Brake protection system of wafer measuring equipment

Abstract

The utility model discloses a brake protection system of wafer measuring equipment, and relates to the technical field of semiconductors. Comprising a power supply system, a circuit breaker, a servo driver, a servo motor, a brake relay, a brake reset relay and a brake power supply, the power supply system is connected with the servo driver through the circuit breaker, the servo driver is connected with the servo motor, the brake relay and the brake reset relay, and the brake relay and the brake reset relay are both connected with the brake power supply. The device is reasonable in structural design, achieves the manual movement of the motor to an inspection and maintenance position through the brake reset relay, facilitates the on-site inspection and maintenance, is convenient and reliable to operate, and is high in practicability.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly to a brake protection system for a wafer measuring device. Background Art

[0002] In industrial applications, when a servo is used in conjunction with a brake motor, in the event of an emergency stop, power failure, or malfunction, the servo sends a brake signal to engage the motor brake, preventing the motor from moving due to external forces when it is stationary and powered off. The brake signal can only be released after manual troubleshooting. In actual malfunctions, the stop position of the equipment is not convenient for inspection and repair. Therefore, the utility model adds a bypass relay to the motor brake signal for manually controlling the presence or absence of the brake signal, enabling the faulty equipment to be moved to the repair position without disassembling the equipment. Summary of the Utility Model

[0003] Aiming at the deficiencies in the prior art, the purpose of the utility model is to provide a brake protection system for a wafer measuring device with a reasonable structural design. It can manually move the motor to the inspection and repair position through a brake reset relay, facilitating on-site inspection and repair work. It is convenient, reliable in operation, and highly practical.

[0004] To achieve the above purpose, the utility model is realized through the following technical solutions: A brake protection system for a wafer measuring device includes a power supply system, a circuit breaker, a servo driver, a servo motor, a brake relay, a brake reset relay, and a brake power supply. The power supply system is connected to the servo driver through the circuit breaker. The servo driver is connected to the servo motor, the brake relay, and the brake reset relay. Both the brake relay and the brake reset relay are connected to the brake power supply.

[0005] Preferably, the L1 terminal and L2 terminal of the power supply system are connected to the L1 terminal and L2 terminal of the servo driver through the circuit breaker. The PE terminal of the servo driver is connected to the PE terminal of the power supply system. The U terminal, V terminal, W terminal, and PE terminal of the servo driver are connected to the BR+ terminal, BR- terminal of the motor's built-in brake wire, and the motor power line SM3_P of the servo motor. The CN2 terminal of the servo driver is connected to the motor encoder wire SM3_C2 of the servo motor. The BR+ terminal and BR- terminal of the motor's built-in brake wire are respectively connected to the brake relay and the brake reset relay through the terminal group TB_BR3+ terminal and TB_BR3- terminal. Both the brake relay and the brake reset relay are connected to the P24B terminal and N24B terminal of the brake power supply.

[0006] Preferably, when the brake relay is closed, the P24B terminal and N24B terminal of the brake power supply are connected to the motor's built-in brake wire to ensure the normal operation of the motor.

[0007] Preferably, the switch of the brake reset relay is a PLC controller or a push-button switch.

[0008] Advantages of the present utility model: The structure of the present utility model is reasonably designed. By adding a brake reset relay BR2, which is controlled by a PLC or a button to close and supply power to the motor brake, the motor can be manually moved to the inspection and maintenance position, facilitating on-site inspection and maintenance work; it has low cost, reliable operation, simple transformation, and strong practicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The present utility model will be described in detail below with reference to the drawings and specific embodiments;

[0010] Figure 1 is the system block diagram of the present utility model;

[0011] Figure 2 is the circuit schematic diagram of the present utility model;

[0012] Figure 3 is the brake motor action logic diagram of the present utility model. SPECIFIC EMBODIMENTS

[0013] In order to make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0014] Refer to Figure 1-2 , the following technical solutions are adopted in this specific embodiment: A brake protection system for a wafer measuring device, including a power supply system 1, a circuit breaker NFB13, a servo driver SD3, a servo motor SM3, a brake relay BR1, a brake reset relay BR2, and a brake power supply 2. The power supply system 1 is connected to the servo driver SD3 through the circuit breaker NFB13. The servo driver SD3 is connected to the servo motor SM3, the brake relay BR1, and the brake reset relay BR2. Both the brake relay BR1 and the brake reset relay BR2 are connected to the brake power supply 2.

[0015] It should be noted that the L1 terminal and L2 terminal of the power supply system 1 are connected to the L1 terminal and L2 terminal of the servo driver SD3 through the circuit breaker NFB13. The PE terminal of the servo driver SD3 is connected to the PE terminal of the power supply system 1. The U terminal, V terminal, W terminal, and PE terminal of the servo driver SD3 are connected to the BR+ terminal, BR- terminal of the motor built-in brake wire and the motor power line SM3_P of the servo motor SM3. The CN2 terminal of the servo driver SD3 is connected to the motor encoder wire SM3_C2 of the servo motor SM3. The BR+ terminal and BR- terminal of the motor built-in brake wire are respectively connected to the brake relay BR1 and the brake reset relay BR2 through the terminal group TB_BR3+ terminal and TB_BR3- terminal. Both the brake relay BR1 and the brake reset relay BR2 are connected to the P24B terminal and N24B terminal of the brake power supply 2.

[0016] It should be noted that when the brake relay BR1 is closed, the P24B terminal and N24B terminal of the brake power supply 2 are connected to the motor built-in brake wire to ensure the normal operation of the motor.

[0017] In addition, the switch of the brake reset relay BR2 adopts a PLC controller or a push-button switch.

[0018] The action logic of the brake motor in this specific embodiment is as Figure 3 shown. First, it is judged whether the motor is abnormal. If the motor works abnormally, the brake relay BR1 is disconnected, the brake is activated, and the motor is locked. Then it is judged whether there is a BR2. If so, the brake reset relay BR2 is controlled to close through the PLC controller or the push-button, the brake gets normal power supply, and it is manually moved to the maintenance position to complete the maintenance. If there is no brake reset relay BR2, the equipment needs to be disassembled for maintenance; if the motor works normally, the brake relay BR1 is closed, and the brake gets normal power supply.

[0019] The working principle of this specific embodiment is as follows: When the motor works normally, the brake relay BR1 is closed, and the P24B terminal and N24B terminal of the brake power supply 2 supply power to the motor brake to ensure the normal operation of the motor; when the motor is abnormal, the brake relay BR1 is disconnected, the motor brake loses power supply, the brake is activated, and the motor cannot move; the brake reset relay BR2 is controlled to close by the PLC or the push-button to supply power to the motor brake, and the motor can be manually moved to the inspection and maintenance position to facilitate the on-site inspection and maintenance work.

[0020] This specific embodiment can realize moving the faulty motor to the maintenance position for direct maintenance without disassembling the equipment by adding a relay (brake reset relay BR2) on the basis of the original equipment. It has low cost, reliable action, simple transformation, convenient operation, and strong practicability.

[0021] The above has shown and described the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and all these changes and improvements fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A wafer measurement equipment brake protection system, characterized in that: The invention comprises a power supply system (1), a circuit breaker (NFB13), a servo drive (SD3), a servo motor (SM3), a brake relay (BR1), a brake reset relay (BR2) and a brake power supply (2). The power supply system (1) is connected to the servo drive (SD3) through the circuit breaker (NFB13), the servo drive (SD3) is connected to the servo motor (SM3) and the brake relay (BR1), the brake reset relay (BR2), and the brake relay (BR1) and the brake reset relay (BR2) are both connected to the brake power supply (2).

2. The wafer measurement equipment braking protection system according to claim 1, characterized in that: The L1 and L2 ends of the power supply system (1) are connected to the L1 and L2 ends of the servo driver (SD3) through a circuit breaker (NFB13); the PE end of the servo driver (SD3) is connected to the PE end of the power supply system (1); the U, V, W and PE ends of the servo driver (SD3) are connected to the BR+ and BR- ends of the motor's built-in brake line and the motor power line SM3_P of the servo motor (SM3); the CN2 end of the servo driver (SD3) is connected to the motor encoder line SM3_C2 of the servo motor (SM3); the BR+ and BR- ends of the motor's built-in brake line are respectively connected to the brake relay (BR1) and the brake reset relay (BR2) through the terminal group TB_BR3+ and TB_BR3-; the brake relay (BR1) and the brake reset relay (BR2) are both connected to the P24B and N24B ends of the brake power supply (2).

3. The wafer measurement equipment braking protection system according to claim 1, characterized in that: When the brake relay (BR1) is closed, the P24B terminal and the N24B terminal of the brake power supply (2) are connected to the brake line of the motor to ensure the normal operation of the motor.

4. The wafer measurement equipment braking protection system according to claim 1, characterized in that: The switch of the brake reset relay (BR2) adopts a PLC controller or a button switch.

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