Photoresist spraying device capable of accurately controlling thickness

Abstract

The utility model discloses a photoresist spraying device capable of accurately controlling the thickness. The photoresist spraying device comprises a processing table, a sliding frame, a bearing assembly, a spraying assembly, a thickness detection assembly, a scanning assembly and an analysis control system, a bearing groove and first mounting grooves are formed in the machining table, the bearing groove is located in the middle of the machining table, the first mounting grooves are located in the left side and the right side of the bearing groove, and a detection sliding rail is further arranged on the machining table; the sliding frame stands on the machining table, the bearing assembly is arranged in the bearing groove, the spraying assembly is arranged on the sliding frame and located above the bearing assembly, the thickness detection assembly is arranged on the detection sliding rail, the scanning assembly is arranged in the first mounting groove, and the analysis control system is in signal connection with all the assemblies. According to the utility model, the thickness detection assembly is designed to be matched with the scanning assembly and the analysis control system, so that the photoresist thickness can be accurately monitored; the utility model has the advantages of strong practicability and strong popularization significance.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing, in particular to a photoresist spraying device capable of accurately controlling thickness. Background Art

[0002] The photolithography process is one of the core processes in the semiconductor manufacturing process, and in the photolithography process, the photoresist coating process is an extremely important part of the photolithography process. The photoresist coating methods include spin coating technology, spraying or immersion method, etc. The quality of the coating will directly affect the quality of semiconductor devices, and the most direct manifestation of the coating quality is the coating thickness accuracy of the photoresist. However, in the existing photoresist spraying equipment, the detection and monitoring of the photoresist thickness is often not in place, and it is difficult to achieve accurate control of the photoresist thickness during the coating process. Utility Model Content

[0003] Based on this, it is necessary to provide a photoresist spraying device that can accurately control the thickness in order to address the deficiencies in the prior art.

[0004] A photoresist spraying device capable of accurately controlling thickness comprises a processing table, a sliding frame, a bearing assembly, a spraying assembly, a thickness detection assembly, a scanning assembly and an analysis control system. The processing table is provided with a bearing slot and a first mounting slot, wherein the bearing slot is located in the middle of the processing table, and the first mounting slot is located on the left and right sides of the bearing slot. The processing table is also provided with a detection slide rail. The sliding frame stands on the processing table, the bearing assembly is installed in the bearing slot, the spraying assembly is installed on the sliding frame and is located above the bearing assembly, the thickness detection assembly is installed on the detection slide rail, the scanning assembly is installed in the first mounting slot, and the analysis control system is respectively connected to the signals of each component. The bearing assembly comprises a first lifting cylinder and a bearing positioning plate, the first lifting cylinder is installed at the bottom of the bearing slot, and the bearing positioning plate is installed at the upper end of the first lifting cylinder and can be movably lifted and lowered. The thickness detection assembly includes a detection frame, a transmission roller and a detection belt. The detection frame is mounted on the detection slide rail and can slide left and right. The transmission roller is mounted on the detection frame. The detection belt is sleeved outside the transmission roller and can be driven by the transmission roller to roll. The scanning assembly includes a first lifting frame and a scanner. The first lifting frame is mounted in the first installation slot and can be moved up and down. The scanner is mounted on the upper end of the first lifting frame and can scan the outer surface of the detection belt.

[0005] Furthermore, the sliding frame includes a fixed frame and a sliding rod, the fixed frame is provided with a spraying slide rail, and both ends of the sliding rod are respectively engaged and installed in the spraying slide rail and can slide left and right. The spraying assembly is installed on the sliding rod.

[0006] Furthermore, the spraying assembly includes a second lifting cylinder, a spraying frame and a plurality of atomizing spraying nozzles. The second lifting cylinder is mounted on a sliding frame, the spraying frame is mounted at the bottom end of the second lifting cylinder and can be moved up and down by the second lifting cylinder, and the plurality of atomizing spraying nozzles are evenly arranged at the bottom of the spraying frame.

[0007] Furthermore, the scanning assembly also includes a plurality of cleaning nozzles, and the plurality of cleaning nozzles are all installed on one side of the first lifting frame and can clean the outer surface of the detection belt.

[0008] Furthermore, the photoresist spraying device capable of precisely controlling the thickness also includes a drying component, the processing table is correspondingly provided with a second mounting groove, and the second mounting groove is located outside the first mounting groove. The drying component includes a second lifting frame and a dryer, the second lifting frame is clamped and installed in the second mounting groove and can be movably lifted and lowered, and the dryer is installed on one side of the second lifting frame and can dry the outer surface of the detection belt.

[0009] To sum up, the beneficial effects of the photoresist spraying device capable of accurately controlling thickness of the utility model are: by designing a thickness detection component to detect the photoresist thickness on the wafer surface during the spraying process in real time, and cooperating with the scanning component and the analysis control system, accurate monitoring of the photoresist thickness can be achieved, and ultimately high-quality photoresist coating effects can be achieved; the spraying component is designed with multiple groups of nozzles to perform zone spraying on the wafer surface, thereby better controlling the uniformity of the photoresist spraying; a cleaning structure is also designed on the scanning component, and cooperating with the drying component, the detection tape can be reused, thereby improving the convenience of thickness detection; the utility model is highly practical and has a strong promotional significance. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a schematic structural diagram of a photoresist spraying device capable of accurately controlling thickness according to the utility model;

[0011] Figure 2 for Figure 1 Schematic diagram of the decomposition structure;

[0012] Figure 3 for Figure 2 Schematic diagram of the structure of the middle processing table;

[0013] Figure 4 for Figure 2 A schematic diagram of the structure of the middle sliding frame;

[0014] Figure 5 for Figure 2 Schematic diagram of the decomposed structure of the load-bearing components;

[0015] Figure 6 for Figure 2 Schematic diagram of the exploded structure of the spraying assembly;

[0016] Figure 7 for Figure 2 Schematic diagram of the exploded structure of the medium thickness detection component;

[0017] Figure 8 for Figure 2 Schematic diagram of the exploded structure of the scanning component;

[0018] Fig. 9 for Figure 2 Schematic diagram of the exploded structure of the drying component. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0020] like Figures 1 to 9 As shown, the utility model provides a photoresist spraying device 100 capable of accurately controlling thickness, which includes a processing table 10, a sliding frame 20, a bearing assembly 30, a spraying assembly 40, a thickness detection assembly 50, a scanning assembly 60 and an analysis control system (not shown). Specifically, in the utility model, it also includes a plurality of drive devices, various detection sensors and wastewater recovery and discharge structures, which are conventional technologies in the technical field and are not described in detail here.

[0021] The processing table 10 is provided with a bearing slot 11 and a first mounting slot 12, wherein the bearing slot 11 is located in the middle of the processing table 10, and the first mounting slot 12 is located on the left and right sides of the bearing slot 11. The processing table 10 is also provided with a detection slide rail 13. The sliding frame 20 stands on the processing table 10, the bearing assembly 30 is installed in the bearing slot 11, the spraying assembly 40 is installed on the sliding frame 20 and is located above the bearing assembly 30, the thickness detection assembly 50 is installed on the detection slide rail 13, the scanning assembly 60 is installed in the first mounting slot 12, and the analysis control system is connected to the signals of each component respectively. The analysis control system connected to the signals of each component can not only collect and analyze the detection data, but also automatically control the operation of each component according to the analysis results, thereby realizing the automation capability of the spraying device.

[0022] The sliding frame 20 includes a fixed frame 21 and a sliding rod 22. The fixed frame 21 is provided with a spraying slide rail 211. The two ends of the sliding rod 22 are respectively mounted in the spraying slide rail 211 and can slide left and right. The spraying assembly 40 is mounted on the sliding rod 22. The sliding rod 22 is driven by a driving device under the control of the analysis control system to drive the spraying assembly 40 to move horizontally left and right, thereby realizing the spraying process of the photoresist.

[0023] The bearing assembly 30 includes a first lifting cylinder 31 and a bearing positioning plate 32. The first lifting cylinder 31 is installed at the bottom of the bearing groove 11, and the bearing positioning plate 32 is installed at the upper end of the first lifting cylinder 31 and can be moved up and down. The bearing positioning plate 32 can carry and fix the wafer to be processed. Since the fixing structure is a conventional structure in the technical field, it will not be described in detail. The first lifting cylinder 31 can drive the bearing positioning plate 32 and the wafer to move up and down, so that the height of the upper surface of the wafer matches the thickness parameter of the photoresist to be sprayed.

[0024] The spray assembly 40 includes a second lifting cylinder 41, a spray frame 42 and a plurality of atomizing spray nozzles 43. The second lifting cylinder 41 is mounted on the sliding frame 20, the spray frame 42 is mounted at the bottom end of the second lifting cylinder 41 and can be moved up and down by the second lifting cylinder 41, and the plurality of atomizing spray nozzles 43 are evenly arranged at the bottom of the spray frame 42.

[0025] The second lifting cylinder 41 can drive the atomizing spray nozzle 43 to move up and down, so that the nozzle can spray photoresist onto the wafer surface at an optimal height, and the arrangement structure of multiple atomizing spray nozzles 43 divides the wafer surface into multiple spraying areas. Under the independent control of the analysis and control system, the multiple atomizing spray nozzles 43 can set different spraying speeds and spraying amounts respectively, so that the photoresist spraying on the wafer surface is easier to adjust evenly.

[0026] The thickness detection assembly 50 includes a detection frame 51, a transmission roller 52 and a detection belt 53. The detection frame 51 is mounted on the detection slide rail 13 and can slide left and right. The transmission roller 52 is mounted on the detection frame 51. The detection belt 53 is sleeved outside the transmission roller 52 and can be driven by the transmission roller 52 to roll. After the spraying assembly 40 sprays a layer of photoresist on the surface of the wafer, the detection frame 51 will be driven to scan the top of the wafer surface in the left and right directions. While scanning, the detection belt 53 will also roll synchronously. If the photoresist sprayed at a certain position on the wafer surface is too thick, the detection belt 53 will contact the photoresist at that position and leave a mark on the surface of the detection belt 53.

[0027] The scanning assembly 60 includes a first lifting frame 61 and a scanner 62. The first lifting frame 61 is mounted in the first mounting slot 12 and can be moved up and down. The scanner 62 is mounted on the upper end of the first lifting frame 61 and can scan the outer surface of the detection belt 53. The scanning assembly 60 also includes a plurality of cleaning nozzles 63. The plurality of cleaning nozzles 63 are mounted on one side of the first lifting frame 61 and can clean the outer surface of the detection belt 53.

[0028] The traces of photoresist on the surface of the detection tape 53 are scanned and processed by the scanner 62, and then analyzed by the analysis control system, which can fully display the location of the excessively thick photoresist on the surface of the wafer. When the spraying assembly 40 sprays for the second time, the analysis control system will control the spraying speed and spraying amount of each nozzle according to the analysis results, so that the spraying thickness of the photoresist is more accurate, smoother and more uniform. The scanned detection tape 53 can be flushed by the cleaning nozzle 63 to restore the surface to a clean state for subsequent re-inspection.

[0029] The photoresist spraying device 100 capable of precisely controlling the thickness further comprises a drying assembly 70. The processing table 10 is correspondingly provided with a second mounting groove 14, and the second mounting groove 14 is located outside the first mounting groove 12. The drying assembly 70 comprises a second lifting frame 71 and a dryer 72. The second lifting frame 71 is mounted in the second mounting groove 14 and can be movably lifted and lowered. The dryer 72 is mounted on one side of the second lifting frame 71 and can dry the outer surface of the detection belt 53. The drying assembly 70 can quickly dry the cleaned detection belt 53 to prevent moisture from being present on the detection belt 53 and affecting the spraying process of the photoresist.

[0030] In summary, the beneficial effects of the photoresist spraying device 100 of the utility model that can accurately control the thickness are: by designing the thickness detection component 50, the photoresist thickness on the wafer surface during the spraying process can be detected in real time, and the scanning component 60 and the analysis and control system can realize accurate monitoring of the photoresist thickness, and finally achieve high-quality photoresist coating effect; the spraying component 40 is designed with multiple groups of nozzles to divide the wafer surface for spraying, so as to better control the uniformity of the photoresist spraying; the scanning component 60 is also designed with a cleaning structure, and the drying component 70 can realize the reuse of the detection belt 53, thereby improving the convenience of thickness detection; the utility model is highly practical and has a strong promotion significance.

[0031] The above-mentioned embodiment only expresses one implementation method of the utility model, and its description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A photoresist spraying device capable of precisely controlling thickness, characterized in that: The invention comprises a processing table, a sliding frame, a bearing assembly, a spraying assembly, a thickness detection assembly, a scanning assembly and an analysis control system; the processing table is provided with a bearing slot and a first installation slot, wherein the bearing slot is located in the middle of the processing table, the first installation slot is located on the left and right sides of the bearing slot, and the processing table is also provided with a detection slide rail; the sliding frame is erected on the processing table, the bearing assembly is installed in the bearing slot, the spraying assembly is installed on the sliding frame and is located above the bearing assembly, the thickness detection assembly is installed on the detection slide rail, the scanning assembly is installed in the first installation slot, and the analysis control system is respectively connected with the signals of each assembly; the bearing assembly The component includes a first lifting cylinder and a load-bearing positioning plate, the first lifting cylinder is installed at the bottom of the load-bearing groove, the load-bearing positioning plate is installed at the upper end of the first lifting cylinder and can be movably lifted and lowered; the thickness detection component includes a detection frame, a transmission roller and a detection belt, the detection frame is clamped and installed on the detection slide rail and can slide left and right, the transmission roller is installed on the detection frame, and the detection belt is sleeved on the outside of the transmission roller and can be driven by the transmission roller to roll; the scanning component includes a first lifting frame and a scanner, the first lifting frame is clamped and installed in the first installation groove and can be movably lifted and lowered, and the scanner is installed at the upper end of the first lifting frame and can scan the outer surface of the detection belt.

2. The photoresist spraying device capable of precisely controlling thickness as claimed in claim 1, characterized in that: The sliding frame comprises a fixed frame and a sliding rod. The fixed frame is provided with a spraying slide rail. The two ends of the sliding rod are respectively engaged and installed in the spraying slide rail and can slide left and right. The spraying assembly is installed on the sliding rod.

3. The photoresist spraying device capable of precisely controlling thickness as claimed in claim 1, characterized in that: The spraying assembly includes a second lifting cylinder, a spraying frame and a plurality of atomizing spraying nozzles; the second lifting cylinder is mounted on a sliding frame, the spraying frame is mounted at the bottom end of the second lifting cylinder and can be moved up and down by the second lifting cylinder, and the plurality of atomizing spraying nozzles are evenly arranged at the bottom of the spraying frame.

4. The photoresist spraying device capable of precisely controlling thickness as claimed in claim 1, characterized in that: The scanning assembly also includes a plurality of cleaning nozzles, which are all installed on one side of the first lifting frame and can clean the outer surface of the detection belt.

5. The photoresist spraying device capable of precisely controlling thickness as claimed in claim 4, characterized in that: It also includes a drying component, and the processing table is correspondingly provided with a second mounting groove, and the second mounting groove is located on the outside of the first mounting groove; the drying component includes a second lifting frame and a dryer, the second lifting frame is snap-fitted and installed in the second mounting groove and can be movably lifted and lowered, and the dryer is installed on one side of the second lifting frame and can dry the outer surface of the detection belt.

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