High-clamping-precision mechanical arm for photoetching machine

Abstract

The utility model discloses a mechanical arm with high clamping precision for a photoetching machine in the technical field of mechanical arm parts of the photoetching machine, which is reasonable in structure and is characterized in that two groups of mechanical arms are arranged on two sides of the outer walls of a left threaded rod and a right threaded rod on a driving box by a movable seat B in a threaded connection manner, and clamping heads are arranged above and below the mechanical arms; the middle part is provided with a vacuum chuck, the vacuum chuck is matched with a clamping plate and is in butt joint with the interior of a guide hole in a mechanical arm in a sliding mode through a guide column, and according to the fact that the position of the vacuum chuck is larger than the position of a clamping head, when a motor B drives and controls the two sets of mechanical arms to clamp a wafer, the vacuum chuck clamps the middle of the wafer in advance. And then the clamping head clamps the upper part and the lower part of the wafer, and two clamping modes are adopted to ensure that when one clamping mode goes wrong, the other clamping mode continues to keep the clamping state.

Description

Technical Field

[0001] The utility model relates to the technical field of lithography machine manipulator components, and specifically relates to a manipulator for a lithography machine with high clamping accuracy. Background Technique

[0002] The lithography machine manipulator technology plays a crucial role in semiconductor manufacturing. A lithography machine is a device used to transfer circuit patterns onto wafers, and the manipulator is responsible for transporting wafers between different processes to improve production efficiency and accuracy. Currently, when the manipulator for a lithography machine clamps a wafer, in terms of clamping the wafer, a single method is usually adopted for clamping the wafer, resulting in malfunctions during the operation of the manipulator for a lithography machine. Once the clamping state becomes loose, it directly causes the wafer to fall. On the one hand, the clamping accuracy of the manipulator for a lithography machine is affected, and on the other hand, the safety of the manipulator for a lithography machine is reduced, thereby affecting the use effect and efficiency of the manipulator for a lithography machine.

[0003] Therefore, it is very necessary to develop a manipulator for a lithography machine with high clamping accuracy. Content of the Utility Model

[0004] The purpose of the utility model is to provide a manipulator for a lithography machine with high clamping accuracy to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A manipulator for a lithography machine with high clamping accuracy, including a lithography machine top frame, a rotating shaft is rotatably connected inside the lithography machine top frame, a support arm is installed on one side of the bottom of the lithography machine top frame, a drive box is installed below the support arm, and a left-right threaded rod is rotatably connected inside the drive box;

[0006] Both sides of the bottom of the drive box are installed with manipulators.

[0007] Preferably, a motor A is installed on the outer wall of one side of the lithography machine top frame, and the output shaft on the motor A is fixedly connected to one end of the rotating shaft through a coupling.

[0008] Preferably, a guide seat A is installed on the top of the support arm, a moving seat A is installed on the top of the guide seat A, and the inside of the moving seat A is threadedly connected to the outer wall of the rotating shaft.

[0009] Preferably, a rotating box is rotatably connected to the top of the drive box, a connecting arm is installed on the top of the rotating box, and the connecting arm is rotatably connected to the support arm.

[0010] Preferably, a guide seat B is installed on the top of the manipulator, a moving seat B is installed on the top of the guide seat B, and the inside of the moving seat B is threadedly connected to the outer wall of the left-right threaded rod.

[0011] Preferably, clamping heads are provided above and below one side outer wall of the manipulator, a clamping plate is installed at the center position of one side outer wall of the manipulator, and guide holes are opened above and below the surface of one side outer wall of the manipulator.

[0012] Preferably, guide columns are installed above and below the outer wall of one side of the clamping plate, the outer wall of the guide column is slidably connected to the inner wall of the guide hole, a nut is threadedly connected to one side of the outer wall of the guide column, a spring is provided on the other side of the outer wall of the guide column, and a vacuum suction cup is installed on the outer wall of the other side of the clamping plate.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] The two groups of manipulators are installed on both sides of the outer walls of the left and right threaded rods on the drive box by means of threaded connection via a movable seat B, and clamping heads are arranged on the upper and lower parts of the manipulators, and a vacuum suction cup is installed in the middle part. The vacuum suction cup is matched with a clamping plate and is connected to the guide hole on the manipulator in a sliding manner via a guide column. Then, the position of the vacuum suction cup is greater than the position of the clamping head, so that the motor B drives and controls the two groups of manipulators to clamp the wafer. The vacuum suction cup clamps the middle part of the wafer in advance, and then the clamping head clamps the upper and lower parts of the wafer. Two clamping methods are used to ensure that if one of the clamping methods has a problem, the other continues to maintain a clamping state, so as to avoid the situation where the wafer falls directly due to a malfunction and looseness during the clamping process of the manipulator used in the lithography machine. The clamping accuracy and safety of the manipulator used in the lithography machine are effectively improved, and the use effect and efficiency of the manipulator used in the lithography machine are also effectively improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A front cross-sectional view of the overall structure provided by the utility model;

[0016] Figure 2 A front cross-sectional view of a portion of the structure provided by the utility model;

[0017] Figure 3 The utility model provides Figure 2 A magnified view of the structure at A;

[0018] Figure 4 The present invention is a three-dimensional schematic diagram of a part of the structure provided by the utility model.

[0019] In the figure: 1. The top frame of the lithography machine; 101. The rotating shaft; 102. Motor A; 2. The support arm; 201. Guide seat A; 202. Moving seat A; 3. The drive box; 301. The left and right threaded rods; 302. The rotating box; 303. The connecting arm; 304. Motor B; 4. The manipulator; 401. Guide seat B; 402. Moving seat B; 403. The clamping head; 404. The clamping plate; 405. The guide hole; 406. The guide post; 407. The nut; 408. The spring; 409. The vacuum chuck. Specific embodiments

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0021] The present invention provides the following technical solution: A manipulator for a lithography machine with high clamping accuracy. Please refer to Figures 1-4, including the top frame 1 of the lithography machine. A rotating shaft 101 is rotatably connected inside the top frame 1 of the lithography machine. A motor A 102 is installed on one outer wall of the top frame 1 of the lithography machine. The output shaft of the motor A 102 is fixedly connected to one end of the rotating shaft 101 through a coupling. A support arm 2 is installed on one side of the bottom of the top frame 1 of the lithography machine. A guide seat A 201 is installed on the top of the support arm 2. A moving seat A 202 is installed on the top of the guide seat A 201. The inside of the moving seat A 202 is threadedly connected to the outer wall of the rotating shaft 101. The top frame 1 of the lithography machine is installed at the top inside the lithography machine as required, and the guide seat A 201 on the support arm 2 is arranged in a sliding manner below the inside of the top frame 1 of the lithography machine. The moving seat A 202 on the top of the guide seat A 201 is arranged on the outer wall of the rotating shaft 101 in a threaded connection manner, so that the motor A 102 can drive and control the left-right horizontal movement of the support arm 2. A drive box 3 is installed below the support arm 2. A left-right threaded rod 301 is rotatably connected inside the drive box 3. A rotating box 302 is rotatably connected to the top of the drive box 3. A connecting arm 303 is installed on the top of the rotating box 302. The connecting arm 303 is rotatably connected to the support arm 2. A motor B 304 is installed on one outer wall of the drive box 3. The output shaft of the motor B 304 is fixedly connected to one end of the left-right threaded rod 301 through a coupling. The connecting arm 303 and the support arm 2 are rotatably connected, and the drive box 3 is installed at the rotating box 302 at the bottom of the connecting arm 303 in a rotatable connection manner. According to the drive device such as a motor, it is correspondingly installed between the connecting arm 303 and the support arm 2. A motor is installed inside the rotating box 302. The main principle is that a motor is installed between the connecting arm 303 and the support arm 2, and the output end of the motor is fixed on the support arm 2. The output end of the motor inside the rotating box 302 is fixed on the drive box 3, so as to drive the connecting arm 303 to rotate up and down, and the drive box 3 rotates, which improves the flexible adjustment effect at various angles;

[0022] The bottom sides of the driving box 3 are both equipped with manipulators 4, the top of the manipulators 4 is equipped with a guide seat B401, the top of the guide seat B401 is equipped with a moving seat B402, the inside of the moving seat B402 is threadedly connected with the outer wall of the left and right threaded rods 301, the guide seats B401 on the top of the two sets of manipulators 4 are installed on the left and right threaded rods 301 on the driving box 3 by the moving seat B402 in a threaded connection manner, and the left and right threads are adopted according to the outer walls of the left and right threaded rods 301, so that the motor B3 04 can drive and control the two groups of manipulators 4 to move relative to each other, thereby achieving a clamping effect. A clamping head 403 is provided above and below one side of the outer wall of the manipulator 4, a clamping plate 404 is installed at the center of one side of the outer wall of the manipulator 4, a guide hole 405 is provided above and below the surface of one side of the outer wall of the manipulator 4, a guide column 406 is installed above and below one side of the outer wall of the clamping plate 404, the outer wall of the guide column 406 is slidably connected to the inner wall of the guide hole 405, and one side of the outer wall of the guide column 406 A nut 407 is threadedly connected, a spring 408 is arranged on the other side of the outer wall of the guide column 406, and a vacuum suction cup 409 is installed on the outer wall of the other side of the clamping plate 404. Before using the vacuum suction cup 409, it is necessary to connect the vacuum pipe on the vacuum pump, set the clamping head 403 on the upper and lower parts of the manipulator 4, install the vacuum suction cup 409 in the middle part, and according to the vacuum suction cup 409 and the clamping plate 404, the guide column 406 is connected to the guide hole 405 on the manipulator 4 in a sliding manner, and then according to the vacuum suction cup The position of 409 is greater than the position of the clamping head 403, so that its motor B304 drives and controls the two groups of robots 4 to clamp the wafer. The vacuum suction cup 409 clamps the middle of the wafer in advance, and then the clamping head 403 clamps the upper and lower parts of the wafer. Two clamping methods are used to ensure that if one of the clamping methods has a problem, the other will continue to maintain the clamping state, so as to avoid the situation where the robot used in the lithography machine fails and loosens during the clamping process, which directly causes the wafer to fall.

[0023] Working principle: When using the utility model, the photolithography machine frame 1 is installed on the top of the photolithography machine as needed, and the guide seat A201 on the support arm 2 is set at the bottom of the photolithography machine frame 1 in a sliding manner, and the moving seat A202 on the top of the guide seat A201 is set on the outer wall of the rotating shaft 101 in a threaded connection manner, so that the motor A102 can drive and control the support arm 2 to move horizontally left and right, and the connecting arm 303 is connected to the support arm 2 by rotation, and the drive box 3 is installed on the bottom of the connecting arm 303 in a rotational connection manner. At the rotating box 302, according to the driving device such as the motor, it is installed between the connecting arm 303 and the supporting arm 2, and the motor is installed in the rotating box 302. The main principle is to install the motor between the connecting arm 303 and the supporting arm 2, and the motor output end is fixed on the supporting arm 2. The motor output end in the rotating box 302 is fixed to the driving box 3, and the driving connecting arm 303 is rotated up and down, and the driving box 3 is rotated, which improves the flexible adjustment effect of each angle. The guide seat B401 on the top of the two sets of manipulators 4 is installed on the driving seat B402 in a threaded connection manner. On the left and right threaded rods 301 on the box 3, according to the left and right threads on the outer walls of the left and right threaded rods 301, the motor B304 can drive and control the two groups of manipulators 4 to move relative to each other, thereby achieving a clamping effect. By setting a clamping head 403 at the upper and lower parts of the manipulator 4, and installing a vacuum suction cup 409 in the middle part, the vacuum suction cup 409 is matched with the clamping plate 404 and is connected to the guide hole 405 on the manipulator 4 in a sliding manner by the guide column 406, and then according to the position of the vacuum suction cup 409 being greater than the position of the clamping head 403, the motor B304 drives and controls the two groups When the robot 4 clamps the wafer, the vacuum suction cup 409 clamps the middle of the wafer in advance, and then the clamping head 403 clamps the upper and lower parts of the wafer. Two clamping methods are adopted to ensure that if one of the clamping methods has a problem, the other will continue to maintain the clamping state. This avoids the situation where the wafer falls directly due to a malfunction or loosening of the robot used in the lithography machine during the clamping process. This effectively improves the clamping accuracy and safety of the robot used in the lithography machine, and also effectively improves the use effect and efficiency of the robot used in the lithography machine.

[0024] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A manipulator for a photolithography machine with high clamping accuracy, comprising a photolithography machine top frame (1), wherein the top frame (1) of the photolithography machine is rotatably connected to a rotating shaft (101), and a support arm (2) is installed on one side of the bottom of the top frame (1), characterized in that: A driving box (3) is installed below the support arm (2), and left and right threaded rods (301) are rotatably connected inside the driving box (3); Mechanical arms (4) are installed on both sides of the bottom of the driving box (3).

2. A manipulator for a photolithography machine with high clamping accuracy according to claim 1, characterized in that: A motor A (102) is installed on one side outer wall of the photolithography machine top frame (1), and an output shaft on the motor A (102) is fixedly connected to one end of the rotating shaft (101) via a coupling.

3. The robot arm for photolithography machine with high clamping accuracy according to claim 1, characterized in that: A guide seat A (201) is installed on the top of the support arm (2), and a movable seat A (202) is installed on the top of the guide seat A (201). The interior of the movable seat A (202) is threadedly connected to the outer wall of the rotating shaft (101).

4. The robot arm for photolithography machine with high clamping accuracy according to claim 1, characterized in that: The top of the driving box (3) is rotatably connected to a rotating box (302), the top of the rotating box (302) is provided with a connecting arm (303), and the connecting arm (303) is rotatably connected to the supporting arm (2).

5. The robot arm for photolithography machine with high clamping accuracy according to claim 1, characterized in that: A motor B (304) is mounted on one side outer wall of the drive box (3), and an output shaft on the motor B (304) is fixedly connected to one end of the left and right threaded rods (301) via a coupling.

6. The robot arm for photolithography machine with high clamping accuracy according to claim 1, characterized in that: A guide seat B (401) is installed on the top of the manipulator (4), and a movable seat B (402) is installed on the top of the guide seat B (401). The interior of the movable seat B (402) is threadedly connected to the outer walls of the left and right threaded rods (301).

7. The robot arm for photolithography machine with high clamping accuracy according to claim 1, characterized in that: A clamping head (403) is provided above and below one side outer wall of the manipulator (4), a clamping plate (404) is installed at the center position of one side outer wall of the manipulator (4), and a guide hole (405) is provided above and below the surface of one side outer wall of the manipulator (4).

8. The robot arm for photolithography machine with high clamping accuracy according to claim 7, characterized in that: A guide column (406) is installed above and below the outer wall of one side of the clamping plate (404); the outer wall of the guide column (406) is slidably connected to the inner wall of the guide hole (405); a nut (407) is threadedly connected to one side of the outer wall of the guide column (406); a spring (408) is provided on the other side of the outer wall of the guide column (406); and a vacuum suction cup (409) is installed on the outer wall of the other side of the clamping plate (404).

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