Evaporation boat and vacuum evaporation equipment

Abstract

The utility model relates to an evaporation boat and vacuum evaporation equipment. The evaporation boat comprises a boat body, and the boat body comprises an evaporation tank used for bearing and heating an evaporation solution; and the bulge is used as a wire feeding point, and the bulge is separably arranged on the bottom wall of the evaporation tank. According to the evaporation boat and the vacuum evaporation equipment provided by the invention, the problem that the evaporation boat is easy to scrap can be relieved, so that the service life of the evaporation boat can be prolonged.

Description

Technical Field

[0001] The present application relates to the field of vacuum evaporation technology, and in particular to an evaporation boat and a vacuum evaporation device. Background Art

[0002] The working principle of vacuum evaporation equipment is to heat the evaporation boat under vacuum conditions, so that the coating material on the evaporation boat vaporizes and evaporates and deposits on the object to be coated to condense and form a film layer. The common method is to use a wire feeding mechanism to make the coating material contact the evaporation boat that is heated to a high temperature by electricity. The coating material is melted by the high temperature and vaporized into steam. The substrate to be coated is placed above the evaporation boat and kept at a low temperature. The steam condenses on the surface of the substrate to form a thin film.

[0003] However, during the continuous wire feeding process, the coating material will cause mechanical impact on the evaporation boat at the contact point with the evaporation boat, so the evaporation boat often has pits at the contact point after a period of use, and the evaporation liquid impacts the pits to form grooves. In this way, the possibility of scrapping the evaporation boat increases and its service life is reduced. Summary of the invention

[0004] In view of the above problems, the embodiments of the present application provide an evaporation boat and a vacuum evaporation device, which can alleviate the problem that the evaporation boat is easily scrapped, thereby increasing the service life of the evaporation boat.

[0005] In a first aspect, an embodiment of the present application provides an evaporation boat, comprising a boat body, wherein the boat body comprises an evaporation tank and a protrusion, the evaporation tank is used to carry and heat the evaporation liquid, the protrusion is used as a wire feeding point, and the protrusion is detachably arranged on the bottom wall of the evaporation tank. By setting the protrusion as the wire feeding point, the coating material contacts the top surface of the protrusion, and the protrusion bears the continuous mechanical impact force of the coating material, thereby increasing the corrosion resistance of the boat body. After the protrusion has pits and grooves after being used for a period of time, the evaporation boat body can be reused by replacing the protrusion, thereby reducing the possibility of defects such as cracking of the protrusion and improving the service life of the evaporation boat.

[0006] In some embodiments, the bottom wall of the evaporation tank has a first groove portion, and the protrusion is arranged on the bottom wall of the first groove portion. The protrusion is arranged on the bottom wall of the first groove portion, so that the melted evaporation liquid can flow from the protrusion as the wire feeding point to the first groove portion, thereby diffusing in the first groove portion. By diffusing the evaporation liquid in the first groove portion first, and then diffusing in the entire evaporation tank after the first groove portion is filled, the evaporation liquid in the entire evaporation tank is diffused more evenly.

[0007] In some embodiments, the groove depth of the first groove portion is 0.5 mm-1.0 mm. The groove depth of the first groove portion is 0.5 mm-1.0 mm, which can reduce the accumulation of metal slag and the occurrence of evaporation liquid splashing.

[0008] In some embodiments, the cross section of the first groove portion parallel to the bottom wall of the evaporation tank is circular, and the diameter of the first groove portion is 7mm-13mm. When the evaporation boat is working, the molten evaporation liquid diffuses from the wire feeding point to the surroundings. Setting the cross section of the first groove portion parallel to the bottom wall of the evaporation tank to be circular can further improve the diffusion uniformity of the evaporation liquid. Setting the diameter of the first groove portion to 7mm-13mm can ensure the diffusion and evaporation effect of the evaporation liquid while reducing the adverse effect on the resistance value of the entire boat body.

[0009] In some embodiments, the protrusion includes a main body and a coupling portion, the first groove portion has a bottom wall and a recessed portion that is recessed relative to the bottom wall of the first groove portion, the main body is protruding relative to the bottom wall of the first groove portion, and the coupling portion is detachably accommodated in the recessed portion. In other embodiments, the protrusion includes a main body and a recessed portion, the recessed portion is recessed relative to the bottom surface of the protrusion, the first groove portion has a bottom wall and a coupling portion that protrudes relative to the bottom wall of the first groove portion, and the coupling portion is detachably accommodated in the recessed portion.

[0010] The main body of the protrusion protrudes relative to the bottom wall of the first groove portion, so that the protrusion acts as a wire feeding point during wire feeding to withstand continuous mechanical impact of high-speed wire feeding, thereby increasing the corrosion resistance of the boat body. By setting one of the protrusion and the first groove portion to have a coupling portion, and the other of the protrusion and the first groove portion to have a recessed portion, and the coupling portion can be detachably accommodated in the recessed portion, the protrusion can be firmly combined with the evaporation groove, reducing the possibility of the protrusion and the evaporation groove being separated under the impact of wire feeding.

[0011] In some embodiments, the protrusion is detachably arranged on the bottom wall of the evaporation tank by plugging, and the outer wall of the joint portion and the inner wall of the recessed portion are interference-fitted. The plugging by interference fit can improve the connection between the protrusion and the evaporation tank on the one hand, reduce the possibility of the protrusion and the evaporation tank being separated under the impact of wire feeding, and on the other hand, take into account the convenience of replacing the protrusion.

[0012] In some embodiments, the protrusion is detachably provided on the bottom wall of the evaporation tank by means of a threaded connection, and the outer wall of the joint portion is threadedly matched with the inner wall of the recessed portion. The threaded connection can improve the connection reliability between the protrusion and the evaporation tank, reduce the possibility of the protrusion and the evaporation tank being separated under the impact of wire feeding, and can also take into account the convenience of replacing the protrusion.

[0013] In some embodiments, the main body is a truncated cone or a prism, and the truncated cone or prism includes a top surface and a side surface, and the angle between the side surface and the top surface is an obtuse angle, which is approximately 105°-135°. By setting the main body to be a truncated cone or a prism, the evaporation liquid can flow along the raised side surface to the evaporation tank, thereby increasing the wetting of the entire evaporation tank by the evaporation liquid. Setting the angle between the side surface of the truncated cone or the prism and the top surface to be an obtuse angle, for example, 105°-135°, can improve the smoothness of the flow of the evaporation liquid to ensure the diffusion and evaporation of the evaporation liquid, while reducing the occurrence of splashing of the evaporation liquid.

[0014] In some embodiments, the main body is spherical. By setting the main body to be spherical, the evaporation liquid can flow along the raised spherical surface toward the evaporation tank, thereby increasing the wetting of the entire evaporation tank by the evaporation liquid.

[0015] In some embodiments, the height of the main body is 3 mm to 7 mm. Setting the height of the main body to 3 mm to 7 mm can ensure that there is an appropriate height difference between the raised wire feeding point and the surface of the evaporation liquid, while reducing the occurrence of evaporation liquid splashing.

[0016] In some embodiments, the height of the joint portion is 0.1 mm-3 mm. Setting the height of the joint portion to 0.1 mm-3 mm can ensure a firm connection between the protrusion and the evaporation groove, while reducing the adverse effect on the resistance value of the entire boat body.

[0017] In some embodiments, the ratio of the height of the main body to the height of the joint portion is 7:1-13:1. Setting the ratio of the height of the main body to the height of the joint portion to 7:1-13:1 can ensure that the main body and the joint portion of the protrusion have an appropriate height ratio to improve the effect of evaporation coating, while the protrusion and the evaporation tank can be firmly combined.

[0018] In some embodiments, the bottom wall of the evaporation tank has a second groove portion, and the second groove portion is arranged around the outer edge of the evaporation tank. The second groove portion is arranged around the outer edge of the evaporation tank to deposit unmelted metal slag, reducing the influence of the metal slag on the evaporation rate.

[0019] In some embodiments, the width of the second groove is 1 mm to 3 mm. Setting the width of the second groove to 1 mm to 3 mm can ensure space for accommodating metal slag while reducing the impact on the evaporation coating space of the evaporation liquid.

[0020] In some embodiments, the second groove has a depth of 0.1 mm to 3 mm. Setting the second groove to have a depth of 0.1 mm to 3 mm can ensure space for accommodating metal slag while reducing adverse effects on the resistance value of the entire boat body.

[0021] In some embodiments, the ratio of the width of the second groove to the depth of the second groove is 1:1-3:1. Setting the ratio of the width of the second groove to the depth of the second groove to 1:1-3:1 can ensure space for accommodating metal slag while reducing adverse effects on the evaporation coating space of the evaporation liquid.

[0022] In a second aspect, an embodiment of the present application provides a vacuum evaporation device, which includes an evaporation boat according to any one of the above embodiments.

[0023] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Moreover, the same reference numerals are used throughout the drawings to represent the same components. In the drawings:

[0025] Figure 1 This is a schematic diagram of the structure of the evaporation boat in some embodiments of the present application;

[0026] Figure 2 A top view of an evaporation boat in some embodiments of the present application;

[0027] Figure 3 for Figure 2 The cross-sectional view of the evaporation boat along the AA direction is shown;

[0028] Figure 4 for Figure 3 A partial enlarged view of part B;

[0029] Figure 5 for Figure 3 A partial enlarged view of part C in the middle;

[0030] Figure 6 for Figure 2 The cross-sectional view of the evaporation boat shown along the AA direction (with the protrusion omitted);

[0031] Figure 7 for Figure 6 A partial enlarged view of part D in the middle;

[0032] Figure 8 A top view of an evaporation boat in some other embodiments of the present application;

[0033] Fig. 9 for Figure 8 The evaporation boat is shown in a cross-sectional view along the A'-A' direction.

[0034] The reference numerals in the specific implementation manner are as follows:

[0035] 1. Evaporation boat;

[0036] 10. boat body; 11. evaporation groove; 12. protrusion; 13. first groove portion; 14. second groove portion;

[0037] 121, main body; 1211, top surface; 1212, side surface;

[0038] 122, joint portion; 1221, bottom surface; 1222, outer side wall;

[0039] 130. bottom wall; 131. recessed portion; 1311. inner wall. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0041] Unless otherwise defined, all technical and scientific terms used in this application have the same meanings as those commonly understood by technicians in the technical field of this application; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned drawings and any variations thereof are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order or a primary and secondary relationship.

[0042] Reference to "embodiment" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments.

[0043] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "attached" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0044] The term "and / or" in this application is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this application generally indicates that the associated objects before and after are in an "or" relationship.

[0045] In the embodiments of the present application, the same reference numerals represent the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width and other dimensions of various components in the embodiments of the present application shown in the drawings, as well as the overall thickness, length, width and other dimensions of the integrated device are only exemplary descriptions and should not constitute any limitation to the present application.

[0046] The term "plurality" used in the present application refers to two or more (including two).

[0047] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0048] Using vacuum evaporation to evenly coat a film layer on the part to be coated is a common coating method. The principle of vacuum evaporation is: in a vacuum environment, the evaporation boat of the vacuum evaporation equipment is powered on and heated to about 1500°C, and the coating material is input. When the coating material contacts the evaporation boat, it will liquefy on the surface of the evaporation boat and evaporate in the vacuum environment. The substrate to be coated is placed above the evaporation boat and kept at a low temperature, so that the substrate to be coated facing the evaporation boat can be coated with a film layer of uniform thickness.

[0049] The evaporation boat is generally a boat-shaped structure. In a vacuum environment, the coating material is guided to the middle of the preheated evaporation boat, and the coating material is melted into a vapor deposition liquid. However, in the process of continuously inputting the coating material, since the coating material has a certain initial velocity before contacting the evaporation boat, it will cause mechanical impact to the evaporation boat at the contact point with the evaporation boat. Therefore, after the evaporation boat has been used for a period of time, pits will be generated at the contact point, and the vapor deposition liquid will impact the pits to form grooves. In this way, the possibility of scrapping the evaporation boat increases and its service life is reduced.

[0050] In view of this, the present application provides an evaporation boat, in which the evaporation tank of the evaporation boat body is provided with a detachable protrusion. When feeding the wire, the protrusion serves as the wire feeding point, and the coating material contacts the top surface of the protrusion. The protrusion withstands the mechanical impact force of the continuous high-speed introduction of the coating material, thereby increasing the corrosion resistance of the boat body. After the protrusion has pits and grooves after being used for a period of time, the evaporation boat body can be reused by replacing the protrusion, thereby reducing the possibility of defects such as cracking of the evaporation boat caused by erosion, thereby increasing the service life of the evaporation boat.

[0051] See also Figure 1 , Figure 1 This is a schematic diagram of the structure of the evaporation boat 1 in some embodiments of the present application. The embodiments of the present application provide an evaporation boat 1 and a vacuum evaporation device including the evaporation boat 1. The vacuum evaporation device can vaporize and evaporate the coating material on the evaporation boat 1 and deposit it on the part to be coated by heating the evaporation boat 1 to condense and form a film layer. Common coating materials include metal coating materials (such as aluminum, copper, gold, silver, etc.), oxides (such as silicon monoxide, silicon dioxide, titanium dioxide, zirconium dioxide, etc.), fluorides (such as neodymium fluoride, barium fluoride, cerium fluoride, magnesium fluoride, etc.) and other compounds (such as zinc sulfide, zinc selenide, titanium nitride, silicon carbide, etc.). The part to be coated can be a flexible substrate, a rigid substrate, etc., which can be specifically set according to needs. The following embodiments are all described by taking the coating material as a metal wire as an example.

[0052] The vacuum evaporation equipment may include, but is not limited to, an evaporation boat 1, which may also include a carrying mechanism, a power supply, a wire feeding mechanism, and a vacuum pumping mechanism. Among them, the carrying mechanism is used to carry the power supply, the wire feeding mechanism, the vacuum pumping mechanism, and the evaporation boat 1. An evaporation chamber is provided on the carrying mechanism, and the vacuum pumping mechanism is used to extract the air in the evaporation chamber to form a vacuum environment in the evaporation chamber. The power supply is electrically connected to the evaporation boat 1 and is used to supply power to the evaporation boat 1. The film-coated part and the evaporation boat 1 are both arranged in the evaporation chamber, and the wire feeding mechanism is used to transport the metal wire into the evaporation chamber.

[0053] During actual operation, the vacuum mechanism extracts the air in the evaporation chamber to form a vacuum environment in the evaporation chamber, the power supply is energized to the evaporation boat 1 and heated to about 1500°C, and the wire feeding mechanism inputs a metal wire into the evaporation chamber, and the metal wire contacts the evaporation boat 1 and melts to form an evaporation liquid. Then, the evaporation liquid liquefies on the surface of the evaporation boat 1 and vaporizes and evaporates in a vacuum environment. When the vaporized evaporation liquid contacts the part to be coated that is set toward the evaporation boat 1, the vaporized evaporation liquid can condense on the surface of the part to be coated to form a metal film layer due to the low temperature of the part to be coated.

[0054] Among them, the bearing mechanism can be a combination structure of a support table and a box body, and the box body is structured to form a vapor deposition chamber. The wire feeding mechanism can include a manipulator capable of three-dimensional movement and a wire winding roller, the metal wire is wound on the wire winding roller, the manipulator clamps one end of the released metal wire and pulls the metal wire to move into the vapor deposition chamber for wire feeding. In the process of the manipulator clamping and pulling the metal wire to move, the wire winding roller rotates and releases the metal wire. The vacuuming mechanism can be a vacuum pump. Specifically, the bearing mechanism, power supply, wire feeding mechanism and vacuuming mechanism are all conventional technical means in the field, so they will not be repeated here.

[0055] Please refer again Figure 1 , and also see Figure 2-Figure 7 , Figure 2 is a top view of the evaporation boat 1 in some embodiments of the present application, Figure 3 for Figure 2 The cross-sectional view of the evaporation boat 1 along the AA direction is shown. Figure 4 for Figure 3 A partial enlarged view of part B. Figure 5 for Figure 3 A partial enlarged view of part C in the middle. Figure 6 for Figure 2 The evaporation boat 1 shown is a cross-sectional view along the AA direction after omitting the protrusion 12. Figure 7 for Figure 6 A partial enlarged view of part D.

[0056] In the first aspect, some embodiments of the present application provide an evaporation boat 1, including a boat body 10, wherein the boat body 10 includes an evaporation tank 11 and a protrusion 12. The evaporation tank 11 is used to carry and heat the evaporation liquid, and the protrusion 12 is used as a wire feeding point, and the protrusion 12 can be detachably arranged on the bottom wall of the evaporation tank 11. Among them, the boat body 10 is generally made of a material formed by a composite of boron nitride and titanium diboride and is manufactured and formed. Specifically, the composite method and composite ratio of boron nitride and titanium diboride are prior art, so they are not repeated here. The number of protrusions 12 can be selected and set according to the number of metal wires transported by the wire feeding mechanism. One protrusion 12 can correspond to one metal wire, or one protrusion 12 can correspond to multiple metal wires.

[0057] The boat body 10 has excellent thermal conductivity and high temperature resistance. When the power source is energized to the boat body 10, the boat body 10 heats up rapidly and can maintain its shape at a high temperature of about 1500° C. The shape of the boat body 10 can be set to a rectangular parallelepiped, cylindrical or other shapes as needed. Generally, a rectangular parallelepiped shape is selected to facilitate the installation of the boat body 10.

[0058] The evaporation tank 11 is used to carry and heat the evaporation liquid, and the evaporation liquid refers to the metal liquid or non-metal liquid formed after the metal wire or non-metal wire is melted. The following description takes the evaporation liquid as a metal liquid as an example. After the metal wire contacts the top surface 1211 of the protrusion 12, it melts to form a metal liquid and is collected in the evaporation tank 11. The top surface 1211 of the protrusion 12 refers to the surface of the protrusion 12 exposed in the evaporation tank 11 and closest to the notch of the evaporation tank 11 in the thickness direction of the boat body 10. The protrusion 12 serves as a wire feeding point, which means that the contact point between the metal wire and the evaporation boat body 10 during the wire feeding process of the wire feeding mechanism is located on the protrusion 12. For example, the contact point between the metal wire and the evaporation boat body 10 can be located on the top surface 1211 of the protrusion 12, and the metal wire contacts the top surface 1211 and melts on the top surface 1211.

[0059] In order to improve the mechanical impact resistance of the protrusion 12, the protrusion 12 can be made of a metal material that is resistant to high temperatures, has good chemical stability, and has strong thermal conductivity. Specifically, the protrusion 12 needs to be resistant to a high temperature of at least 1500°C, and at this temperature, the protrusion 12 has sufficient strength to support the metal wire and will hardly react chemically with the molten metal wire and the boat body 10.

[0060] The protrusion 12 can be arranged near the middle of the evaporation tank 11. The temperature of the middle of the evaporation boat 1 is usually higher. The protrusion 12 is arranged near the middle of the evaporation tank 11 so that the molten metal after the wire feeding is relatively cooled in the middle first, so that the temperature distribution of the entire evaporation tank 11 is more uniform, and the possibility of boiling caused by temperature difference is reduced.

[0061] In order to further improve the service life of the evaporation boat 1, the protrusion 12 can be detachably arranged on the bottom wall of the evaporation tank 11. Separable, also called detachable or replaceable, can be arranged in a variety of ways. For example, the protrusion 12 can be detachably arranged on the bottom wall of the evaporation tank 11 by plugging. Alternatively, the protrusion 12 can be detachably arranged on the bottom wall of the evaporation tank 11 by threaded connection. Alternatively, the protrusion 12 can be detachably arranged on the bottom wall of the evaporation tank 11 by magnetic adsorption.

[0062] In actual operation, the wire feeding mechanism feeds the wire so that the metal wire can contact the protrusion 12. Then, the metal wire melts at the contact point with the protrusion 12 to form a metal liquid and is collected in the evaporation tank 11. When the power source continues to be energized, the metal liquid in the evaporation tank 11 vaporizes and contacts the to-be-evaporated member spaced above the notch of the evaporation tank 11, and then condenses to form a metal film layer.

[0063] In a traditional evaporation boat 1, the metal wire directly contacts the bottom wall of the evaporation boat 1 to melt and form a vapor deposition liquid. The metal wire introduced at high speed through the wire guide tube has a certain initial velocity before contacting the boat body 10, which forms a continuous mechanical impact on the bottom wall of the evaporation boat 1, resulting in pits on the bottom wall of the evaporation tank 11 after the evaporation boat 1 has been used for a period of time. The vapor deposition liquid continues to impact the pits to form grooves, and the boat body 10 is easily scrapped and has a short service life.

[0064] It is worth mentioning that other areas of the evaporation tank 11 of the boat 10 that are in contact with the molten metal will also corrode, but because other areas are not mechanically impacted by the metal wire, the possibility of grooves or pits forming in other areas is smaller or slower. In other words, the area on the boat 10 that is in contact with the metal wire is most likely to form grooves or pits.

[0065] In the embodiment of the present application, the metal wire contacts the protrusion 12 during the wire feeding process. Since the protrusion 12 bears the continuous mechanical impact of the metal wire, the possibility of grooves or pits forming in other areas of the boat body 10 is relatively small or relatively slow, which increases the corrosion resistance of the boat body. When the protrusion 12 has pits and grooves after being used for a period of time, the boat body 10 of the evaporation boat 1 can be reused by replacing the protrusion 12. In this way, the evaporation boat 1 is not easily scrapped during use, and its service life is extended.

[0066] In some embodiments of the present application, the bottom wall of the evaporation groove 11 has a first groove portion 13 , and the protrusion 12 is disposed on the bottom wall of the first groove portion 13 .

[0067] The first groove 13 is provided to increase the uniformity of the diffusion of the molten metal, which is beneficial for the molten metal to be wetted, dispersed and spread in the evaporation zone, so that the diffusion of the molten metal in the entire evaporation groove is more uniform. The protrusion 12 is provided on the bottom wall of the first groove 13, so that the molten metal can flow smoothly from the protrusion 12 as the wire feeding point into the first groove 13 and diffuse in the first groove 13.

[0068] In some embodiments of the present application, the groove depth D1 of the first groove portion 13 is 0.5 mm-1.0 mm. For example, the groove depth D1 of the first groove portion 13 may be 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm or 1.0 mm.

[0069] Specifically, the groove depth D1 of the first groove portion 13 should not be too large, as a large groove depth D1 may easily cause splashing of the molten metal. In addition, the groove depth D1 of the first groove portion 13 should not be too small, as a small groove depth D1 may cause unmelted metal slag to accumulate, and the accumulated metal slag may reduce the area of ​​the first groove portion 13. In order to maintain the original evaporation rate, the temperature of the evaporation boat 1 may be increased, which may reduce the service life of the evaporation boat 1. By setting the groove depth D1 of the first groove portion to 0.5 mm-1.0 mm, the height difference of the flow of the molten metal can be controlled, the occurrence of metal molten splashing can be reduced, and the accumulation of metal slag can be reduced to increase the service life of the evaporation boat 1.

[0070] In some embodiments of the present application, the cross section of the first groove portion 13 parallel to the bottom wall of the evaporation groove 11 is circular, and the diameter L1 of the first groove portion 13 is 7 mm-13 mm. For example, the diameter L1 of the first groove portion 13 can be 7 mm, 8 mm, 9 mm, 10 mm, 11 mm, 12 mm or 13 mm.

[0071] When the evaporation boat 1 is working, the molten metal liquid diffuses from the wire feeding point to the surroundings. Since the circle shape makes it easier for the fluid to diffuse and flow in all directions from the wire feeding point, setting the cross-section of the first groove portion 13 parallel to the bottom wall of the evaporation groove 11 to be circular can further improve the diffusion uniformity of the metal liquid.

[0072] Specifically, the diameter L1 of the first groove 13 should not be too large. If the diameter L1 is too large, the thickness of the boat 10 in the area where the first groove 13 is set will be thinner, resulting in a larger resistance value of the boat 10 as a whole. In addition, the diameter L1 of the first groove 13 should not be too small. If the diameter L1 is too small, the diffusion area of ​​the molten metal will be smaller, affecting the diffusion and evaporation effect of the molten metal. The diameter L1 of the first groove 13 is 7mm-13mm, which can ensure the diffusion and evaporation effect of the molten metal, while reducing the adverse effect on the resistance value of the boat 10 as a whole.

[0073] In addition, as an alternative, the cross section of the first groove portion 13 parallel to the bottom wall of the evaporation groove 11 may also be an ellipse, triangle, quadrilateral, pentagon or hexagon, etc., which is not specifically limited here.

[0074] In some embodiments of the present application, the protrusion 12 includes a main body 121 and a coupling portion 122, the first groove portion 13 includes a bottom wall 130 and a recessed portion 131 that is recessed relative to the bottom wall 130 of the first groove portion 13, the main body 121 is protruding relative to the bottom wall 130 of the first groove portion 13, and the coupling portion 122 is detachably accommodated in the recessed portion 131. Not shown, in other embodiments, the protrusion 12 may also include a main body 121 and a recessed portion 131, the recessed portion 131 is recessed relative to the bottom surface of the protrusion 12, the first groove portion 13 includes a bottom wall 130 and a coupling portion 122 that is protruding relative to the bottom wall 130 of the first groove portion 13, and the coupling portion 122 is detachably accommodated in the recessed portion 131.

[0075] The main body 121 of the protrusion 12 protrudes relative to the bottom wall 130 of the first groove portion 13, so that the protrusion 12 serves as a wire feeding point during wire feeding, thereby increasing the corrosion resistance of the boat body 10 and improving the service life of the evaporation boat 1. Further, by setting one of the protrusion 12 and the first groove portion 13 to have a coupling portion 122, and the other of the protrusion 12 and the first groove portion 13 to have a recessed portion 131, and the coupling portion 122 can be detachably accommodated in the recessed portion 131, the protrusion 12 can be firmly combined with the evaporation groove 11, reducing the possibility of the protrusion 12 and the evaporation groove 11 being separated under the mechanical impact of wire feeding, and improving the reliability of the evaporation boat 1 in the working state.

[0076] In some embodiments of the present application, the protrusion 12 is detachably provided on the bottom wall of the evaporation tank 11 by plugging, and the outer wall 1222 of the joint 122 is interference fit with the inner wall 1311 of the recessed portion 131 .

[0077] The connection reliability between the protrusion 12 and the evaporation tank 11 can be improved by the interference fit. The interference fit has a large load-bearing capacity and good impact resistance, which can reduce the possibility of the protrusion 12 and the evaporation tank 11 being separated under the impact of wire feeding. In addition, the convenience of replacing the protrusion 12 can be taken into account by setting an appropriate interference amount.

[0078] In some embodiments of the present application, the protrusion 12 is detachably provided on the bottom wall of the evaporation tank 11 by means of a threaded connection, and the outer wall 1222 of the coupling portion 122 is threadably matched with the inner wall 1311 of the recessed portion 131 .

[0079] The threaded connection structure is simple, the connection is reliable, and the assembly and disassembly are convenient. The threaded connection can improve the connection reliability between the protrusion 12 and the evaporation tank 11, reduce the possibility of the protrusion 12 and the evaporation tank 11 being separated under the impact of wire feeding, and at the same time take into account the convenience of replacing the protrusion 12. The threaded cooperation between the outer wall 1222 of the joint 122 and the inner wall 1311 of the recessed part 131 can be achieved by providing an external thread on the outer wall 1222 of the joint 122 and an internal thread on the inner wall 1311 of the recessed part 131.

[0080] In some embodiments of the present application, the main body 121 is a truncated cone or a prism, and the truncated cone or the prism includes a top surface 1211 and a side surface 1212, and the angle α of the side surface 1212 relative to the top surface 1211 is 105°-135°. For example, the angle α can be 105°, 110°, 115°, 120°, 125°, 130° or 135°.

[0081] A top surface 1211 is formed on the top of the cone or prism, and the top surface 1211 can serve as the contact point between the metal wire and the evaporation boat 1 during wire feeding, and withstand the mechanical impact force generated by continuous wire feeding. The side surface 1212 of the cone or prism can facilitate the molten metal liquid to flow smoothly to the first groove portion 13, thereby increasing the infiltration of the metal liquid into the entire evaporation groove.

[0082] Specifically, the angle α of the side surface 1212 relative to the top surface 1211 is less than or equal to 135°, so that the inclination angle of the side surface 1212 relative to the horizontal plane of the evaporation tank 11 is not too small, and the molten metal can flow smoothly to ensure the diffusion and evaporation of the molten metal, thereby improving the uniformity of the coating. The angle α of the side surface 1212 relative to the top surface 1211 is greater than or equal to 105°, which can reduce the splashing of the molten metal.

[0083] See also Figure 8-Figure 9 In some embodiments of the present application, the main body 121 may be spherical.

[0084] By setting the main body 121 to be spherical, the molten metal can flow along the top of the spherical surface of the protrusion 12 toward the evaporation tank 11 , thereby increasing the wetting of the entire evaporation tank 11 by the molten metal.

[0085] In some embodiments of the present application, the height H1 of the main body 121 is 3 mm to 7 mm. For example, the height H1 may be 3 mm, 3.5 mm, 4 mm, 4.5 mm, 5 mm, 5.5 mm, 6 mm, 6.5 mm or 7 mm.

[0086] Specifically, the height H1 of the main body 121 is greater than or equal to 3 mm, which can ensure that the height difference between the wire feeding point of the protrusion 12 and the liquid surface of the molten metal is sufficient, reducing the possibility of the metal wire flowing into the first groove 13 before it is completely melted, and improving the effect of evaporation coating. The height H1 of the main body 121 is less than or equal to 7 mm, which can ensure that the flow height difference of the molten metal is not too large, and reduce the occurrence of splashing during the flow of the molten metal.

[0087] In some embodiments of the present application, the height H2 of the joint portion 122 is 0.1 mm-3 mm. For example, the height H2 may be 0.1 mm, 0.5 mm, 1 mm, 1.5 mm, 2 mm, 2.5 mm or 3 mm.

[0088] Specifically, the height H2 of the joint 122 is greater than or equal to 0.1 mm, which can ensure that the protrusion 12 is firmly combined with the evaporation tank 11, and reduce the possibility of the protrusion 12 and the evaporation tank 11 being loosened and separated from the evaporation tank 11 under the impact of continuous high-speed wire feeding. The height H2 of the joint 122 is less than or equal to 3 mm, which can ensure that the thickness of the corresponding position where the protrusion 12 is provided on the evaporation boat 1 is not too thin, reducing the adverse effect on the resistance value of the entire boat body.

[0089] In some embodiments of the present application, the ratio of the height H1 of the main body 121 to the height H2 of the coupling portion 122 is 7:1-13:1. For example, the ratio of the height H1 to the height H2 may be 7:1, 8:1, 9:1, 10:1, 11:1, 12:1 or 13:1.

[0090] Specifically, the ratio of the height H1 of the main body 121 to the height H2 of the joint 122 is greater than or equal to 7:1, which can ensure that the height ratio of the main body 121 in the protrusion 12 is sufficient, so that the height difference between the wire feeding point of the protrusion 12 and the liquid surface of the molten metal is sufficient, reducing the possibility of the metal wire flowing into the first groove 13 before it is completely melted, and improving the effect of evaporation coating. The ratio of the height H1 of the main body 121 to the height H2 of the joint 122 is less than or equal to 13:1, which can ensure that the height ratio of the joint 122 in the protrusion 12 is sufficient, ensuring the firm connection between the protrusion 12 and the evaporation groove 11, and reducing the possibility of the protrusion 12 and the evaporation groove 11 being loosened and separated from the evaporation groove 11 under the impact of continuous high-speed wire feeding.

[0091] In some embodiments of the present application, the bottom wall of the evaporation tank 11 has a second tank portion 14 , and the second tank portion 14 is disposed around the outer edge of the evaporation tank 11 .

[0092] As the use time increases, the metal slag accumulated in the evaporation tank 11 reduces the area of ​​the molten pool. In order to maintain the original evaporation rate, the temperature of the evaporation boat 1 will be increased, which will reduce the service life of the evaporation boat 1. The second groove portion 14 is provided around the outer edge of the evaporation tank 11 to deposit the unmelted metal slag, thereby reducing the influence of the metal slag on the evaporation rate.

[0093] In some embodiments of the present application, the groove width W1 of the second groove portion 14 is 1 mm-3 mm. For example, the groove width W1 may be 1 mm, 1.5 mm, 2 mm, 2.5 mm or 3 mm.

[0094] Specifically, the groove width W1 of the second groove portion 14 is greater than or equal to 1 mm, which can ensure that the space for accommodating the metal slag is sufficient, thereby improving the effect of depositing the unmelted metal slag in the second groove portion 14. The groove width W1 of the second groove portion 14 is less than or equal to 3 mm, which can ensure that the area of ​​the metal evaporation zone is sufficient, thereby reducing the impact on the evaporation coating space of the metal liquid.

[0095] In some embodiments of the present application, the groove depth D2 of the second groove portion 14 is 0.1 mm-3 mm. For example, the groove depth D2 may be 0.1 mm, 0.5 mm, 1 mm, 1.5 mm, 2 mm, 2.5 mm or 3 mm.

[0096] Specifically, the groove depth D2 of the second groove portion 14 is greater than or equal to 0.1 mm, which can ensure that the space for accommodating the metal slag is sufficient, thereby improving the effect of depositing the unmelted metal slag in the second groove portion 14. The groove depth D2 of the second groove portion 14 is less than or equal to 3 mm, which can ensure that the thickness of the corresponding position where the second groove portion 14 is provided on the evaporation boat 1 is not too thin, thereby reducing the adverse effect on the resistance value of the entire boat body.

[0097] In some embodiments of the present application, the ratio of the groove width W1 of the second groove portion 14 to the groove depth D2 of the second groove portion 14 is 1:1-3:1. For example, the ratio of the groove width W1 to the groove depth D2 may be 1:1, 1.5:1, 2:1, 2.5:1 or 3:1.

[0098] Specifically, the ratio of the groove width W1 of the second groove portion 14 to the groove depth D2 of the second groove portion 14 is greater than or equal to 1:1, which can ensure that the groove width W1 of the second groove portion 14 is not too small relative to the groove depth D2, so that the accommodating space of the metal slag is sufficient, and the effect of depositing unmelted metal slag in the second groove portion 14 is improved. The ratio of the groove width W1 of the second groove portion 14 to the groove depth D2 of the second groove portion 14 is less than or equal to 3:1, which can ensure that the groove width W1 of the second groove portion 14 is not too large relative to the groove depth D2, ensure that the area of ​​the metal evaporation zone is sufficient, and reduce the impact on the evaporation coating space of the metal liquid.

[0099] In a second aspect, an embodiment of the present application further provides a vacuum evaporation device, which includes an evaporation boat 1 as described in any one of the above embodiments.

[0100] Please refer to Figures 1 to 7 According to some embodiments of the present application, an evaporation boat 1 is provided, wherein the boat body 10 of the evaporation boat 1 comprises an evaporation tank 11 and a protrusion 12, wherein the evaporation tank 11 is used to carry and heat the molten metal, and the protrusion 12 is used as a wire feeding point. The bottom wall of the evaporation tank 11 comprises a first groove portion 13, wherein the first groove portion 13 comprises a bottom wall 130 and a recessed portion 131 recessed relative to the bottom wall 130 of the first groove portion 13. The protrusion 12 comprises a main body portion 121 and a joint portion 122, wherein the main body portion 121 is a truncated cone, wherein the main body portion 121 is protruding relative to the bottom wall 130 of the first groove portion 13, and the protrusion 12 is detachably arranged on the bottom wall of the first groove portion 13 by plugging, and the outer side wall 1222 of the joint portion 122 is interference fit with the inner wall 1311 of the recessed portion 131. A second groove portion 14 is also arranged around the outer edge of the evaporation tank 11.

[0101] In the above-mentioned evaporation boat 1, a detachable protrusion 12 is used as a wire feeding point. On the one hand, the protrusion 12 can withstand the continuous mechanical impact of the metal wire during high-speed wire feeding, thereby increasing the corrosion resistance of the boat body 10. On the other hand, after the protrusion 12 has pits and grooves after being used for a period of time, the evaporation boat body 10 can continue to be used by replacing only the protrusion 12, thereby reducing the possibility of defects such as cracking of the evaporation boat 1 caused by erosion, thereby increasing the service life of the evaporation boat 1. Through the interference fit plug-in method of the outer wall 1222 of the joint 122 and the inner wall 1311 of the recessed part 131, on the one hand, the connection firmness of the protrusion 12 and the evaporation tank 11 can be improved, and the possibility of the protrusion 12 and the evaporation tank 11 being separated under the impact of wire feeding can be reduced. On the other hand, the convenience of replacing the protrusion 12 can be taken into account. By providing the bottom wall of the evaporation tank 11 with a first groove portion 13 and providing the protrusion 12 on the bottom wall 130 of the first groove portion 13, the molten metal liquid can flow from the protrusion 12 as the wire feeding point to the first groove portion 13, thereby diffusing and evaporating in the first groove portion 13. By providing the second groove portion 14 around the outer edge of the evaporation tank 11, unmelted metal slag can be deposited to reduce the influence of the metal slag on the evaporation rate. By providing the main body 121 as a truncated cone, the metal liquid can flow to the evaporation tank 11 along the side of the protrusion 12, thereby increasing the infiltration of the metal liquid into the entire evaporation tank 11.

[0102] The above embodiments are only used to illustrate the technical solutions of the present application and are not used to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application. The above embodiments are only used to illustrate the technical solutions of the present application and are not used to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An evaporation boat, characterized in that: comprising a boat body, wherein The boat body comprises: An evaporation tank, used to carry and heat the evaporation liquid; and A protrusion, used as a wire feeding point, wherein the protrusion is detachably arranged on the bottom wall of the evaporation tank; The bottom wall of the evaporation tank has a first groove portion, and the protrusion is detachably arranged on the bottom wall of the first groove portion; The protrusion includes a main body and a coupling portion, the first groove portion has a bottom wall and a recessed portion recessed relative to the bottom wall of the first groove portion, the main body is protruding relative to the bottom wall of the first groove portion, and the coupling portion is detachably accommodated in the recessed portion; or, The protrusion includes a main body and a recessed portion, wherein the recessed portion is recessed relative to a bottom surface of the protrusion, and the first groove portion has a bottom wall and a coupling portion protruding relative to the bottom wall of the first groove portion, wherein the coupling portion is detachably accommodated in the recessed portion.

2. The evaporation boat according to claim 1, characterized in that: The groove depth of the first groove portion is 0.5 mm-1.0 mm; and / or the cross section of the first groove portion parallel to the bottom wall of the evaporation groove is circular, and the diameter of the first groove portion is 7 mm-13 mm.

3. The evaporation boat according to claim 1, characterized in that: The protrusion is detachably provided on the bottom wall of the evaporation tank by plugging, and the outer wall of the joint portion is interference-fitted with the inner wall of the recessed portion; or The protrusion is detachably arranged on the bottom wall of the evaporation tank by means of a threaded connection, and the outer wall of the joint portion is threadedly matched with the inner wall of the recessed portion.

4. The evaporation boat according to claim 1, characterized in that: The main body is a truncated cone or a prism, the truncated cone or the prism comprises a top surface and a side surface, and the angle between the side surface and the top surface is 105°-135°; or The main body is in a spherical shape.

5. The evaporation boat according to claim 1, characterized in that: The height of the main body is 3mm-7mm, and / or the height of the connecting portion is 0.1mm-3mm, and / or the ratio of the height of the main body to the height of the connecting portion is 7:1-13:

1.

6. The evaporation boat according to claim 1, characterized in that: The bottom wall of the evaporation tank has a second groove portion, and the second groove portion is disposed around an outer edge of the evaporation tank.

7. The evaporation boat according to claim 6, characterized in that: The groove width of the second groove portion is 1 mm-3 mm, and / or the groove depth of the second groove portion is 0.1 mm-3 mm, and / or the ratio of the groove width of the second groove portion to the groove depth of the second groove portion is 1:1-3:

1.

8. A vacuum evaporation device, characterized in that: The evaporation boat comprises the evaporation boat according to any one of claims 1 to 7.

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