Vacuumizing device for vacuum coating equipment

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a vacuumizing device for vacuum coating equipment, which comprises a coating box body, a first vacuumizing mechanism is arranged on the coating box body, the first vacuumizing mechanism comprises an air exhaust main pipe, one end of the air exhaust main pipe is connected with the coating box body, and the other end of the air exhaust main pipe is connected with the coating box body. A vacuum pump is connected to the end, away from the coating box body, of the main air exhaust pipe, a first control valve is arranged on the main air exhaust pipe, a first air exhaust branch pipe is connected to the main air exhaust pipe, the connecting positions of the first air exhaust branch pipe and the main air exhaust pipe are located on the two sides of the first control valve, and a second control valve is arranged on the first air exhaust branch pipe; the first vacuumizing mechanism further comprises a negative pressure assembly used for accelerating exhaust of air in the coating box body, and the main air exhaust pipe and the coating box body are both connected with the negative pressure assembly. The vacuum-pumping device has the advantages that the vacuum-pumping efficiency of the interior of the coating box body is improved, so that the vacuum-pumping time of the coating box body is shortened, and the coating efficiency of the silicon wafer is improved.

Description

Technical Field

[0001] The present application relates to the field of vacuum coating technology, and in particular to a vacuum pumping device for vacuum coating equipment. Background Art

[0002] With the rapid development of the photovoltaic industry, solar cells have also been widely used. Solar cells are the main power generation body of solar cells. Their production process generally includes silicon wafer inspection, surface texturing and pickling, diffusion bonding, dephosphorized silicon glass, etching and pickling, coating, screen printing and rapid sintering, etc. In the coating step, the carrier loaded with silicon wafers is usually transported to the coating box of the vacuum coating equipment, the coating box is evacuated by a vacuum pump, and the silicon wafers are coated at a certain temperature.

[0003] The volume of the coating box currently used is usually large, so multiple vacuum pumps are generally installed, and the exhaust ends of the multiple vacuum pumps are connected to the coating box. When it is necessary to evacuate the inside of the coating box, the coating box is first closed, and then the air in the coating box is extracted by the vacuum pump, so that the pressure in the coating box drops to the target pressure, that is, the vacuum pressure required for coating. After the coating is completed, the coating box is opened again, so that the vacuum pressure of the coating box is restored to atmospheric pressure.

[0004] In the above technical scheme, when the coating work is carried out, the coating of silicon wafers is carried out in batches. After the coating of one batch of silicon wafers is completed, the next batch of silicon wafers is coated. Therefore, each time the coating is carried out, the air pressure in the coating box needs to be reduced from atmospheric pressure to the vacuum pressure required for coating. However, in the existing vacuuming process, the efficiency of directly vacuuming the coating box by a vacuum pump is not high, which results in a long time required for vacuuming, thereby reducing the coating efficiency of the silicon wafers. Utility Model Content

[0005] In order to improve the efficiency of evacuating the coating box, thereby shortening the time required for evacuating the coating box and further improving the coating efficiency of silicon wafers, the present application provides a vacuum evacuation device for vacuum coating equipment.

[0006] The present application provides a vacuum pumping device for vacuum coating equipment, which adopts the following technical solution:

[0007] A vacuum pumping device for vacuum coating equipment comprises a coating box, a first vacuum pumping mechanism is arranged on the coating box, the first vacuum pumping mechanism comprises an exhaust pipe, one end of the exhaust pipe is connected to the coating box, the end of the exhaust pipe away from the coating box is connected to a vacuum pump, a first control valve is arranged on the exhaust pipe, a first exhaust branch pipe is connected to the exhaust pipe, and the connection position of the first exhaust branch pipe and the exhaust pipe is located on both sides of the first control valve, a second control valve is arranged on the first exhaust branch pipe, the first vacuum pumping mechanism also comprises a negative pressure component for accelerating the exhaust of air in the coating box, and the exhaust pipe and the coating box are both connected to the negative pressure component.

[0008] By adopting the above technical solution, when vacuuming the coating box, the negative pressure component is used to help gradually balance the air pressure in the coating box with the air pressure inside the negative pressure component, so that the air inside the coating box is discharged, and at the same time the first control valve is closed, and the vacuum pump, the first exhaust branch pipe and part of the exhaust main pipe are used to help simultaneously suck the air inside the coating box, and gradually complete the vacuuming process inside the coating box. The cooperation of the above two operation steps helps to improve the efficiency of vacuuming the coating box, thereby shortening the time required for vacuuming the coating box, and further improving the coating efficiency of the silicon wafer.

[0009] In a specific feasible implementation scheme, the negative pressure assembly includes a negative pressure tank, a connecting main pipe and a connecting branch pipe, one end of the connecting main pipe is connected to the coating box, the negative pressure tank is connected to the other end of the connecting main pipe, a third control valve is arranged on the connecting main pipe, one end of the connecting branch pipe is connected to the negative pressure tank, the other end of the connecting branch pipe is connected to the exhaust main pipe, and the connection position of the connecting branch pipe and the exhaust main pipe is located on a section between the vacuum pump and the first control valve, and a fourth control valve is arranged on the connecting branch pipe.

[0010] By adopting the above technical scheme, before evacuating the coating box, the air in the negative pressure tank is first sucked through the connecting branch pipe using a vacuum pump. When the negative pressure inside the negative pressure tank reaches the set value, the third control valve is opened to connect the negative pressure tank with the inside of the coating box, so that the air pressure inside the coating box is gradually balanced with the air pressure inside the negative pressure tank, which helps to improve the efficiency of evacuating the coating box, helps to shorten the time required for evacuating the coating box, and improves the coating efficiency of silicon wafers.

[0011] In a specific implementation scheme, a differential pressure gauge is provided on the negative pressure tank, and the measuring pipeline of the differential pressure gauge is connected to the negative pressure tank and the coating box respectively, and the differential pressure gauge is used to measure the air pressure difference between the negative pressure tank and the coating box.

[0012] By adopting the above technical solution, the use of a differential pressure gauge helps to monitor the air pressure difference inside the negative pressure tank and the coating box in real time, thereby facilitating subsequent vacuum operations.

[0013] In a specific implementation scheme, a two-way isolation valve is provided on one side of the coating box, a negative pressure box is provided on the side of the two-way isolation valve away from the coating box, and a second vacuuming mechanism for vacuuming the interior of the negative pressure box is provided on the negative pressure box.

[0014] By adopting the above technical scheme, before evacuating the coating box, the two-way isolating valve is used to prevent the coating box and the negative pressure box from being connected to each other, and the second vacuum pumping mechanism is used to help evacuate the negative pressure box. When evacuating the coating box, the two-way isolating valve is opened to connect the coating box and the negative pressure box, so that the air pressure in the coating box is gradually balanced with the air pressure in the negative pressure box, which helps to further improve the efficiency of evacuating the coating box, further shorten the time required for evacuating the coating box, and further improve the coating efficiency of the silicon wafer.

[0015] In a specific feasible implementation scheme, the two-way isolating valve includes a valve body, and connecting openings are provided on the opposite side walls of the valve body, one of the connecting openings is used to connect the coating box with the valve body, and the other connecting opening is used to connect the negative pressure box with the valve body, and the valve body is provided with a driving cylinder, the output shaft of the driving cylinder is inserted into the interior of the valve body, and the output shaft of the driving cylinder is connected to a mounting frame, the mounting frame is provided with a valve plate for sealing the connecting opening, and a sealing ring is provided on the valve plate.

[0016] By adopting the above technical solution, the driving cylinder is used to help drive the movement of the mounting frame and the valve plate, so that the valve plate can block the connecting opening, thereby helping to prevent the coating box and the negative pressure box from being connected to each other. The sealing ring is used to improve the sealing effect between the valve plate and the inner wall of the valve body, so as to improve the sealing effect of the valve plate on the connecting opening.

[0017] In a specific implementation scheme, the main air extraction pipe is connected to a second air extraction branch pipe, one end of the second air extraction branch pipe away from the main air extraction pipe is connected to the valve body, and a fifth control valve is provided on the second air extraction branch pipe.

[0018] By adopting the above technical scheme, before evacuating the coating box, a vacuum pump, a second exhaust branch pipe and part of the exhaust main pipe are used to help suck the air inside the valve body, thereby helping to generate negative pressure inside the valve body, and further helping to ensure the discharge of air inside the coating box when the coating box and the negative pressure box are connected, helping to further improve the efficiency of evacuating the coating box, further shortening the time required for evacuating the coating box, and further improving the coating efficiency of silicon wafers.

[0019] In a specific feasible implementation scheme, a mounting groove is provided on the valve plate, a mounting plate is slidably provided in the mounting groove, a sealing groove is provided on the mounting plate, the sealing ring is provided in the sealing groove, and a movable component for moving the mounting plate in the mounting groove is provided on the mounting frame.

[0020] By adopting the above technical solution, in the process of the valve plate gradually blocking the connecting opening, the movable component is used to help the mounting plate move toward the inner wall of the valve body, so that the sealing ring gradually presses against the inner wall of the valve body, and then helps to ensure the sealing effect of the sealing ring on the gap between the valve plate and the valve body, and improves the sealing effect of the valve plate on the connecting opening. In the process of the valve plate gradually releasing the blockage of the connecting opening, the movable component is used to help the mounting plate move toward the inside of the mounting groove, so that the sealing ring gradually moves away from the inner wall of the valve body, and then helps to avoid friction between the sealing ring and the inner wall of the valve body as much as possible, and helps to prevent the sealing ring from loosening due to friction in the sealing groove, thereby ensuring the use effect of the sealing ring and extending the service life of the sealing ring.

[0021] In a specific feasible implementation scheme, the movable component includes a column, a guide plate, a connecting rod, a plug joint and a telescopic spring, the column is arranged on the inner bottom wall of the valve body, the guide plate is arranged on the column, and a guide groove is arranged on the side wall of the guide plate, and the depth of the guide groove gradually decreases in the direction away from the column, one end of the connecting rod is connected to the mounting plate and passes through the valve plate and the mounting frame, the plug joint is connected to the end of the connecting rod away from the mounting plate, and the plug joint is plugged into the guide groove, the telescopic spring is sleeved on the connecting rod, and one end of the telescopic spring is abutted against the plug joint, and the other end is abutted against the mounting frame.

[0022] By adopting the above technical solution, in the process of the valve plate gradually blocking the connecting opening, the valve plate gradually moves up under the drive of the driving cylinder and the mounting frame, so that the plug connector gradually moves up inside the guide groove, which helps to use the connecting rod to push the mounting plate toward the inner wall of the valve body, which helps to gradually make the sealing ring close to the inner wall of the valve body, which helps to ensure the sealing effect of the sealing ring on the gap between the valve plate and the valve body, and improves the sealing effect of the valve plate on the connecting opening. In the process of the valve plate gradually releasing the blockage of the connecting opening, the valve plate gradually moves down under the drive of the driving cylinder and the mounting frame, so that the plug connector gradually moves down inside the guide groove, which helps to use the connecting rod and the telescopic spring to drive the mounting plate gradually away from the inner wall of the valve body, which helps to avoid friction between the sealing ring and the inner wall of the valve body as much as possible, and helps to prevent the sealing ring from loosening due to friction in the sealing groove, thereby ensuring the use effect of the sealing ring and extending the service life of the sealing ring.

[0023] In summary, the present application includes at least one of the following beneficial technical effects:

[0024] 1. The present application provides a negative pressure component, which facilitates evacuating the coating box. At the same time, the negative pressure component balances the air pressure inside the coating box with the air pressure inside the negative pressure tank, thereby helping to speed up the discharge of air inside the coating box, thereby helping to improve the efficiency of evacuating the coating box, helping to shorten the time required for evacuating the coating box, and thereby improving the coating efficiency of the silicon wafer.

[0025] 2. In the present application, through the provision of a negative pressure box, a second vacuum pumping mechanism and a two-way isolating valve, the second vacuum pumping mechanism helps to perform vacuum treatment on the negative pressure box, the two-way isolating valve helps to control the connection state between the coating box and the negative pressure box, and the negative pressure box helps to gradually balance the air pressure inside the coating box with the air pressure inside the negative pressure box when connected with the coating box, thereby helping to further improve the efficiency of vacuuming the coating box, further shortening the time required for vacuuming the coating box, and further improving the coating efficiency of silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of Example 1 of the present application.

[0027] Figure 2 It is a partial structural diagram reflecting the specific structure of the negative pressure component in Example 1.

[0028] Figure 3 It is a cross-sectional view showing the specific internal structure of the two-way isolating valve in Example 1.

[0029] Figure 4 It is a cross-sectional view showing the specific internal structure of the two-way isolating valve in Example 2 of the present application.

[0030] Figure 5 It is a cross-sectional view showing the specific structure of the active component in Example 2 of the present application.

[0031] Figure 6 yes Figure 5 Enlarged view of point A in the middle.

[0032] Explanation of the reference numerals: 1. coating box; 2. first vacuum pumping mechanism; 3. exhaust main pipe; 4. vacuum pump; 5. first control valve; 6. first exhaust branch pipe; 7. second control valve; 8. negative pressure assembly; 81. negative pressure tank; 82. connecting main pipe; 83. connecting branch pipe; 9. third control valve; 10. fourth control valve; 11. differential pressure gauge; 12. two-way isolation valve; 121. valve body; 1211. connecting opening; 122. driving cylinder; 123. mounting frame; 124. valve plate; 125. sealing ring; 13. negative pressure box; 14. second vacuum pumping mechanism; 15. second exhaust branch pipe; 16. fifth control valve; 17. mounting groove; 18. mounting plate; 19. sealing groove; 20. movable assembly; 201. column; 202. guide plate; 203. connecting rod; 204. plug connector; 205. telescopic spring; 21. guide groove. DETAILED DESCRIPTION

[0033] The present application is further described in detail below in conjunction with the accompanying drawings.

[0034] Embodiment 1:

[0035] The present application discloses a vacuum pumping device for vacuum coating equipment. Figure 1 and Figure 2 , including a coating box 1 and two groups of first vacuum pumping mechanisms 2, each group of first vacuum pumping mechanisms 2 includes an exhaust main pipe 3, one end of the exhaust main pipe 3 is fixedly connected to the coating box 1, a vacuum pump 4 is fixedly installed on the other end of the exhaust main pipe 3, and a first control valve 5 is fixedly installed on the exhaust main pipe 3. A first exhaust branch pipe 6 is fixedly connected to the exhaust main pipe 3, and two connecting positions of the first exhaust branch pipe 6 and the exhaust main pipe 3 are respectively located on both sides of the first control valve 5, and a second control valve 7 is fixedly installed on the first exhaust branch pipe 6.

[0036] Reference Figure 1 and Figure 2The first vacuum pumping mechanism 2 further includes a negative pressure assembly 8, which includes a negative pressure tank 81, a connecting main pipe 82 and a connecting branch pipe 83. One end of the connecting main pipe 82 is fixedly connected to the coating box 1, and a third control valve 9 is fixedly installed on the connecting main pipe 82. The negative pressure tank 81 is fixedly connected to the other end of the connecting main pipe 82. One end of the connecting branch pipe 83 is fixedly connected to the negative pressure tank 81, and the other end is fixedly connected to the exhaust main pipe 3. The connecting position of the connecting branch pipe 83 and the exhaust main pipe 3 is located on a section of the exhaust main pipe 3 between the vacuum pump 4 and the first control valve 5. A fourth control valve 10 is fixedly installed on the connecting branch pipe 83.

[0037] Reference Figure 1 and Figure 2 Before vacuuming the coating box 1, only the fourth control valve 10 is opened, and the vacuum pump 4 is started, so that the vacuum pump 4 sucks the air in the negative pressure tank 81 through the connecting branch pipe 83, thereby generating negative pressure in the negative pressure tank 81. When the negative pressure inside the negative pressure tank 81 reaches the set value, the second control valve 7 is opened, so that the vacuum pump 4 sucks the air in the coating box 1 through the first exhaust branch pipe 6, and the third control valve 9 is opened at the same time, so that the negative pressure tank 81 is connected with the inside of the coating box 1, so that the air pressure in the coating box 1 and the air pressure in the negative pressure tank 81 are gradually balanced, that is, the air in the coating box 1 flows into the negative pressure tank 81. Sucking the air inside the coating box 1 through two paths at the same time helps to improve the efficiency of vacuuming the coating box 1, shortens the time required for vacuuming the coating box 1, and improves the coating efficiency of the silicon wafer.

[0038] Reference Figure 1 A two-way shut-off valve 12 is installed on one side of the coating box 1, and a negative pressure box 13 is installed on the side of the two-way shut-off valve 12 away from the coating box 1. A second vacuum pumping mechanism 14 is arranged on the negative pressure box 13, and the second vacuum pumping mechanism 14 has the same structure as the first vacuum pumping mechanism 2.

[0039] Reference Figure 1 and Figure 3The two-way isolation valve 12 includes a valve body 121, and communication openings 1211 are provided on opposite side walls of the valve body 121, wherein one of the communication openings 1211 allows the coating box 1 to communicate with the valve body 121, and the other communication opening 1211 allows the negative pressure box 13 to communicate with the valve body 121. A driving cylinder 122 is fixedly installed at the bottom of the valve body 121, and the output shaft of the driving cylinder 122 is inserted upward into the valve body 121, and a mounting frame 123 is fixedly connected to the output shaft of the driving cylinder 122, and two valve plates 124 are fixedly installed on the mounting frame 123, and a sealing ring 125 is fixedly installed on each valve plate 124. A second exhaust branch pipe 15 is fixedly connected to the exhaust main pipe 3, and a fifth control valve 16 is fixedly installed on the second exhaust branch pipe 15, and the end of the second exhaust branch pipe 15 away from the exhaust main pipe 3 is fixedly connected to the inside of the valve body 121.

[0040] Reference Figure 1 and Figure 3 Before vacuuming the coating box 1, the two-way isolation valve 12 is in a closed state, and the second vacuuming mechanism 14 is used to vacuum the negative pressure box 13, so that negative pressure is generated in the negative pressure box 13. At the same time, the fifth control valve 16 is opened, so that the vacuum pump 4 sucks the air in the valve body 121 through the second air extraction branch pipe 15, so that negative pressure is generated inside the valve body 121. When the coating box 1 is evacuated, the output shaft of the driving cylinder 122 contracts, driving the mounting frame 123 and the valve plate 124 to move downward, so that the valve plate 124 no longer blocks the connecting opening 1211, so that the coating box 1 and the negative pressure box 13 are connected to each other, so that the air pressure in the coating box 1 is gradually balanced with the air pressure inside the negative pressure box 13, that is, the air in the coating box 1 flows into the negative pressure box 13, which helps to further improve the efficiency of evacuating the coating box 1, further shorten the time required for evacuating the coating box 1, and further improve the coating efficiency of the silicon wafers.

[0041] Reference Figure 2 A differential pressure gauge 11 is fixedly installed on the negative pressure tank 81. Two measuring pipelines of the differential pressure gauge 11 are fixedly connected to the negative pressure tank 81 and the coating box 1 respectively (not shown in the figure). The differential pressure gauge 11 helps to monitor the air pressure difference between the inside of the negative pressure tank 81 and the inside of the coating box 1 in real time.

[0042] Reference Figure 1 and Figure 2 When the negative pressure inside the negative pressure tank 81 and the coating box 1 is balanced, open the first control valve 5, and at the same time close the other control valves and the two-way isolation valve 12, so that the vacuum pump 4 only evacuates the inside of the coating box 1 through the exhaust pipe 3, thereby completing the vacuuming of the inside of the coating box 1.

[0043] The implementation principle of the embodiment of the present application is as follows: before vacuuming the coating box 1, only the fourth control valve 10 is opened, and the vacuum pump 4 is started, so that the vacuum pump 4 sucks the air in the negative pressure tank 81 through the connecting branch pipe 83, thereby generating negative pressure in the negative pressure tank 81. At the same time, the two-way isolation valve 12 is in a closed state, and the second vacuum pumping mechanism 14 is used to vacuum the negative pressure box 13, thereby generating negative pressure in the negative pressure box 13. The fifth control valve 16 is opened, so that the vacuum pump 4 sucks the air in the valve body 121 through the second exhaust branch pipe 15, so that negative pressure is generated inside the valve body 121.

[0044] When the negative pressure inside the negative pressure tank 81 reaches the set value, the second control valve 7 is opened, so that the vacuum pump 4 sucks the air inside the coating box 1 through the first exhaust branch pipe 6, and the third control valve 9 is opened at the same time, so that the negative pressure tank 81 is connected with the inside of the coating box 1, so that the air pressure inside the coating box 1 is gradually balanced with the air pressure inside the negative pressure tank 81, that is, the air inside the coating box 1 flows into the negative pressure tank 81. At the same time, the output shaft of the driving cylinder 122 contracts, driving the mounting frame 123 and the valve plate 124 to move downward, so that the valve plate 124 no longer blocks the communication opening 1211, so that the coating box 1 and the negative pressure box 13 are connected to each other, so that the air pressure inside the coating box 1 is gradually balanced with the air pressure inside the negative pressure box 13, that is, the air inside the coating box 1 flows into the negative pressure box 13. The air inside the coating box 1 is sucked simultaneously through three paths, which helps to improve the efficiency of vacuuming the coating box 1, shortens the time required for vacuuming the coating box 1, and improves the coating efficiency of the silicon wafer.

[0045] When the negative pressure inside the negative pressure tank 81 and the coating box 1 is balanced, open the first control valve 5, and at the same time close the other control valves and the two-way isolation valve 12, so that the vacuum pump 4 only evacuates the inside of the coating box 1 through the exhaust pipe 3, thereby completing the vacuuming of the inside of the coating box 1.

[0046] Embodiment 2:

[0047] Reference Figure 4 and Figure 5 The difference between the embodiment of the present application and embodiment 1 is that a mounting groove 17 is provided on the valve plate 124, a mounting plate 18 is slidably placed inside the mounting groove 17, a sealing groove 19 is provided on the outer wall of the mounting plate 18, and a sealing ring 125 is fixedly installed in the sealing groove 19.

[0048] Reference Figure 5 and Figure 6, a movable assembly 20 is arranged on the mounting frame 123, and the movable assembly 20 includes a column 201, a guide plate 202, a connecting rod 203, a plug connector 204 and a telescopic spring 205. The column 201 is fixedly mounted on the inner bottom wall of the valve body 121, and the guide plate 202 is fixedly mounted on the top of the column 201. A guide groove 21 is provided on both side walls of the guide plate 202, and the depth of the guide groove 21 gradually decreases from bottom to top. The connecting rod 203 is arranged horizontally, one end of the connecting rod 203 is connected to the mounting plate 18 and passes through the valve plate 124 and the mounting frame 123, the plug connector 204 is fixedly mounted on the end of the connecting rod 203 away from the mounting plate 18 and plugged into the guide groove 21, and the telescopic spring 205 is sleeved on the connecting rod 203, and one end of the telescopic spring 205 abuts against the plug connector 204, and the other end abuts against the mounting frame 123.

[0049] Reference Figure 5 and Figure 6 Before evacuating the coating box 1, the plug connector 204 is plugged into the top of the guide groove 21, and the telescopic spring 205 is in a contracted state. As a result, under the abutment of the guide plate 202, the connecting rod 203 and the mounting plate 18 drive the sealing ring 125 to press against the inner wall of the valve body 121, which helps to ensure the sealing effect of the sealing ring 125 on the gap between the valve plate 124 and the valve body 121, and enhances the sealing effect of the valve plate 124 on the connecting opening 1211. When the coating box 1 is evacuated, the output shaft of the driving cylinder 122 contracts, driving the mounting frame 123 and the valve plate 124 to move downward, so that the plug connector 204 gradually abuts against the bottom of the guide groove 21 along the guide groove 21. At the same time, the telescopic spring 205 gradually extends, and then drives the sealing ring 125 to gradually move away from the inner wall of the valve body 121 through the connecting rod 203 and the mounting plate 18, which helps to avoid friction between the sealing ring 125 and the inner wall of the valve body 121 as much as possible, and helps to prevent the sealing ring 125 from loosening due to friction in the sealing groove 19, thereby ensuring the use effect of the sealing ring 125 and extending the service life of the sealing ring 125.

[0050] The implementation principle of the embodiment of the present application is as follows: when the coating box 1 is vacuumed, the output shaft of the driving cylinder 122 contracts, driving the mounting frame 123 and the valve plate 124 to move downward, so that the plug joint 204 gradually abuts against the bottom of the guide groove 21 along the guide groove 21, and at the same time the telescopic spring 205 gradually extends, and then drives the sealing ring 125 to gradually move away from the inner wall of the valve body 121 through the connecting rod 203 and the mounting plate 18, which helps to avoid friction between the sealing ring 125 and the inner wall of the valve body 121 as much as possible, and helps to prevent the sealing ring 125 from loosening due to friction in the sealing groove 19, thereby ensuring the use effect of the sealing ring 125 and extending the service life of the sealing ring 125.

[0051] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum pumping device for vacuum coating equipment, characterized in that: The invention comprises a coating box (1), wherein a first vacuum pumping mechanism (2) is arranged on the coating box (1), wherein the first vacuum pumping mechanism (2) comprises an exhaust pipe (3), wherein one end of the exhaust pipe (3) is connected to the coating box (1), wherein one end of the exhaust pipe (3) away from the coating box (1) is connected to a vacuum pump (4), wherein a first control valve (5) is arranged on the exhaust pipe (3), wherein a first exhaust branch pipe (6) is connected to the exhaust pipe (3), and the connection position between the first exhaust branch pipe (6) and the exhaust pipe (3) is located on both sides of the first control valve (5), wherein a second control valve (7) is arranged on the first exhaust branch pipe (6), and wherein the first vacuum pumping mechanism (2) further comprises a negative pressure component (8) for accelerating the exhaust of air in the coating box (1), wherein the exhaust pipe (3) and the coating box (1) are both connected to the negative pressure component (8).

2. The vacuum pumping device for vacuum coating equipment according to claim 1, characterized in that: The negative pressure assembly (8) comprises a negative pressure tank (81), a connecting main pipe (82) and a connecting branch pipe (83); one end of the connecting main pipe (82) is connected to the coating box (1); the negative pressure tank (81) is connected to the other end of the connecting main pipe (82); a third control valve (9) is arranged on the connecting main pipe (82); one end of the connecting branch pipe (83) is connected to the negative pressure tank (81); the other end of the connecting branch pipe (83) is connected to the exhaust main pipe (3); and the connection position of the connecting branch pipe (83) and the exhaust main pipe (3) is located on a section between the vacuum pump (4) and the first control valve (5); and a fourth control valve (10) is arranged on the connecting branch pipe (83).

3. The vacuum pumping device for vacuum coating equipment according to claim 2, characterized in that: The negative pressure tank (81) is provided with a differential pressure gauge (11), the measuring pipeline of the differential pressure gauge (11) is respectively connected to the negative pressure tank (81) and the coating box (1), and the differential pressure gauge (11) is used to measure the air pressure difference between the negative pressure tank (81) and the coating box (1).

4. The vacuum pumping device for vacuum coating equipment according to claim 1, characterized in that: A two-way isolating valve (12) is provided on one side of the coating box (1), a negative pressure box (13) is provided on the side of the two-way isolating valve (12) facing away from the coating box (1), and a second vacuuming mechanism (14) for vacuuming the interior of the negative pressure box (13) is provided on the negative pressure box (13).

5. The vacuum pumping device for vacuum coating equipment according to claim 4, characterized in that: The two-way isolating valve (12) comprises a valve body (121), and connecting openings (1211) are arranged on opposite side walls of the valve body (121), one of the connecting openings (1211) is used to connect the coating box (1) with the valve body (121), and the other connecting opening (1211) is used to connect the negative pressure box (13) with the valve body (121), and the valve body (121) is provided with a driving cylinder (122), the output shaft of the driving cylinder (122) is inserted into the interior of the valve body (121), and the output shaft of the driving cylinder (122) is connected to a mounting frame (123), and the mounting frame (123) is provided with a valve plate (124) for sealing the connecting opening (1211), and the valve plate (124) is provided with a sealing ring (125).

6. The vacuum pumping device for vacuum coating equipment according to claim 5, characterized in that: The main air extraction pipe (3) is connected to a second air extraction branch pipe (15), one end of the second air extraction branch pipe (15) away from the main air extraction pipe (3) is connected to a valve body (121), and a fifth control valve (16) is provided on the second air extraction branch pipe (15).

7. The vacuum pumping device for vacuum coating equipment according to claim 5, characterized in that: The valve plate (124) is provided with a mounting groove (17), a mounting plate (18) is slidably arranged in the mounting groove (17), a sealing groove (19) is provided on the mounting plate (18), the sealing ring (125) is arranged in the sealing groove (19), and a movable component (20) for moving the mounting plate (18) in the mounting groove (17) is provided on the mounting frame (123).

8. The vacuum pumping device for vacuum coating equipment according to claim 7, characterized in that: The movable component (20) comprises a column (201), a guide plate (202), a connecting rod (203), a plug connector (204) and a telescopic spring (205); the column (201) is arranged on the inner bottom wall of the valve body (121); the guide plate (202) is arranged on the column (201); a guide groove (21) is arranged on the side wall of the guide plate (202); the depth of the guide groove (21) gradually decreases in a direction away from the column (201); One end of the connecting rod (203) is connected to the mounting plate (18) and passes through the valve plate (124) and the mounting frame (123); the plug connector (204) is connected to the end of the connecting rod (203) away from the mounting plate (18), and the plug connector (204) is plugged into the guide groove (21); the telescopic spring (205) is sleeved on the connecting rod (203), and one end of the telescopic spring (205) is in contact with the plug connector (204), and the other end is in contact with the mounting frame (123).

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