Sheet body collecting device

Abstract

The utility model discloses a sheet body collecting device which comprises a main conveying line, a sheet body discharging mechanism, a first material box carrying mechanism, a second material box carrying mechanism, a material box transferring mechanism and a material box conveying mechanism, and full material boxes are carried to the material box transferring mechanism through cooperation of the main conveying sheet body discharging mechanism, the first material box carrying mechanism and the second material box carrying mechanism. The material box transferring mechanism comprises a first driving part and a material box transferring line, and the first driving part drives the material box transferring line to reciprocate in the second direction, so that the material box transferring line is moved to the first side of the main conveying line to be in butt joint with the first material box carrying mechanism and bear full material boxes, or the material box transferring line is moved to the second side of the main conveying line to be in butt joint with the second material box carrying mechanism and bear full material boxes. The second material box carrying mechanism is in butt joint with the second material box carrying mechanism and carries full material boxes. The first driving part is further configured to drive the material box transfer line to move to the position in butt joint with the material box conveying mechanism so that the full material boxes can be transferred to the material box conveying mechanism. The sheet body collecting device is simple in structure and low in cost; and meanwhile, the safety of the equipment is also improved.

Description

Technical Field

[0001] This application belongs to the field of manufacturing silicon wafer production equipment, and particularly relates to a sheet material receiving device. Background Art

[0002] During the production process of silicon wafers, the process of receiving silicon wafers is usually as follows: First, the main conveyor line is used to convey the silicon wafers to the blanking station, and then the blanking mechanism is used to move the silicon wafers at the blanking station into the material box at the material receiving position on the side of the main conveyor line. After the material box is filled with silicon wafers, the material box handling mechanism picks up the material box filled with silicon wafers and transports the picked material box filled with silicon wafers to the material box transfer mechanism. Finally, the material box transfer mechanism transports the material box filled with silicon wafers to the material box conveyor mechanism, and the material box conveyor mechanism transfers the material box filled with silicon wafers to the next process.

[0003] In order to improve the receiving efficiency, the silicon wafer receiving device is provided with material receiving positions on both sides of the conveying direction of the main conveyor line, and each material receiving position corresponds to a set of material box handling mechanisms; the existing material box transfer mechanism usually includes a sky rail, a cantilever, and a material box transfer line. The material box transfer line is hung under the sky rail through the cantilever. Since the main conveyor line will interfere with the movement of the cantilever, in order to connect the material box handling mechanisms on both sides of the main conveyor line, a set of material box transfer mechanisms need to be provided on both sides of the main conveyor line respectively. The two sets of material box transfer mechanisms usually share a sky rail, and the material box transfer line in each set of material box transfer mechanisms moves along the sky rail to connect the material box conveyor mechanism and the material box handling mechanism on the same side. Using two sets of material box transfer mechanisms makes the structure complex and the cost high; in addition, the material box transfer line is in a hanging form, which has a safety hazard of falling. Summary of the Utility Model

[0004] The purpose of this application is to provide a sheet material receiving device to solve the problems of complex structure, high cost, and safety hazards existing in the sheet material receiving device in the prior art.

[0005] To achieve this purpose, this application adopts the following technical solutions:

[0006] This application provides a sheet material receiving device, which includes a main conveyor line, a sheet blanking mechanism, a first material box handling mechanism, a second material box handling mechanism, a material box transfer mechanism, and a material box conveyor mechanism, wherein:

[0007] The main conveyor line is configured to convey the sheet along a first direction. A first blanking station is provided on the conveying path of the main conveyor line, and material box receiving components for carrying material boxes are provided on both the first side and the second side of the main conveyor line;

[0008] The sheet blanking mechanism is arranged at the first blanking station, and the sheet blanking mechanism is configured to pick up the sheet conveyed to the first blanking station and collect the picked sheet into the material box of the material box receiving component;

[0009] The first cartridge handling mechanism is arranged on the first side of the main conveyor line. The first cartridge handling mechanism is at least configured to pick up the full cartridges on the cartridge receiving assembly on the first side of the main conveyor line and transport the picked-up full cartridges to the cartridge transfer mechanism. The second cartridge handling mechanism is arranged on the second side of the main conveyor line. The second cartridge handling mechanism is at least configured to pick up the full cartridges on the cartridge receiving assembly on the second side of the main conveyor line and transport the picked-up full cartridges to the cartridge transfer mechanism;

[0010] The cartridge transfer mechanism is arranged below the main conveyor line. The cartridge transfer mechanism includes a first driving member and a cartridge transfer line. The driving end of the first driving member is connected to the cartridge transfer line. The first driving member is configured to drive the cartridge transfer line to reciprocate along a second direction below the main conveyor line, so that the cartridge transfer line moves to the first side of the main conveyor line to dock with the first cartridge handling mechanism and receive the full cartridges, or the cartridge transfer line moves to the second side of the main conveyor line to dock with the second cartridge handling mechanism and receive the full cartridges;

[0011] The first driving member is further configured to drive the cartridge transfer line to move to a position where it docks with the cartridge conveying mechanism to transfer the full cartridges onto the cartridge conveying mechanism.

[0012] By arranging the cartridge transfer line below the main conveyor line and the first driving member driving the cartridge transfer line to move to the first side or the second side of the main conveyor line to dock with the first cartridge handling mechanism and the second cartridge handling mechanism; compared with the existing sheet receiving device, it is realized that only one set of cartridge transfer mechanism is needed to dock with the first cartridge handling mechanism and the second cartridge handling mechanism to transfer the full cartridges, with a simple structure and low cost; at the same time, it also avoids the hanging installation method of the cartridge transfer line, improving the safety of the equipment.

[0013] Optionally, the cartridge conveying mechanism is further configured to convey empty cartridges, and the cartridge transfer line is further configured to receive the empty cartridges conveyed by the cartridge conveying mechanism;

[0014] When the first driving member drives the cartridge transfer line to move to a preset position on the first side of the main conveyor line, the cartridge transfer line docks with the first cartridge handling mechanism. The first cartridge handling mechanism is further configured to pick up the empty cartridges on the cartridge transfer line and transport the picked-up empty cartridges to the cartridge receiving assembly on the first side of the main conveyor line;

[0015] When the first driving member drives the cartridge transfer line to move to a preset position on the second side of the main conveyor line, the cartridge transfer line docks with the second cartridge handling mechanism. The second cartridge handling mechanism is further configured to pick up the empty cartridges on the cartridge transfer line and transport the picked-up empty cartridges to the cartridge receiving assembly on the second side of the main conveyor line.

[0016] Through the cooperation of the cartridge conveying mechanism, the first driving member, the cartridge transfer line, the first cartridge handling mechanism, and the second cartridge handling mechanism, the empty cartridges conveyed by the cartridge conveying mechanism can be transferred to the cartridge receiving components on both sides of the main conveying line, realizing the automatic replenishment of empty cartridges to the cartridge receiving components, which is beneficial to improving the receiving efficiency of the sheet body.

[0017] Optionally, a second blanking station is provided on the moving path of the cartridge transfer line. The cartridge conveying mechanism is arranged below the main conveying line and corresponding to the second blanking station. The first driving member is further configured to drive the cartridge transfer line to move to the second blanking station so that the cartridge transfer line is docked with the cartridge conveying mechanism.

[0018] By arranging the cartridge conveying mechanism below the main conveying line and corresponding to the second blanking station, the transfer travel of the cartridge transfer line can be reduced, and the transfer efficiency of the sheet body can be improved; at the same time, the overall structure is compact, the occupied space is small, and the layout is reasonable.

[0019] Optionally, the cartridge conveying mechanism includes a full cartridge conveying line and an empty cartridge conveying line. The full cartridge conveying line is arranged above or below the empty cartridge conveying line;

[0020] The full cartridge conveying line is configured to receive the full cartridges conveyed by the cartridge transfer line and convey the received full cartridges to the next process;

[0021] The empty cartridge conveying line is configured to receive the empty cartridges and convey the received empty cartridges to the cartridge transfer line.

[0022] By arranging the full cartridge conveying line, it realizes receiving the full cartridges conveyed by the cartridge transfer line and conveying the received full cartridges to the next process; by arranging the empty cartridge conveying line, it realizes receiving the empty cartridges and conveying the received empty cartridges to the cartridge transfer line, and conveys the empty cartridges and full cartridges in layers, which greatly facilitates the conveying of empty cartridges and full cartridges and improves the conveying efficiency; at the same time, arranging the full cartridge conveying line and the empty cartridge conveying line in the height direction has a reasonable layout.

[0023] Optionally, the first driving member includes a base, a motor, a driving wheel, a driven wheel, and a transmission belt, wherein:

[0024] The fixed end of the motor is installed on the base. The driving end of the motor is connected to the driving wheel. The driven wheel and the driving wheel are arranged on the base at intervals in the second direction. The transmission belt is sleeved on the driving wheel and the driven wheel. The cartridge transfer line is fixed on the transmission belt;

[0025] The motor drives the driving wheel to rotate, and then drives the cartridge transfer line to move in the second direction through the cooperation of the driven wheel and the transmission belt, so as to move the cartridge transfer line to the first side, the second side or the second blanking station of the main conveying line.

[0026] Through the cooperation of a base, a motor, a driving wheel, a driven wheel and a transmission belt, a first driving member using a motor in cooperation with a belt drive is provided, which has the advantages of simple structure, low cost, low noise and accurate transmission.

[0027] Optionally, the sheet collecting device further includes a first sheet feeding mechanism, a flower basket collecting mechanism, a flower basket handling mechanism and a flower basket transfer mechanism, wherein:

[0028] A third blanking station is further provided on the conveying path of the main conveying line, and the third blanking station is arranged after the first blanking station;

[0029] The first sheet feeding mechanism is correspondingly arranged with the third blanking station, and a flower basket for receiving qualified sheets is carried on the flower basket collecting mechanism;

[0030] The first sheet feeding mechanism is configured to insert the qualified sheets conveyed to the third blanking station into the flower basket of the flower basket collecting mechanism, the flower basket handling mechanism is configured to pick up the flower basket filled with qualified sheets on the flower basket collecting mechanism and carry it onto the flower basket transfer mechanism, and the flower basket transfer mechanism is configured to receive the flower basket filled with qualified sheets and transfer it to the subsequent sheet processing station.

[0031] Through the cooperation of the main conveying line, the first sheet feeding mechanism, the flower basket collecting mechanism, the flower basket handling mechanism and the flower basket transfer mechanism, the flower basket filled with silicon wafers is automatically taken away and moved onto the flower basket transfer mechanism, and then the flower basket transfer mechanism automatically transfers the flower basket filled with silicon wafers to the silicon wafer processing station or other stations. The whole process does not require manual operation, improving the sheet collecting efficiency of the silicon wafers, saving labor and reducing production costs to a certain extent.

[0032] Optionally, the flower basket transfer mechanism is further configured to transfer the empty flower basket to the flower basket handling mechanism, and the flower basket handling mechanism is further configured to pick up the empty flower basket sent back by the flower basket transfer mechanism and carry it onto the flower basket collecting mechanism.

[0033] Through the cooperation of the flower basket transfer mechanism, the flower basket handling mechanism and the flower basket collecting mechanism, the automatic circular flow of the empty flower basket is realized, further improving the sheet collecting efficiency of the silicon wafers.

[0034] Optionally, the flower basket transfer mechanism includes a flower basket buffer line and a first transfer mechanism, wherein,

[0035] The flower basket buffer line is configured to receive and buffer the flower basket filled with qualified sheets carried by the flower basket handling mechanism, the first transfer mechanism is docked with the flower basket buffer line, and the first transfer mechanism is configured to receive and transfer the flower basket filled with qualified sheets output by the flower basket buffer line;

[0036] The first transfer mechanism is further configured to transfer the empty flower basket onto the flower basket buffer line, and the flower basket buffer line is further configured to receive and buffer the empty flower basket sent back by the first transfer mechanism.

[0037] Through the cooperation of the flower basket cache line and the first transfer mechanism, the flower basket full of silicon wafers can be cached, which can alleviate the transfer frequency of the first transfer mechanism, and thus better coordinate the collection efficiency of the flower basket and the transfer efficiency of the first transfer mechanism; at the same time, empty flower baskets can also be cached, providing the flower basket collection mechanism with sufficient empty flower baskets, which is conducive to improving the collection efficiency of the flower basket.

[0038] Optionally, a material box connected to the main conveyor line is provided at the output end of the main conveyor line, and an access channel is provided between the flower basket receiving mechanism and the flower basket transfer mechanism, and the access channel leads to the output end of the main conveyor line.

[0039] By arranging a material box at the output end of the main conveyor line, the silicon wafers in the flower basket that are not received by the first sheet feeding mechanism on the main conveyor line and inserted into the flower basket receiving mechanism are recovered; by arranging the access channel, it is convenient to collect and replace the material box at the output end of the main conveyor line, and it is also convenient to repair the mechanism at the output end of the main conveyor line.

[0040] Optionally, the flower basket buffer line includes a flower basket lifting mechanism and two layers of buffer conveyor lines docked with the flower basket lifting mechanism, one layer of the buffer conveyor line is configured to convey a flower basket full of qualified sheets, and the other layer of the buffer conveyor line is configured to convey an empty flower basket, the first transfer mechanism docks with the two layers of the buffer conveyor lines to transfer the flower basket, and the flower basket handling mechanism and the flower basket lifting mechanism dock to transfer the flower basket;

[0041] The flower basket lifting mechanism includes a transfer conveyor line that can be raised and lowered, and the transfer conveyor line is configured to connect with two layers of buffer conveyor lines or connect with the flower basket handling mechanism.

[0042] Through the cooperation of the flower basket lifting mechanism and the two-layer buffer conveyor line, the layered buffering and transfer of empty flower baskets and flower baskets full of silicon wafers are realized, which greatly facilitates the circulation of flower baskets and is beneficial to improving the efficiency of silicon wafer collection. At the same time, the overall structure is compact and occupies little space.

[0043] Optionally, each layer of cache conveyor line includes two first conveyor lines arranged side by side, and the transfer conveyor line includes two second conveyor lines arranged side by side. The two second conveyor lines are configured to rise and fall simultaneously. The two second conveyor lines are configured to transmit flower baskets one-to-one with the two first conveyor lines on each layer. The two second conveyor lines are respectively provided with a flower basket placement position, and the flower basket transport mechanism is configured to simultaneously transport two flower baskets full of qualified sheets to the flower basket placement positions of the two second conveyor lines.

[0044] By setting each layer of the buffer conveyor line to include two first conveyor lines arranged side by side, and setting the transfer conveyor line to include two second conveyor lines arranged side by side, and the two second conveyor lines and the two first conveyor lines of each layer corresponding to each other to transfer the flower baskets, the flower basket handling mechanism simultaneously transports two flower baskets filled with qualified wafers to the two second conveyor lines, realizing the simultaneous discharging of two flower baskets filled with qualified wafers, improving the wafer receiving efficiency; at the same time, each of the two second conveyor lines is provided with a flower basket placement position, reducing the overall length of the second conveyor line, so that the addition of the access channels will not increase the overall length of the equipment.

[0045] Optionally, the buffer conveyor line located on the upper layer is configured to convey empty flower baskets. At the docking ends of the two first conveyor lines in the buffer conveyor line located on the upper layer, there are flower basket docking positions. At both ends of the flower basket docking positions, there are liftable blocking mechanisms. The docking end of the first conveyor line is docked with the second conveyor line. The blocking mechanism is configured to be able to rise to block an empty flower basket at the flower basket docking position of the first conveyor line, so as to isolate an empty flower basket at the flower basket docking position of the first conveyor line from other empty flower baskets on the first conveyor line. The flower basket handling mechanism is configured to handle the empty flower baskets at the second conveyor line and / or the flower basket docking positions.

[0046] By setting the flower basket docking positions at the docking ends of the two first conveyor lines and setting liftable blocking mechanisms at both ends of the flower basket docking positions, it is realized to isolate an empty flower basket on the flower basket docking position from other flower baskets on the first conveyor line, facilitating the flower basket handling mechanism to grab the empty flower basket on the flower basket docking position. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 is a schematic three-dimensional structure diagram of the wafer receiving device provided by the embodiment of the present application;

[0048] Figure 2 is a schematic three-dimensional structure diagram of the cartridge transfer mechanism provided by the embodiment of the present application;

[0049] Figure 3 is a schematic three-dimensional structure diagram of the wafer discharging mechanism provided by the embodiment of the present application;

[0050] Figure 4 is a schematic three-dimensional structure diagram of the cartridge transfer line provided by the embodiment of the present application;

[0051] Figure 5 is a schematic three-dimensional structure diagram of the first cartridge handling mechanism provided by the embodiment of the present application;

[0052] Figure 6 is a schematic three-dimensional structure diagram of the first wafer feeding mechanism provided by the embodiment of the present application;

[0053] Figure 7It is a schematic three-dimensional structure diagram of the flower basket handling mechanism provided by an embodiment of the present application;

[0054] Figure 8 It is a schematic three-dimensional structure diagram of the flower basket buffer line provided by an embodiment of the present application.

[0055] Figures 1 to 8 It includes the following reference numerals:

[0056] Main conveyor line 10, tail stock box 11, access passage 12;

[0057] Sheet blanking mechanism 20, stock box receiving component 21, mounting seat 210, first stock box 211, second stock box 212;

[0058] First stock box handling mechanism 30, first transverse movement module 300, first lifting module 301, picking component 302, second stock box handling mechanism 31;

[0059] Stock box transfer mechanism 40, first driving part 41, base 410, driven wheel 411, transmission belt 412, stock box transfer line 42, upper conveyor line 420, lower conveyor line 421;

[0060] Stock box conveyor mechanism 50;

[0061] First sheet feeding mechanism 60: adsorption and transfer component 61, sheet inserting conveyor line 62;

[0062] Flower basket receiving mechanism 70: lifting driving part 71, bearing part 72, positioning component 73;

[0063] Flower basket handling mechanism 80: second transverse movement module 81, third transverse movement module 82, clamping component 83, rotation driving part 830, clamping part 831;

[0064] Flower basket transfer mechanism 90: flower basket buffer line 91, first transfer mechanism 92, flower basket lifting mechanism 93, mounting frame 931, lifting driving component 932, second conveyor line 933, buffer conveyor line 94, first conveyor line 940, blocking mechanism 9400. Detailed implementation manners

[0065] To make the above objects, features, and advantages of the present application more obvious and understandable, the present application will be further described in detail below with reference to the accompanying drawings and specific implementation manners.

[0066] In the production process of silicon wafers, the wafer receiving process is usually as follows: First, the silicon wafers are conveyed to the blanking station by the main conveyor line. Then, the blanking mechanism is used to move the silicon wafers at the blanking station into the cassette at the receiving position on the side of the main conveyor line. After the cassette is full of silicon wafers, the cassette handling mechanism picks up the cassette full of silicon wafers and transports the picked-up cassette full of silicon wafers to the cassette transfer mechanism. Finally, the cassette transfer mechanism transports the cassette full of silicon wafers to the cassette conveyor mechanism, and the cassette conveyor mechanism transfers the cassette full of silicon wafers to the next process.

[0067] In order to improve the receiving efficiency, the wafer receiving device is provided with receiving positions on both sides of the conveying direction of the main conveyor line, and each receiving position corresponds to a set of cassette handling mechanisms; the existing cassette transfer mechanism usually includes an overhead rail, a cantilever, and a cassette transfer line. The cassette transfer line is suspended below the overhead rail by the cantilever. Since the main conveyor line will interfere with the movement of the cantilever, in order to connect the cassette handling mechanisms on both sides of the main conveyor line, a set of cassette transfer mechanisms needs to be provided on each side of the main conveyor line. The two sets of cassette transfer mechanisms usually share an overhead rail. The cassette transfer line in each set of cassette transfer mechanisms moves along the overhead rail to connect the cassette conveyor mechanism and the cassette handling mechanism on the same side. Using two sets of cassette transfer mechanisms makes the structure complex and the cost high; in addition, the cassette transfer line is in a suspended form, which has a safety hazard of falling.

[0068] Therefore, this application proposes a sheet receiving device. Please refer to Figure 1 and Figure 2 As shown, the sheet receiving device proposed in the embodiment of this application includes a main conveyor line 10, a sheet blanking mechanism 20, a first cassette handling mechanism 30, a second cassette handling mechanism 31, a cassette transfer mechanism 40, and a cassette conveyor mechanism 50, where: The main conveyor line 10 is configured to move along a first direction ( Figure 1Transport the sheet in the X direction (in the figure), and a first blanking station is provided on the transport path of the main transport line 10. Cartridge receiving components 21 for carrying cartridges are provided on both the first side and the second side of the main transport line 10; the sheet blanking mechanism 20 is arranged at the first blanking station, and the sheet blanking mechanism 20 is configured to pick up the sheet transported to the first blanking station and collect the picked-up sheet into the cartridge of the cartridge receiving component 21; the first cartridge handling mechanism 30 is arranged on the first side of the main transport line 10, and the first cartridge handling mechanism 30 is at least configured to pick up the full cartridge on the cartridge receiving component 21 on the first side of the main transport line 10 and transport the picked-up full cartridge to the cartridge transfer mechanism 40. The second cartridge handling mechanism 31 is arranged on the second side of the main transport line 10, and the second cartridge handling mechanism 31 is at least configured to pick up the full cartridge on the cartridge receiving component 21 on the second side of the main transport line 10 and transport the picked-up full cartridge to the cartridge transfer mechanism 40; the cartridge transfer mechanism 40 is arranged below the main transport line 10. The cartridge transfer mechanism 40 includes a first driving member 41 and a cartridge transfer line 42. The driving end of the first driving member 41 is connected to the cartridge transfer line 42. The first driving member 41 is configured to drive the cartridge transfer line 42 to reciprocate in the second direction ( Figure 1 the Y direction in the figure) below the main transport line 10, so that the cartridge transfer line 42 moves to the first side of the main transport line 10 to dock with the first cartridge handling mechanism 30 and receive the full cartridge, or the cartridge transfer line 42 moves to the second side of the main transport line 10 to dock with the second cartridge handling mechanism 31 and receive the full cartridge; the first driving member 41 is further configured to drive the cartridge transfer line 42 to move to a position where it docks with the cartridge conveying mechanism 50 to transfer the full cartridge to the cartridge conveying mechanism 50.

[0069] Through the cooperation of the main transport line 10, the sheet blanking mechanism 20, the first cartridge handling mechanism 30, the second cartridge handling mechanism 31, the cartridge transfer mechanism 40 and the cartridge conveying mechanism 50, automatic material collection of the silicon wafers on the main transport line 10 is realized, and the full cartridges filled with silicon wafers are automatically taken away and moved to the cartridge conveying mechanism 50, and then the cartridge conveying mechanism 50 automatically transports the cartridges filled with silicon wafers to the silicon wafer processing station or other stations. The whole process does not require manual operation, improving the material collection efficiency of the silicon wafers; at the same time, by arranging the cartridge transfer line 42 below the main transport line 10, the first driving member 41 drives the cartridge transfer line 42 to move to the first side or the second side of the main transport line 10 to dock with the first cartridge handling mechanism 30 and the second cartridge handling mechanism 31; compared with the existing sheet material collection device, it is realized that only one set of cartridge transfer mechanism 40 can dock with the first cartridge handling mechanism 30 and the second cartridge handling mechanism 31 to transfer the full cartridges, with a simple structure and low cost; at the same time, it also avoids the hanging installation method of the cartridge transfer line 42, improving the safety of the equipment.

[0070] Please refer to Figure 1 andFigure 3 As shown, as an implementation manner, the sheet blanking mechanism 20 is a side separation conveyor line. The side separation conveyor line is arranged directly above the first blanking station and extends along the second direction. The side separation conveyor line is configured to adsorb and convey the silicon wafers to the first blanking station, and convey the adsorbed silicon wafers along the second direction to the release positions on the first side or the second side of the main conveyor line 10. The cassette receiving and collecting assembly 21 includes a mounting base 210, a first cassette 211, and a second cassette 212. The first cassette 211 is horizontally movable on the mounting base 210, and the second cassette 212 is horizontally and vertically movable on the mounting base 210. The first cassette 211 and the second cassette 212 can be moved to their respective preset wafer receiving positions. The release positions are located above the wafer receiving positions, so that the first cassette 211 and the second cassette 212 can alternately receive the silicon wafers released by the side separation conveyor line. After the first cassette 211 or the second cassette 212 is full of silicon wafers, it can be moved to the blanking position for the first cassette handling mechanism 30 or the second cassette handling mechanism 31 to grab the full cassette.

[0071] Please refer to Figure 1 and Figure 2 As shown, as an implementation manner, the cassette conveying mechanism 50 is also configured to convey empty cassettes, and the cassette transfer line 42 is also configured to receive the empty cassettes conveyed by the cassette conveying mechanism 50; when the first driving member 41 drives the cassette transfer line 42 to move to a preset position on the first side of the main conveyor line 10, the cassette transfer line 42 is docked with the first cassette handling mechanism 30. The first cassette handling mechanism 30 is also configured to pick up the empty cassette on the cassette transfer line 42 and convey the picked-up empty cassette to the cassette receiving and collecting assembly 21 located on the first side of the main conveyor line 10; when the first driving member 41 drives the cassette transfer line 42 to move to a preset position on the second side of the main conveyor line 10, the cassette transfer line 42 is docked with the second cassette handling mechanism 31. The second cassette handling mechanism 31 is also configured to pick up the empty cassette on the cassette transfer line 42 and convey the picked-up empty cassette to the cassette receiving and collecting assembly 21 located on the second side of the main conveyor line 10.

[0072] Please refer to Figure 1 、 Figure 4 and Figure 5As shown in the figure, as an implementation manner, the cartridge transfer line 42 adopts a double-layer structure, which includes an upper conveyor line 420 and a lower conveyor line 421. One of the upper conveyor line 420 and the lower conveyor line 421 is used to transfer empty cartridges, and the other is used to transfer full cartridges. The lower conveyor line 421 is a telescopic conveyor line. One end of the lower conveyor line 421 can extend to one side of the upper conveyor line 420 to avoid the obstruction of the upper conveyor line 420, facilitating the cartridge handling mechanism to place the cartridge on the lower conveyor line 421 or pick up the cartridge on the lower conveyor line 421. The structures of the first cartridge handling mechanism 30 and the second cartridge handling mechanism 31 are the same. The first cartridge handling mechanism 30 and the second cartridge handling mechanism 31 both include a first transverse movement module 300, two first lifting modules 301, and two picking parts 302. The fixed ends of the two first lifting modules 301 are arranged at the driving end of the first transverse movement module 300 at a preset distance. The first transverse movement module 300 is configured to drive the two first lifting modules 301 to reciprocate along the first direction. A picking part 302 is arranged at the driving end of each first lifting module 301. The first lifting module 301 is configured to drive the corresponding picking part 302 to lift and lower. The picking part 302 includes a hook, and the hook can lift or release the cartridge.

[0073] In this application, both the first cartridge handling mechanism 30 and the second cartridge handling mechanism 31 include two picking parts 302. One of the two picking parts 302 is used to handle empty cartridges, and the other is used to handle full cartridges. Through the cooperation of the cartridge conveying mechanism 50, the first driving part 41, the cartridge transfer line 42, the first cartridge handling mechanism 30, and the second cartridge handling mechanism 31, the empty cartridges conveyed by the cartridge conveying mechanism 50 can be transferred to the cartridge receiving components 21 on both sides of the main conveyor line 10, realizing the automatic replenishment of empty cartridges to the cartridge receiving components 21, which is beneficial to improving the receiving efficiency of the sheet.

[0074] As an implementation manner, a second blanking station is arranged on the moving path of the cartridge transfer line 42. The cartridge conveying mechanism 50 is arranged below the main conveyor line 10 and corresponding to the second blanking station. The first driving part 41 is further configured to drive the cartridge transfer line 42 to move to the second blanking station so that the cartridge transfer line 42 is docked with the cartridge conveying mechanism 50.

[0075] By arranging the cartridge conveying mechanism 50 below the main conveyor line 10 and corresponding to the second blanking station, the transfer stroke of the cartridge transfer line 42 can be reduced, and the transfer efficiency of the sheet can be improved. At the same time, the overall structure is compact, the occupied space is small, and the layout is reasonable.

[0076] As an implementation manner, the cartridge conveying mechanism 50 includes a full-cartridge conveying line and an empty-cartridge conveying line. The full-cartridge conveying line is arranged above or below the empty-cartridge conveying line. The full-cartridge conveying line is configured to receive the full cartridges conveyed by the cartridge transfer line 42 and convey the received full cartridges to the next process. The empty-cartridge conveying line is configured to receive the empty cartridges and convey the received empty cartridges to the cartridge transfer line 42.

[0077] By providing the full-cartridge conveying line, it is realized to receive the full cartridges conveyed by the cartridge transfer line 42 and convey the received full cartridges to the next process. By providing the empty-cartridge conveying line, it is realized to receive the empty cartridges and convey the received empty cartridges to the cartridge transfer line 42, so as to convey the empty cartridges and full cartridges in layers, which greatly facilitates the conveying of the empty cartridges and full cartridges and improves the conveying efficiency. At the same time, the full-cartridge conveying line and the empty-cartridge conveying line are arranged in the height direction, and the layout is reasonable.

[0078] As an implementation manner, the first driving member 41 includes a base 410, a motor, a driving wheel, a driven wheel 411 and a transmission belt 412. The fixed end of the motor is installed on the base 410. The driving end of the motor is connected to the driving wheel. The driven wheel 411 and the driving wheel are arranged on the base 410 at intervals in the second direction. The transmission belt 412 is sleeved on the driving wheel and the driven wheel 411. The cartridge transfer line 42 is fixed on the transmission belt 412. The motor drives the driving wheel to rotate, and then drives the cartridge transfer line 42 to move in the second direction through the cooperation of the driven wheel 411 and the transmission belt 412, so as to move the cartridge transfer line 42 to the first side, the second side or the second blanking station of the main conveying line 10.

[0079] Through the cooperation of the base 410, the motor, the driving wheel, the driven wheel 411 and the transmission belt 412, a first driving member 41 using a motor with belt drive is provided, which has the advantages of simple structure, low cost, low noise and accurate transmission.

[0080] Please refer to Figure 1 and Figure 6 As shown, as an implementation manner, the sheet receiving device further includes a first sheet feeding mechanism 60, a flower basket receiving mechanism 70, a flower basket handling mechanism 80 and a flower basket transfer mechanism 90. A third blanking station is further arranged on the conveying path of the main conveying line 10, and the third blanking station is arranged at the back of the first blanking station. The first sheet feeding mechanism 60 is correspondingly arranged with the third blanking station. The flower basket receiving mechanism 70 carries a flower basket for receiving qualified sheets. The first sheet feeding mechanism 60 is configured to insert the qualified sheets conveyed to the third blanking station into the flower basket of the flower basket receiving mechanism 70. The flower basket handling mechanism 80 is configured to pick up the flower basket filled with qualified sheets on the flower basket receiving mechanism 70 and carry it to the flower basket transfer mechanism 90. The flower basket transfer mechanism 90 is configured to receive the flower basket filled with qualified sheets and transfer it to the subsequent sheet processing station.

[0081] Through the cooperation of the main conveyor line 10, the first wafer feeding mechanism 60, the flower basket receiving mechanism 70, the flower basket transporting mechanism 80 and the flower basket transfer mechanism 90, the flower basket full of silicon wafers can be automatically taken away and moved to the flower basket transfer mechanism 90, and then the flower basket transfer mechanism 90 can automatically transfer the flower basket full of silicon wafers to the silicon wafer processing station or other stations. The whole process does not require manual operation, which improves the efficiency of silicon wafer receiving, saves manpower, and reduces production costs to a certain extent.

[0082] As an embodiment, the first wafer feeding mechanism 60 includes an adsorption and transfer component 61 and an insert wafer conveyor line 62. The adsorption and transfer component 61 is arranged above the third unloading station, and the insert wafer conveyor line 62 is located on the side of the third unloading station. The adsorption and transfer component 61 is configured to pick up qualified silicon wafers conveyed to the third unloading station, and release the picked up qualified silicon wafers to the insert wafer conveyor line 62. The insert wafer conveyor line 62 is configured to receive the qualified silicon wafers released by the adsorption and transfer component 61 and insert the received qualified silicon wafers into the flower basket of the flower basket receiving mechanism 70.

[0083] Specifically, the adsorption transfer component 61 includes a transverse moving module and a suction cup installed at the driving end of the transverse moving module. The insert conveyor line 62 includes an adsorption conveyor line and a telescopic conveyor line. The adsorption conveyor line is located on the side of the third unloading station. The adsorption transfer component 61 is configured to pick up the silicon wafers transported to the third unloading station and release the picked-up silicon wafers to the adsorption conveyor line. The telescopic conveyor line is connected to the adsorption conveyor line to receive the silicon wafers. The output end of the telescopic conveyor line is telescopic. The telescopic conveyor line is configured to insert the silicon wafers into the flower basket of the flower basket receiving mechanism 70. The insert conveyor line 62 is provided with an adsorption component. The adsorption component It is configured to non-contactly adsorb silicon wafers and adsorb the silicon wafers on the conveying surface of the wafer conveyor line 62, which can prevent the silicon wafers from shifting when released onto the wafer conveyor line 62 and the wafer conveyor line 62 from shifting when conveying the silicon wafers. The adsorption component can be a Bernoulli suction cup, and the adsorption surface of the Bernoulli suction cup is lower than the conveying surface of the adsorption conveyor line; or the adsorption component is a strip adsorption block based on the Bernoulli principle, and an air cavity that can form a Bernoulli negative pressure is provided inside the strip adsorption block, and the adsorption surface of the strip adsorption block is lower than the conveying surface of the adsorption conveyor line, and the air cavity of the strip adsorption block or the Bernoulli suction cup is connected to the air source through a pipeline.

[0084] As an implementation manner, the flower basket material receiving mechanism 70 includes a lifting driving member 71, a bearing member 72, and a positioning assembly 73. The driving end of the lifting driving member 71 is connected to the bearing member 72. The lifting driving member 71 is configured to drive the bearing member 72 to lift and lower. The bearing member 72 is configured to carry a vertically arranged flower basket. The positioning assembly 73 is configured to fix the flower basket on the bearing member 72. Each time the lifting driving member 71 drives the flower basket on the bearing member 72 to lift a preset height, the empty card slots of the flower basket are flush with the telescopic conveyor line, so that the silicon wafers at the output end of the telescopic conveyor line are inserted into the corresponding empty card slots of the flower basket.

[0085] Among them, the lifting driving member 71 can adopt a vertical linear module, and the positioning assembly 73 can adopt a cylinder to press the flower basket to realize the positioning of the flower basket.

[0086] Through the cooperation of the lifting driving member 71, the bearing member 72, and the telescopic conveyor line, the qualified silicon wafers are automatically received into the flower basket of the flower basket material receiving mechanism 70, providing a flower basket material receiving mechanism 70 with a simple structure, convenient material receiving, and stable and reliable operation.

[0087] Please refer to Figure 1 and Figure 7 As shown, as an implementation manner, the flower basket handling mechanism 80 includes a second transverse movement module 81, two third transverse movement modules 82, and two sets of clamping assemblies 83. The fixed ends of the two third transverse movement modules 82 are arranged at the driving end of the second transverse movement module 81 at a preset interval. The second transverse movement module 81 is configured to drive the two third transverse movement modules 82 to reciprocate along a first direction. A set of clamping assemblies 83 is arranged at the driving end of each third transverse movement module 82. The third transverse movement module 82 is configured to drive the corresponding clamping assembly 83 to reciprocate along a second direction. The clamping assembly 83 is configured to clamp or release the flower basket. Through the cooperation of the second transverse movement module 81 and the third transverse movement module 82, the clamping assemblies 83 are alternately moved to the flower basket material receiving mechanism 70 and the flower basket transfer mechanism 90.

[0088] Specifically, each set of clamping components 83 includes a rotary driving member 830, a clamping driving member, and two clamping members 831. The fixed end of the rotary driving member 830 is installed at the driving end of the third cross - transfer module 82. The driving end of the rotary driving member 830 is connected to the fixed end of the clamping driving member. The driving end of the clamping driving member is connected to the two clamping members 831. The clamping driving member is configured to drive the two clamping members 831 to approach or separate from each other to clamp or release the flower basket. The rotary driving member 830 drives the connecting member 403 to rotate to control the opening direction of the flower basket 11 clamped by the clamping component 402, so that the opening of the flower basket faces the silicon wafer to be received. The rotary driving member 830 uses a motor, and the clamping driving member uses two driving cylinders. The two driving cylinders are connected to the two clamping members 831 in a one - to - one correspondence. The two driving cylinders drive the two clamping members 831 to approach or separate from each other to clamp or release the flower basket 11. The rotation of the flower basket is realized by the motor driving the flower basket to rotate.

[0089] Through the cooperation of the second cross - transfer module 81, the two third cross - transfer modules 82, and the two sets of clamping components 83, the automatic clamping of the flower basket and the automatic transfer of the clamped flower basket between the flower - basket receiving mechanism 30 and the flower - basket transfer mechanism 50 are realized. At the same time, by setting two sets of clamping components 83, the simultaneous handling of two flower baskets is realized, improving the handling efficiency of the flower basket.

[0090] Please refer to Figure 1 and Figure 8 As shown, as an implementation manner, the flower - basket transfer mechanism 90 includes a flower - basket buffer line 91 and a first transfer mechanism 92. The flower - basket buffer line 91 is configured to receive and buffer the flower baskets filled with silicon wafers transported by the flower - basket handling mechanism 80. The first transfer mechanism 92 is docked with the flower - basket buffer line 91. The first transfer mechanism 92 is configured to receive the flower baskets filled with silicon wafers output by the flower - basket buffer line 91 for the transfer of the received flower baskets filled with silicon wafers. The first transfer mechanism 92 is also configured to transfer the empty flower baskets to the flower - basket buffer line 91. The flower - basket buffer line 91 is also configured to receive and buffer the empty flower baskets sent back by the first transfer mechanism 92.

[0091] Through the cooperation of the flower - basket buffer line 91 and the first transfer mechanism 92, the buffering of the flower baskets filled with silicon wafers is realized, which can relieve the transfer frequency of the first transfer mechanism 92, and then better coordinate the receiving efficiency of the flower baskets and the transfer efficiency of the first transfer mechanism 92. At the same time, the buffering of the empty flower baskets is also realized, providing sufficient empty flower baskets for the flower - basket receiving mechanism 70, which is beneficial to improving the receiving efficiency of the flower baskets.

[0092] As an implementation manner, a tail - material box 11 docked with the main conveyor line 10 is provided at the output end of the main conveyor line 10. An access passage 12 is provided between the flower - basket receiving mechanism 70 and the flower - basket transfer mechanism 90, and the access passage 12 leads to the output end of the main conveyor line 11.

[0093] By setting a tail stock box 11 at the output end of the main conveyor line 10, the recycling of the wafers on the main conveyor line 10 that are not received by the first wafer feeding mechanism 60 and inserted into the carrier of the carrier receiving mechanism 70 is realized; by setting an access channel 12, it is convenient to collect and replace the tail stock box 11 at the output end of the main conveyor line 10, and at the same time, it is also convenient to repair the mechanism at the output end of the main conveyor line 10.

[0094] As an implementation manner, the carrier buffer line 91 includes a carrier lifting mechanism 93 and two-layer buffer conveyor lines 94 docked with the carrier lifting mechanism 93. One layer of the buffer conveyor lines 94 is configured to convey the carriers filled with qualified wafers, and the other layer of the buffer conveyor lines 94 is configured to convey empty carriers. The first transfer mechanism 92 is docked with the two-layer buffer conveyor lines 91 to transfer carriers, and the carrier handling mechanism 80 is docked with the carrier lifting mechanism 93 to transfer carriers; the carrier lifting mechanism 93 includes a liftable transfer conveyor line, and the transfer conveyor line is configured to dock with the two-layer buffer conveyor lines 94 or dock with the carrier handling mechanism 80. One of the two sets of clamping assemblies 83 is used to handle empty carriers, and the other set is used to handle the carriers filled with wafers.

[0095] Specifically, the carrier lifting mechanism 93 further includes a mounting frame 931 and a lifting drive assembly 932. The transfer conveyor line is liftably arranged on the mounting frame 931. The fixed end of the lifting drive assembly 932 is fixed on the mounting frame 931, and the drive end of the lifting drive assembly 932 is connected to the transfer conveyor line. The lifting drive assembly 932 is configured to drive the transfer conveyor line to lift so that the transfer conveyor line is docked with the two-layer buffer conveyor lines 94. The lifting drive assembly 932 can adopt a belt drive method to drive the transfer conveyor line to lift.

[0096] Through the cooperation of the carrier lifting mechanism 93 and the two-layer buffer conveyor lines 94, the hierarchical buffering and transfer of empty carriers and carriers filled with wafers are realized, which greatly facilitates the transfer of carriers, is beneficial to improving the wafer receiving efficiency, and at the same time, the overall structure is compact and occupies a small space.

[0097] As an implementation manner, each layer of the buffer conveyor line 94 includes two first conveyor lines 940 arranged side by side. The transfer conveyor line includes two second conveyor lines 933 arranged side by side. The two second conveyor lines 933 are configured to lift simultaneously. The two second conveyor lines 933 are configured to transfer carriers corresponding to the two first conveyor lines 940 of each layer one by one. Each of the two second conveyor lines 933 is provided with a carrier placement position, and the carrier handling mechanism 80 is configured to simultaneously handle two carriers filled with qualified wafers to the carrier placement positions of the two second conveyor lines 933.

[0098] By setting each layer of the buffer conveyor line 94 to include two first conveyor lines 940 arranged side by side, and setting the transfer conveyor line to include two second conveyor lines 933 arranged side by side, the two second conveyor lines 933 and the two first conveyor lines 940 of each layer correspond to each other to transfer the flower baskets. The flower basket handling mechanism 80 simultaneously transports two flower baskets filled with qualified wafers to the two second conveyor lines 933, realizing the simultaneous discharging of two flower baskets filled with qualified wafers, improving the wafer receiving efficiency; at the same time, each of the two second conveyor lines 933 is provided with a flower basket placement position, reducing the overall length of the second conveyor line 933, so that the overall length of the equipment will not increase after adding the access channels 12.

[0099] As an implementation manner, the buffer conveyor line 94 located in the upper layer is configured to convey empty flower baskets. Flower basket docking positions are provided at the docking ends of the two first conveyor lines 940 in the buffer conveyor line 94 located in the upper layer. Two liftable blocking mechanisms 9400 are provided at both ends of the flower basket docking position. The docking end of the first conveyor line 940 is docked with the second conveyor line 933. The blocking mechanism 9400 is configured to be able to rise to block an empty flower basket at the flower basket docking position of the first conveyor line 940, so as to isolate an empty flower basket at the flower basket docking position of the first conveyor line 940 from other empty flower baskets on the first conveyor line 940. The flower basket handling mechanism 80 is configured to handle the empty flower baskets at the second conveyor line 933 and / or the flower basket docking position.

[0100] Specifically, the blocking mechanism 9400 includes a blocking cylinder and a blocking member. The driving end of the blocking cylinder is connected to the blocking member. The blocking cylinder drives the blocking member to rise and extend out of the conveying surface of the flower basket docking position to block an empty flower basket at the flower basket docking position. The blocking member can be plate-shaped or strip-shaped, etc.

[0101] By providing flower basket docking positions at the docking ends of the two first conveyor lines 940 and providing liftable blocking mechanisms 9400 at both ends of the flower basket docking positions, it is realized to isolate an empty flower basket on the flower basket docking position from other flower baskets on the first conveyor line 940, facilitating the flower basket handling mechanism 80 to grab the empty flower basket on the flower basket docking position.

[0102] The sheet receiving device proposed in this embodiment has the following advantages compared with the prior art:

[0103] 1) It is realized that only one set of cartridge transfer mechanism can be used to dock the first cartridge handling mechanism and the second cartridge handling mechanism to transfer the full cartridges, with a simple structure and low cost; at the same time, the cartridge transfer mechanism is arranged below the main conveyor line, which also avoids the hanging installation method of the cartridge transfer line and improves the safety of the equipment.

[0104] 2) It can realize the automatic circulation of full flower baskets and empty flower baskets, improve the wafer receiving efficiency, save manpower, and reduce the production cost.

[0105] 3) It can realize the automatic transfer of full material boxes and empty material boxes, further improving the receiving efficiency of silicon wafers and saving labor.

[0106] 4) The first wafer feeding mechanism adopts the adsorption and conveying method, avoiding the deviation of silicon wafers during the conveying process. At the same time, the telescopic conveying line is used to insert the silicon wafers into the corresponding flower baskets, facilitating the receiving of silicon wafers and further improving the receiving efficiency.

[0107] 5) An access passage is provided between the flower basket receiving mechanism and the flower basket transfer mechanism, facilitating the collection and replacement of the material boxes at the output end of the main conveying line, and also facilitating the maintenance of the mechanism at the output end of the main conveying line.

[0108] 6) The flower basket buffer line can buffer and convey full material flower baskets and empty flower baskets, thereby coordinating the transfer efficiency of flower baskets and being beneficial to improving the receiving efficiency of flower baskets.

[0109] Please refer to Figure 1 and Figure 3 As shown, it should be noted that: The main conveying line 10 can be divided into a second blanking area and a first blanking area as a whole along its conveying direction. The first blanking area is the receiving area where the flower baskets are located. The first blanking area is used to receive the qualified silicon wafers on the main conveying line 10 into the flower baskets. The first blanking area can be provided with a plurality of third blanking stations at intervals in the first direction (the conveying direction of the silicon wafers). A set of first wafer feeding mechanism 60 and a set of flower basket receiving mechanism 70 are correspondingly provided on both sides of each third blanking station. The flower basket receiving mechanisms 70 on the same side share a set of flower basket handling mechanism 80, and each set of flower basket handling mechanism 80 is connected to a set of flower basket transfer mechanism 90 to improve the receiving efficiency of qualified silicon wafers.

[0110] The second blanking area is the receiving area where the material boxes are located. The second blanking area is used to receive the unqualified silicon wafers on the main conveying line 10 into the material boxes. The material boxes can also receive some qualified silicon wafers according to needs. The second blanking area can be provided with a plurality of first blanking stations at intervals in the first direction (the conveying direction of the silicon wafers). A set of material box receiving assembly 21 is correspondingly provided on both sides of each first blanking station. The material box receiving assemblies 21 on the same side share a set of material box handling mechanism to improve the receiving efficiency of unqualified silicon wafers. Figure 1 For the sake of clear structure of the attached drawings, only one set of material box receiving assembly 21 is shown.

[0111] The above embodiments only illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, there are various changes and modifications to the present application, and these changes and modifications all fall within the scope of the present application claimed. The scope of protection claimed by the present application is defined by the appended claims and their equivalents.

Claims

1. A sheet receiving device, characterized in that: The sheet receiving device comprises a main conveying line, a sheet unloading mechanism, a first material box conveying mechanism, a second material box conveying mechanism, a material box transfer mechanism and a material box conveying mechanism, wherein: The main conveyor line is configured to convey the sheet body along a first direction, a first unloading station is arranged on the conveying path of the main conveyor line, and a material box receiving assembly for carrying a material box is arranged on the first side and the second side of the main conveyor line; The sheet unloading mechanism is disposed at the first unloading station, and is configured to pick up the sheet conveyed to the first unloading station and collect the picked-up sheet into the material box of the material box collecting component; The first material box conveying mechanism is arranged on the first side of the main conveying line, and the first material box conveying mechanism is at least configured to pick up a full material box on the material box receiving assembly located on the first side of the main conveying line, and convey the picked up full material box to the material box transfer mechanism, and the second material box conveying mechanism is arranged on the second side of the main conveying line, and the second material box conveying mechanism is at least configured to pick up a full material box on the material box receiving assembly located on the second side of the main conveying line, and convey the picked up full material box to the material box transfer mechanism; The material box transfer mechanism is arranged below the main conveying line, and the material box transfer mechanism includes a first driving member and a material box transfer line, the driving end of the first driving member is connected to the material box transfer line, and the first driving member is configured to drive the material box transfer line to reciprocate along the second direction below the main conveying line, so that the material box transfer line moves to the first side of the main conveying line to dock with the first material box handling mechanism and receive the full material box, or so that the material box transfer line moves to the second side of the main conveying line to dock with the second material box handling mechanism and receive the full material box; The first driving member is further configured to drive the material box transfer line to move to a position docking with the material box conveying mechanism to transfer the full material box to the material box conveying mechanism.

2. The sheet receiving device according to claim 1, characterized in that: The material box conveying mechanism is further configured to convey empty material boxes, and the material box transfer line is further configured to receive the empty material boxes conveyed by the material box conveying mechanism; When the first driving member drives the material box transfer line to move to a preset position on the first side of the main conveying line, the material box transfer line docks with the first material box handling mechanism, and the first material box handling mechanism is further configured to pick up an empty material box on the material box transfer line and transport the picked-up empty material box to a material box receiving assembly located on the first side of the main conveying line; When the first driving member drives the material box transfer line to a preset position on the second side of the main conveying line, the material box transfer line is docked with the second material box handling mechanism, and the second material box handling mechanism is also configured to pick up the empty material boxes on the material box transfer line and transport the picked up empty material boxes to the material box receiving assembly located on the second side of the main conveying line.

3. The sheet receiving device according to claim 2, characterized in that: A second unloading station is arranged on the moving path of the material box transfer line, the material box conveying mechanism is arranged below the main conveying line and corresponds to the second unloading station, and the first driving member is further configured to drive the material box transfer line to move to the second unloading station so that the material box transfer line is docked with the material box conveying mechanism.

4. The sheet receiving device according to claim 3, characterized in that: The material box conveying mechanism comprises a full material box conveying line and an empty material box conveying line, wherein the full material box conveying line is arranged above or below the empty material box conveying line; The full material box conveying line is configured to receive the full material boxes conveyed by the material box transfer line and convey the received full material boxes to the next process; The empty material box conveying line is configured to receive empty material boxes and convey the received empty material boxes to the material box transfer line.

5. The sheet receiving device according to claim 3, characterized in that: The first driving member includes a base, a motor, a driving wheel, a driven wheel and a transmission belt, wherein: The fixed end of the motor is mounted on the base, the driving end of the motor is connected to the driving wheel, the driven wheel and the driving wheel are spaced apart from each other on the base along the second direction, the transmission belt is sleeved on the driving wheel and the driven wheel, and the material box transfer line is fixed on the transmission belt; The motor drives the driving wheel to rotate, and then drives the material box transfer line to move along the second direction through the cooperation of the driven wheel and the transmission belt, so as to move the material box transfer line to the first side, the second side or the second unloading station of the main conveying line.

6. The sheet receiving device according to claim 1, characterized in that: The sheet receiving device further comprises a first sheet feeding mechanism, a flower basket receiving mechanism, a flower basket conveying mechanism and a flower basket transporting mechanism, wherein: A third unloading station is also provided on the conveying path of the main conveying line, and the third unloading station is arranged after the first unloading station; The first sheet feeding mechanism is arranged corresponding to the third unloading station, and the flower basket receiving mechanism carries a flower basket for receiving qualified sheets; The first sheet feeding mechanism is configured to insert the qualified sheets conveyed to the third unloading station into the flower basket of the flower basket collecting mechanism, the flower basket transporting mechanism is configured to pick up the flower basket full of qualified sheets on the flower basket collecting mechanism and transport it to the flower basket transfer mechanism, and the flower basket transfer mechanism is configured to receive the flower basket full of qualified sheets and transfer it to the subsequent sheet processing station.

7. The sheet receiving device according to claim 6, characterized in that: The flower basket transfer mechanism is also configured to transfer the empty flower basket to the flower basket handling mechanism, and the flower basket handling mechanism is also configured to pick up the empty flower basket returned by the flower basket transfer mechanism and transport it to the flower basket receiving mechanism.

8. The sheet receiving device according to claim 7, characterized in that: The flower basket transfer mechanism includes a flower basket buffer line and a first transfer mechanism, wherein: The flower basket buffer line is configured to receive and buffer the flower basket full of qualified sheets transported by the flower basket transport mechanism, and the first transfer mechanism is connected to the flower basket buffer line, and the first transfer mechanism is configured to receive and transfer the flower basket full of qualified sheets output by the flower basket buffer line; The first transfer mechanism is further configured to transfer the empty flower baskets to the flower basket cache line, and the flower basket cache line is further configured to receive and cache the empty flower baskets returned by the first transfer mechanism.

9. The sheet receiving device according to claim 8, characterized in that: A material box connected to the main conveyor line is arranged at the output end of the main conveyor line, and an access channel is arranged between the flower basket receiving mechanism and the flower basket transporting mechanism, and the access channel leads to the output end of the main conveyor line.

10. The sheet receiving device according to claim 8, characterized in that: The flower basket buffer line includes a flower basket lifting mechanism and two layers of buffer conveyor lines docked with the flower basket lifting mechanism, one layer of the buffer conveyor line is configured to convey a flower basket full of qualified sheets, and the other layer of the buffer conveyor line is configured to convey an empty flower basket, the first transfer mechanism docks with the two layers of buffer conveyor lines to transfer the flower basket, and the flower basket handling mechanism docks with the flower basket lifting mechanism to transfer the flower basket; The flower basket lifting mechanism includes a transfer conveyor line that can be raised and lowered, and the transfer conveyor line is configured to connect with the two-layer buffer conveyor lines or the flower basket transport mechanism.

11. The sheet receiving device according to claim 10, characterized in that: The cache conveyor line on each layer includes two first conveyor lines arranged side by side, and the transfer conveyor line includes two second conveyor lines arranged side by side. The two second conveyor lines are configured to rise and fall simultaneously, and the two second conveyor lines are configured to transmit flower baskets in a one-to-one correspondence with the two first conveyor lines on each layer. The two second conveyor lines are respectively provided with a flower basket placement position, and the flower basket transporting mechanism is configured to simultaneously transport two flower baskets full of qualified sheets to the flower basket placement positions of the two second conveyor lines.

12. The sheet receiving device according to claim 11, characterized in that: The cache conveyor line located on the upper layer is configured to convey empty flower baskets, and the docking ends of two of the first conveyor lines in the cache conveyor line located on the upper layer are provided with flower basket docking positions, and both ends of the flower basket docking positions are provided with liftable blocking mechanisms, and the docking end of the first conveyor line is docked with the second conveyor line, and the blocking mechanism is configured to rise to block an empty flower basket at the flower basket docking position of the first conveyor line, so that the empty flower basket at the flower basket docking position of the first conveyor line is isolated from other empty flower baskets on the first conveyor line, and the flower basket transporting mechanism is configured to transport the empty flower baskets at the second conveyor line and / or the flower basket docking position.

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