Automatic assembling and separating device for evaporation equipment

Abstract

The utility model belongs to the technical field of evaporation, and relates to an automatic assembling and separating device for evaporation equipment, which comprises a box body, a material fork, an assembling and separating component and a gate component, the material fork stretches out and draws back along the feeding height under the action of a manipulator, the box body is hollow, the gate component is arranged on one side of the box body, and the assembling and separating component is arranged in the box body. The assembling and separating assembly is arranged on the lower portion of the box body, the gate assembly is provided with an inlet and outlet located at the feeding height and a gate valve used for closing the inlet and outlet, the assembling and separating assembly comprises a first lifting driving mechanism, a second lifting driving mechanism, an outer support and an inner support, and the first lifting driving mechanism drives the outer support to ascend and descend; the second lifting driving mechanism drives the inner support to ascend and descend. According to the automatic assembling and separating device, the mask plate can be automatically replaced on the carrier and the base plate in an independent space, the inner cavity of the box body and the inner cavity of the evaporation equipment are separated by the gate valve during evaporation, and the situation that the vacuumizing speed of the evaporation equipment is affected due to the fact that gap gas in the structure is difficult to exhaust is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation, in particular to an automatic assembly and separation device for evaporation equipment. Background Art

[0002] Vacuum evaporation is a method of heating the raw materials to be formed into a thin film in an evaporation container in a vacuum box, so that its atoms or molecules escape from its surface, form a vapor flow, and enter the surface of the substrate to condense into a solid film. In the process of vacuum evaporation, a mask plate is often used to limit the evaporation area. The method of use is to place the substrate on a carrier, and the mask plate and the carrier are magnetically attracted and clamp the substrate to form an assembly. A hollow structure is designed on the mask plate to expose part of the surface of the substrate. The assembly is flipped to the mask side facing down, and then the assembly is placed above the evaporation source to complete the evaporation of a evaporation material. If multiple materials are to be evaporated on the substrate, the evaporation range is different. In this case, the mask plate needs to be replaced. In the prior art, a stage lifting method is generally used, and the material is fed by a manipulator. The stage and the manipulator are both located inside the evaporation chamber. The stage structure parts are complex, and it is easy to have gaps that are difficult for air to discharge, and the volume is large. Therefore, when the vacuum chamber needs to be evacuated, it will affect the maintenance of the vacuum degree, which will then cause evaporation quality problems.

[0003] Chinese patent CN109023234A discloses a mask plate replacement device, which is a device for storing mask plates and relies on a clamping mechanism to take out and return the mask plates. However, how the mask plate is assembled with the carrier is uncertain.

[0004] Therefore, it is necessary to design a device specifically for assembling and separating the mask, substrate and carrier to solve the above problems. Utility Model Content

[0005] The main purpose of the utility model is to provide an automatic assembly and separation device for evaporation equipment, which can automatically complete the replacement of the mask plate on the carrier and the substrate in an independent space, avoiding the gap in the structure affecting the vacuum speed of the evaporation equipment.

[0006] The utility model achieves the above-mentioned purpose through the following technical solutions: an automatic assembly and separation device for evaporation equipment, comprising a box, a material fork, an assembly and separation component and a gate component, the material fork is extended and retracted along the feeding height under the action of a manipulator, the interior of the box is hollow, the gate component is arranged on one side of the box, the assembly and separation component is arranged at the bottom of the box, and the gate component has an inlet and outlet located at the feeding height and a gate valve for closing the inlet and outlet;

[0007] The material fork is used to transport the mask plate or the assembly. The assembly is composed of the mask plate, the substrate and the carrier assembled from top to bottom. The upper surface of the carrier has a plurality of positioning convex pillars. The side of the mask plate is provided with a positioning notch that cooperates with the positioning convex pillars. In the assembly, the four corners of the mask plate are outside the upper projection range of the carrier.

[0008] The assembly and separation component includes a first lifting drive mechanism, a second lifting drive mechanism, an outer bracket and an inner bracket, the first lifting drive mechanism drives the outer bracket to rise and fall, and the second lifting drive mechanism drives the inner bracket to rise and fall, the outer bracket includes a lower lifting plate, an upper lifting plate, a plurality of columns connected between the lower lifting plate and the upper lifting plate, and support blocks extending upward from the four corners of the upper lifting plate respectively, the support blocks are provided with a mask plate supporting notch and a carrier supporting notch, the height of the mask plate supporting notch is higher than the carrier supporting notch and the height difference is greater than the thickness of the material fork, the mask plate supporting notch is located at the outer side of the upper projection range of the carrier supporting notch close to the corner of the upper lifting plate, the inner bracket includes a middle lifting plate located between the lower lifting plate and the upper lifting plate and a plurality of push rods located above the middle lifting plate, the push rods pass through the upper lifting plate upward, and the moving path of the push rods is staggered with the moving path of the material fork.

[0009] Specifically, the upper part of the box is open, and an inspection door is rotatably provided on the upper part of the box to seal the open opening, and a handle is provided on the rotating free edge of the inspection door.

[0010] Furthermore, a window is provided in the middle of the inspection door.

[0011] Furthermore, one side of the inspection door in the rotation direction is connected to one side of the upper edge of the box body through a gas spring.

[0012] Specifically, the inner bracket is also provided with a plurality of linear bearings for the columns to pass through and cooperate with.

[0013] Specifically, the edge of the carrier is provided with a plurality of positioning holes, the upper surface of the mask plate is provided with alignment holes corresponding to the positions and sizes of the positioning holes, and the top ends of the push rods match the positioning holes of the carrier and the alignment holes of the mask plate.

[0014] The beneficial effects of the technical solution of the utility model are:

[0015] This automatic assembly and separation device can automatically complete the replacement of the mask plate on the carrier and the substrate in an independent space. During evaporation, the gate valve separates the inner cavity of the box from the inner cavity of the evaporation equipment, avoiding the difficulty in discharging the void gas in the structure and affecting the vacuum pumping speed of the evaporation equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is an exploded view of the assembly;

[0017] Figure 2 is a perspective view of an automatic assembly separation device;

[0018] Figure 3 It is a partial cross-sectional view of the box body;

[0019] Figure 4 It is a diagram showing the position relationship between the material fork and the outer bracket and the inner bracket when the material fork is fed into the assembly;

[0020] Figure 5 It is a position relationship diagram of the outer bracket and the inner bracket when the assembly is separated;

[0021] Figure 6 for Figure 5 A partial enlarged view of position A in the middle;

[0022] Figure 7 This is a diagram showing the position relationship between the material fork and the outer bracket and the inner bracket when transferring the mask plate.

[0023] The numbers in the figure represent:

[0024] 1- Automatic assembly and separation device,

[0025] 11-box, 111-inspection door, 1111-handle, 1112-window, 112-gas spring,

[0026] 12-Material fork,

[0027] 13-assembly and separation components, 131-first lifting drive mechanism, 132-second lifting drive mechanism, 133-external bracket, 1331-lower lifting plate, 1332-upper lifting plate, 1333-column, 1334-support block, 13341-mask plate supporting gap, 13342-carrier supporting gap, 134-inner bracket, 1341-middle lifting plate, 1342-thrust rod, 1343-linear bearing,

[0028] 14-gate assembly, 141-inlet and outlet, 142-gate valve;

[0029] 2-mask plate, 21-alignment hole, 22-alignment notch;

[0030] 3-carrier, 31-positioning hole, 32-positioning boss;

[0031] 4-Substrate. DETAILED DESCRIPTION

[0032] The utility model is further described in detail below in conjunction with specific embodiments.

[0033] Example:

[0034] like Figures 1 to 3 As shown, the automatic assembly and separation device 1 for evaporation equipment of the utility model comprises a box body 11, a material fork 12, an assembly and separation component 13 and a gate component 14. The material fork 12 is used to transport the mask plate 2 or the assembly, and the assembly and separation component 13 is used to separate or assemble the mask plate 2 from the carrier 3 carrying the substrate 4. The assembly is composed of the mask plate 2, the substrate 4 and the carrier 3 assembled from top to bottom. The edge of the carrier 3 is provided with a plurality of positioning holes 31, and the upper surface is provided with a plurality of positioning bosses 32. The upper surface of the mask plate 2 is provided with alignment holes 21 corresponding to the position and size of the positioning holes 31, and the side is provided with alignment notches 22 that cooperate with the positioning bosses 32. In the assembly, the four corners of the mask plate 2 are outside the upper projection range of the carrier 3.

[0035] The automatic assembly and separation device 1 is used to replace the mask plate 2. Since the range of evaporation depends on the range of the substrate 4 exposed by the mask plate 2, different mask plates 2 often need to be replaced when coating different materials on the same substrate 4. Here, the carrier 3 does not need to be replaced, and its positioning boss 32 serves as the basis for positioning different mask plates 2. Therefore, the material fork 12 is responsible for moving the assembly into the box 11, and the assembly and separation component 13 separates the previous mask plate from the carrier 3. The material fork 12 replaces another mask plate and assembles it with the carrier 3 and the substrate 4 into another assembly, which is then sent to the evaporation equipment for evaporation. Because the evaporation material is evaporated from bottom to top during evaporation, the assembly needs to be flipped to the position where the mask plate 2 is at the bottom during evaporation. The mask plate 2 needs to have a certain magnetic force to be sucked together with the carrier 3 to prevent the assembly from disintegrating and to prevent the substrate 4 from falling.

[0036] like Figure 2 and Figure 3 As shown, the interior of the box body 11 is hollow and open at the top, and an inspection door 111 is rotatably provided on the upper part of the box body 11 to seal the open mouth. A handle 1111 is provided on the rotating free edge of the inspection door 111, and a window 1112 is provided in the middle of the inspection door 111. One side of the inspection door 111 in the rotating direction is connected to one side of the upper edge of the box body 11 through a gas spring 112.

[0037] The box body 11 is connected to the evaporation equipment, so the box body 11 must be in a sealed state when working, and the inspection door 111 needs to be closed at this time. When the box body 11 is not in working state, the maintenance personnel use the handle 1111 to rotate and open the inspection door 111. The gas spring 112 can keep the inspection door 111 in place after opening, freeing the hands of the maintenance personnel, saving the manpower required for maintenance, and avoiding the danger of the inspection door 111 automatically closing under the action of gravity and causing injuries. The window 1112 is made of transparent glass, and the maintenance personnel can observe through the window 1112 whether the working state of the assembly and separation component 13 is normal. Because the upper viewing angle can better display the state of the assembly and the assembly and separation component 13, the window 1112 is preferably set on the upper surface of the box body 11, that is, the position of the inspection door 111 of this embodiment.

[0038] like Figure 1 and Figure 2 As shown, the material fork 12 is extended and retracted along the feeding height under the action of the robot, and the gate assembly 14 is arranged on one side of the box body 11, and has an inlet and outlet 141 located at the feeding height and a gate valve 142 for closing the inlet and outlet 141.

[0039] The inlet and outlet 141 is a passage connecting the evaporation equipment and the automatic assembly separation device 1. When evaporation is in progress, the evaporation equipment needs to be evacuated, so a gate valve 142 is required to separate the two spaces, so that the vacuum degree of the evaporation equipment can be more stable.

[0040] like Figures 3 to 7As shown, the assembly and separation component 13 is arranged at the lower part of the box body 11, including a first lifting drive mechanism 131, a second lifting drive mechanism 132, an outer bracket 133 and an inner bracket 134. The first lifting drive mechanism 131 drives the outer bracket 133 to rise and fall, and the second lifting drive mechanism 132 drives the inner bracket 134 to rise and fall. The outer bracket 133 includes a lower lifting plate 1331, an upper lifting plate 1332, and a plurality of vertical plates connected between the lower lifting plate 1331 and the upper lifting plate 1332. The column 1333 and the support blocks 1334 extending upward from the four corners of the upper lifting plate 1332 respectively, the support blocks 1334 are provided with a mask plate supporting notch 13341 and a carrier supporting notch 13342, the height of the mask plate supporting notch 13341 is higher than the carrier supporting notch 13342 and the height difference is greater than the thickness of the material fork 12, and the mask plate supporting notch 13341 is located on the outer side of the upper projection range of the carrier supporting notch 13342 close to the corner of the upper lifting plate 1332. The inner bracket 134 includes a middle lifting plate 1341 located between the lower lifting plate 1331 and the upper lifting plate 1332 and a plurality of push rods 1342 located above the middle lifting plate 1341, the push rods 1342 pass through the upper lifting plate 1332 upward and the top ends match the positioning holes 31 of the carrier 3 and the alignment holes 21 of the mask plate 2, and the moving path of the push rods 1342 is staggered with the moving path of the material fork 12. The inner bracket 134 is also provided with a plurality of linear bearings 1343 for the columns 1333 to pass through.

[0041] Because the outer bracket 133 is driven to rise and fall by the first lifting drive mechanism 131, and the inner bracket 134 is driven to rise and fall by the second lifting drive mechanism 132, the lifting and falling of the outer bracket 133 and the inner bracket 134 are independent. However, with the cooperation of the linear bearing 1343 and the column 1333, both can move in the vertical direction. Because the four corners of the mask plate 2 protrude from the carrier 3, the mask plate supporting notch 13341 will only support the four corners of the mask plate 2, and the carrier 3 will pass through the upper part of the support block 1334 until it is supported by the carrier supporting notch 13342. In this process, the mask plate 2 and the carrier 3 only perform vertical lifting. After the material fork 12 leaves the box 11, the height of the mask plate 2 depends on the higher of the mask plate supporting notch 13341 and the upper surface of the carrier 3, and the height of the carrier 3 depends on the higher of the carrier supporting notch 13342 and the supporting position of the top rod 1342. After the mask plate 2 and the carrier 3 are separated from each other, the outer bracket 133 rises a little bit to make the mask plate 2 higher than the feeding height and the carrier 3 lower than the feeding height. The material fork 12 can then extend under the mask plate 2. The outer bracket 133 descends, and the mask plate 2 falls on the material fork 12. The material fork 12 can then replace the mask plate 2. The mask plate 2 and the carrier 3 are attracted together by a small magnetic force, but the magnetic force will not be higher than the total gravity of the carrier 3 and the substrate 4. In this way, after the top rod 1342 descends, the carrier 3 carrying the substrate 4 will separate from the mask plate 2 by itself. During assembly, the top rod 1342 will use the positioning hole 31 and the alignment hole 21 to keep the carrier 3 and the new mask plate 2 in the proper position, so that a new assembly can be reassembled.

[0042] The working process of the automatic assembly and separation device 1 is as follows: the gate valve 142 is opened, and the material fork 12 carries the assembly into the box body 11, at which time the outer bracket 133 and the inner bracket 134 are both in a lower position; when the assembly is in place, the outer bracket 133 is raised, and the inner bracket 134 is lowered relative to the outer bracket 133, until the height of the carrier supporting notch 13342 is higher than the feeding height, at which time the mask plate supporting notches 13341 of the four support blocks 1334 support the four corners of the mask plate 2, and the four corners of the carrier 3 are respectively supported by the four carrier supporting notches 13342, and the mask plate 2 and the carrier 3 are separated from the material fork 12; the material fork 12 temporarily leaves the lower projection range of the carrier 3, and the outer bracket 133 is lowered to a point where the height of the carrier supporting notch 13342 is lower than the feeding height and the mask plate supporting notch 13341 is lower than the feeding height. The height of 3341 is higher than the feeding height, and the material fork 12 is extended between the mask plate 2 and the substrate 4; the outer bracket 133 continues to descend, the mask plate 2 falls on the material fork 12, the material fork 12 leaves the box 11, and the new mask plate 2 is replaced and returns to its original position; the outer bracket 133 rises first to allow the new mask plate 2 to separate from the material fork 12, the material fork 12 retreats, the inner bracket 134 rises, and the push rod 1342 allows the new mask plate 2 to assemble a new assembly with the carrier 3 and the substrate 4; then the material fork 12 extends to the bottom of the new assembly, the outer bracket 133 and the inner bracket 134 fall together, the new assembly falls on the material fork 12, the material fork 12 sends the new assembly out of the box 11, and the gate valve 142 is closed; the evaporation equipment outside the inlet and outlet 141 can start vacuuming, and then carry out evaporation work.

[0043] The automatic assembly and separation device can automatically complete the replacement of the mask plate 2 on the carrier 3 and the substrate 4 in an independent space. During evaporation, the gate valve 142 separates the inner cavity of the box body 11 from the inner cavity of the evaporation equipment, thereby preventing the void gas in the structure from being difficult to discharge and affecting the vacuum pumping speed of the evaporation equipment.

[0044] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. An automatic assembly and separation device for evaporation equipment, characterized in that: It includes a box body, a material fork, an assembly and separation component and a gate component. The material fork is extended and retracted along the feeding height under the action of a manipulator. The interior of the box body is hollow. The gate component is arranged on one side of the box body. The assembly and separation component is arranged at the bottom of the box body. The gate component has an inlet and outlet located at the feeding height and a gate valve for closing the inlet and outlet; The material fork is used to transport the mask plate or the assembly. The assembly is composed of the mask plate, the substrate and the carrier assembled from top to bottom. The upper surface of the carrier has a plurality of positioning convex pillars. The side of the mask plate is provided with a positioning notch that cooperates with the positioning convex pillars. In the assembly, the four corners of the mask plate are outside the upper projection range of the carrier. The assembly and separation component includes a first lifting drive mechanism, a second lifting drive mechanism, an outer bracket and an inner bracket, the first lifting drive mechanism drives the outer bracket to rise and fall, and the second lifting drive mechanism drives the inner bracket to rise and fall, the outer bracket includes a lower lifting plate, an upper lifting plate, a plurality of columns connected between the lower lifting plate and the upper lifting plate, and support blocks extending upward from the four corners of the upper lifting plate respectively, the support blocks are provided with a mask plate supporting notch and a carrier supporting notch, the height of the mask plate supporting notch is higher than the carrier supporting notch and the height difference is greater than the thickness of the material fork, the mask plate supporting notch is located at the outer side of the upper projection range of the carrier supporting notch close to the corner of the upper lifting plate, the inner bracket includes a middle lifting plate located between the lower lifting plate and the upper lifting plate and a plurality of push rods located above the middle lifting plate, the push rods pass through the upper lifting plate upward, and the moving path of the push rods is staggered with the moving path of the material fork.

2. The automatic assembly and separation device for evaporation equipment according to claim 1, characterized in that: The upper part of the box body is open, and an inspection door for sealing the open opening is rotatably provided on the upper part of the box body, and a handle is provided on the rotating free edge of the inspection door.

3. The automatic assembly and separation device for evaporation equipment according to claim 2, characterized in that: A viewing window is arranged in the middle of the inspection door.

4. The automatic assembly and separation device for evaporation equipment according to claim 2, characterized in that: One side of the inspection door in the rotation direction is connected to one side of the upper edge of the box body through a gas spring.

5. The automatic assembly and separation device for evaporation equipment according to claim 1, characterized in that: The inner bracket is also provided with a plurality of linear bearings for the columns to pass through and cooperate with.

6. The automatic assembly and separation device for evaporation equipment according to claim 1, characterized in that: The edge of the carrier is provided with a plurality of positioning holes, the upper surface of the mask plate is provided with alignment holes corresponding to the positions and sizes of the positioning holes, and the top end of the ejector rod matches the positioning holes of the carrier and the alignment holes of the mask plate.

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