Film storage box

Abstract

The utility model relates to a wafer storage box, the wafer storage box comprises a bottom plate, a first side plate, a second side plate and a first spacing plate, the bottom plate comprises a bearing surface, the first side plate and the second side plate are located on the bearing surface and are oppositely arranged along a first direction, the first direction is parallel to the bearing surface, and one side, opposite to the second side plate, of the first side plate is provided with a plurality of first clamping grooves. The side, opposite to the first side plate, of the second side plate is provided with a plurality of second clamping grooves, the first clamping grooves and the second clamping grooves extend in the second direction and are arranged at intervals in the third direction, the second direction is perpendicular to the bearing face and the first direction, and the third direction is parallel to the bearing face and perpendicular to the first direction. The first partition plate is located between the first side plate and the second side plate, a third clamping groove and a fourth clamping groove are formed in the two sides, in the first direction, of the first partition plate respectively, the third clamping groove and the fourth clamping groove extend in the second direction, and the wafer storage box can store accompanying wafers of different sizes.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and particularly to a wafer cassette. Background Art

[0002] To reduce the influence of wafers or dummy wafers by pollutants such as dust in the external environment, the wafers or dummy wafers are usually placed in a wafer cassette for storage or transportation.

[0003] Existing wafer cassettes are designed into corresponding specifications according to the size of wafers or dummy wafers and are made by integral molding. For example, dedicated wafer cassettes need to be made separately for dummy wafers with diameters of 150 mm (6 inches), 200 mm (8 inches), and 300 mm (12 inches). Therefore, a wafer cassette can only store dummy wafers of a single size, resulting in an increase in the manufacturing cost of the wafer cassette. Utility Model Content

[0004] An embodiment of the present application provides a wafer cassette that can store dummy wafers of multiple sizes to at least partially solve the above technical problems.

[0005] To achieve the above object, according to the first aspect of the present application, a wafer cassette is provided, including:

[0006] A bottom plate including a bearing surface;

[0007] A first side plate and a second side plate located on the bearing surface and oppositely arranged in a first direction parallel to the bearing surface. The side of the first side plate opposite to the second side plate has a plurality of first card slots, and the side of the second side plate opposite to the first side plate has a plurality of second card slots. The first card slots and the second card slots both extend in a second direction and are arranged at intervals in a third direction. The second direction is perpendicular to the bearing surface and the first direction, and the third direction is parallel to the bearing surface and perpendicular to the first direction;

[0008] A first spacer plate located between the first side plate and the second side plate. Both sides of the first spacer plate in the first direction have a third card slot and a fourth card slot respectively, and the third card slot and the fourth card slot both extend in the second direction.

[0009] In some embodiments, the distance between the first side plate and the first spacer plate is greater than the distance between the second side plate and the first spacer plate.

[0010] In some embodiments, it further includes a third side plate and a fourth side plate oppositely arranged in the third direction. The bottom plate, the first side plate, the second side plate, the third side plate, and the fourth side plate enclose a wafer storage cavity;

[0011] The dimension of the first spacer along the third direction is less than or equal to the dimension of the first side plate along the third direction.

[0012] In some embodiments, the dimension of the first spacer along the third direction is equal to the dimension of the first side plate along the third direction;

[0013] The first spacer includes a first end and a second end opposite to each other along the third direction. The first end is connected to the third side plate, and the second end is connected to the fourth side plate.

[0014] In some embodiments, the first end has a first opening facing the third side plate. The cross-section of the first opening parallel to the bearing surface is U-shaped. The second end has a second opening facing the fourth side plate. The cross-section of the second opening parallel to the bearing surface is U-shaped;

[0015] The third side plate has a first convex portion, and the first convex portion is embedded in the first end. The fourth side plate has a second convex portion, and the second convex portion is embedded in the second end.

[0016] In some embodiments, the inner side of the third side plate has a first sliding groove arranged along the first direction, and the inner side of the fourth side plate has a second sliding groove arranged along the first direction;

[0017] The first end includes a first sliding block, and the first sliding block is located in the first sliding groove; the second end includes a second sliding block, and the second sliding block is located in the second sliding groove.

[0018] In some embodiments, the dimension of the first spacer along the third direction is less than the dimension of the first side plate along the third direction;

[0019] The wafer storage cavity includes a first wafer storage cavity, a second wafer storage cavity, and a third wafer storage cavity. The first wafer storage cavity is located between the first side plate and the first spacer. The second wafer storage cavity is located between the second side plate and the first spacer. The third wafer storage cavity is located between the first side plate and the second side plate.

[0020] In some embodiments, the orthographic projection of the third card slot on the first side plate coincides with the first card slot, and the orthographic projection of the fourth card slot on the second side plate coincides with the second card slot.

[0021] In some embodiments, a second spacer is further included. The second spacer is located between the first side plate and the first spacer. The two sides of the second spacer along the first direction respectively have a fifth card slot and a sixth card slot. The fifth card slot is arranged opposite to the first card slot, and the sixth card slot is arranged opposite to the third card slot.

[0022] In some embodiments, the bearing surface has a plurality of grooves extending in the first direction, and the plurality of grooves are aligned with the plurality of first card slots one by one, and the plurality of grooves are aligned with the plurality of second card slots.

[0023] The film storage box of the embodiment of the present application includes a bottom plate, a first side plate, a second side plate and a first spacer. The bottom plate includes a bearing surface. The first side plate and the second side plate are located on the bearing surface and are oppositely arranged along the first direction. The first direction is parallel to the bearing surface. One side of the first side plate opposite to the second side plate has a plurality of first card slots. One side of the second side plate opposite to the first side plate has a plurality of second card slots. The first card slots and the second card slots both extend along the second direction and are spaced apart along the third direction. The second direction is perpendicular to the bearing surface and the first direction. The third direction is parallel to the bearing surface and perpendicular to the first direction. The first spacer is located between the first side plate and the second side plate. Both sides of the first spacer along the first direction have a third card slot and a fourth card slot respectively. The third card slot and the fourth card slot both extend along the second direction. By adding the first spacer in the present application, the same-sized dummy wafers can be stored between the first side plate and the first spacer, and another-sized dummy wafers can be stored between the second side plate and the first spacer. Therefore, the film storage box can store different-sized dummy wafers.

[0024] Other features and advantages of the present application will be described in detail in the subsequent specific implementation section. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] In order to more fully understand the present application and its beneficial effects, the following description will be made in conjunction with the drawings, where the same reference numerals represent the same parts in the following description.

[0027] Figure 1 is a schematic structural diagram of the film storage box provided by the embodiment of the present application;

[0028] Figure 2 is provided by some embodiments of the present application Figure 1 a top view structural diagram of the film storage box therein;

[0029] Figure 3 is a schematic structural diagram of the cover plate of the film storage box provided by some embodiments of the present application;

[0030] Figure 4 It is a schematic top view structure diagram of a wafer storage box provided by some embodiments of the present application;

[0031] Figure 5 It is a schematic top view structure diagram of a wafer storage box provided by some embodiments of the present application. Specific embodiments

[0032] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present application.

[0033] The present application provides a wafer storage box. Please refer to Figure 1 and Figure 2 , Figure 1 which is a schematic structure diagram of the wafer storage box provided by the embodiments of the present application, Figure 2 and Figure 1 is a schematic top view structure diagram of the wafer storage box in

[0034] The wafer storage box 100 includes a bottom plate 10, a first side plate 20, a second side plate 30, and a first spacer 40. The bottom plate 10 includes a bearing surface 11. The first side plate 20 and the second side plate 30 are located on the bearing surface 11 and are oppositely arranged along a first direction (X), and the first direction (X) is parallel to the bearing surface 11. One side of the first side plate 20 opposite to the second side plate 30 has a plurality of first card slots 21, and one side of the second side plate 30 opposite to the first side plate 20 has a plurality of second card slots 31. The first card slots 21 and the second card slots 31 both extend along a second direction (Y) and are spaced apart along a third direction (Z). The second direction (Y) is perpendicular to the bearing surface 11 and the first direction (X), and the third direction (Z) is parallel to the bearing surface 11 and perpendicular to the first direction (X). The first spacer 40 is located between the first side plate 20 and the second side plate 30. Both sides of the first spacer 40 along the first direction (X) have a third card slot 41 and a fourth card slot 42 respectively, and the third card slot 41 and the fourth card slot 42 both extend along the second direction (Y). By adding the first spacer 40 in the present application, wafers of the same size can be stored between the first side plate 20 and the first spacer 40, and wafers of another size can be stored between the second side plate 30 and the first spacer 40. Therefore, the wafer storage box 100 can store wafers of different sizes.

[0035] It can be understood that, since both the first card slot 21 and the second card slot 31 extend along the second direction (Y), and both the third card slot 41 and the fourth card slot 42 extend along the second direction (Y), a wafer or a dummy wafer can be inserted into the first card slot 21 and the third card slot 41 along the second direction (Y), and can also be inserted into the second card slot 31 and the fourth card slot 42 along the second direction (Y). Moreover, multiple wafers or dummy wafers can be arranged at intervals along the third direction (Z). Among them, two opposite edges of the dummy wafer are inserted into the corresponding card slots, and the bottom of the dummy wafer is placed on the bearing surface 11.

[0036] In some embodiments, the dimension of each card slot along the third direction can correspond to the thickness of the dummy wafer, that is, the dimension of each card slot along the third direction can be designed according to the thickness of the stored dummy wafer. Among them, the dimension of each card slot (such as the first card slot) along the third direction can be greater than or equal to the thickness of the dummy wafer.

[0037] In some embodiments, the bearing surface 11 has a plurality of grooves (not shown) extending along the first direction (X), and the plurality of grooves are aligned with the plurality of first card slots 21 one by one, and the plurality of grooves are aligned with the plurality of second card slots 31. Thus, when the dummy wafer is inserted into the first card slot 21 and the third card slot 41, or inserted into the second card slot 31 and the fourth card slot 42, the bottom of the dummy wafer can also be inserted into the grooves, so the grooves can also play a role in fixing the dummy wafer.

[0038] In some embodiments, the bearing surface 11 can be a flat surface or a curved surface, and correspondingly, the grooves can be straight grooves or curved grooves. When the bearing surface 11 is a curved surface and the corresponding grooves are curved grooves, the contact area between the dummy wafer and the bearing surface can be increased, and the supporting effect on the dummy wafer can be improved. Among them, the shape of the curved surface corresponds to the shape of the edge of the dummy wafer.

[0039] In some embodiments, the opposite surfaces of the first side plate 20 and the second side plate 30 can be curved surfaces, and correspondingly, the first card slot 21 and the second card slot 31 can also be curved in shape, but the overall card slot extends along the second direction. The third card slot 41 and the fourth card slot 42 can also be curved in shape, but the overall card slot extends along the second direction.

[0040] In some embodiments, as Figure 1 and Figure 2 shown, the distance between the first side plate 20 and the first spacer 40 is greater than the distance between the second side plate 30 and the first spacer 40, that is, the first spacer 40 is arranged closer to the second side plate 30. Therefore, a larger-sized dummy wafer, such as a 12-inch dummy wafer, can be stored between the first side plate 20 and the first spacer 40, and a smaller-sized dummy wafer, such as a 6-inch dummy wafer, can be stored between the second side plate 30 and the first spacer 40.

[0041] It should be noted that the distance between the first side plate 20 and the first spacer plate 40, as well as the distance between the second side plate 30 and the first spacer plate 40, or rather the position of the first spacer plate 40, can be designed according to the specific dimensions (such as diameter) of the companion piece. The distance between the first side plate 20 and the first spacer plate 40 is equal to the diameter of one kind of companion piece, and the distance between the second side plate 30 and the first spacer plate 40 is equal to the diameter of another kind of companion piece.

[0042] In some embodiments, the orthographic projection of the third card slot 41 on the first side plate 20 coincides with the first card slot 21, and the orthographic projection of the fourth card slot 42 on the second side plate 30 coincides with the second card slot 31. That is to say, the first card slot 21 and the third card slot 41 are opposite and equal in number, and the second card slot 31 and the fourth card slot 42 are opposite and equal in number. At this time, the surface of the companion piece is arranged parallel to the first direction (X).

[0043] The film storage box 100 may further include a third side plate 50 and a fourth side plate 60 oppositely arranged along the third direction (Z). The bottom plate 10, the first side plate 20, the second side plate 30, the third side plate 50 and the fourth side plate 60 enclose a film storage cavity.

[0044] In some embodiments, the dimension of the first spacer plate 40 along the third direction (Z) is less than or equal to the dimension of the first side plate 20 along the third direction (Z).

[0045] As Figure 1 and Figure 2 shown, the dimension of the first spacer plate 40 along the third direction (Z) is equal to the dimension of the first side plate 20 along the third direction (Z). Therefore, the first spacer plate 40 divides the film storage cavity into two sub-film storage cavities. The first spacer plate 40 includes a first end 401 and a second end 402 oppositely arranged along the third direction (Z). The first end 401 is connected to the third side plate 50, and the second end 402 is connected to the fourth side plate 60.

[0046] Specifically, the first spacer plate 40 includes a connecting portion 403 located between the first end 401 and the second end 402. The third card slot 41 and the fourth card slot 42 are respectively located on both sides of the connecting portion 403 along the first direction (X). The connecting portion 403 connects the plurality of third card slots 41, and the connecting portion 403 connects the plurality of fourth card slots 42.

[0047] In some embodiments, the cassette 100 further includes a second partition board (not shown), which is located between the first side plate 20 and the first partition board 40. The two sides of the second partition board along the first direction (X) respectively have a fifth card slot and a sixth card slot. The fifth card slot is arranged opposite to the first card slot 21, and the sixth card slot is arranged opposite to the third card slot 41. Therefore, some dummy wafers can be inserted into the fifth card slot and the first card slot 21, some dummy wafers can be inserted into the sixth card slot and the third card slot 41, and some other dummy wafers can be inserted into the fourth card slot 42 and the second card slot 31. Therefore, the second partition board and the first partition board 40 can altogether divide the cassette cavity into at least three sub-cassette cavities, and the sizes of the required sub-cassette cavities can be designed by setting the positions of the first partition board 40 and the second partition board.

[0048] In some embodiments, referring to Figure 2 , the inner side of the third side plate 50 has a first sliding groove (not shown) arranged along the first direction (X), and the inner side of the fourth side plate 60 has a second sliding groove (not shown) arranged along the first direction (X). The first end 401 includes a first sliding block, and the first sliding block is located in the first sliding groove; the second end 402 includes a second sliding block, and the second sliding block is located in the second sliding groove. Therefore, the first sliding block can slide along the first direction (X) in the first sliding groove, and the second sliding block can slide along the first direction (X) in the second sliding groove, so that the position of the first partition board 40 can be adjusted to meet the required sizes of the two sub-cassette cavities, thereby enabling a cassette to be compatible with dummy wafers or wafers of various sizes.

[0049] Please refer to Figure 3 , Figure 3 which is a schematic structural diagram of the cover plate of the cassette provided by some embodiments of the present application.

[0050] The cassette 100 may further include a cover plate 70 arranged opposite to the bottom plate 10, and the cover plate 70 covers the edges of the first side plate 20, the second side plate 30, the third side plate 50 and the fourth side plate 60.

[0051] Specifically, the edges of the first side plate 20, the second side plate 30, the third side plate 50 and the fourth side plate 60 have a first step structure S1, and the cover plate 70 has a second step structure S2 matching the first step structure S1.

[0052] Please refer to Figure 4 , Figure 4 which is a schematic top view structural diagram of the cassette provided by some embodiments of the present application. The difference between this embodiment and the above embodiment lies in the structures at both ends of the first partition board 40A, and the same structures will not be described in detail.

[0053] Specifically, the first spacer 40A includes a first end 401A and a second end 402A. The first end 401A has a first opening C1 facing the third side plate 50. The cross-section of the first opening C1 parallel to the bearing surface 11 is U-shaped. The second end 402A has a second opening C2 facing the fourth side plate 60. The cross-section of the second opening C2 parallel to the bearing surface 11 is U-shaped. Correspondingly, the third side plate 50 has a first convex portion T1, and the first convex portion T1 is embedded in the first end 401A. The fourth side plate 60 has a second convex portion T2, and the second convex portion T2 is embedded in the second end 402A. Therefore, the first spacer 40A can be detachably moved between the third side plate 50 and the fourth side plate 60. When the first spacer 40A is installed between the third side plate 50 and the fourth side plate 60, the cassette can store wafers of two sizes; when the first spacer 40A is removed, the cassette can store wafers of a third size. Therefore, the cassette can store wafers of three sizes in total.

[0054] Please refer to Figure 5 , Figure 5 which is a schematic top view structure diagram of a cassette provided by some embodiments of the present application.

[0055] The difference between this embodiment and Figure 2 the embodiment in is the dimension of the first spacer 40B in the third direction (Z) and the position of the first spacer 40B.

[0056] Specifically, the dimension of the first spacer 40B in the third direction (Z) is smaller than the dimension of the first side plate 20 in the third direction (Z). The cassette cavity includes a first cassette cavity B1, a second cassette cavity B2, and a third cassette cavity B3. The first cassette cavity B1 is located between the first side plate 20 and the first spacer 40B. The second cassette cavity B2 is located between the second side plate 30 and the first spacer 40B. The third cassette cavity B3 is located between the first side plate 20 and the second side plate 30. Therefore, wafers can also be inserted into the first card slot 21 and the second card slot 31. The size of this part of the wafers is larger than the size of the wafers in the first card slot 21 and the third card slot 41, and larger than the size of the wafers in the second card slot 31 and the fourth card slot 42. This cassette can store wafers of three sizes.

[0057] In some embodiments, the orthographic projection of the second card slot 31 on the first side plate 20 coincides with the first card slot 21, that is, the second card slot 31 and the first card slot 21 are facing each other and have the same number. When the wafer is inserted into the first card slot 21 and the second card slot 31, the surface of the wafer is arranged along the first direction (X).

[0058] ​In some embodiments, the distance between the first side plate 20 and the first spacer plate 40B is greater than or equal to the distance between the second side plate 30 and the first spacer plate 40B. When the distance between the first side plate 20 and the first spacer plate 40B is greater than the distance between the second side plate 30 and the first spacer plate 40B, the cassette can store three sizes of dummy wafers; when the distance between the first side plate 20 and the first spacer plate 40B is equal to the distance between the second side plate 30 and the first spacer plate 40B, the cassette can store two sizes of dummy wafers.

[0059] In some embodiments, the first spacer plate 40B can be detachably connected to the third side plate 50.

[0060] The cassette according to the embodiment of the present application includes a bottom plate 10, a first side plate 20, a second side plate 30, and a first spacer plate. The bottom plate 10 includes a bearing surface 11. The first side plate 20 and the second side plate 30 are located on the bearing surface 11 and are oppositely arranged along a first direction (X). The first direction (X) is parallel to the bearing surface 11. One side of the first side plate 20 opposite to the second side plate 30 has a plurality of first card slots 21. One side of the second side plate 30 opposite to the first side plate 20 has a plurality of second card slots 31. The first card slots 21 and the second card slots 31 both extend along a second direction (Y) and are spaced apart along a third direction (Z). The second direction (Y) is perpendicular to the bearing surface 11 and the first direction (X). The third direction (Z) is parallel to the bearing surface 11 and perpendicular to the first direction (X). The first spacer plate is located between the first side plate 20 and the second side plate 30. Both sides of the first spacer plate along the first direction (X) have a third card slot 41 and a fourth card slot 42 respectively. The third card slot 41 and the fourth card slot 42 both extend along the second direction (Y). By adding the first spacer plate in the present application, dummy wafers of the same size can be stored between the first side plate 20 and the first spacer plate, and dummy wafers of another size can be stored between the second side plate 30 and the first spacer plate. Therefore, the cassette can store dummy wafers of different sizes, thereby realizing the function that a cassette can store dummy wafers of multiple sizes and reducing costs. In addition, the detachable connection of the first spacer plate can be set so that the dummy wafer cassette can store one more size of dummy wafers.

[0061] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of the present application, the meaning of "a plurality of" is two or more unless otherwise specifically defined.

[0062] In the above embodiments, the descriptions of the respective embodiments each have their own focuses. For parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0063] Among the embodiments, implementation manners and related technical features of the present application, they can be combined and replaced with each other without conflict.

[0064] The above are only the preferred embodiments of the present application and do not impose any form of limitation on the present application. However, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present application without departing from the content of the technical solution of the present application still fall within the scope of the technical solution of the present application.

Claims

1. A film storage box, characterized in that: include: a base plate, including a load-bearing surface; A first side plate and a second side plate are located on the bearing surface and are arranged opposite to each other along a first direction, the first direction is parallel to the bearing surface, a side of the first side plate opposite to the second side plate has a plurality of first card slots, a side of the second side plate opposite to the first side plate has a plurality of second card slots, the first card slots and the second card slots both extend along the second direction and are arranged at intervals along a third direction, the second direction is perpendicular to the bearing surface and the first direction, the third direction is parallel to the bearing surface and perpendicular to the first direction; The first partition plate is located between the first side plate and the second side plate. The first partition plate has a third card slot and a fourth card slot on both sides along the first direction. The third card slot and the fourth card slot both extend along the second direction.

2. The film storage box according to claim 1, characterized in that: The distance between the first side plate and the first spacer plate is greater than the distance between the second side plate and the first spacer plate.

3. The film storage box according to claim 1, characterized in that: It also includes a third side plate and a fourth side plate that are arranged opposite to each other along the third direction, and the bottom plate, the first side plate, the second side plate, the third side plate and the fourth side plate form a film storage cavity; A dimension of the first partition plate along the third direction is smaller than or equal to a dimension of the first side plate along the third direction.

4. The film storage box according to claim 3, characterized in that: The dimension of the first partition plate along the third direction is equal to the dimension of the first side plate along the third direction; The first partition plate includes a first end and a second end opposite to each other along the third direction, the first end is connected to the third side plate, and the second end is connected to the fourth side plate.

5. The film storage box according to claim 4, characterized in that: The first end has a first opening toward the third side plate, and the first opening is parallel to the cross section of the bearing surface and has a U-shape; the second end has a second opening toward the fourth side plate, and the second opening is parallel to the cross section of the bearing surface and has a U-shape; The third side plate has a first protrusion, and the first protrusion is embedded in the first end. The fourth side plate has a second protrusion, and the second protrusion is embedded in the second end.

6. The film storage box according to claim 4, characterized in that: The inner side of the third side plate has a first slide groove arranged along the first direction, and the inner side of the fourth side plate has a second slide groove arranged along the first direction; The first end includes a first slider, and the first slider is located in the first slide groove; the second end includes a second slider, and the second slider is located in the second slide groove.

7. The film storage box according to claim 3, characterized in that: The dimension of the first partition plate along the third direction is smaller than the dimension of the first side plate along the third direction; The film storage cavity includes a first film storage cavity, a second film storage cavity and a third film storage cavity. The first film storage cavity is located between the first side plate and the first partition plate, the second film storage cavity is located between the second side plate and the first partition plate, and the third film storage cavity is located between the first side plate and the second side plate.

8. The film storage box according to claim 1, characterized in that: The orthographic projection of the third card slot on the first side panel coincides with the first card slot, and the orthographic projection of the fourth card slot on the second side panel coincides with the second card slot.

9. The film storage box according to claim 1, characterized in that: It also includes a second partition plate, which is located between the first side plate and the first partition plate. The second partition plate has a fifth card slot and a sixth card slot on both sides along the first direction respectively. The fifth card slot is arranged opposite to the first card slot, and the sixth card slot is arranged opposite to the third card slot.

10. The film storage box according to claim 1, characterized in that: The bearing surface has a plurality of grooves extending along the first direction, the plurality of grooves are aligned one by one with the plurality of first card slots, and the plurality of grooves are aligned with the plurality of second card slots.

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