating cavity and being beneficial to improving the process efficiency of the workpiece.

[0036] The following will elaborate on some embodiments of the present application in conjunction with the drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0037] Please refer to Figure 1 and Figure 2 , an embodiment of the present application provides a cooling system 100, which is applied to a high-temperature furnace 200. The present application also provides a high-temperature furnace 200. The high-temperature furnace 200 further includes a furnace body 2001 and a heating element 2005. A heating cavity 2011 is provided in the furnace body 2001. The heating element 2005 heats the heating cavity 2011 to the temperature required for the processing process of the workpiece (for example, boron diffusion, phosphorus diffusion, etc.), for example, heats to 1000 °C, 1100 °C or 1200 °C, etc. The present application does not limit the heating temperature here.

[0038] The cooling system 100 includes a cavity 10 and cooling pipes 20. The cavity 10 is configured to surround the heating cavity 2011. The cooling pipes 20 communicate with the cavity 10 and are connected to the suction device 300. When the suction device 300 sucks air, the cooling pipes 20 can cool down the high-temperature gas discharged from the cavity 10.

[0039] In one embodiment, the cavity 10 surrounding the heating cavity 2011 means that the cavity 10 is generally an annular cavity structure and continuously surrounds the outer periphery of the heating cavity 2011. It can be understood that in another embodiment, the cavity 10 can also intermittently surround the outer periphery of the heating cavity 2011. For example, the cavity 10 is divided into multiple sub-cavities (not shown in the figure), and the multiple sub-cavities are arranged around the heating cavity 2011. The multiple sub-cavities communicate with the cooling pipes 20 respectively. The cavity walls of two adjacent cavities 10 can share the same wall, and two adjacent cavities 10 can also communicate with each other.

[0040] It should be noted that the heating cavity 2011 can be a sealed cavity. The cavity 10 does not need to be sealed. That is, the cavity 10 is a non-sealed cavity. The high-temperature gas in the cavity 10 is discharged through the cooling pipes 20, and the air outside the cavity 10 can enter the cavity 10 through the gaps at the non-sealed joints of the cavity 10. The air entering the cavity 10 continues to take away the heat of the wall of the heating cavity 2011 and is discharged through the cooling pipes 20.

[0041] The cavity 10 surrounds the outer periphery of the heating cavity 2011. The gas in the cavity 10 directly absorbs the heat of the heating cavity 2011. The gas in the cavity 10 is discharged through the cooling pipes 20 under the action of the suction device 300. The high-temperature gas in the cavity 10 takes away the heat of the heating cavity 2011, effectively reducing the temperature of the heating cavity 2011. Compared with natural heat dissipation in the prior art, the gas in the cavity 10 is continuously and quickly discharged, thereby improving the cooling efficiency of the heating cavity 2011 and being beneficial to improving the process efficiency of the workpiece.

[0042] The furnace body 2001 is generally in a circular tubular furnace structure, but is not limited thereto. The furnace body 2001 is arranged in the cavity 10, and a space for gas flow is formed by surrounding the outer wall of the furnace body 2001 with the cavity wall of the cavity 10. The heating cavity 2011 is arranged in the furnace body 2001. The furnace body 2001 is made of a tubular structure of high-temperature resistant materials such as quartz tubes or corundum.

[0043] The outer wall of the cavity 10 can be formed by assembling multiple shells 24. There are gaps between the shells 24 to facilitate the air with a lower temperature outside the furnace body 2001 to enter the cavity 10, so as to take away the heat of the cavity 10 through the air in the cavity 10.

[0044] In one embodiment, the cavity 10 has an air inlet (not shown in the figure), and the air inlet communicates with an external air source (not shown in the figure). The external air source is configured to introduce gas into the cavity 10 to take away the heat of the cavity 10.

[0045] In other embodiments, the furnace body 2001 can also be a tubular structure with other shapes such as square or elliptical.

[0046] In one embodiment, the high-temperature furnace 200 further includes a heating element 2005 and a heat-insulating layer 2003. The heating element 2005 and the heat-insulating layer 2003 are both disposed inside the cavity 10 and outside the heating cavity 2011. The heat-insulating layer 2003 is disposed between the heating element 2005 and the cavity wall of the cavity 10. The heat-insulating layer 2003 isolates the heating element 2005 from the cavity wall of the cavity 10, reducing the heat loss conducted from the heating element 2005 to the cavity wall of the cavity 10, which is beneficial for the heat generated by the heating element 2005 to be utilized by the heating cavity 2011 and is conducive to improving the heat utilization rate of the heating element 2005 for heating the workpiece.

[0047] In one embodiment, the heating element 2005 is spaced from the furnace body 2001, and the space between the heating element 2005 and the furnace body 2001 is used for gas conduction, so that this space is in direct contact with the cavity wall of the heating cavity 2011 in the furnace body 2001, without indirect heat conduction through the heating element 2005, which is beneficial for improving the efficiency of heat conduction from the heating cavity 2011 to the gas in the cavity 10, and further improving the cooling efficiency of the heating cavity 2011. The temperature of the heating element 2005 is directly conducted to the gas in the cavity 10, and the gas in the cavity 10 takes away the heat, reducing the influence of the residual temperature of the heating element 2005 during heat dissipation on the temperature in the heating cavity 2011.

[0048] It can be understood that in other embodiments, the heating element 2005 can also be disposed on the furnace body 2001, that is, the heating element 2005 can be in contact with the cavity wall of the heating cavity 2011, and heat is conducted between the cavity 10 and the heating cavity 2011 through the heating element 2005 and the cavity wall of the heating cavity 2011. Compared with natural heat dissipation, extracting the high-temperature gas in the cavity 10 can still improve the cooling efficiency.

[0049] The cooling pipeline 20 includes a first pipeline 21 and a second pipeline 22. The second pipeline 22 is disposed around the first pipeline 21. And the first pipeline 21 is communicated between the cavity 10 and the suction device 300. The second pipeline 22 is configured to allow coolant to pass through. The suction device 300 sucks air, so that the high-temperature gas in the cavity 10 flows into the first pipeline 21. Gas flows in the second pipeline 22, and coolant flows in the second pipeline 22. The coolant cools the first pipeline 21 and the gas in the first pipeline 21. The gas in the cavity 10 absorbs the heat of the heating cavity 2011 and is cooled by the coolant in the first pipeline 21 of the cooling pipeline 20, accelerating the cooling speed of the heating cavity 2011.

[0050] Please refer to Figure 1 and 3, In one embodiment, both the first pipe 21 and the second pipe 22 adopt a corrugated pipe structure, and the corrugations of the first pipe 21 and the second pipe 22 are arranged substantially parallel. The corrugations of the first pipe 21 can increase the heat transfer area of the high-temperature gas contacting the inner wall of the first pipe 21, and the corrugations can increase the heat transfer area of the first pipe 21 and the second pipe 22 contacting the coolant. The inner wall of the first pipe 21 absorbs the heat of the high-temperature gas, and the outer wall of the first pipe 21 conducts the heat to the coolant; the inner wall of the second pipe 22 absorbs the heat of the coolant, and the outer wall of the second pipe 22 contacts the relatively cold air outside to conduct the heat to the relatively cold air. When the area of the pipe walls of the first pipe 21 and the second pipe 22 with the corrugated pipe structure is set as a multiple of the area of the pipe walls with a smooth surface, the heat conduction efficiency can be increased exponentially, thereby increasing the cooling efficiency.

[0051] In addition, the corrugated pipe wall of the first pipe 21 causes the high-temperature gas to quickly change from laminar flow to turbulent flow, and the heat transfer coefficient of turbulent flow is much greater than that of laminar flow, so that the cooling efficiency of the high-temperature gas in the first pipe 21 is significantly improved.

[0052] It can be understood that in other embodiments, the second pipe 22 can also adopt a smooth pipe wall structure and increase the radial area of the second pipe 22, which can increase the unit area flow rate of the coolant between the first pipe 21 and the second pipe 22 to improve the cooling efficiency.

[0053] In some other embodiments, the second pipe 22 can also be omitted, and by means of a housing 24 structure (not shown in the figure) sleeved outside the first pipe 21 and containing coolant, the temperature of the pipe wall of the first pipe 21 is lower than that of the high-temperature gas, enhancing the heat resistance of the first pipe 21 and its cooling effect on the gas.

[0054] In one embodiment, please refer to Figure 1 and Figure 4 simultaneously. The cooling pipe 20 further includes a housing 24, a condensing pipe 23, and a plurality of condensing fins 25. The housing 24 is provided with a gas cavity 2401. The first pipe 21 communicates with the gas cavity 2401, and the second pipe 22 communicates with the condensing pipe 23. The gas in the first pipe 21 flows into the gas cavity 2401, and the coolant in the second pipe 22 flows into the condensing pipe 23.

[0055] The condensing pipe 23 shuttles in the gas cavity 2401, and the wall of the condensing pipe 23 directly contacts the gas to continue cooling the gas. Specifically, the condensing pipe 23 is arranged substantially along a serpentine path in the gas cavity 2401 of the housing 24. The condensing pipe 23 with the serpentine path substantially forms a plurality of branch pipelines 231 arranged along the first direction X, and each branch pipeline 231 extends along the second direction Y, and the first direction X is perpendicular to the second direction Y. Along the extending direction of the condensing pipe 23, two adjacent branch pipelines 231 are connected by a zigzag pipeline 233. In one embodiment, the condensing pipe 23 is an integrally formed pipeline, but it is not limited thereto.

[0056] In one embodiment, the multiple branch pipelines 231 are arranged in a single layer. It can be understood that the multiple branch pipelines 231 can also be arranged in multiple layers. For example, in another embodiment, the condenser pipe 23 first extends along a serpentine path within the first layer, then extends longitudinally and enters the second layer, and continues to extend along a serpentine path in the second layer, and is substantially opposite to the extension direction of the first layer. Therefore, the condenser pipe 23 can form multiple-layer branch pipelines 231.

[0057] The multiple condenser fins 25 are arranged at intervals along the second direction Y in the housing 24 in sequence, and are attached to the outer walls of each branch pipeline 231. The condenser fins 25 absorb the heat of the condenser pipe 23, and the condenser fins 25 neutralize the temperatures of the multiple branch pipelines 231, improving the utilization rate of the cold quantity of the coolant in the condenser pipe 23 to improve the cooling effect on the gas.

[0058] The arrangement of the condenser pipe 23, the condenser fins 25 and the housing 24 is beneficial to shortening the single-layer length of the cooling pipeline 20, and thus is beneficial to reducing the occupied area of the cooling system 100.

[0059] It can be understood that in other embodiments, the first direction X and the second direction Y can also be inclined relative to each other.

[0060] In one embodiment, the cooling pipeline 20 is provided with a liquid inlet 201 and a liquid outlet 202. The liquid inlet 201 is located at one end of the second pipeline 22 away from the condenser pipe 23, and the liquid outlet 202 is located at one end of the condenser pipe 23 away from the second pipeline 22. The liquid inlet 201 introduces the coolant, and the coolant absorbs heat and flows towards the condenser pipe 23, and continues to cool down in the condenser pipe 23, so that the coolant reaches the dischargeable temperature. For example, the dischargeable temperature is 65-80 °C to meet the requirement of being discharged from the suction device 300 to the outside.

[0061] It can be understood that in other embodiments, the condenser pipe 23 and the second pipeline 22 can also introduce different coolants respectively. Compared with the case where the condenser pipe 23 and the second pipeline 22 introduce the same coolant, the cooling capacity is large, and the cooling efficiency can be improved.

[0062] The liquid inlet 201 is closer to the heating chamber 2011 than the liquid outlet 202. The relatively cold coolant at the liquid inlet 201 absorbs a large amount of heat and then continues to flow along the cooling pipeline 20, which is beneficial to reducing the heat resistance requirement of the cooling pipeline 20.

[0063] It can be understood that in other embodiments, the liquid inlet 201 can also be farther from the heating chamber 2011 than the liquid outlet 202.

[0064] In one embodiment, to further improve the cooling effect, the cooling system 100 further includes an auxiliary pipeline 30. The auxiliary pipeline 30 is connected to the first pipeline 21 and is configured to allow a small amount of coolant to pass through. A small amount of coolant enters the first pipeline 21, absorbs the heat of the high-temperature gas in the first pipeline 21 and vaporizes. Vaporization absorbs a large amount of heat, thereby effectively reducing the temperature of the gas in the first pipeline 21.

[0065] In one embodiment, the number of the auxiliary pipelines 30 is one, and the auxiliary pipeline 30 is arranged at a position of the first pipeline 21 close to the heating chamber 2011, which is beneficial to ensuring that the temperature at the inlet of the first pipeline 21 corresponding to the auxiliary pipeline 30 is sufficient to vaporize a small amount of liquid.

[0066] It can be understood that in other embodiments, the number of the auxiliary pipelines 30 can be multiple, and the multiple auxiliary pipelines 30 can be arranged along the conduction direction of the air flow to further improve the cooling efficiency.

[0067] In one embodiment, please refer to Figure 1 、 Figure 3 and Figure 4 , the cooling system 100 further includes a first on-off valve 40 and a first probe 50. The first probe 50 is configured to be located in the end region of the first pipeline 21 far from the heating chamber 2011 and monitor the temperature in the first pipeline 21. The first on-off valve 40 is configured to connect the auxiliary pipeline 30 and the first pipeline 21 when the temperature measured by the first probe 50 is greater than or equal to a first set value. When the temperature measured by the first probe 50 is above (including) the first set value, it indicates that the temperature is too high. The subsequent condenser pipe 23 and condenser fins 25 may not be able to cool the gas to meet the emission requirements within a certain time. It is necessary to strengthen the gas cooling measures in the first pipeline 21, that is, to introduce a small amount of coolant through the auxiliary pipeline 30, so that the coolant vaporizes and absorbs a large amount of heat, thereby reducing the temperature of the gas entering the housing 24, which is beneficial to improving the reliability of the cooling system 100.

[0068] When the temperature measured by the first probe 50 is below the first set value, the first on-off valve 40 is closed to block the coolant from entering the first pipeline 21 from the auxiliary pipeline 30, so as to reduce the requirement for the pressure resistance of the first pipeline 21 caused by the generation of a large amount of gas.

[0069] In one embodiment, the first on - off valve 40 is configured to control the flow rate of the coolant entering the first pipe 21 from the auxiliary pipe 30 to be less than or equal to 0.6 L / min. For example, the flow rate can be set to 0.4 L / min, 0.45 L / min, 0.5 L / min, 0.55 L / min, or 0.6 L / min. The flow rate controlled by the first on - off valve 40 helps to ensure an appropriate amount of coolant required for gasification and is conducive to controlling the amount of gas generated by the coolant in a short time, reducing the pressure in the first pipe 21 from increasing too much in a short time, and thus reducing the pressure resistance requirement for the first pipe 21.

[0070] It can be understood that in other embodiments, the auxiliary pipe 30 can also be in a normally - on state with the first pipe 21, and by reducing the flow rate of the auxiliary pipe 30, the amount of gas generated by the coolant in a short time can be controlled, reducing the pressure in the first pipe 21 from increasing too much in a short time, and thus reducing the pressure resistance requirement for the first pipe 21.

[0071] In one embodiment, the cooling system 100 further includes a second probe 70. The second probe 70 is configured to be located on the side of the suction device 300 close to the cooling pipe 20. The second probe 70 measures the temperature of the gas before it is discharged from the suction device 300. When the temperature measured by the second probe 70 is greater than or equal to the second set value, the suction device 300 stops. The second set value can be close to the required discharge temperature. For example, if the gas needs to be cooled to 70 °C before being discharged to the outside, the second set value can be set to 87 °C. Those skilled in the art can set the second set value according to the gas flow rate, dimensions such as the length of the cooling pipe 20, the flow rate of the coolant, the equipment safety level, etc. This application does not make a limitation here.

[0072] When the temperature of the gas before it is discharged from the suction device 300 has not dropped to the second set value, it indicates that the temperature of the gas discharged to the outside after passing through the suction device 300 is likely not to meet the discharge requirement. At this time, the suction device 300 needs to be closed and the gas cannot be discharged to the outside. This situation may occur at the initial stage of cooling when the gas temperature still needs some time to drop to the required level; it may also occur when the coolant in the cooling pipe 20 decreases, resulting in a poor cooling effect and other abnormal situations of the cooling system 100. The setting of the second probe 70 avoids or reduces the risk of discharging gas that does not meet the discharge requirement to the outside due to various reasons, thereby improving the reliability of the cooling system 100.

[0073] In one embodiment, the cooling system 100 further includes a flow meter 60 and a liquid inlet pipe 90. The liquid inlet pipe 90 is communicated with the liquid inlet 201, and the flow meter 60 is arranged on the liquid inlet pipe 90 to measure the flow rate of the coolant entering the second pipe 22. When the flow rate of the coolant measured by the flow meter 60 is less than the flow rate set value, it indicates that only a small amount of coolant enters the cooling pipe 20, and the cooling effect is not sufficient to meet the requirement of reaching the discharge temperature before discharge. At this time, it is necessary to confirm the working state of the second on-off valve 80 and fully open the second on-off valve 80 to increase the amount of coolant entering the cooling pipe 20 so as to improve the cooling effect. When necessary, it is necessary to stop the suction device 300. For example, when the temperature measured by the second probe 70 is greater than or equal to the second set value, the suction device 300 is closed.

[0074] Please refer to Figure 5 , in one embodiment, the working process of the cooling system 100 is generally as follows:

[0075] When the cooling starts and the flow rate measured by the flow meter 60 in the liquid inlet pipe 90 is greater than or equal to the flow rate set value, the suction device 300 can be started.

[0076] Of course, in another embodiment, timing can start when the flow rate measured by the flow meter 60 reaches the flow rate set value, and the suction device 300 is started after a certain period of time (for example, 10 minutes, not limited), which is beneficial to reducing the temperature of the first pipe 21 in advance and then improving the cooling efficiency after the gas is introduced into the first pipe 21.

[0077] When the flow rate of the liquid inlet pipe 90 measured by the flow meter 60 is less than the flow rate set value, it is necessary to repair the second on-off valve 80 and open the second on-off valve 80 so that the flow rate of the coolant entering the second pipe 22 reaches the flow rate set value.

[0078] When the cooling starts, the flow meter 60, the first probe 50 and the second probe 70 can start working simultaneously.

[0079] When the temperature measured by the first probe 50 in the first pipe 21 is greater than the first set value, it indicates that the cooling effect of the first pipe 21 does not meet the expectation and needs to be improved. At this time, the first on-off valve 40 is opened, so that a small amount of coolant in the auxiliary pipe 30 enters the first pipe 21 and is vaporized by heat, absorbing a large amount of heat and improving the cooling effect of the gas in the first pipe 21.

[0080] When the temperature measured by the second probe 70 is greater than the second set value, it indicates that the gas temperature is still relatively high and it is very likely that the discharge requirement cannot be met during discharge. Therefore, it is necessary to close the suction device 300 so that the gas continues to cool in the cooling pipe 20 for a period of time until the temperature measured by the second probe 70 is less than or equal to the second set value and then restart the suction device 300.

[0081] Measure the temperature inside the heating chamber 2011 through another measuring structure (for example, a thermometer, not shown in the figure). When the measured temperature is less than or equal to the third set value (for example, 700 °C, not limited), the temperature reduction ends. The first on-off valve 40 and the second on-off valve 80 are closed, and the suction device 300 is closed. When the temperature of the heating chamber 2011 is greater than the third set value, the temperature reduction continues.

[0082] It should be noted that for the convenience of description, Figure 5 the flowchart shown only provides the logical sequence of one embodiment, and the present application does not limit the sequence. For example, the temperature measurements of the flowmeter 60, the first probe 50, the second probe 70, and the heating chamber 2011 can all be performed simultaneously. As long as the corresponding determination conditions are met, the corresponding subsequent operations can be executed. Therefore, the temperature measurements of the flowmeter 60, the first probe 50, the second probe 70, and the heating chamber 2011 are not in a specific order.

[0083] For the cooling system 100 of the above high-temperature furnace 200, the cavity 10 surrounds the outer periphery of the heating chamber 2011. The gas in the cavity 10 directly absorbs the heat of the heating chamber 2011. The gas in the cavity 10 is discharged through the cooling pipe 20 under the action of the suction device 300. The gas in the cavity 10 absorbs the heat of the heating chamber 2011, and the heat of the gas is absorbed by the coolant in the first pipe 21 of the cooling pipe 20, accelerating the temperature reduction rate of the heating chamber 2011. Compared with natural heat dissipation in the prior art, the gas in the cavity 10 is continuously and rapidly discharged, and the coolant continuously cools the gas, thereby improving the temperature reduction efficiency of the heating chamber 2011 and being beneficial to improving the process efficiency of the workpiece.

[0084] In addition, those of ordinary skill in the art should recognize that the above embodiments are only used to illustrate the present application and are not intended to limit the present application. As long as it is within the scope of the spirit of the present application, appropriate changes and variations made to the above embodiments fall within the scope of the disclosure of the present application.

Claims

1. A cooling system for cooling a heating chamber of a high temperature furnace, characterized in that: The cooling system comprises: A cavity body is configured to surround the heating cavity; The cooling pipeline comprises a first pipeline and a second pipeline arranged around the first pipeline; the first pipeline is configured to be connected between the cavity and an air suction device; the second pipeline is configured to allow cooling liquid to pass through.

2. The cooling system according to claim 1, characterized in that: The cooling system further includes an auxiliary pipeline, which is in communication with the first pipeline and is configured to allow a small amount of coolant to pass through, so that the coolant in the auxiliary pipeline enters the first pipeline for gasification.

3. The cooling system according to claim 2, characterized in that: The cooling system also includes a first conduction valve and a first probe; The first probe is configured to be located at an end region of the first pipe away from the heating chamber, and monitor the temperature in the first pipe; The first conducting valve is configured to conduct the auxiliary pipeline with the first pipeline when the temperature measured by the first probe is greater than or equal to a first set value.

4. The cooling system according to claim 3, characterized in that: The first conduction valve is configured to control the flow rate of the coolant entering the first pipeline from the auxiliary pipeline to be less than or equal to 0.6 L / min.

5. The cooling system according to any one of claims 1 to 4, characterized in that: The cooling pipeline also includes a shell, a condenser pipe and a plurality of condenser sheets; An air cavity is provided in the shell, the air cavity is connected to the first pipe, the condenser is connected to the second pipe, and is arranged in the air cavity along a serpentine path to form a plurality of branch pipes arranged along a first direction, each of the branch pipes extends along a second direction, and the first direction intersects with the second direction; The plurality of condensing sheets are sequentially arranged in the air cavity at intervals along the second direction and are in contact with the outer wall of each branch pipe.

6. The cooling system according to claim 5, characterized in that: The cooling pipe is provided with a liquid inlet and a liquid outlet. The liquid inlet is located at an end of the second pipe away from the condenser pipe, and the liquid outlet is located at an end of the condenser pipe away from the second pipe.

7. The cooling system according to claim 6, characterized in that: The cooling system further includes a flow meter and a liquid inlet pipe, wherein the liquid inlet pipe is connected to the liquid inlet, and the flow meter is arranged on the liquid inlet pipe to measure the flow rate of the coolant entering the second pipe.

8. The cooling system according to any one of claims 1 to 4, characterized in that: The cooling system further includes a second probe, which is configured to be located near a side of the air intake device facing the cooling pipe to measure the temperature of the gas before being discharged from the air intake device; When the temperature measured by the second probe is greater than or equal to a second set value, the air suction device stops.

9. The cooling system according to any one of claims 1 to 4, characterized in that: The first pipe is a bellows structure, and the second pipe is a bellows structure.

10. A high temperature furnace, comprising a furnace body, wherein the furnace body is provided with a heating chamber, characterized in that: The high temperature furnace further comprises a cooling system as claimed in any one of claims 1 to 9, wherein the cooling system is used to cool the heating chamber.

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