Vacuum system for film coating

Abstract

The utility model discloses a vacuum system for coating, and belongs to the technical field of crystal hot-fix rhinestone coating. A vacuum system for film coating comprises an air exhaust assembly, a transfer chamber and a plurality of vacuum chambers. The air exhaust assembly is communicated with the transfer chamber so as to continuously exhaust air, and the interior of the transfer chamber is kept in a high-vacuum state; the plurality of vacuum chambers are mutually independent, and the transfer chamber is communicated with the vacuum chambers through control valves; the number of the vacuum chambers is two, and the vacuum chambers comprise the first vacuum chamber and the second vacuum chamber. The first vacuum chamber is connected with the transfer chamber through a first high valve; the second vacuum chamber is connected with the transfer chamber through a second high valve; when the vacuum chamber is opened, the control valve corresponding to the vacuum chamber is closed; the vacuumizing time of the vacuum chambers can be shortened, the speed of achieving the high vacuum state in the vacuum chambers is higher, all the vacuum chambers are independent of one another, vacuumizing or loading and unloading operation can be conducted respectively, and the production efficiency can be improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal hot diamond coating, and more specifically relates to a vacuum system for coating. Background Art

[0002] One of the steps in the process of hot-drilling processing of crystal is coating. The aluminum plate with hot-drilling needs to be placed in a vacuum coating machine for coating. In the existing technology, it is necessary to evacuate the vacuum chamber step by step through low vacuum, medium vacuum and high vacuum to create a vacuum environment. After coating is completed in the vacuum chamber, the vacuum system needs to be turned off to load and unload materials in the vacuum chamber. However, this vacuum system needs to re-evacuate the vacuum chamber after each loading and unloading. The re-evacuation process takes a lot of time, which seriously affects production efficiency. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a vacuum system for coating, which can reduce the vacuum pumping time of the vacuum chamber and make the vacuum chamber reach a high vacuum state faster. Each vacuum chamber is independent of each other and can perform vacuum pumping or loading and unloading operations separately, thereby improving production efficiency and reducing production costs.

[0004] The utility model discloses a vacuum system for coating, which comprises a vacuum pumping assembly, a transfer chamber and a plurality of vacuum chambers. The vacuum pumping assembly is connected to the transfer chamber to continuously pump air, and a high vacuum state is maintained in the transfer chamber. The plurality of vacuum chambers are independent of each other, and each vacuum chamber is connected to an independent low vacuum system, and the transfer chamber is connected to the vacuum chamber through a control valve.

[0005] As a further improvement of the utility model, the number of vacuum chambers is two, and the vacuum chambers include a first vacuum chamber and a second vacuum chamber. The first vacuum chamber is connected to the transfer chamber via a first high valve. The second vacuum chamber is connected to the transfer chamber via a second high valve. When the vacuum chamber is opened, the corresponding control valve is closed.

[0006] As a further improvement of the present invention, when any one of the first vacuum chamber and the second vacuum chamber is opened, the control valve corresponding to the other vacuum chamber remains in an open state.

[0007] As a further improvement of the utility model, when the vacuum chamber is closed again, the corresponding control valve is opened so that the closed vacuum chamber maintains a high vacuum state.

[0008] As a further improvement of the utility model, the air extraction assembly includes a mechanical pump and a diffusion pump. The mechanical pump is arranged in front of the diffusion pump, and the mechanical pump and the diffusion pump are connected through a pipeline. The diffusion pump and the transfer chamber are connected through a main valve.

[0009] As a further improvement of the present invention, the transfer chamber is further connected to a plurality of regulating tubes.

[0010] As a further improvement of the utility model, the vacuum assembly includes a low vacuum system 1 and a low vacuum system 2. The low vacuum system 1 is connected to the first vacuum chamber, and the low vacuum system 2 is connected to the second vacuum chamber.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] By setting up a vacuum pumping component, a transfer chamber and several vacuum chambers, the vacuum pumping component is connected to the transfer chamber to continuously pump air and maintain a high vacuum state in the transfer chamber, which can reduce the vacuum pumping time of the vacuum chamber and make the vacuum chamber reach a high vacuum state faster. Each vacuum chamber is independent of each other and can perform vacuum pumping or loading and unloading operations separately, which can improve production efficiency and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall principle of the utility model;

[0014] Figure 2 It is a schematic diagram of the overall structure of the utility model.

[0015] Description of the numbers in the figure:

[0016] Mechanical pump 1, diffusion pump 2, gauge 3, main valve 4, transfer chamber 5, first high valve 6, first vacuum chamber 7, second high valve 8, second vacuum chamber 9, low vacuum system 1 10, low vacuum system 2 11. DETAILED DESCRIPTION

[0017] Specific embodiment 1: Please refer to Figure 1-Figure 2 A vacuum system for coating includes an exhaust component, a transfer chamber 5 and a plurality of vacuum chambers. The exhaust component is connected to the transfer chamber 5 to continuously exhaust air, and a high vacuum state is maintained in the transfer chamber 5. The transfer chamber 5 is also connected to a plurality of gauges 3, and the gauges 3 are used to detect the vacuum degree of the transfer chamber 5. The plurality of vacuum chambers are independent of each other, and each vacuum chamber is connected to an independent low vacuum system, and the transfer chamber 5 is connected to the vacuum chamber through a control valve. Among them, the exhaust component includes a high vacuum system and a low vacuum system, and the high vacuum system connected to the transfer chamber 5, and the high vacuum system operates continuously to keep the hollow chamber in a high vacuum state.

[0018] In this embodiment, there are two vacuum chambers, including a first vacuum chamber 7 and a second vacuum chamber 9. It should be noted that the number of vacuum chambers here is at least two. The first vacuum chamber 7 is connected to the transfer chamber 5 through a first high valve 6. The second vacuum chamber 9 is connected to the transfer chamber 5 through a second high valve 8. When the vacuum chamber is opened, the corresponding control valve is closed.

[0019] The low vacuum system includes a low vacuum system 10 and a low vacuum system 2 11. The low vacuum system 10 is connected to the first vacuum chamber 7, and the low vacuum system 2 11 is connected to the second vacuum chamber 9. The low vacuum system 10 and the low vacuum system 2 11 are independent of each other and are independent of the high vacuum system.

[0020] When any one of the first vacuum chamber 7 and the second vacuum chamber 9 is opened, the control valve corresponding to the other vacuum chamber remains open. When the vacuum chamber is closed again, the corresponding control valve is opened. The closed vacuum chamber maintains a high vacuum state.

[0021] The air extraction assembly includes a mechanical pump 1 and a diffusion pump 2. The mechanical pump 1 is arranged in front of the diffusion pump 2, and the mechanical pump 1 and the diffusion pump 2 are connected by a pipeline. The diffusion pump 2 is connected to the transfer chamber 5 through a main valve 4. It should be noted that the mechanical pump 1 and the diffusion pump 2 are both existing conventional devices, and their specific connection structures and working principles are not repeated here.

[0022] Working principle:

[0023] First, the transfer chamber 5 is evacuated from a low vacuum state to a high vacuum state through the mechanical pump 1 and the diffusion pump 2 of the vacuum assembly, and the high vacuum state is maintained. The gauge 3 is used to measure the vacuum degree; then the first vacuum chamber 7 and the second vacuum chamber 9 are evacuated to a high vacuum state, and the hot diamond coating process is carried out in the two vacuum chambers at the same time. After the processing is completed, the first high valve 6 is first closed, and the first vacuum chamber 7 is opened for loading and unloading. After the loading and unloading is completed, the first vacuum chamber 7 is closed, and the low vacuum system 10 is started, and the low vacuum state is returned to the low vacuum state, and the first high valve 6 is opened to make the first vacuum chamber 7 return to the high vacuum state; at the same time, while waiting for the first vacuum chamber 7 to be evacuated, the first high valve 6 is closed. The second high valve 8 opens the second vacuum chamber 9 for loading and unloading. After the loading and unloading is completed, the second vacuum chamber 9 is closed, and the low vacuum system 11 is started, and the second high valve 8 is opened, so that the second vacuum chamber 9 returns to the high vacuum state. At the same time, the first vacuum chamber 7 has returned to the high vacuum state to complete the coating process; the exhaust component is connected to the transfer chamber 5 to continuously exhaust air, and the transfer chamber 5 maintains a high vacuum state, which can reduce the vacuum chamber exhaust time and make the vacuum chamber reach a high vacuum state faster. Each vacuum chamber is independent of each other and can perform vacuum exhaust or loading and unloading operations separately, which can improve production efficiency and reduce production costs.

Claims

1. A vacuum system for coating, characterized in that: The invention comprises an exhaust component, a transfer chamber (5) and a plurality of vacuum chambers; the exhaust component is connected to the transfer chamber (5) to continuously exhaust gas, and a high vacuum state is maintained in the transfer chamber (5); the plurality of vacuum chambers are independent of each other, each vacuum chamber is connected to an independent low vacuum system, and the transfer chamber (5) is connected to the vacuum chamber via a control valve.

2. A vacuum system for coating according to claim 1, characterized in that: There are two vacuum chambers, which include a first vacuum chamber (7) and a second vacuum chamber (9); the first vacuum chamber (7) is connected to the transfer chamber (5) via a first high valve (6); the second vacuum chamber (9) is connected to the transfer chamber (5) via a second high valve (8); when the vacuum chamber is opened, the corresponding control valve is closed.

3. A vacuum system for coating according to claim 2, characterized in that: When any one of the first vacuum chamber (7) and the second vacuum chamber (9) is opened, the control valve corresponding to the other vacuum chamber remains in an open state.

4. A vacuum system for coating according to claim 3, characterized in that: When the vacuum chamber is closed again, the corresponding control valve is opened; the closed vacuum chamber maintains a high vacuum state.

5. The vacuum system for coating according to claim 1, characterized in that: The air extraction component comprises a mechanical pump (1) and a diffusion pump (2); the mechanical pump (1) is arranged in front of the diffusion pump (2), and the mechanical pump (1) and the diffusion pump (2) are connected via a pipeline; the diffusion pump (2) and the transfer chamber (5) are connected via a main valve (4).

6. A vacuum system for coating according to claim 1, characterized in that: The transfer chamber (5) is also connected to a plurality of regulating tubes (3).

7. A vacuum system for coating according to claim 3, characterized in that: The vacuum pumping assembly comprises a low vacuum system 1 (10) and a low vacuum system 2 (11); the low vacuum system 1 (10) is connected to the first vacuum chamber (7); and the low vacuum system 2 (11) is connected to the second vacuum chamber (9).

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