Wafer-level optical element coating jig

Abstract

The utility model relates to the technical field of film coating, and discloses a wafer-level optical element film coating jig which comprises an installation shell, a connecting groove is formed in the installation shell, a connecting plate is fixedly connected in the connecting groove, two connecting grooves are formed in the connecting plate, connecting columns are slidably connected in the two connecting grooves, and the connecting columns are fixedly connected in the connecting grooves. The connecting columns are sleeved with first springs, one ends of the first springs are fixedly connected with moving plates, the bottoms of the moving plates are fixedly connected with second springs, one ends of the second springs are fixedly connected with clamping plates, a sliding groove is formed in one side of the mounting shell, and an upper mold is slidably connected into the sliding groove; according to the utility model, the connecting column is pushed by external force, so that the clamping plate can uniformly clamp the wafer-level optical element, the risks of element damage and non-uniform coating caused by stress concentration are reduced, the service life of the jig is prolonged, and the maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, and in particular to a wafer-level optical element coating fixture. Background Art

[0002] Optical coating is achieved by depositing one or more layers of thin films with specific optical properties on the surface of optical components to change the reflection, transmission and absorption characteristics of light on the surface of the component to achieve a specific optical effect. Coating technology can accurately control the propagation of light waves to meet specific functional requirements, such as enhancing the reflection protection of lenses, improving photoelectric conversion efficiency, and enhancing the durability and environmental stability of devices.

[0003] The coating jig needs to remain stable during the coating process to ensure the coating quality. The traditional clamping method is not flexible and convenient enough, and thus cannot ensure the uniform clamping of wafer-level optical components, resulting in stress concentration or movement during the coating process, thereby affecting the coating quality and component performance. It will also cause the wafer position to change during the coating process, thereby affecting the coating effect and product quality. Therefore, a wafer-level optical component coating jig is proposed to solve the above problems. Utility Model Content

[0004] In order to remedy the above deficiencies, the utility model provides a wafer-level optical element coating jig, which aims to improve the problem that optical elements are easily positioned during production, thereby affecting the coating effect and product quality.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a wafer-level optical element coating jig, including a mounting shell, a connecting groove is provided inside the mounting shell, a connecting plate is fixedly connected inside the connecting groove, two connecting grooves are provided inside the connecting plate, connecting columns are slidably connected inside the two connecting grooves, a first spring is sleeved on the outside of the connecting column, a movable plate is fixedly connected to one end of the first spring, a second spring is fixedly connected to the bottom of the movable plate, a clamping plate is fixedly connected to one end of the second spring, a sliding groove is provided on one side of the mounting shell, an upper mold is slidably connected inside the sliding groove, a pulling plate is fixedly connected to one side of the upper mold, and a disassembly component is provided inside the mounting shell.

[0006] As a further description of the above technical solution:

[0007] The disassembly assembly includes a fixed plate, the bottom of which is fixedly connected to the inside of the mounting shell, a pull rod is slidably connected to the inside of the fixed plate, one end of the pull rod is fixedly connected to a pull rope, both ends of the pull rope are sleeved with compression springs, one end of the compression spring is fixedly connected to a movable block, one side of the movable block is fixedly connected to a clamping block, a lower mold is provided inside the mounting shell, both sides of the lower mold are fixedly connected to slide plates, and two grooves are provided inside the slide plate.

[0008] As a further description of the above technical solution:

[0009] One end of the connecting column extends to the top of the connecting plate and is fixedly connected with a handle, and the outer portion of the movable plate is slidably connected to the inner portion of the connecting groove.

[0010] As a further description of the above technical solution:

[0011] The outside of the pull plate is slidably connected to the inside of the slide groove, and a handle is fixedly connected to one side of the pull plate.

[0012] As a further description of the above technical solution:

[0013] The outer portion of the slide plate is slidably connected to the inner portion of the fixed plate.

[0014] As a further description of the above technical solution:

[0015] The longitudinal section of the card block is arranged to be square, and the outside of the card block fits with the inside of the card block.

[0016] As a further description of the above technical solution:

[0017] The outer portion of the draw cord is slidably connected to the inner portion of the fixing plate.

[0018] As a further description of the above technical solution:

[0019] The bottom of the installation shell is fixedly connected with a bottom plate.

[0020] The utility model has the following beneficial effects:

[0021] 1. In the utility model, the connecting column is pushed by external force, so that the clamping plate can evenly clamp the wafer-level optical element, reducing the risk of component damage and uneven coating due to stress concentration, while reducing the wear and deformation of the fixture itself during long-term use, thereby helping to extend the service life of the fixture and reduce maintenance costs.

[0022] 2. In the utility model, the pull rod drives the pull rope to drive the card block to fall out of the groove, so that the lower mold can be removed and installed, so that the fixture can adapt to the coating requirements of optical components of different specifications and types, thereby improving the flexibility and production efficiency of the production line, so that the product can better meet the market demand. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional diagram of a wafer-level optical element coating fixture proposed by the utility model;

[0024] Figure 2 This is a schematic structural diagram of a pulling plate of a wafer-level optical element coating fixture proposed by the utility model;

[0025] Figure 3 A cross-sectional view of a connecting plate of a wafer-level optical element coating fixture proposed by the utility model;

[0026] Figure 4 The utility model discloses a cross section of a fixing plate of a wafer-level optical element coating fixture.

[0027] Legend:

[0028] 1. Mounting shell; 2. Connecting plate; 3. Fixed plate; 4. Upper mold; 5. Lower mold; 6. Pull plate; 7. Slide groove; 8. Connecting groove; 9. Slide plate; 10. Connecting column; 11. First spring; 12. Second spring; 13. Moving plate; 14. Clamping plate; 15. Connecting groove; 16. Pull rod; 17. Pull rope; 18. Compression spring; 19. Movable block; 20. Block; 21. Groove; 22. Bottom plate; 23. Handle. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Reference Figure 2 and Figure 3The utility model provides an embodiment: a wafer-level optical element coating fixture, including a mounting shell 1, a connecting groove 8 is provided inside the mounting shell 1, a connecting plate 2 is fixedly connected inside the connecting groove 8, two connecting grooves 15 are provided inside the connecting plate 2, a connecting column 10 is slidably connected inside the two connecting grooves 15, a first spring 11 is sleeved outside the connecting column 10, a moving plate 13 is fixedly connected to one end of the first spring 11, a second spring 12 is fixedly connected to the bottom of the moving plate 13, a clamping plate 14 is fixedly connected to one end of the second spring 12, a sliding groove 7 is provided on one side of the mounting shell 1, an upper mold 4 is slidably connected inside the sliding groove 7, a pulling plate 6 is fixedly connected to one side of the upper mold 4, and a disassembly component is provided inside the mounting shell 1.

[0031] Specifically, the connecting plate 2 is fixedly connected to the mounting shell 1 via the connecting groove 8, and the connecting column 10 slides inside the connecting groove 15. By pushing or pulling the handle, the first spring 11 is sleeved on the outside of the connecting column 10 to provide elastic force for the clamping mechanism. When the first spring 11 is released or compressed, it will drive the movable plate 13 to move up and down. When the movable plate 13 moves downward, the second spring 12 will release the elastic force, driving the clamping plate 14 to release the clamping of the optical element. The upper mold 4 can slide inside the slide groove 7 and fit or separate from the lower mold 5 by pushing the pull plate 6.

[0032] Reference Figure 3 The disassembly assembly includes a fixed plate 3, the bottom of the fixed plate 3 is fixedly connected to the inside of the mounting shell 1, a pull rod 16 is slidably connected to the inside of the fixed plate 3, one end of the pull rod 16 is fixedly connected to a pull rope 17, both ends of the pull rope 17 are sleeved with compression springs 18, one end of the compression spring 18 is fixedly connected to a movable block 19, one side of the movable block 19 is fixedly connected to a clamping block 20, a lower mold 5 is arranged inside the mounting shell 1, both sides of the lower mold 5 are fixedly connected to a slide plate 9, and two grooves 21 are provided inside the slide plate 9.

[0033] Specifically, one end of the pull rope 17 is fixedly connected to the pull rod 16, and the other end is connected to the movable block 19, which plays the role of transmitting the action of the pull rod 16. When the pull rod 16 is pulled, the compression spring 18 will be compressed; when the pull rod 16 is released, the compression spring 18 will release the elastic force, driving the movable block 19 to reset. Through the elastic force of the compression spring 18, the movable block 19 can drive the clamping block 20 to move. Two grooves 21 are opened inside the slide plate 9. The grooves 21 are used to cooperate with the clamping block 20 to realize the locking and release of the lower mold 5.

[0034] Reference Figure 1One end of the connecting column 10 extends to the top of the connecting plate 2 and is fixedly connected to a handle, the outside of the movable plate 13 is slidably connected to the inside of the connecting groove 15, the outside of the pull plate 6 is slidably connected to the inside of the slide groove 7, one side of the pull plate 6 is fixedly connected to a handle 23, and the bottom of the mounting shell 1 is fixedly connected to a bottom plate 22.

[0035] Specifically, the operator can grasp the handle to facilitate pulling the connecting column 10. When the connecting column 10 moves, the movable plate 13 also moves accordingly, thereby driving the clamping plate 14. By pushing or pulling the handle 23, the operator can control the movement of the pulling plate 6 in the slide groove 7. The bottom plate 22 ensures that the fixture can remain stable during operation to prevent adverse effects on the coating process due to vibration or movement.

[0036] Reference Figure 4 The outside of the slide plate 9 is slidably connected to the inside of the fixed plate 3, the longitudinal section of the block 20 is set to be square, the outside of the block 20 is fitted with the inside of the block 20, and the outside of the pull rope 17 is slidably connected to the inside of the fixed plate 3.

[0037] Specifically, the lower mold 5 can be installed and disassembled by sliding the slide plate 9 on the fixed plate 3. The clamping block 20 can be stably inserted into and pulled out of the groove 21 on the slide plate 9 during the movement, reducing sticking and shaking, ensuring that the clamping block 20 can firmly lock the slide plate 9 to prevent the slide plate 9 from moving or falling off on its own when no external force is applied. The movement of the movable block 19 and the clamping block 20 is controlled by pulling or releasing the pull rope 17, thereby achieving the locking and release of the slide plate 9 and the lower mold 5.

[0038] Working principle: First, the upper mold 4 is operated by pushing the pull plate 6 to pass through the inside of the slide groove 7 and fit with the lower mold 5. When the optical element needs to be clamped, the connecting column 10 is pushed by the handle to move inside the connecting groove 15. The movement of the connecting column 10 releases the tension of the first spring 11 and drives the moving plate 13 to move downward. The movement of the moving plate 13 drives the clamping plate 14 to clamp the optical element. When the optical element needs to be released, the compression force of the first spring 11 is pulled by pulling the connecting column 10, thereby driving the moving plate 13 to move upward. The upward movement of the moving plate 13 drives the second spring 12 to move and drives the clamping plate 14 to release the clamping of the optical element.

[0039] Secondly, when it is necessary to remove the lower mold 5, pull the pull rod 16 to drive the pull rope 17 to move, and then the pull rope 17 will drive the movable block 19 to move, and the compression spring 18 will be further compressed, and then the movable block 19 will drive the clamping block 20 to move out of the groove 21. At this time, the slide plate 9 slides out from the inside of the fixed plate 3, and then the slide plate 9 drives the lower mold 5 to be disassembled. When it is necessary to fix the lower mold 5, by pushing the pull rod 16, the pull rope 17 will drive the movable block 19 to move. Under the elastic force of the compression spring 18, the movable block 19 will drive the clamping block 20 to be inserted into the groove 21 on the slide plate 9, so that the lower mold 5 is locked in the mounting shell 1.

[0040] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer-level optical element coating fixture, comprising a mounting shell (1), characterized in that: The installation shell (1) is provided with a connecting groove (8) inside, a connecting plate (2) is fixedly connected inside the connecting groove (8), two connecting grooves (15) are provided inside the connecting plate (2), connecting columns (10) are slidably connected inside the two connecting grooves (15), a first spring (11) is sleeved on the outside of the connecting column (10), one end of the first spring (11) is fixedly connected to a moving plate (13), the bottom of the moving plate (13) is fixedly connected to a second spring (12), one end of the second spring (12) is fixedly connected to a clamping plate (14), a sliding groove (7) is provided on one side of the installation shell (1), an upper mold (4) is slidably connected inside the sliding groove (7), a pulling plate (6) is fixedly connected to one side of the upper mold (4), and a disassembly component is provided inside the installation shell (1).

2. The wafer-level optical element coating fixture according to claim 1, characterized in that: The disassembly assembly comprises a fixed plate (3), the bottom of which is fixedly connected to the inside of the mounting shell (1), a pull rod (16) is slidably connected to the inside of the fixed plate (3), one end of the pull rod (16) is fixedly connected to a pull rope (17), both ends of the pull rope (17) are sleeved with compression springs (18), one end of the compression spring (18) is fixedly connected to a movable block (19), one side of the movable block (19) is fixedly connected to a clamping block (20), a lower mold (5) is arranged inside the mounting shell (1), both sides of the lower mold (5) are fixedly connected to a slide plate (9), and two grooves (21) are provided inside the slide plate (9).

3. The wafer-level optical element coating fixture according to claim 1, characterized in that: One end of the connecting column (10) extends to the top of the connecting plate (2) and is fixedly connected to a handle, and the outside of the movable plate (13) is slidably connected to the inside of the connecting groove (15).

4. The wafer-level optical element coating fixture according to claim 1, characterized in that: The outside of the pull plate (6) is slidably connected to the inside of the slide groove (7), and a handle (23) is fixedly connected to one side of the pull plate (6).

5. The wafer-level optical element coating fixture according to claim 2, characterized in that: The outside of the slide plate (9) is slidably connected to the inside of the fixed plate (3).

6. The wafer-level optical element coating fixture according to claim 2, characterized in that: The longitudinal section of the card block (20) is arranged to be square, and the outside of the card block (20) fits with the inside of the card block (20).

7. The wafer-level optical element coating fixture according to claim 2, characterized in that: The outside of the pull rope (17) is slidably connected to the inside of the fixing plate (3).

8. The wafer-level optical element coating fixture according to claim 1, characterized in that: The bottom of the installation shell (1) is fixedly connected to a bottom plate (22).

Images