Inserting jig of copper sheet for copper-clad ceramic substrate
By designing a copper sheet insert fixture composed of support rods and serrated limit strips, the problems of wet oxidation of copper sheets are solved, such as accumulation of Chinese medicine liquid, uneven oxidation and collision between copper sheets, and the uniformity of copper sheets are improved and the yield of product is improved.
Patent Information
- Application Number
- CN202421818520.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-06-03
- Estimated Expiration
- 2034-07-30
AI Technical Summary
In the existing wet oxidation process of copper sheets, problems such as accumulation of liquid, uneven oxidation, collisions and adhesions between copper sheets, resulting in low product yield and low production efficiency.
A copper sheet fixture for copper sheets for copper clad ceramic substrates is designed, and a frame structure composed of support rods and serrated limit strips is used to regulate the serrated tooth pitch and the inclination angle of the limit strips to ensure that the liquid flows fully and the copper sheets are appropriately spaced to avoid accumulation of liquid and damage to the oxide layer.
The uniformity and yield of wet oxidation of copper sheets is improved, ensuring the stability of product quality and the improvement of production efficiency.
Smart Images
Figure CN222940981U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor device processing, and particularly relates to an inserting jig for copper sheets used in copper-clad ceramic substrates. Background Art
[0002] Copper-clad ceramic substrate (DBC, Direct Bond Copper) is a high-performance electronic packaging material, which has the characteristics of high thermal conductivity, high electrical insulation, high mechanical strength, and a thermal expansion coefficient close to that of silicon, and is widely used in fields such as power modules and high-power semiconductor devices. The manufacturing process of DBC substrates is mainly to directly sinter copper sheets onto the ceramic surface at high temperature, and utilize the oxygen-containing eutectic liquid of copper to react chemically with the ceramic substrate to form a eutectic bond. Before sintering the copper sheets, it is usually necessary to pre-oxidize the copper sheets so that copper and oxygen form a Cu-O eutectic liquid at high temperature, which helps to improve the bonding force between the copper sheets and the ceramic substrate.
[0003] Currently, in order to improve the production efficiency and reliability of copper sheet pre-oxidation, the method of wet oxidation has been gradually introduced in existing industrial production. First, the copper sheets are pickled and washed with water in sequence, and then the copper sheets are immersed in an oxidation solution (such as a mixed solution containing potassium permanganate and copper sulfate) for oxidation, and then washed with water, dehydrated, and dried in sequence to complete the oxidation process. Among them, corresponding inserting jigs are required for the copper sheets to immerse them in the oxidation solution to make the copper sheets fully contact with the liquid medicine. However, in the existing production process of wet oxidation of copper sheets, the following problems mainly exist: (1) The spacing between the contact parts of the existing copper sheet inserting jig and the copper sheet is relatively small (generally only 3-4 mm), and the contact surface is a horizontal plane, which easily leads to the accumulation of liquid medicine. The accumulated liquid medicine is easy to drip onto the surface of the copper sheet during movement, and it is easy to cause layout color difference and uneven oxidation during infiltration and drying; (2) In the existing inserting jig, the spacing between copper sheets is too small, resulting in a relatively limited reaction space between the liquid medicine and the copper sheets, affecting the uniformity of the copper sheet oxide layer; (3) During the wet oxidation process of copper sheets, the liquid medicine is always in a circulating state, and due to the thin and soft thickness of the copper sheets, the copper sheets are easily affected by the flow of the liquid medicine and swing, deform, etc., and adjacent copper sheets are prone to collision, adhesion, etc., and thus it is easy to cause the oxide layer formed on the surface of the copper sheets to fall off, resulting in product scrapping.
[0004] For example, CN116426908A discloses a copper sheet rack for a wet oxidation process, which includes a support frame for supporting copper sheets. The support frame includes support rods, and notches extending axially through from left to right are formed on opposite sides of the support rods; at least three spacer rings arranged from left to right are sleeved on the support rods, and adjacent spacer rings are connected to form an insertion slot portion with a width increasing from inside to outside; the inside of the spacer ring is hollowed out, the spacer ring includes an outer ring, and two oppositely arranged slider portions for laterally sliding into the support rod are provided inside the spacer ring, and the outer ring is connected to the slider portion through a guiding portion; the spacer ring includes a middle spacer ring located in the middle, a left end spacer ring located at the left end, and a right end spacer ring located at the right end, and all the middle spacer rings have the same structure; limiting members are also threadedly connected to both ends of the support rod, and the limiting members at both ends of the support rod respectively abut against the left end spacer ring and the right end spacer ring. However, the above copper sheet rack still cannot effectively avoid problems such as liquid medicine dripping onto the surface of the copper sheet and easy collision and adhesion between adjacent copper sheets.
[0005] Therefore, providing an insertion jig for copper sheets of a copper-clad ceramic substrate to improve the uniformity and yield of wet oxidation of copper sheets is a technical problem that needs to be solved in the current field. Utility Model Content
[0006] Aiming at the deficiencies of the prior art, the purpose of the present utility model is to provide an insertion jig for copper sheets of a copper-clad ceramic substrate. The insertion jig is used for the wet oxidation process of copper sheets, can promote uniform oxidation of copper sheets, avoid situations such as collision and adhesion between copper sheets, and improve the yield and production efficiency of products.
[0007] To achieve this purpose, the present utility model adopts the following technical solutions:
[0008] The present utility model provides an insertion jig for copper sheets of a copper-clad ceramic substrate, and the insertion jig includes a support frame body;
[0009] The support frame body includes a rectangular parallelepiped-shaped copper sheet insertion space formed by support rods;
[0010] Support rods are provided in the middle of the side surface of the copper sheet insertion space;
[0011] The support rods in the middle of the side surface are parallel to the support rods along the upper edge of the corresponding side surface;
[0012] Sawtooth-shaped limiting strips are symmetrically provided at the top and middle of the copper sheet insertion space;
[0013] The limiting strips are arranged along the direction in which the copper sheets are arranged;
[0014] The sawtooth surface of the limiting strip is inclined upward relative to the horizontal plane;
[0015] Support rods are provided on the bottom surface of the copper sheet insertion space along a direction parallel to the limiting strip.
[0016] The insert fixture provided by the present utility model mainly consists of a support rod and a limiting strip. On the one hand, the support rods are connected to form a copper sheet insertion space, which is a rectangular frame structure. The hollow area in the copper sheet insertion space enables the liquid medicine and the copper sheet to fully exchange and react, which is beneficial to improving the uniformity of copper sheet oxidation. On the other hand, serrated limiting strips are symmetrically arranged at both the top and the middle, so that both sides of the upper and middle parts of the rectangular copper sheet are fixed by the serrated openings of the limiting strips on both sides, and the copper sheet is supported by the support rods on the bottom surface of the copper sheet insertion space. The present utility model controls the reaction space between the copper sheets through the serration pitch, increases the gap between adjacent copper sheets, enables the liquid medicine and the copper sheet to fully exchange, thereby further improving the uniformity of copper sheet oxidation, and can also avoid problems such as damage to the oxide layer caused by the too-close distance between the copper sheets. On the other hand, the present utility model also sets the serrated surface of the limiting strip to be inclined upward at a certain angle relative to the horizontal plane, which can avoid the problem of liquid medicine accumulation caused by the horizontal plane at the contact between the existing fixture and the copper sheet. By setting the inclination angle of the serrated surface, the present utility model can form a diversion channel for the liquid medicine. When the fixture is taken out vertically upward, it helps the liquid medicine to quickly flow out from both ends of the diversion channel, thereby avoiding the liquid medicine dripping on the copper sheet and avoiding the problem of uneven local oxidation of the copper sheet. In summary, the insert fixture provided by the present utility model can promote the uniformity of copper sheet wet oxidation, avoid damage and destruction of the copper sheet oxide layer, and improve the yield and processing efficiency of the product.
[0017] In the present utility model, the material of the insert fixture generally adopts a material resistant to strong acids, strong alkalis, and strong oxidants. For example, it can be a pure titanium material to avoid the fixture reacting in the liquid medicine and affecting the liquid medicine.
[0018] Preferably, the shape of the support rod is cylindrical.
[0019] In the present utility model, by controlling the shape of the support rod to be cylindrical, the accumulation of the liquid medicine can be effectively avoided, which helps the liquid medicine to fully flow along the radial and axial directions of the support rod, and improves the uniformity of copper sheet wet oxidation.
[0020] Preferably, at least 2 support rods are arranged on the bottom surface of the copper sheet insertion space. For example, it can be 2, 3, or 4, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.
[0021] Preferably, the angle at which the serrated surface of the limiting strip is inclined upward relative to the horizontal plane is 30° - 50°. For example, it can be 30°, 32°, 34°, 36°, 38°, 40°, 42°, 44°, 46°, 48°, or 50°, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.
[0022] In the present utility model, by preferably controlling the angle of the serrated surface of the limit bar inclined upward relative to the horizontal plane, it is beneficial to further regulate the opening size of the diversion channel, so that the liquid medicine can flow out quickly from both ends of the diversion channel.
[0023] Preferably, the end of the limit bar is respectively connected to a group of support bars connected perpendicular to each other.
[0024] In the present utility model, by arranging support bars in the middle of the side of the copper sheet insertion space, a place for installing the limit bar in the middle is provided. Among them, the limit bar includes two ends, and the two end points of each side end are respectively connected to a group of support bars connected perpendicularly, so that the inclination angle of the serrated surface can be adjusted according to the position of the connection point.
[0025] Preferably, the adjacent tooth pitch of the limit bar is 5 - 30 mm. For example, it can be 5 mm, 6 mm, 8 mm, 10 mm, 12 mm, 14 mm, 16 mm, 18 mm, 20 mm, 22 mm, 24 mm, 26 mm, 28 mm or 30 mm, but not limited to the listed values. Other unlisted values within the numerical range are equally applicable.
[0026] In the present utility model, by preferably controlling the adjacent tooth pitch of the limit bar, the distance between adjacent copper sheets can be further regulated, avoiding problems such as collision and adhesion between copper sheets due to too small a distance, preventing the oxide layer from being damaged, and improving the yield of the product.
[0027] Preferably, the main body of the support frame includes at least 2 copper sheet insertion spaces. For example, it can be 2, 3 or 4, but not limited to the listed values. Other unlisted values within the numerical range are equally applicable.
[0028] Preferably, the arrangement direction of the copper sheets in adjacent copper sheet insertion spaces is parallel.
[0029] Preferably, a diversion groove with an upward opening is formed between the limit bars in adjacent copper sheet insertion spaces.
[0030] Preferably, the opening angle of the diversion groove is 80° - 120°. For example, it can be 80°, 82°, 84°, 86°, 88°, 90°, 92°, 94°, 96°, 98°, 100°, 102°, 104°, 106°, 108°, 110°, 112°, 114°, 116°, 118° or 120°, but not limited to the listed values. Other unlisted values within the numerical range are equally applicable.
[0031] In the present utility model, through the combination of the limiting strips in the insertion spaces of two adjacent copper sheets, and by utilizing the angle between the serrated surface and the vertical surface of the limiting strips on both sides, a diversion channel can be jointly formed. The formation of the diversion channel can further promote the rapid outflow of the liquid medicine from both ends of the diversion channel, prevent the liquid medicine from dripping onto the copper sheets, and avoid uneven oxidation of the copper sheets.
[0032] The insertion jig provided by the present utility model is used for the wet oxidation operation of copper sheets as follows:
[0033] Insert the rectangular copper sheet into the copper sheet insertion space, so that the top and middle parts of the two symmetrical sides of the copper sheet are limited by the serrated openings of the limiting strips on both sides, and the bottom of the copper sheet is supported by the support rods on the bottom surface of the copper sheet insertion space. The distance between adjacent copper sheets is regulated by adjusting the adjacent tooth pitch of the limiting strips, and the opening sizes of the diversion channel and the diversion groove are regulated by adjusting the angle of the serrated surface of the limiting strip inclined upward relative to the horizontal plane, thus completing the insertion process of the copper sheet.
[0034] When wet oxidation is required, use the jig to carry the copper sheet and vertically immerse the whole into the liquid medicine. When the oxidation is completed, vertically take out the whole from the liquid medicine to make the liquid medicine flow out quickly from both ends of the diversion channel or the diversion groove.
[0035] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0036] (1) The insertion jig provided by the present utility model can enable the liquid medicine and the copper sheet to fully exchange and react by using the copper sheet insertion space formed by the support rods, which is beneficial to improving the uniformity of copper sheet oxidation. The standard deviation of the quality of copper sheets oxidized by the insertion jig provided by the present utility model can reach below 0.007 g for the same batch of copper sheets, and can reach below 0.005 g under better conditions. The qualified rate can reach above 96.5%, and can reach above 98.2% under better conditions.
[0037] (2) The insertion jig provided by the present utility model can fix the top and middle parts of the copper sheet through the serrated limiting strips, control the reaction space between the copper sheets by the serrated tooth pitch, increase the gap between adjacent copper sheets, enable the liquid medicine and the copper sheet to fully exchange, thereby further improving the uniformity of copper sheet oxidation, avoiding problems such as damage to the oxide layer caused by too close distance between copper sheets, and improving the qualified rate and processing efficiency of the product.
[0038] (3) The insertion jig provided by the present utility model can avoid the problem of liquid medicine accumulation caused by the horizontal plane at the contact between the existing jig and the copper sheet by setting the serrated surface of the limiting strip inclined upward relative to the horizontal plane, which helps the liquid medicine to flow out quickly from both ends of the diversion channel or the diversion groove, thus preventing the liquid medicine from dripping onto the copper sheet and avoiding uneven local oxidation of the copper sheet, and further improving the qualified rate of the product. Description of the Drawings
[0039] Figure 1 This is the front view of the insert fixture described in Embodiment 1 of the present utility model;
[0040] Figure 2 This is the top view of the insert fixture described in Embodiment 1 of the present utility model;
[0041] Wherein, 1 - support rod; 2 - limit strip; 3 - flow guide groove; 4 - copper sheet insertion space. Detailed implementation manners
[0042] The technical solution of the present utility model will be further described below in conjunction with the accompanying drawings and through specific implementation manners.
[0043] The present utility model will be further described in detail below. However, the following examples are only simple examples of the present utility model and do not represent or limit the scope of the protection of the present utility model. The scope of protection of the present utility model shall be subject to the claims.
[0044] It should be understood that in the description of the present utility model, the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.
[0045] It should be noted that in the description of the present utility model, unless otherwise clearly defined and limited, the terms "set", "connected", "connected to" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific situations.
[0046] Those skilled in the art should understand that the utility model necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing the complete process. However, the above contents do not belong to the main inventive points of the utility model. Those skilled in the art can add and arrange them by themselves based on the process flow and equipment structure selection, and the utility model does not have special requirements and specific limitations on this.
[0047] Embodiment 1
[0048] This embodiment provides an inserting jig for copper sheets used in copper-clad ceramic substrates. Its front view and top view are respectively as Figure 1 and Figure 2 shown. The inserting jig includes a support frame main body;
[0049] The support frame main body includes two rectangular copper sheet insertion spaces 4 formed by support rods 1. The support rods 1 are cylindrical in shape. The copper sheet arrangement directions in adjacent copper sheet insertion spaces 4 are parallel. Each bottom surface of the copper sheet insertion space 4 is provided with two support rods 1. A support rod 1 is provided in the middle of the side surface of the copper sheet insertion space 4. The support rods 1 in the middle of the side surface are parallel to the support rods 1 along the upper edge of the corresponding side surface respectively. Serrated limit strips 2 are symmetrically arranged at the top and middle of the copper sheet insertion space 4. The ends of the limit strips 2 are respectively connected to a group of support rods 1 that are perpendicular to each other. The limit strips 2 are arranged along the copper sheet arrangement direction. The serrated surface of the limit strip 2 is inclined upward by 45° relative to the horizontal plane, and the adjacent tooth pitch of the limit strip 2 is 10 mm;
[0050] The limit strips 2 between adjacent copper sheet insertion spaces 4 form a diversion groove 3 with an upward opening, and the opening angle of the diversion groove 3 is 90°.
[0051] Embodiment 2
[0052] This embodiment provides an inserting jig for copper sheets used in copper-clad ceramic substrates. The difference compared with Embodiment 1 is only that the serrated surface of the limit strip is inclined upward by 30° relative to the horizontal plane, and the adjacent tooth pitch of the limit strip is 30 mm;
[0053] The limit strips between adjacent copper sheet insertion spaces form a diversion groove with an upward opening, and the opening angle of the diversion groove is 120°.
[0054] Embodiment 3
[0055] This embodiment provides an inserting jig for copper sheets used in copper-clad ceramic substrates. The difference compared with Embodiment 1 is only that the serrated surface of the limit strip is inclined upward by 50° relative to the horizontal plane, and the adjacent tooth pitch of the limit strip is 5 mm;
[0056] A diversion channel with an upward opening is formed between the limiting strips adjacent to the copper sheet insertion space, and the opening angle of the diversion channel is 80°.
[0057] Example 4
[0058] This example provides an insertion jig for copper sheets used in copper-clad ceramic substrates. The only difference compared with Example 1 is that the adjacent tooth pitch of the limiting strips is 3 mm.
[0059] Comparative Example 1
[0060] This comparative example provides an insertion jig. The only difference between the insertion jig and Example 1 is that the serrated surface of the limiting strip is parallel to the horizontal plane.
[0061] The wet oxidation is carried out using the insertion jigs described in Examples 1-4 and Comparative Example 1. The operation process is as follows:
[0062] Insert the rectangular copper sheet into the copper sheet insertion space, so that the top and middle parts of the symmetric sides of the copper sheet are limited by the serrated openings of the limiting strips on both sides, and the bottom of the copper sheet is supported by the support rods on the bottom surface of the copper sheet insertion space to complete the copper sheet insertion process;
[0063] When wet oxidation is required, use the jig to carry the copper sheet and vertically immerse the whole into the liquid medicine. When the oxidation is completed, vertically take out the whole from the liquid medicine to make the liquid medicine flow out quickly from both ends of the diversion channel or the diversion groove, and obtain the copper sheet product after wet oxidation.
[0064] Detect the quality of the copper sheet products, measure the quality of multiple copper sheets of the same batch using the same jig, and calculate the standard deviation. The results are shown in Table 1; detect the yield rate of the obtained copper sheet products, and the results are shown in Table 1.
[0065] Table 1
[0066] Standard deviation / g Yield rate / % Example 1 0.003 99.2 Example 2 0.004 98.6 Example 3 0.005 98.2 Example 4 0.007 96.5 Comparative Example 1 0.012 94.5
[0067] It can be seen from the data in Table 1 as follows:
[0068] (1) It can be seen from the data in Examples 1-4 that the insertion jig provided by the present invention can make the standard deviation of the quality of copper sheets after oxidation of the same batch reach below 0.007 g, and can reach below 0.005 g under better conditions. The yield rate can reach above 96.5%, and can reach above 98.2% under better conditions.
[0069] (2) By comprehensively comparing the data of Example 1 and Comparative Example 1, it can be seen that the only difference between Comparative Example 1 and Example 1 is that the serrated surface of the limiting strip is parallel to the horizontal plane. The results show that by controlling the serrated surface to incline upward at a certain angle relative to the horizontal plane, the present utility model can form a diversion channel or a diversion groove, promote the rapid outflow of the liquid medicine, and improve the uniformity and yield of copper sheet oxidation.
[0070] In summary, the insertion jig provided by the present utility model is used for the wet oxidation process of copper sheets, can promote the uniform oxidation of copper sheets, avoid collisions and adhesions between copper sheets, etc., and improve the yield and production efficiency of products.
[0071] The applicant declares that the above description is only the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present utility model fall within the protection scope and the disclosure scope of the present utility model.
Claims
1. A copper sheet inserting fixture for a copper-clad ceramic substrate, characterized in that: The insert jig comprises a support frame body; The support frame body includes a rectangular copper sheet insertion space formed by support rods; A support rod is provided in the middle of the side of the copper sheet insertion space; The support rods in the middle of the side surfaces are respectively parallel to the support rods at the upper edges of the side surfaces; The top and middle of the copper sheet insertion space are symmetrically provided with sawtooth-shaped limiting strips; The limit strips are arranged along the direction in which the copper sheets are arranged; The serrated surface of the limiting strip is inclined upward relative to the horizontal plane; A support rod is arranged on the bottom surface of the copper sheet insertion space in a direction parallel to the limiting strip.
2. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 1, characterized in that: The support rod is cylindrical in shape.
3. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 1, characterized in that: At least two support rods are arranged on the bottom surface of the copper sheet insertion space.
4. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 1, characterized in that: The serrated surface of the limiting strip is inclined upward at an angle of 30°-50° relative to the horizontal plane.
5. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 1, characterized in that: The ends of the limit strips are respectively connected to a group of support rods vertically connected to each other.
6. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 1, characterized in that: The adjacent tooth pitch of the limiting strip is 5-30 mm.
7. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 1, characterized in that: The support frame body includes at least two copper sheet insertion spaces.
8. The copper sheet inserting fixture for copper-clad ceramic substrate according to claim 7, characterized in that: The copper sheets in adjacent copper sheet insertion spaces are arranged in parallel.
9. The copper sheet inserting jig for copper-clad ceramic substrate according to claim 8, characterized in that: A guide groove with an upward opening is formed between the limiting strips of the adjacent copper sheet insertion spaces.
10. The copper sheet inserting jig for copper-clad ceramic substrate according to claim 9, characterized in that: The opening angle of the guide groove is 80°-120°.