X-ray generating device

Abstract

The utility model provides an X-ray generating device. The X-ray generating device includes: an X-ray tube that emits X-rays in a first direction as an emission direction; an X-ray tube housing part that houses at least a portion of the X-ray tube and is sealed with an insulating liquid; a housing having a first housing chamber for housing the X-ray tube housing part; one or a plurality of air suction ports for sucking cooling air from the outside to the inside of the housing; one or a plurality of exhaust ports for discharging the cooling gas from the inside of the housing to the outside; and a fan which is disposed opposite to the X-ray tube housing part and pressure-feeds the cooling gas so that the cooling gas flows from the intake port to the exhaust port inside the housing. The emission window portion of the X-ray tube is disposed on the first direction side of the housing. The exhaust port is formed in a wall portion other than the first wall portion on the first direction side of the housing.

Description

Technical Field

[0001] The utility model relates to an X-ray generating device. Background Art

[0002] There is known an X-ray generating device including an X-ray tube that emits X-rays and a housing that houses the X-ray tube. In the X-ray generating device, a heat dissipation mechanism including a heat sink and a cooling fan is provided to release the heat generated in the X-ray tube to the outside of the housing through the heat dissipation mechanism (for example, refer to Japanese Patent No. 5019760).

[0003] However, in the X-ray generating device, a structure is considered in which an air inlet and an air outlet are formed in the housing, and air (cooling gas) is sucked from the air inlet and discharged from the air outlet, so as to release the heat generated by the X-ray tube in the housing to the outside of the housing. However, in such a structure, there is a case where the air discharged from the air outlet hits the irradiated object irradiated with X-rays (hereinafter, also simply referred to as "irradiated object"), and there is a concern about the adverse effects on the irradiated object caused by the heat and air volume of the air. Summary of the Utility Model

[0004] Therefore, an object of the present utility model is to provide an X-ray generating device capable of suppressing adverse effects on an irradiated object.

[0005] The X-ray generating device of the present utility model is [1] "an X-ray generating device, including: an X-ray tube that emits X-rays in a first direction as an emission direction; an X-ray tube housing portion that houses at least a part of the X-ray tube and is filled with an insulating liquid; a housing having a first housing chamber that houses the X-ray tube housing portion; one or more air inlets that suck cooling gas from the outside of the housing to the inside; one or more air outlets that discharge cooling gas from the inside of the housing to the outside; and a fan that is disposed opposite to the X-ray tube housing portion and presses the cooling gas so that the cooling gas flows from the air inlet to the air outlet inside the housing, wherein an emission window portion of the X-ray tube is disposed on the first direction side of the housing, and the air outlet is formed in a wall portion other than the first wall portion on the first direction side of the housing".

[0006] In this X-ray generating device, X-rays are emitted in the first direction from the emission window portion disposed on the first direction side of the housing, and the irradiated object is irradiated with X-rays. Here, since the air outlet is formed in a wall portion other than the first wall portion on the first direction side of the housing, the cooling gas discharged from the housing is less likely to hit the irradiated object, and adverse effects on the irradiated object caused by the heat and air volume of the cooling gas can be suppressed. That is, adverse effects on the irradiated object can be suppressed.

[0007] The X-ray generating device of the present utility model may also be "[2] the X-ray generating device described in [1] above, wherein the exhaust port is formed in the second wall portion on the second direction side intersecting the first direction of the wall portion constituting the first storage chamber, and the suction port is formed in the first wall portion". In this case, since the exhaust port is formed in the second wall portion, the cooling gas discharged from the housing is not likely to hit the irradiated object, and the adverse effects on the irradiated object can be suppressed. In addition, since the suction port is formed in the first wall portion, for example, the cooling gas around the irradiated object flows toward the first wall portion, and thus the cooling gas discharged from the exhaust port due to this air flow is even less likely to hit the irradiated object.

[0008] The X-ray generating device of the present utility model may also be "[3] the X-ray generating device described in [1] or [2] above, wherein the fan is provided at the exhaust port or at a position close to the exhaust port inside the first storage chamber". In this case, the cooling gas can be effectively circulated from the suction port to the exhaust port by the fan.

[0009] The X-ray generating device of the present utility model may also be "[4] the X-ray generating device described in [1] above, wherein the exhaust port is formed in the second wall portion on the second direction side intersecting the first direction of the wall portion constituting the first storage chamber, and the suction port is formed in the third wall portion which is the wall portion constituting the first storage chamber and opposite to the second wall portion". In this case, since the exhaust port is formed in the second wall portion, the cooling gas discharged from the housing is not likely to hit the irradiated object, and the adverse effects on the irradiated object can be suppressed. In addition, since the suction port is formed in the third wall portion opposite to the second wall portion, the cooling gas can flow smoothly from the suction port to the exhaust port.

[0010] The X-ray generating device of the present utility model may also be "[5] the X-ray generating device described in [4] above, wherein the fan is provided at the exhaust port or at a position close to the exhaust port inside the first storage chamber". In this case, the cooling gas can be effectively circulated from the suction port to the exhaust port by the fan.

[0011] The X-ray generating device of the present utility model may also be "[6] the X-ray generating device described in [4] above, wherein the fan is provided at the suction port or at a position close to the suction port inside the first storage chamber". In this case, the cooling gas can be effectively circulated from the suction port to the exhaust port by the fan.

[0012] The X-ray generating device of the present utility model may also be the X-ray generating device described in any one of [7] "[1] and [4] to [6] above, wherein in the above-mentioned first wall portion, no air vent for ventilating the cooling gas between the inside and the outside of the housing is formed". In this case, the cooling gas discharged from the housing is less likely to hit the irradiated object.

[0013] The X-ray generating device of the present utility model may also be the X-ray generating device described in [8] "[1] above, wherein the housing has a second storage chamber for storing a power supply unit that supplies power to the X-ray tube, the interiors of the above-mentioned first storage chamber and the second storage chamber are separated by a partition wall portion, a communication port for communicating the first storage chamber and the second storage chamber is formed in the partition wall portion, the exhaust port is formed in the wall portion of either the first storage chamber or the second storage chamber, and the suction port is formed in the wall portion of the other of the first storage chamber and the second storage chamber". In this case, the exhaust port or the suction port can be made far from the irradiated object.

[0014] The X-ray generating device of the present utility model may also be the X-ray generating device described in any one of [9] "[1] to [6] and [8] above, wherein in the above-mentioned first wall portion, one or more auxiliary exhaust ports for discharging the cooling gas from the inside of the housing to the outside are formed, and the total area of the auxiliary exhaust ports is smaller than the total area of the exhaust port". Thereby, even when the auxiliary exhaust ports are formed in the first wall portion, the cooling gas discharged from the housing is less likely to hit the irradiated object, and the adverse effects on the irradiated object can be suppressed.

[0015] The X-ray generating device of the present utility model may also be the X-ray generating device described in

[10] "[1] above, wherein the above-mentioned first wall portion is a top wall portion extending in a direction perpendicular to the above-mentioned first direction, either the suction port or the exhaust port is formed in the side wall portion of the housing extending in the above-mentioned first direction, and the other of the suction port and the exhaust port is formed in the inclined wall portion of the housing that is connected to the top wall portion and the side wall portion and extends in a direction inclined with respect to the above-mentioned first direction". Thereby, since the exhaust port is formed in the inclined wall portion or the side wall portion, the cooling gas discharged from the housing is less likely to hit the irradiated object, and the adverse effects on the irradiated object can be suppressed. Description of the Drawings

[0016] Figure 1 It is a side view showing the X-ray generating device according to the first embodiment.

[0017] Figure 2 It is a side sectional view showing the X-ray generating device according to the first embodiment.

[0018] Figure 3 It is a side sectional view of the X-ray generating apparatus according to the second embodiment.

[0019] Figure 4 It is a side sectional view of the X-ray generating apparatus according to the third embodiment.

[0020] Figure 5 It is a side sectional view of the X-ray generating apparatus according to the fourth embodiment.

[0021] Figure 6 It is a side sectional view of the X-ray generating apparatus according to the fifth embodiment.

[0022] Figure 7 It is a side sectional view of the X-ray generating apparatus according to the sixth embodiment.

[0023] Figure 8 It is a side sectional view of the X-ray generating apparatus according to the seventh embodiment.

[0024] Figure 9 It is a side sectional view of the X-ray generating apparatus according to the eighth embodiment.

[0025] Figure 10 It is a side sectional view of the X-ray generating apparatus according to the ninth embodiment.

[0026] Figure 11 It is a top sectional view of the X-ray generating apparatus according to the modification.

[0027] Figure 12 It is a top sectional view of the X-ray generating apparatus according to another modification.

[0028] Figure 13 It is a top sectional view of the X-ray generating apparatus according to still another modification. Detailed Embodiments

[0029] Hereinafter, with reference to the drawings, the embodiments will be described in detail. The same or corresponding parts in each figure are denoted by the same reference numerals, and redundant descriptions are omitted.

[0030] [First Embodiment]

[0031] The first embodiment will be described. As Figure 1 and as Figure 2As shown, the X-ray generating device 1 according to the first embodiment is, for example, a device for inspection that irradiates an object, and irradiates the object 91 with X-rays. As an example, the X-ray generating device 1 is a microfocus X-ray source used in X-ray non-destructive inspection for observing the internal structure of the object 91. The object 91 to be irradiated is not particularly limited and can be various objects.

[0032] Hereinafter, an explanation will be given by setting the direction along the emission direction (first direction) A of the X-rays from the X-ray generating device 1 as the Z direction, one direction perpendicular to the Z direction as the X direction, and the direction perpendicular to both the Z direction and the X direction as the Y direction. The X-ray generating device 1 includes an X-ray tube 2, an X-ray tube housing portion 2S, a power supply unit 3, and a housing 4.

[0033] The X-ray tube 2 is a part that generates X-rays and emits the X-rays in the emission direction A. The X-ray tube 2 has a vacuum housing 21 that keeps the inside vacuum. Inside the vacuum housing 21, an electron gun and a target, which are electron generating units, are housed. On the end face of the vacuum housing 21 on the emission direction A side, an emission window portion 22 formed of an X-ray transmissive material (such as beryllium or diamond, etc.) is provided. The emission window portion 22 is disposed on the emission direction A side of the housing 4.

[0034] The object 91 is disposed at a position opposite to and close to the emission window portion 22 on the emission direction A side. At a position opposite to and close to the object 91 on the emission direction A side, for example, X-ray detectors 92 such as cameras, flat panel sensors, and line sensors are disposed. In the X-ray tube 2, when electrons emitted from the electron gun enter the target inside the vacuum housing 21, X-rays are generated radially with the target as the base point. The generated X-rays are emitted from the emission window portion 22 in the emission direction A and irradiate the object 91. The X-rays transmitted through the object 91 are detected by the X-ray detector 92. In addition, when the X-rays are emitted radially from the emission window portion 22, the emission direction A may also be the emission direction of the X-rays emitted along the axial direction of the X-ray tube 2 therein.

[0035] The X-ray tube housing portion 2S houses at least a part of the X-ray tube 2. An insulating liquid (such as insulating oil) is sealed in the X-ray tube housing portion 2S. The X-ray tube housing portion 2S has a function of dissipating heat from the X-ray tube 2. That is, the heat from the X-ray tube 2 moves to the X-ray tube housing portion 2S via the insulating liquid. In addition, in the illustrated example, the end portion of the vacuum housing 21 on the emission direction A side protrudes (is exposed) from the X-ray tube housing portion 2S, and the emission window portion 22 is not housed in the X-ray tube housing portion 2S.

[0036] The power supply unit 3 supplies power to the X-ray tube 2. The power supply unit 3 has an electrically insulating insulating block 31 formed of solid epoxy resin and an internal substrate 32 including a high-voltage generation circuit molded within the insulating block 31. The insulating block 31 is formed in a substantially rectangular parallelepiped shape. The power supply unit 3 is electrically connected to the X-ray tube 2 via a high-voltage power supply unit electrically connected to the internal substrate 32.

[0037] The housing 4 forms the periphery of the X-ray generating apparatus 1. The housing 4 is a component having a rectangular parallelepiped outer shape. The housing 4 includes a first storage chamber 41 mainly storing the X-ray tube storage portion 2S and a second storage chamber 42 mainly storing the power supply unit 3. The interiors of the first storage chamber 41 and the second storage chamber 42 are each separated by a partition wall portion 44. The partition wall portion 44 is a wall portion extending in a direction perpendicular to the emission direction A (in other words, along the XY plane).

[0038] The first storage chamber 41 is composed of a top wall portion (first wall portion) 41A disposed on the emission direction A side, a plurality of side wall portions 41B continuous with the top wall portion 41A, and a partition wall portion 44 continuous with the opposite side of the side wall portions 41B on the emission direction A side. The first storage chamber 41 has a rectangular parallelepiped-shaped enclosed space inside thereof.

[0039] The top wall portion 41A is a wall portion extending in a direction perpendicular to the emission direction A. An opening for exposing the emission window portion 22 is provided in the top wall portion 41A. That is, when looking at the top wall portion 41A from the direction opposite to the emission direction A, the emission window portion 22 is exposed from the top wall portion 41A. In the illustrated example, the emission window portion 22 is disposed so as to be flush with the top wall portion 41A, but the positional relationship between the emission window portion 22 and the top wall portion 41A is not particularly limited. For example, the emission window portion 22 may protrude from the top wall portion 41A.

[0040] The top wall portion 41A and the partition wall portion 44 face each other. The side wall portions 41B are wall portions extending in the emission direction A. A pair of side wall portions 41B are provided so as to face each other in the X direction between one end portion in the X direction of the top wall portion 41A and one end portion in the X direction of the partition wall portion 44, and between the other end portion in the X direction of the top wall portion 41A and the other end portion in the X direction of the partition wall portion 44. In addition, a pair of side wall portions 41B are provided so as to face each other in the Y direction between one end portion in the Y direction of the top wall portion 41A and one end portion in the Y direction of the partition wall portion 44, and between the other end portion in the Y direction of the top wall portion 41A and the other end portion in the Y direction of the partition wall portion 44.

[0041] The second storage chamber 42 is composed of a bottom wall portion 42A disposed on the opposite side of the emission direction A side, a plurality of side wall portions 42B continuous with the bottom wall portion 42A, and a partition wall portion 44 continuous with the emission direction A side of the side wall portions 42B. The second storage chamber 42 has a rectangular parallelepiped-shaped enclosed space inside thereof.

[0042] The bottom wall portion 42A is a wall portion extending in a direction perpendicular to the emission direction A. The bottom wall portion 42A and the partition wall portion 44 face each other. The side wall portion 42B is a wall portion extending in the emission direction A. A pair of side wall portions 42B are provided in a manner facing each other in the X direction between one end portion in the X direction of the bottom wall portion 42A and one end portion in the X direction of the partition wall portion 44, and between the other end portion in the X direction of the bottom wall portion 42A and the other end portion in the X direction of the partition wall portion 44. In addition, a pair of side wall portions 42B are provided in a manner facing each other in the Y direction between one end portion in the Y direction of the bottom wall portion 42A and one end portion in the Y direction of the partition wall portion 44, and between the other end portion in the Y direction of the bottom wall portion 42A and the other end portion in the Y direction of the partition wall portion 44.

[0043] The X-ray generating device 1 includes a plurality of air inlets 5 that suck air (cooling gas) from the outside to the inside of the housing 4, an air outlet 6 that discharges air from the inside to the outside of the housing 4, and a fan 7 that pressurizes the air so that the air circulates from the air inlet 5 to the air outlet 6 inside the housing 4.

[0044] The air inlets 5 are formed in the top wall portion 41A. A plurality of air inlets 5 are provided around the emission window portion 22 of the top wall portion 41A. The air inlets 5 communicate the inside and outside of the first storage chamber 41. The air inlets 5 are, for example, circular through holes.

[0045] The air outlet 6 is formed in the side wall portion (second wall portion) 41B1 on one side in the X direction (second direction side, left side in the drawing). That is, the air outlet 6 is formed in a wall portion other than the top wall portion 41A of the housing 4. The air outlet 6 communicates the inside and outside of the first storage chamber 41. The air outlet 6 is, for example, a circular through hole having a diameter larger than that of the air inlet 5.

[0046] The fan 7 is provided at a position in the first storage chamber 41 close to the air outlet 6. Specifically, the fan 7 is disposed between the air outlet 6 and the X-ray tube storage portion 2S (X-ray tube 2) inside the first storage chamber 41. The fan 7 pressurizes the air inside the first storage chamber 41 to the outside of the first storage chamber 41 via the air outlet 6. The fan 7 is supported by the housing 4. The fan 7 is disposed opposite to the X-ray tube storage portion 2S. That is, the fan 7 is disposed such that its suction port or discharge port (here, the suction port) faces the X-ray tube storage portion 2S. In the illustrated example, by disposing the fan 7 opposite to the X-ray tube storage portion 2S, the air in contact with the X-ray tube storage portion 2S is smoothly sucked to the suction port of the fan 7.

[0047] In such an X-ray generating apparatus 1, for example, by driving the fan 7, air is sucked from the air inlet 5 of the top wall portion 41A in a direction opposite to the emission direction A, and the air flows into the interior of the first storage chamber 41. Inside the first storage chamber 41, the air flows from the air inlet 5 to the air outlet 6. At this time, the air contacts the X-ray tube storage portion 2S, whereby the X-ray tube storage portion 2S is cooled. As a result, the X-ray tube 2 is cooled (the heat generated in the X-ray tube 2, that is, the heat transferred to the X-ray tube storage portion 2S is dissipated). Thereafter, the heated air is discharged to one side in the X direction from the air outlet 6 and flows out of the first storage chamber 41.

[0048] As described above, in the X-ray generating apparatus 1, since the air outlet 6 is formed in a wall portion other than the top wall portion 41A, the air discharged from the housing 4 is less likely to contact the irradiated object 91, and adverse effects on the irradiated object 91 due to the heat and air volume of the air can be suppressed. That is, according to the X-ray generating apparatus 1, adverse effects on the irradiated object 91 can be suppressed. Stable X-ray imaging can be achieved. In particular, the X-ray generating apparatus 1 is a microfocus X-ray source, and the FOD (Focus to Object Distance: the distance between the irradiated object 91 and the focus) is small. Therefore, the above-described effect that the air discharged from the housing 4 is less likely to contact the irradiated object 91 is effective.

[0049] In the X-ray generating apparatus 1, since the air outlet 6 is formed in the side wall portion 41B1, the air discharged from the housing 4 is less likely to contact the irradiated object 91, and adverse effects on the irradiated object 91 can be suppressed. In addition, since the air inlet 5 is formed in the top wall portion 41A, for example, the air around the irradiated object 91 flows toward the top wall portion 41A. Therefore, the air discharged from the air outlet 6 due to this air flow is even less likely to contact the irradiated object 91.

[0050] In the X-ray generating apparatus 1, the fan 7 is disposed at a position inside the first storage chamber 41 close to the air outlet 6. In this case, the air can be effectively circulated from the air inlet 5 to the air outlet 6 by the fan 7.

[0051] In addition, in the present embodiment, as long as the air inlet 5 is formed in the top wall portion 41A, its number, size, position, and shape are not particularly limited and can be various numbers, sizes, positions, and shapes. As long as the air outlet 6 is formed in the side wall portion 41B, its number, size, position, and shape are not particularly limited and can be various numbers, sizes, positions, and shapes. The fan 7 is not particularly limited, and various known fans can be used. The position where the fan 7 is disposed and the support structure of the fan 7 are not particularly limited. For example, the fan 7 can also be disposed at the air outlet 6.

[0052] [Second Embodiment]

[0053] A description will be given of the second embodiment. In the description of the second embodiment, differences from the above-described first embodiment will be described, and redundant descriptions will be appropriately omitted.

[0054] As Figure 3 shown, the X-ray generating apparatus 101 according to the second embodiment is provided with an intake port 105 instead of the intake port 5 (refer to Figure 2 ), which is different from the above-described first embodiment. A plurality of intake ports 105 are formed in the wall portion constituting the first storage chamber 41, that is, the side wall portion (the third wall portion) 41B2 on the other side (the right side in the drawing) in the X direction. The side wall portion 41B2 in which the intake ports 105 are formed faces the side wall portion 41B1 in which the exhaust port 6 is formed.

[0055] The intake port 105 communicates the inside and outside of the first storage chamber 41. The intake port 105 is, for example, a circular through-hole. In addition, as long as the intake port 105 is formed in the side wall portion 41B2, its number, size, position, and shape are not particularly limited, and can be various numbers, sizes, positions, and shapes. In the top wall portion 41A, no ventilation port for ventilating air between the inside and outside of the housing 4 is formed. In other words, the top wall portion 41A is a wall portion in which no through-hole is formed.

[0056] In such an X-ray generating apparatus 101, for example, by driving the fan 7, air is sucked from the intake port 105 of the side wall portion 41B2 to one side in the X direction, and the air flows into the inside of the first storage chamber 41. Inside the first storage chamber 41, the air flows from the intake port 105 to the exhaust port 6. At this time, the air contacts the X-ray tube housing portion 2S, and as a result, the X-ray tube 2 is cooled. After that, the heated air is discharged from the exhaust port 6 to one side in the X direction and flows out to the outside of the first storage chamber 41.

[0057] As described above, in the X-ray generating apparatus 101, since the exhaust port 6 is formed in a wall portion other than the top wall portion 41A, the air discharged from the housing 4 is less likely to hit the irradiated object 91, and the adverse effects on the irradiated object 91 due to the heat and air volume of the air can be suppressed. That is, in the X-ray generating apparatus 101, the adverse effects on the irradiated object 91 can also be suppressed.

[0058] In the X-ray generating apparatus 101, since the exhaust port 6 is formed in the side wall portion 41B1, the air discharged from the housing 4 is less likely to hit the irradiated object 91, and the adverse effects on the irradiated object 91 can be suppressed. In addition, since the intake port 105 is formed in the side wall portion 41B2 facing the side wall portion 41B1, the air can flow smoothly from the intake port 105 to the exhaust port 6.

[0059] In the X-ray generating apparatus 101, an air vent for ventilating air between the inside and the outside of the housing 4 is not formed in the top wall portion 41A. In this case, the air discharged from the housing 4 is less likely to hit the irradiated object 91.

[0060] [Third Embodiment]

[0061] The third embodiment will be described. In the description of the third embodiment, differences from the above-described second embodiment will be described, and redundant descriptions will be appropriately omitted.

[0062] As Figure 4 shown, the X-ray generating apparatus 201 according to the third embodiment includes an intake port 205 instead of the intake port 105 (see Figure 3 ), an exhaust port 206 instead of the exhaust port 6 (see Figure 3 ), and a fan 207 instead of the fan 7 (see Figure 3 ), which is different from the above-described second embodiment.

[0063] The intake port 205 is formed in the wall portion constituting the first storage chamber 41, that is, the side wall portion 41B1 on the X-direction side (left side in the drawing). The intake port 205 communicates the inside and the outside of the first storage chamber 41. The intake port 205 is, for example, a circular through-hole. The exhaust port 206 is formed in the wall portion constituting the first storage chamber 41, that is, the side wall portion 41B2 on the other X-direction side (right side in the drawing). A plurality of exhaust ports 206 are formed in the side wall portion 41B2. The exhaust port 206 communicates the inside and the outside of the first storage chamber 41. The exhaust port 206 is, for example, a circular through-hole having a diameter smaller than that of the intake port 205.

[0064] The fan 207 is provided at a position in the first storage chamber 41 close to the intake port 205. Specifically, the fan 207 is disposed between the intake port 205 and the X-ray tube 2 inside the first storage chamber 41. The fan 207 presses the air inside the first storage chamber 41 into the first storage chamber 41 via the intake port 205. The fan 207 is disposed opposite to the X-ray tube housing portion 2S. That is, the fan 207 is disposed such that its suction port or discharge port (here, the discharge port) faces the X-ray tube housing portion 2S. In the illustrated example, by disposing the fan 207 opposite to the X-ray tube housing portion 2S, the air pressed by the fan 207 directly contacts the X-ray tube housing portion 2S.

[0065] In such an X-ray generating apparatus 201, for example, by driving the fan 207, air is sucked from the air inlet 205 of the side wall portion 41B1 toward the other side in the X direction, and the air flows into the interior of the first storage chamber 41. Inside the first storage chamber 41, the air flows from the air inlet 205 toward the air outlet 206. At this time, the air contacts the X-ray tube housing portion 2S, and as a result, the X-ray tube 2 is cooled. After that, the heated air is discharged from the air outlet 206 toward the other side in the X direction and flows out of the first storage chamber 41.

[0066] As described above, in the X-ray generating apparatus 201, since the air outlet 206 is formed in a wall portion other than the top wall portion 41A, the air discharged from the housing 4 is less likely to hit the irradiation object 91, and it is possible to suppress the adverse effects on the irradiation object 91 due to the heat and air volume of the air. That is, in the X-ray generating apparatus 201, it is also possible to suppress the adverse effects on the irradiation object 91.

[0067] In the X-ray generating apparatus 201, the fan 207 is provided at a position inside the first storage chamber 41 close to the air inlet 205. In this case, it is possible to effectively circulate the air from the air inlet 205 to the air outlet 206 by the fan 207.

[0068] In addition, in the present embodiment, as long as the air inlet 205 is formed in the side wall portion 41B1, its number, size, position, and shape are not particularly limited, and they can be various numbers, sizes, positions, and shapes. As long as the air outlet 206 is formed in the side wall portion 41B2, its number, size, position, and shape are not particularly limited, and they can be various numbers, sizes, positions, and shapes. As the fan 207, there is no particular limitation, and various known fans can be used. The position where the fan 207 is disposed and the support structure of the fan 207 are not particularly limited, and the fan 207 may also be provided at the air inlet 205.

[0069] [Fourth Embodiment]

[0070] The fourth embodiment will be described. In the description of the fourth embodiment, differences from the above-described first embodiment will be described, and repeated descriptions will be appropriately omitted.

[0071] As Figure 5 shown, the X-ray generating apparatus 301 according to the fourth embodiment includes an air inlet 305 instead of the air inlet 5 (see Figure 2 ), includes an air outlet 306 instead of the air outlet 6 (see Figure 2 ), and further includes a fan 307, and a communication port 309 is formed in the partition wall portion 44, which is different from the above-described second embodiment.

[0072] A plurality of air inlets 305 are formed in the wall portion constituting the first storage chamber 41, i.e., the side wall portion 41B1 on one side in the X direction (the left side in the drawing). The air inlets 305 communicate the inside and outside of the first storage chamber 41. The air inlets 305 are, for example, circular through holes. A plurality of air outlets 306 are formed in the wall portion constituting the second storage chamber 42, i.e., the side wall portion 42B2 on the other side in the X direction (the right side in the drawing). The air outlets 306 communicate the inside and outside of the second storage chamber 42. The air outlets 306 are, for example, circular through holes.

[0073] A fan 307 is provided inside the second storage chamber 42. The fan 307 presses the air inside the second storage chamber 42 toward the air outlet 306. A plurality of communication ports 309 communicate the first storage chamber 41 and the second storage chamber 42. The communication ports 309 are formed in the partition wall portion 44. The communication ports 309 are, for example, circular through holes.

[0074] In such an X-ray generating apparatus 301, for example, by driving the fans 7 and 307, air is sucked from the air inlet 305 of the side wall portion 41B1 toward the other side in the X direction and flows into the inside of the first storage chamber 41. Inside the first storage chamber 41, a part of the air flows toward the other side in the X direction. At this time, the air contacts the X-ray tube storage portion 2S, and as a result, the X-ray tube 2 is cooled. After that, a part of the heated air flows into the inside of the second storage chamber 42 through the communication port 309. In addition, inside the first storage chamber 41, other parts of the air directly flow into the inside of the second storage chamber 42 through the communication port 309. The air that has flowed into the inside of the second storage chamber 42 flows toward the air outlet 306. At this time, the air contacts the power supply unit 3, and thereby the power supply unit 3 is cooled. Then, the heated air is discharged from the air outlet 306 toward the other side in the X direction and flows out of the second storage chamber 42.

[0075] As described above, in the X-ray generating apparatus 301, since the air outlet 306 is formed in a wall portion other than the top wall portion 41A, the air discharged from the housing 4 is less likely to hit the irradiation object 91, and the adverse effects on the irradiation object 91 due to the heat and the air volume of the air can be suppressed. That is, in the X-ray generating apparatus 301, the adverse effects on the irradiation object 91 can also be suppressed.

[0076] In the X-ray generating apparatus 301, the communication port 309 is formed in the partition wall portion 44, the air outlet 306 is formed in the wall portion constituting the second storage chamber 42, and the air inlet 305 is formed in the wall portion constituting the first storage chamber 41. In this case, the air outlet 306 can be made far from the irradiation object 91.

[0077] In addition, in the present embodiment, as long as the air inlet 305 is formed in the side wall portion 41B1, there are no particular limitations on its number, size, position, and shape, and it can have various numbers, sizes, positions, and shapes. As long as the air outlet 306 is formed in the side wall portion 43B2, there are no particular limitations on its number, size, position, and shape, and it can have various numbers, sizes, positions, and shapes. There are no particular limitations on the fan 307, and various known fans can be used. The position where the fan 307 is disposed and the supporting structure of the fan 307 are not particularly limited, as long as it is disposed and supported inside the second storage chamber 42. As long as the communication port 309 is formed in the partition wall portion 44, there are no particular limitations on its number, size, position, and shape, and it can have various numbers, sizes, positions, and shapes.

[0078] In addition, in the present embodiment, it is also possible that the air outlet 306 is formed in the wall portion constituting the first storage chamber 41, and the air inlet 305 is formed in the wall portion constituting the second storage chamber 42. In this case, the air inlet 305 can be separated from the irradiation object 91.

[0079] [Fifth Embodiment]

[0080] The fifth embodiment will be described. In the description of the fifth embodiment, differences from the above-described third embodiment will be described, and repeated descriptions will be appropriately omitted.

[0081] As Figure 6 shown, the X-ray generating apparatus 401 according to the fifth embodiment is provided with an air inlet 405 instead of the air inlet 205 (refer to Figure 4 ), and an auxiliary air outlet 402 is formed in the top wall portion 41A, which is different from the above-described third embodiment.

[0082] A plurality of air inlets 405 are formed in the wall portion constituting the first storage chamber 41, that is, the side wall portion 41B1 on one side in the X direction (the left side in the drawing). The air inlets 405 communicate the inside and outside of the first storage chamber 41. The air inlets 405 are, for example, circular through holes. The auxiliary air outlet 402 is an air outlet for discharging air from the inside of the housing 4 to the outside. A plurality of auxiliary air outlets 402 are formed in the wall portion constituting the first storage chamber 41, that is, the top wall portion 41A on the emission direction A side. The auxiliary air outlets 402 communicate the inside and outside of the first storage chamber 41. The auxiliary air outlets 402 are, for example, circular through holes. The total area of the plurality of auxiliary air outlets 402 is smaller than the total area of the plurality of air outlets 206. For example, the sum of the flow path areas of the respective auxiliary air outlets 402 is smaller than the sum of the flow path areas of the respective air outlets 206.

[0083] In such an X-ray generating apparatus 401, for example, by driving the fan 207, air is sucked from the air inlet 405 of the side wall portion 41B1 toward the other side in the X direction and flows into the interior of the first storage chamber 41. Inside the first storage chamber 41, the air flows toward the other side in the X direction. At this time, the air contacts the X-ray tube housing portion 2S, and as a result, the X-ray tube 2 is cooled. After that, the heated air is discharged from the exhaust port 206 toward the other side in the X direction and flows out of the first storage chamber 41. Along with this, a small amount of air is discharged from the auxiliary exhaust port 402 toward the emission direction A and flows out of the first storage chamber 41.

[0084] As described above, in the X-ray generating apparatus 401, since the exhaust port 206 is formed in a wall portion other than the top wall portion 41A, the air discharged from the housing 4 is less likely to contact the irradiation object 91, and it is possible to suppress the adverse effects on the irradiation object 91 due to the heat and air volume of the air. That is, in the X-ray generating apparatus 401, it is also possible to suppress the adverse effects on the irradiation object 91.

[0085] In the X-ray generating apparatus 401, since the total area of the auxiliary exhaust port 402 is smaller than the total area of the exhaust port 206, even when the auxiliary exhaust port 402 is formed in the top wall portion 41A, the air discharged from the housing 4 is less likely to contact the irradiation object 91, and it is possible to suppress the adverse effects on the irradiation object 91.

[0086] In addition, in the present embodiment, as long as the air inlet 405 is formed in the side wall portion 41B1, its number, size, position, and shape are not particularly limited and can be various numbers, sizes, positions, and shapes. As long as the auxiliary exhaust port 402 is formed in the top wall portion 41A, its number, size, position, and shape are not particularly limited and can be various numbers, sizes, positions, and shapes. When the diameters of the exhaust port 206 and the auxiliary exhaust port 402 change depending on the depth position of the hole, the areas can also be the areas at the maximum diameter, minimum diameter, or average diameter of the hole.

[0087] [Sixth Embodiment]

[0088] The sixth embodiment will be described. In the description of the sixth embodiment, differences from the above-described first embodiment will be described, and repeated descriptions will be appropriately omitted.

[0089] As Figure 7 shown, the X-ray generating apparatus 501 according to the sixth embodiment includes a first storage chamber 541 instead of the first storage chamber 41 (refer to Figure 2 ), an air inlet 505 instead of the air inlet 5 (refer to Figure 2 ), and an exhaust port 6 (refer to Figure 2)It has an exhaust port 506, which is different from the first embodiment described above.

[0090] The first storage chamber 541 is composed of a top wall portion (first wall portion) 541A, a plurality of side wall portions 541B, a plurality of inclined wall portions 541C, and a partition wall portion 44. The top wall portion 541A is disposed on the emission direction A side and is a wall portion extending in a direction perpendicular to the emission direction A. An opening for exposing the emission window portion 22 is provided in the top wall portion 541A. That is, when looking at the top wall portion 541A from the direction opposite to the emission direction A, the emission window portion 22 is exposed from the top wall portion 541A. The top wall portion 541A and the partition wall portion 44 face each other.

[0091] The side wall portion 541B is a wall portion extending in the emission direction A. A pair of side wall portions 541B are provided at both ends in the X direction of the partition wall portion 44 so as to face each other in the X direction. In addition, a pair of side wall portions 541B are provided at both ends in the Y direction of the partition wall portion 44 so as to face each other in the Y direction.

[0092] The inclined wall portion 541C is a wall portion extending in a direction inclined with respect to the emission direction A. Specifically, the inclined wall portion 541C is inclined so as to incline inward with respect to the emission direction A as it advances in the emission direction A. The inclined wall portion 541C is continuous with the top wall portion 541A and the side wall portion 541B. The inclined wall portion 541C is provided between one end in the X direction of the top wall portion 541A and the end on the emission direction A side of the side wall portion 541B, between the other end in the X direction of the top wall portion 541A and the end on the emission direction A side of the side wall portion 541B, between one end in the Y direction of the top wall portion 541A and the end on the emission direction A side of the side wall portion 541B, and between the other end in the Y direction of the top wall portion 541A and the end on the emission direction A side of the side wall portion 541B. A plurality of suction ports 505 are formed in the side wall portion 541B. The suction ports 505 are, for example, circular through-holes. A plurality of exhaust ports 506 are formed in the inclined wall portion 541C. The exhaust ports 506 are, for example, circular through-holes.

[0093] In such an X-ray generating apparatus 501, for example, by driving the fan 7, air is sucked from the suction ports 505 of the side wall portion 541B and flows into the interior of the first storage chamber 541. Inside the first storage chamber 541, the air flows toward the exhaust port 506. At this time, the air comes into contact with the X-ray tube housing portion 2S, and as a result, the X-ray tube 2 is cooled. After that, the heated air is discharged from the exhaust ports 506 of the inclined wall portion 541C in a direction inclined with respect to the emission direction A and flows out to the outside of the first storage chamber 541.

[0094] As described above, in the X-ray generating apparatus 501, since the exhaust port 506 is formed in a wall portion other than the top wall portion 541A, the air discharged from the housing 4 is less likely to hit the irradiated object 91, and adverse effects on the irradiated object 91 due to the heat and air volume of the air can be suppressed. That is, in the X-ray generating apparatus 501, adverse effects on the irradiated object 91 can also be suppressed.

[0095] In the X-ray generating apparatus 501, since the exhaust port 506 is formed in the inclined wall portion 541C, the air discharged from the housing 4 is less likely to hit the irradiated object 91, and adverse effects on the irradiated object 91 can be suppressed.

[0096] In addition, in the present embodiment, the number, size, position, and shape of the suction port 505 are not particularly limited, and can be various numbers, sizes, positions, and shapes. The number, size, position, and shape of the exhaust port 506 are not particularly limited, and can be various numbers, sizes, positions, and shapes. Further, in the present embodiment, the suction port 505 may be formed in the inclined wall portion 541C, and the exhaust port 506 may be formed in the side wall portion 541B. In this case, since the exhaust port 506 is formed in the side wall portion 541B, the air discharged from the housing 4 is less likely to hit the irradiated object 91, and adverse effects on the irradiated object 91 can be suppressed.

[0097] [Embodiment 7]

[0098] The seventh embodiment will be described. In the description of the seventh embodiment, differences from the first embodiment described above will be described, and repeated descriptions will be appropriately omitted.

[0099] As Figure 8 shown, the X-ray generating apparatus 601 according to the seventh embodiment includes a housing 604 instead of the housing 4 (see Figure 2 ), a suction port 605 instead of the suction port 5 (see Figure 2 ), an exhaust port 606 instead of the exhaust port 6 (see Figure 2 ), and a fan 607 instead of the fan 7 (see Figure 2 ), which is different from the first embodiment described above.

[0100] The housing 604 forms the periphery of the X-ray generating apparatus 1. The housing 604 is a component having a rectangular parallelepiped shape. The housing 604 includes a storage chamber 640 that mainly houses the X-ray tube storage section 2S and the power supply section 3. The storage chamber 640 is composed of a top wall section (first wall section) 640A disposed on the emission direction A side, a plurality of side wall sections 640B continuous with the top wall section 41A, and a bottom wall section 640C continuous with the opposite side of the side wall section 640B on the emission direction A side. The storage chamber 640 has a rectangular parallelepiped-shaped enclosed space inside. The top wall section 640A is a wall section extending in a direction perpendicular to the emission direction A (in other words, along the XY plane). An opening for exposing the emission window section 22 is provided in the top wall section 640A. That is, when looking at the top wall section 640A from the direction opposite to the emission direction A, the emission window section 22 is exposed from the top wall section 640A. The top wall section 640A and the bottom wall section 640C face each other.

[0101] The side wall section 640B is a wall section extending in the emission direction A. The bottom wall section 640C is a wall section extending in a direction perpendicular to the emission direction A. A pair of side wall sections 640B are provided in a relatively opposed manner in the X direction between one end in the X direction of the top wall section 640A and one end in the X direction of the bottom wall section 640C, and between the other end in the X direction of the top wall section 640A and the other end in the X direction of the bottom wall section 640C. In addition, a pair of side wall sections 640B are provided in a relatively opposed manner in the Y direction between one end in the Y direction of the top wall section 640A and one end in the Y direction of the bottom wall section 640C, and between the other end in the Y direction of the top wall section 640A and the other end in the Y direction of the bottom wall section 640C.

[0102] The suction port 605 sucks air from the outside of the housing 4 to the inside. A plurality of suction ports 605 are formed in the side wall section 640B1 on one side in the X direction (left side in the drawing). The suction port 605 is disposed on the emission direction A side of the side wall section 640B1. The suction port 605 communicates the inside and outside of the storage chamber 640. The suction port 605 is, for example, a circular through-hole. The exhaust port 606 discharges air from the inside of the housing 4 to the outside. A plurality of exhaust ports 606 are formed in the side wall section 640B2 on the other side in the X direction (right side in the drawing). The exhaust port 606 is disposed on the side opposite to the emission direction A side of the side wall section 640B2. The fan 607 pressurizes air so that the air flows from the suction port 605 to the exhaust port 606. The fan 607 is supported by the X-ray tube 2. The fan 607 is disposed opposite to the X-ray tube storage section 2S. That is, the fan 7 is disposed such that its suction port or discharge port (here, the discharge port) faces the X-ray tube storage section 2S. In the illustrated example, by disposing the fan 607 opposite to the X-ray tube storage section 2S, the air pressurized by the fan 607 comes into direct contact with the X-ray tube storage section 2S.

[0103] In such an X-ray generating apparatus 601, for example, by driving the fan 607, air is sucked from the air inlet 605 of the side wall portion 640B1 to the other side in the X direction, and the air flows into the interior of the storage chamber 640. Inside the storage chamber 640, the air flows toward the air outlet 606. At this time, the air comes into contact with the X-ray tube storage portion 2S and the power supply portion 3. As a result, the X-ray tube 2 and the power supply portion 3 are cooled thereby. After that, the heated air is discharged from the air outlet 606 to the other side in the X direction and flows out of the storage chamber 640.

[0104] As described above, in the X-ray generating apparatus 601, since the air outlet 606 is formed in a wall portion other than the top wall portion 640A, the air discharged from the housing 604 is less likely to hit the irradiation object 91, and it is possible to suppress the adverse effects on the irradiation object 91 due to the heat and the air volume of the air. That is, in the X-ray generating apparatus 601, it is also possible to suppress the adverse effects on the irradiation object 91.

[0105] In addition, in the present embodiment, as long as the air inlet 605 is formed in the side wall portion 640B, its number, size, position, and shape are not particularly limited, and various numbers, sizes, positions, and shapes can be adopted. As long as the air outlet 606 is formed in the side wall portion 640B2, its number, size, position, and shape are not particularly limited, and various numbers, sizes, positions, and shapes can be adopted. The fan 607 is not particularly limited, and various known fans can be used. The position where the fan 607 is disposed and the supporting structure of the fan 607 are not particularly limited, as long as the fan 607 is disposed and supported inside the housing 604.

[0106] [Eighth Embodiment]

[0107] The eighth embodiment will be described. In the description of the eighth embodiment, differences from the above-described fourth embodiment will be described, and repeated descriptions will be appropriately omitted.

[0108] As Figure 9 shown, the X-ray generating apparatus 701 according to the eighth embodiment includes an air inlet 705 instead of the air inlet 305 (see Figure 5 ), and does not include the fan 307, which is different from the above-described fourth embodiment.

[0109] A plurality of air inlets 705 are formed in the wall portion constituting the second storage chamber 42, that is, the side wall portion 42B1 on the X direction side. The air inlets 705 communicate the inside and outside of the second storage chamber 42. The air inlets 705 are, for example, circular through holes. As long as the air inlets 705 are formed in the side wall portion 42B1, their number, size, position, and shape are not particularly limited, and various numbers, sizes, positions, and shapes can be adopted.

[0110] In such an X-ray generating apparatus 701, for example, by driving the fan 7, air is sucked from the air inlet 705 of the side wall portion 42B1 to the other side in the X direction, and the air flows into the interior of the second storage chamber 42. Inside the first storage chamber 41 and the second storage chamber 42, the air flows from the air inlet 705 to the air outlet 306. At this time, a part of the air flows from the second storage chamber 42 to the first storage chamber 41 and from the first storage chamber 41 to the second storage chamber 42 via the plurality of communication ports 309. As a result of the air coming into contact with the X-ray tube housing portion 2S and the power supply portion 3, the X-ray tube 2 and the power supply portion 3 are cooled. Then, the heated air is discharged from the air outlet 306 to the other side in the X direction and flows out of the second storage chamber 42.

[0111] As described above, in the X-ray generating apparatus 701, since the air outlet 306 is formed in a wall portion other than the top wall portion 41A, the air discharged from the housing 4 is less likely to hit the irradiated object 91, and it is possible to suppress the adverse effects on the irradiated object 91 due to the heat and the air volume of the air. That is, in the X-ray generating apparatus 701, it is also possible to suppress the adverse effects on the irradiated object 91.

[0112] [Embodiment 9]

[0113] The ninth embodiment will be described. In the description of the ninth embodiment, differences from the above-described first embodiment will be described, and repeated descriptions will be appropriately omitted.

[0114] As Figure 10 shown, the X-ray generating apparatus 801 according to the ninth embodiment includes a housing 804 instead of the housing 4 (see Figure 2 ), an air inlet 805 instead of the air inlet 5 (see Figure 2 ), an air outlet 806 instead of the air outlet 6 (see Figure 2 ), and a fan 807 instead of the fan 7 (see Figure 2 ), which is different from the above-described first embodiment.

[0115] The housing 804 includes a first storage chamber 840 that houses the X-ray tube 2 and does not house the power supply portion 3. The first storage chamber 840 is composed of a top wall portion 840A disposed on the emission direction A side, a plurality of side wall portions 840B continuous with the top wall portion 840A, and a bottom wall portion 840C continuous with the opposite side of the side wall portions 840B on the emission direction A side. The first storage chamber 840 has a rectangular parallelepiped-shaped enclosed space inside. The top wall portion 840A is a wall portion extending in a direction perpendicular to the emission direction A. An opening for exposing the emission window portion 22 is provided in the top wall portion 840A. That is, when looking at the top wall portion 840A from the direction opposite to the emission direction A, the emission window portion 22 is exposed from the top wall portion 840A. The top wall portion 840A and the bottom wall portion 840C face each other.

[0116] The side wall portion 840B is a wall portion extending along the emission direction A. The bottom wall portion 840C is a wall portion extending along a direction perpendicular to the emission direction A. A pair of side wall portions 840B are provided in a manner opposite to each other in the X direction between one end in the X direction of the top wall portion 840A and one end in the X direction of the bottom wall portion 840C, and between the other end in the X direction of the top wall portion 840A and the other end in the X direction of the bottom wall portion 840C. In addition, a pair of side wall portions 840B are provided in a manner opposite to each other in the Y direction between one end in the Y direction of the top wall portion 840A and one end in the Y direction of the bottom wall portion 840C, and between the other end in the Y direction of the top wall portion 840A and the other end in the Y direction of the bottom wall portion 840C.

[0117] The air inlet 805 sucks air from the outside to the inside of the housing 804. The air inlet 805 is formed on one side (the left side in the drawing) in the X direction of the bottom wall portion 840C. The air inlet 805 communicates the inside and outside of the first storage chamber 840. The air inlet 805 is, for example, a circular through-hole. The air outlet 806 discharges air from the inside of the housing 4 to the outside. The air outlet 806 is formed on the other side (the right side in the drawing) in the X direction of the bottom wall portion 840C. The air outlet 806 communicates the inside and outside of the first storage chamber 840. The air outlet 806 is, for example, a circular through-hole.

[0118] The fan 807 pressurizes air so that the air flows from the air inlet 805 to the air outlet 806. The fan 807 is provided at a position in the first storage chamber 840 close to the air inlet 805. The fan 807 is supported by the housing 804. The fan 807 is disposed opposite to the X-ray tube storage portion 2S. That is, the fan 807 is disposed such that its suction port or discharge port (here, the discharge port) faces the X-ray tube storage portion 2S. In the illustrated example, by disposing the fan 807 opposite to the X-ray tube storage portion 2S, the air pressurized by the fan 807 directly contacts the X-ray tube storage portion 2S.

[0119] In such an X-ray generating apparatus 801, for example, by driving the fan 807, air is sucked from the air inlet 805 along the emission direction A, and the air flows into the inside of the storage chamber 640 from the outside. Inside the first storage chamber 840, the air flows toward the air outlet 806. At this time, the air contacts the X-ray tube storage portion 2S, and as a result, the X-ray tube 2 is cooled. After that, the heated air is discharged from the air outlet 806 to the opposite side of the emission direction A and flows out of the first storage chamber 840.

[0120] As described above, in the X-ray generating apparatus 801, since the exhaust port 806 is formed in a wall portion other than the top wall portion 840A, the air discharged from the housing 804 is less likely to hit the irradiation object 91, and adverse effects on the irradiation object 91 due to the heat and air volume of the air can be suppressed. That is, in the X-ray generating apparatus 801, adverse effects on the irradiation object 91 can also be suppressed.

[0121] In addition, in the present embodiment, as long as the suction port 805 is formed in the bottom wall portion 840C, its number, size, position, and shape are not particularly limited, and various numbers, sizes, positions, and shapes can be adopted. As long as the exhaust port 606 is formed in the bottom wall portion 840C, its number, size, position, and shape are not particularly limited, and various numbers, sizes, positions, and shapes can be adopted. There is no particular limitation on the fan 807, and various known fans can be used. The position where the fan 807 is disposed and the supporting structure of the fan 807 are not particularly limited, and the fan 807 can also be disposed and supported inside the housing 804.

[0122] As described above, one mode of the present utility model is not limited to the above-described embodiment.

[0123] In the above-described embodiment, the positional relationship between the exhaust port 6 and the suction port 5 in the housing 4 is not particularly limited. For example, as shown in Figure 11 , a plurality of suction ports 5 may be formed in the side wall portion 41B1 of the housing 4, and a plurality of exhaust ports 6 may be formed in the side wall portion 41B3 of the housing 4 perpendicular to the side wall portion 41B1. In addition, for example, as shown in Figure 12 , a plurality of suction ports 5 may be formed in the side wall portion 41B1 of the housing 4, a plurality of exhaust ports 6 may be formed in the side wall portion 41B3 of the housing 4 perpendicular to the side wall portion 41B1, and a plurality of exhaust ports 6 may be formed in the side wall portion 41B4 of the housing 4 opposite to the side wall portion 41B3. In addition, for example, as shown in Figure 13 , a plurality of suction ports 5 may be formed in the side wall portion 41B1 of the housing 4, a plurality of exhaust ports 6 may be formed in the side wall portion 41B2 of the housing 4 opposite to the side wall portion 41B1, a plurality of exhaust ports 6 may be formed in the side wall portion 41B3 of the housing 4 perpendicular to the side wall portion 41B1, and a plurality of exhaust ports 6 may be formed in the side wall portion 41B4 of the housing 4 opposite to the side wall portion 41B3. In these cases, the amount of air flowing in and out of the first storage chamber 41 increases, and the cooling capacity can be improved. In addition, in Figure 11 , Figure 12 and Figure 13 , illustrations of the internal structure of the first storage chamber 41 are omitted.

[0124] Each structure in the above-described embodiments and the above-described modification examples is not limited to the above-described materials and shapes, and various materials and shapes can be used. In addition, each structure in the above-described embodiments and the above-described modification examples can be arbitrarily applied to each structure in other embodiments or modification examples.

[0125] According to the present invention, an X-ray generating apparatus capable of suppressing adverse effects on an object to be irradiated can be provided.

Claims

1. An X-ray generating device, characterized in that: include: An X-ray tube emitting X-rays in a first direction as an emission direction; an X-ray tube housing portion that houses at least a portion of the X-ray tube and is sealed with an insulating liquid; A housing having a first storage chamber for storing the X-ray tube storage portion; One or more air intake ports for drawing cooling gas from the outside of the housing to the inside; One or more exhaust ports for exhausting cooling gas from the interior of the housing to the outside; and a fan disposed opposite to the X-ray tube housing portion and configured to pressurize cooling gas so that the cooling gas flows from the air intake port to the air exhaust port in the housing; The exit window of the X-ray tube is arranged on the first direction side of the housing. The exhaust port is formed in a wall portion other than the first wall portion on the first direction side of the housing.

2. The X-ray generating device according to claim 1, characterized in that: The exhaust port is formed in a second wall portion which is a wall portion constituting the first storage chamber and is located on a second direction side intersecting the first direction. The air intake port is formed in the first wall portion.

3. The X-ray generating device according to claim 2, characterized in that: The fan is provided at the exhaust port or at a position close to the exhaust port inside the first storage chamber.

4. The X-ray generating device according to claim 1, characterized in that: The exhaust port is formed in a second wall portion which is a wall portion constituting the first storage chamber and is located on a second direction side intersecting the first direction. The air intake port is formed in a third wall portion which is a wall portion constituting the first storage chamber and is opposed to the second wall portion.

5. The X-ray generating device according to claim 4, characterized in that: The fan is provided at the exhaust port or at a position close to the exhaust port inside the first storage chamber.

6. The X-ray generating device according to claim 4, characterized in that: The fan is provided at the air inlet or at a position close to the air inlet inside the first storage chamber.

7. The X-ray generating device according to claim 4, characterized in that: The first wall portion does not include a vent hole for ventilating cooling gas between the inside and the outside of the housing.

8. The X-ray generating device according to claim 1, characterized in that: The housing has a second storage chamber for storing a power supply unit for supplying power to the X-ray tube. The first storage chamber and the second storage chamber are each separated by a partition wall. The partition wall portion has a communication port formed therein for communicating the first storage chamber with the second storage chamber. The exhaust port is formed in a wall portion constituting either the first storage chamber or the second storage chamber. The air intake port is formed in a wall portion constituting the other of the first storage chamber and the second storage chamber.

9. The X-ray generating device according to claim 1, characterized in that: One or more auxiliary exhaust ports for exhausting cooling gas from the inside of the housing to the outside are formed on the first wall portion. The total area of ​​the auxiliary exhaust ports is smaller than the total area of ​​the exhaust ports.

10. The X-ray generating device according to claim 1, characterized in that: The first wall portion is a top wall portion extending in a direction perpendicular to the first direction. Either the air intake port or the air exhaust port is formed in a side wall portion of the housing extending in the first direction. The other of the air intake port and the air exhaust port is formed in the housing on an inclined wall portion that is connected to the top wall portion and the side wall portion and extends in a direction inclined with respect to the first direction.

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