Heater for single crystal furnace and single crystal furnace

Abstract

The utility model discloses a heater for a single crystal furnace and the single crystal furnace, and belongs to the technical field of single crystal manufacturing. The heater for the single crystal furnace comprises a heating ring, the heating ring comprises a first heating part and a second heating part, the first heating part and the second heating part are oppositely arranged at an interval, and the first heating part and the second heating part enclose to form the heating ring of an annular structure; the supporting foot plates comprise a first group of supporting foot plates and a second group of supporting foot plates, the first group of supporting foot plates are detachably connected to the first heating part, and the second group of supporting foot plates are detachably connected to the second heating part; in the height direction of the heating ring, the first group of supporting foot plates and the second group of supporting foot plates are connected to the same side of the heating ring.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal manufacturing, and in particular to a heater for a single crystal furnace and a single crystal furnace. Background Art

[0002] The heater is one of the core components of the single crystal furnace. As a direct heating element, it can provide a heat field for the single crystal furnace. As the single crystal furnace body continues to increase, the size of the heater is also increasing.

[0003] The heater in the related art includes a heating coil and two supporting foot plates connected to the heating coil, and the two supporting foot plates are detachably connected to the heating coil by bolts.

[0004] However, as the size of the heater increases, the stress at the connection between the heating coil and the supporting foot plate becomes greater, and cracks are easily formed at the connection between the heating coil and the supporting foot plate, causing the heater to fail. Utility Model Content

[0005] The present application discloses a heater for a single crystal furnace and a single crystal furnace, so as to solve or at least partially solve the problems existing in the prior art, that is, the stress at the connection between the heating coil and the supporting foot plate is relatively large, and cracks are easily formed at the connection between the heating coil and the supporting foot plate, resulting in failure of the heater.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] In the first aspect, the present application discloses a heater for a single crystal furnace, which comprises a heating ring, wherein the heating ring comprises a first heating part and a second heating part, the first heating part and the second heating part are arranged relatively spaced apart, and the first heating part and the second heating part enclose the heating ring to form a ring-shaped structure; supporting feet, wherein the supporting feet comprise a first group of supporting feet and a second group of supporting feet, the first group of supporting feet are detachably connected to the first heating part, and the second group of supporting feet are detachably connected to the second heating part; along the height direction of the heating ring, the first group of supporting feet and the second group of supporting feet are connected to the same side of the heating ring.

[0008] Optionally, along the height direction of the heating coil, the height of the first group of supporting feet is equal to the height of the second group of supporting feet.

[0009] Optionally, the first heating portion and the second heating portion are both in a semi-circular ring structure, and the first heating portion and the second heating portion enclose the heating ring to form a circular ring structure.

[0010] Optionally, the first group of supporting foot plates includes a first supporting foot plate and a second supporting foot plate, wherein, along the circumferential direction of the heating coil, the first heating part has a first end and a second end, the first supporting foot plate is detachably connected to a position of the first heating part close to the first end, and the second supporting foot plate is detachably connected to a position of the first heating part close to the second end; along the height direction of the heating coil, the first supporting foot plate and the second supporting foot plate are connected to the same side of the first heating part.

[0011] Optionally, the single crystal furnace heater also includes a first connecting member and a second connecting member, wherein a first through hole is provided at a position close to the first end of the first heating part, a second through hole is provided on the first supporting foot plate, and the first connecting member is inserted into the first through hole and the second through hole; a third through hole is provided at a position close to the second end of the first heating part, a fourth through hole is provided on the second supporting foot plate, and the second connecting member is inserted into the third through hole and the fourth through hole.

[0012] Optionally, the first through hole and the second through hole each include a plurality, and each of the first through hole is correspondingly arranged to the second through hole; the first connecting member also includes a plurality, and each of the first connecting member is correspondingly arranged to the first through hole and the second through hole; and / or, the third through hole and the fourth through hole each include a plurality, and each of the third through hole is correspondingly arranged to the fourth through hole; the second connecting member also includes a plurality, and each of the second connecting member is correspondingly arranged to the third through hole and the fourth through hole.

[0013] Optionally, the second group of supporting foot plates includes a third supporting foot plate and a fourth supporting foot plate, wherein, along the circumferential direction of the heating coil, the second heating portion has a third end and a fourth end, the third supporting foot plate is detachably connected to a position of the second heating portion close to the third end, and the fourth supporting foot plate is detachably connected to a position of the second heating portion close to the fourth end; along the height direction of the heating coil, the third supporting foot plate and the fourth supporting foot plate are connected to the same side of the second heating portion.

[0014] Optionally, the single crystal furnace heater also includes a third connecting member and a fourth connecting member, wherein a fifth through hole is provided at a position near the third end of the second heating part, a sixth through hole is provided on the third supporting foot plate, and the third connecting member is inserted into the fifth through hole and the sixth through hole; a seventh through hole is provided at a position near the fourth end of the second heating part, an eighth through hole is provided on the fourth supporting foot plate, and the fourth connecting member is inserted into the seventh through hole and the eighth through hole.

[0015] Optionally, the fifth through hole and the sixth through hole each include a plurality, and each of the fifth through holes is correspondingly arranged to the sixth through hole; the third connecting member also includes a plurality, and each of the third connecting member is correspondingly arranged to the fifth through hole and the sixth through hole; and / or, the seventh through hole and the eighth through hole each include a plurality, and each of the seventh through hole is correspondingly arranged to the eighth through hole; the fourth connecting member also includes a plurality, and each of the fourth connecting member is correspondingly arranged to the seventh through hole and the eighth through hole.

[0016] In a second aspect, the present application further discloses a single crystal furnace, which comprises a single crystal furnace body and the single crystal furnace heater described in the first aspect, wherein the single crystal furnace heater is arranged in the single crystal furnace body.

[0017] Optionally, the single crystal furnace body has a accommodating cavity, and the single crystal furnace heater is arranged in the accommodating cavity; the bottom wall of the accommodating cavity is provided with two groups of electrodes, the first group of supporting foot plates are detachably connected to one group of the electrodes, and the second group of supporting foot plates are detachably connected to the other group of the electrodes.

[0018] The present application discloses a heater for a single crystal furnace and a single crystal furnace, the heater for a single crystal furnace comprises a heating ring, the heating ring comprises a first heating part and a second heating part, the first heating part and the second heating part are arranged relatively spaced apart, the first heating part and the second heating part enclose the heating ring to form a ring-shaped structure; supporting feet, the supporting feet comprise a first group of supporting feet and a second group of supporting feet, the first group of supporting feet are detachably connected to the first heating part, and the second group of supporting feet are detachably connected to the second heating part; along the height direction of the heating ring, the first group of supporting feet and the second group of supporting feet are connected to the same side of the heating ring.

[0019] The single crystal furnace heater disclosed in the present application includes a heating ring and a supporting foot plate, wherein the heating ring includes a first heating part and a second heating part, the first heating part and the second heating part are arranged at a relative interval, and the first heating part and the second heating part enclose a heating ring of an annular structure. The supporting foot plate includes a first group of supporting foot plates and a second group of supporting foot plates, the first group of supporting foot plates are detachably connected to the first heating part to support the first heating part through the first group of supporting foot plates, and the second group of supporting foot plates are detachably connected to the second heating part to support the second heating part through the second group of supporting foot plates. Through the above arrangement, the stress at the connection between the first heating part and the first group of supporting foot plates, and the stress at the connection between the second heating part and the second group of supporting foot plates can be reduced, and cracks at the connection between the first heating part and the first group of supporting foot plates and the connection between the second heating part and the second group of supporting foot plates can be avoided, thereby improving the reliability of the single crystal furnace heater.

[0020] Furthermore, in the present application, along the height direction of the heating ring, the first group of supporting legs and the second group of supporting legs are connected to the same side of the heating ring to facilitate the installation of the heater for the single crystal furnace and reduce the space occupied by the heater.

[0021] In addition, the first heating unit and the second heating unit in the present application can operate independently to provide a heat field for the single crystal furnace. When one of the heating units has a problem and cannot operate normally, the other heating unit can complete the subsequent operation, thereby reducing the risk of heater failure and reducing losses during the operation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram showing the structure of a heater for a single crystal furnace in an embodiment of the present application;

[0023] Figure 2 A schematic diagram showing the structure of a heating coil in an embodiment of the present application;

[0024] Figure 3 A schematic diagram showing the structure of the first heating unit or the second heating unit in an embodiment of the present application;

[0025] Figure 4 A schematic diagram showing the structure of the supporting foot plate in an embodiment of the present application.

[0026] Reference numerals:

[0027] 10: heating coil; 11: first heating part; 12: second heating part;

[0028] 20: supporting foot plate; 21: first group of supporting foot plates; 211: first supporting foot plate; 212: second supporting foot plate; 22: second group of supporting foot plates; 221: third supporting foot plate; 222: fourth supporting foot plate; 23: first connecting member; 24: second connecting member; 25: third connecting member; 26: fourth connecting member. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] It should be understood that the references to "one embodiment" or "an embodiment" throughout the specification mean that the specific features, structures, or characteristics associated with the embodiment are included in at least one embodiment of the present invention. Therefore, the references to "in one embodiment" or "in an embodiment" appearing throughout the specification do not necessarily refer to the same embodiment. In addition, these specific features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0031] Reference Figure 1 , which shows a schematic diagram of the structure of a heater for a single crystal furnace in an embodiment of the present application; Figure 2 , which shows a schematic diagram of the structure of the heating coil in the embodiment of the present application; Figure 3 , showing a schematic diagram of the structure of the first heating unit or the second heating unit in an embodiment of the present application; Figure 4 , showing a schematic structural diagram of the supporting foot plate in an embodiment of the present application.

[0032] like Figures 1 to 4 As shown, an embodiment of the present application discloses a heater for a single crystal furnace, which comprises a heating coil 10, wherein the heating coil 10 comprises a first heating portion 11 and a second heating portion 12, wherein the first heating portion 11 and the second heating portion 12 are arranged relatively spaced apart, and the first heating portion 11 and the second heating portion 12 enclose the heating coil 10 to form a ring-shaped structure; a supporting foot plate 20, wherein the supporting foot plate 20 comprises a first group of supporting foot plates 21 and a second group of supporting foot plates 22, wherein the first group of supporting foot plates 21 is detachably connected to the first heating portion 11, and the second group of supporting foot plates 22 is detachably connected to the second heating portion 12; along the height direction of the heating coil 10, the first group of supporting foot plates 21 and the second group of supporting foot plates 22 are connected to the same side of the heating coil 10.

[0033] The embodiment of the present application discloses a heater for a single crystal furnace. The heater for a single crystal furnace is installed in the single crystal furnace and serves as a direct heating element in the single crystal furnace to provide a thermal field for the single crystal furnace.

[0034] like Figures 1 to 4 As shown, the single crystal furnace heater disclosed in the embodiment of the present application includes a heating coil 10 and a supporting foot plate 20. Among them, the heating coil 10 is the core heating component of the heater, and the heating coil 10 includes a first heating part 11 and a second heating part 12. The first heating part 11 and the second heating part 12 are arranged relatively spaced apart, and the first heating part 11 and the second heating part 12 enclose the heating coil 10 to form a ring-shaped structure.

[0035] For example, the first heating part 11 and the second heating part 12 are both semicircular ring structures, and the first heating part 11 and the second heating part 12 are arranged relatively spaced apart and enclosed to form a heating ring 10 with a circular ring structure. For another example, the first heating part 11 and the second heating part 12 enclose a heating ring 10 with a square ring structure, and the first heating part 11 and the second heating part 12 are respectively used as a part of the heating ring 10 with a square ring structure.

[0036] It should be noted that in the embodiment of the present application, there are no excessive restrictions on the specific structure of the heating coil 10. In actual applications, technicians can set the specific structure of the heating coil 10 as needed. The following will take the heating coil 10 as a heating coil with a circular ring structure as an example for relevant description.

[0037] like Figures 1 to 4 As shown, the supporting foot plates 20 in the embodiment of the present application include a first group of supporting foot plates 21 and a second group of supporting foot plates 22. The first group of supporting foot plates 21 is detachably connected to the first heating part 11, so as to support the first heating part 11 through the first group of supporting foot plates 21, and the first heating part 11 is connected to the electrode of the single crystal furnace. The second group of supporting foot plates 22 is detachably connected to the second heating part 12, so as to support the second heating part 12 through the second group of supporting foot plates 22, and the second heating part 12 is connected to the electrode of the single crystal furnace.

[0038] It should be noted that the first group of supporting foot plates 21 in the embodiment of the present application includes two supporting foot plates, the two supporting foot plates are arranged at an interval, and one end of the two supporting foot plates is detachably connected to the first heating part 11, and the other end is connected to the positive electrode and the negative electrode of the single crystal furnace. The structure of the second group of supporting foot plates 22 is the same or similar to that of the first group of supporting foot plates 21. No further details will be given here.

[0039] like Figures 1 to 4 As shown, in the embodiment of the present application, along the height direction of the heating ring 10, the first group of supporting legs 21 and the second group of supporting legs 22 are connected to the same side of the heating ring 10. This facilitates the installation of the single crystal furnace heater and reduces the space occupied by the single crystal furnace heater.

[0040] The single crystal furnace heater disclosed in the embodiment of the present application includes a heating coil 10 and a supporting foot plate 20, wherein the heating coil 10 includes a first heating portion 11 and a second heating portion 12, the first heating portion 11 and the second heating portion 12 are arranged relatively spaced apart, and the first heating portion 11 and the second heating portion 12 enclose the heating coil 10 to form a ring-shaped structure. The supporting foot plate 20 includes a first group of supporting foot plates 21 and a second group of supporting foot plates 22, the first group of supporting foot plates 21 is detachably connected to the first heating portion 11, so as to support the first heating portion 11 through the first group of supporting foot plates 21, and the second group of supporting foot plates 22 is detachably connected to the second heating portion 12, so as to support the second heating portion 12 through the second group of supporting foot plates 22. Through the above arrangement, the stress at the connection between the first heating unit 11 and the first group of supporting foot plates 21, and the stress at the connection between the second heating unit 12 and the second group of supporting foot plates 22 can be reduced, so as to avoid cracks at the connection between the first heating unit 11 and the first group of supporting foot plates 21 and the connection between the second heating unit 12 and the second group of supporting foot plates 22, thereby improving the reliability of the heater for the single crystal furnace. Furthermore, the first heating unit 11 and the second heating unit 12 in the embodiment of the present application can operate independently to provide a thermal field for the single crystal furnace. When one of the heating units has a problem and cannot operate normally, the other heating unit can complete the subsequent operation, thereby reducing the risk of heater failure and reducing losses during the operation process.

[0041] Alternatively, if Figures 1 to 4 As shown, along the height direction of the heating coil 10 , the height of the first group of supporting foot plates 21 is equal to the height of the second group of supporting foot plates 22 .

[0042] like Figures 1 to 4 As shown, in the embodiment of the present application, along the height direction of the heating ring 10, the height of the first group of supporting foot plates 21 is set to be equal to the height of the second group of supporting foot plates 22, so as to facilitate the disassembly and assembly of the single crystal furnace heater. Furthermore, the versatility of the supporting foot plates can be improved, which is convenient for the processing of the single crystal furnace heater.

[0043] Alternatively, if Figures 1 to 4 As shown, the first heating portion 11 and the second heating portion 12 in the embodiment of the present application are both in a semi-circular ring structure, and the first heating portion 11 and the second heating portion 12 enclose a heating ring 10 to form a circular ring structure.

[0044] The furnace body of the single crystal furnace is generally a cylindrical structure. In the embodiment of the present application, Figures 1 to 4As shown, the first heating part 11 and the second heating part 12 are both arranged in a semicircular ring structure, and the first heating part 11 and the second heating part 12 can enclose a heating ring 10 of a circular ring structure, and the size of the heating ring 10 of the circular ring structure is adapted to the size of the single crystal furnace body, so that the heating ring 10 of the circular ring structure can be installed in the furnace body of the single crystal furnace. Furthermore, the heating ring 10 of the circular ring structure can provide a more uniform thermal field environment, making the thermal field environment of the single crystal furnace better.

[0045] Alternatively, if Figures 1 to 4 As shown, the first group of supporting feet 21 in the embodiment of the present application includes a first supporting foot 211 and a second supporting foot 212, wherein, along the circumferential direction of the heating coil 10, the first heating part 11 has a first end and a second end, the first supporting foot 211 is detachably connected to the first heating part 11 at a position close to the first end, and the second supporting foot 212 is detachably connected to the first heating part 12 at a position close to the second end; along the height direction of the heating coil 10, the first supporting foot 211 and the second supporting foot 212 are connected to the same side of the first heating part 11.

[0046] like Figures 1 to 4 As shown, in the case where the first heating part 11 is a semicircular ring structure, along the circumferential direction of the heating ring 10, the first heating part 11 has a first end and a second end. The first supporting foot plate 211 is detachably connected to the first heating part 11 near the first end, and the second supporting foot plate 212 is detachably connected to the first heating part 11 near the second end. The first heating part 11 is supported by the first supporting foot plate 211 and the second supporting foot plate 212, the stress at the connection between the first heating part 11 and the first supporting foot plate 211 and the second supporting foot plate 212 is reduced, cracks are avoided at the connection between the first heating part 11 and the first supporting foot plate 211 and the second supporting foot plate 212, and the reliability of the heater for the single crystal furnace is improved.

[0047] It should be noted that in the embodiment of the present application, along the height direction of the heating ring 10, the first supporting foot plate 211 and the second supporting foot plate 212 are connected to the same side of the first heating part 11. This facilitates the installation of the single crystal furnace heater and reduces the space occupied by the single crystal furnace heater.

[0048] Alternatively, if Figures 1 to 4 As shown, the single crystal furnace heater disclosed in the embodiment of the present application also includes a first connecting member 23 and a second connecting member 24, wherein a first through hole is provided at a position close to the first end of the first heating portion 11, a second through hole is provided on the first supporting foot plate 211, and the first connecting member 23 is inserted into the first through hole and the second through hole; a third through hole is provided at a position close to the second end of the first heating portion 11, a fourth through hole is provided on the second supporting foot plate 212, and the second connecting member 24 is inserted into the third through hole and the fourth through hole.

[0049] like Figures 1 to 4 As shown, in the embodiment of the present application, a first through hole is provided at a position near the first end of the first heating portion 11, and a second through hole is provided on the first supporting foot plate 211, and the first connecting member 23 is inserted into the first through hole and the second through hole to detachably connect the first supporting foot plate 211 to a position near the first end of the first heating portion 11.

[0050] It should be noted that the first connecting member 23 in the embodiment of the present application may include a bolt and a nut. The bolt is inserted into the first through hole and the second through hole, and the nut is connected to the end of the bolt passing through the first through hole and the second through hole, so that the first supporting foot plate 211 is detachably connected to the position of the first heating part 11 near the first end through the bolt and the nut.

[0051] like Figures 1 to 4 As shown, in the embodiment of the present application, a third through hole is provided at a position near the second end of the first heating portion 11, a fourth through hole is provided on the second supporting foot plate 212, and the second connecting member 24 is inserted into the third through hole and the fourth through hole to detachably connect the second supporting foot plate 212 to a position near the second end of the first heating portion 11.

[0052] It should be noted that the second connecting member 24 in the embodiment of the present application also includes bolts and nuts. The bolts are inserted into the third through holes and the fourth through holes, and the nuts are connected to the ends of the bolts passing through the third through holes and the fourth through holes, so that the second supporting foot plate 212 is detachably connected to the position of the first heating part 11 near the second end through the bolts and nuts.

[0053] Of course, the above configuration of the first connecting member 23 and the second connecting member 24 as bolts and nuts is only an individual implementation of the present application and is not intended to be a limitation of the present application. In actual applications, technicians may also configure the specific structures of the first connecting member 23 and the second connecting member 24 as needed.

[0054] Alternatively, if Figures 1 to 4 As shown, the first through hole and the second through hole in the embodiment of the present application each include a plurality, and each first through hole is correspondingly arranged to a second through hole; the first connecting member 23 also includes a plurality, and each first connecting member 23 is correspondingly arranged to a first through hole and a second through hole; and / or, the third through hole and the fourth through hole each include a plurality, and each third through hole is correspondingly arranged to a fourth through hole; the second connecting member 24 also includes a plurality, and each second connecting member 24 is correspondingly arranged to a third through hole and a fourth through hole.

[0055] like Figures 1 to 4As shown, a plurality of first through holes can be provided at a position near the first end of the first heating part 11, and a plurality of second through holes can be provided on the first supporting foot plate 211, and each second through hole can be provided corresponding to a first through hole. The first connecting member 23 includes a plurality of first connecting members, and each first connecting member 23 is inserted into a first through hole and a second through hole, so that the first supporting foot plate 211 can be detachably connected to a position near the first end of the first heating part 11 through the plurality of first connecting members 23, so as to improve the reliability of the connection between the first supporting foot plate 211 and the first heating part 11. Furthermore, the stress at the connection between the first heating part 11 and the first supporting foot plate 211 can also be reduced, so as to avoid cracks at the connection between the first heating part 11 and the first supporting foot plate 211.

[0056] Similarly, a plurality of third through holes can be provided at a position near the second end of the first heating part 11, and a plurality of fourth through holes can be provided on the second supporting foot plate 212, and each third through hole can be provided correspondingly to a fourth through hole. The second connecting member 24 includes a plurality of second connecting members 24, and each second connecting member 24 is inserted into a third through hole and a fourth through hole, so that the second supporting foot plate 212 can be detachably connected to a position near the second end of the first heating part 11 through the plurality of second connecting members 24, so as to improve the reliability of the connection between the second supporting foot plate 212 and the first heating part 11. Furthermore, the stress at the connection between the first heating part 11 and the second supporting foot plate 212 can also be reduced, so as to avoid cracks at the connection between the first heating part 11 and the second supporting foot plate 212.

[0057] Alternatively, if Figures 1 to 4 As shown, the second group of supporting foot plates 22 in the embodiment of the present application includes a third supporting foot plate 221 and a fourth supporting foot plate 222, wherein, along the circumferential direction of the heating coil 10, the second heating portion 12 has a third end and a fourth end, the third supporting foot plate 221 is detachably connected to a position of the second heating portion 12 close to the third end, and the fourth supporting foot plate 222 is detachably connected to a position of the second heating portion 12 close to the fourth end; along the height direction of the heating coil 10, the third supporting foot plate 221 and the fourth supporting foot plate 222 are connected to the same side of the second heating portion 12.

[0058] like Figures 1 to 4As shown, in the case where the second heating part 12 is a semicircular ring structure, along the circumferential direction of the heating ring 10, the second heating part 12 has a first end and a second end. The third supporting foot plate 221 is detachably connected to the position of the second heating part 12 close to the first end, and the fourth supporting foot plate 222 is detachably connected to the position of the second heating part 12 close to the second end. The second heating part 12 is supported by the third supporting foot plate 221 and the fourth supporting foot plate 222, the stress at the connection between the second heating part 12 and the third supporting foot plate 221 and the fourth supporting foot plate 222 is reduced, cracks are avoided at the connection between the second heating part 12 and the third supporting foot plate 221 and the fourth supporting foot plate 222, and the reliability of the heater for the single crystal furnace is improved.

[0059] It should be noted that in the embodiment of the present application, along the height direction of the heating ring 10, the third supporting foot plate 221 and the fourth supporting foot plate 222 are connected to the same side of the first heating part 11. This facilitates the installation of the single crystal furnace heater and reduces the space occupied by the single crystal furnace heater.

[0060] Alternatively, if Figures 1 to 4 As shown, the single crystal furnace heater disclosed in the embodiment of the present application also includes a third connecting member 25 and a fourth connecting member 26, wherein a fifth through hole is provided at a position near the third end of the second heating portion 12, a sixth through hole is provided on the third supporting foot plate 221, and the third connecting member 25 is inserted into the fifth through hole and the sixth through hole; a seventh through hole is provided at a position near the fourth end of the second heating portion 12, an eighth through hole is provided on the fourth supporting foot plate 222, and the fourth connecting member 26 is inserted into the seventh through hole and the eighth through hole.

[0061] like Figures 1 to 4 As shown, in the embodiment of the present application, a fifth through hole is provided at a position near the third end of the second heating portion 12, a sixth through hole is provided on the third supporting foot plate 221, and the third connecting member 25 is inserted into the fifth through hole and the sixth through hole to detachably connect the third supporting foot plate 221 to a position near the third end of the second heating portion 12.

[0062] It should be noted that the third connecting member 25 in the embodiment of the present application may include bolts and nuts. The bolts are inserted into the fifth through holes and the sixth through holes, and the nuts are then connected to the ends of the bolts passing through the fifth through holes and the sixth through holes, so that the third supporting foot plate 221 is detachably connected to the position of the second heating part 12 near the third end through the bolts and nuts.

[0063] like Figures 1 to 4 As shown, in the embodiment of the present application, a seventh through hole is provided at a position near the fourth end of the second heating portion 12, an eighth through hole is provided on the fourth supporting foot plate 222, and the fourth connecting member 26 is inserted into the seventh through hole and the eighth through hole to detachably connect the fourth supporting foot plate 222 to a position near the fourth end of the second heating portion 12.

[0064] It should be noted that the fourth connecting member 26 in the embodiment of the present application also includes bolts and nuts. The bolts are inserted into the seventh through holes and the eighth through holes, and the nuts are then connected to the ends of the bolts passing through the seventh through holes and the eighth through holes, so that the fourth supporting foot plate 222 is detachably connected to the position of the second heating part 12 near the fourth end through the bolts and nuts.

[0065] Of course, the above configuration of the third connecting member 25 and the fourth connecting member 26 as bolts and nuts is only an individual implementation of the present application and is not intended to be a limitation of the present application. In actual applications, technicians may also configure the specific structures of the third connecting member 25 and the fourth connecting member 26 as needed.

[0066] Alternatively, if Figures 1 to 4 As shown, the fifth through hole and the sixth through hole in the embodiment of the present application each include a plurality, and each fifth through hole is correspondingly arranged to a sixth through hole; the third connecting member 25 also includes a plurality, and each third connecting member 25 is correspondingly arranged to a fifth through hole and a sixth through hole; and / or, the seventh through hole and the eighth through hole each include a plurality, and each seventh through hole is correspondingly arranged to an eighth through hole; the fourth connecting member 26 also includes a plurality, and each fourth connecting member 26 is correspondingly arranged to a seventh through hole and an eighth through hole.

[0067] like Figures 1 to 4 As shown, a plurality of fifth through holes can be provided at a position near the third end of the second heating part 12, and a plurality of sixth through holes can be provided on the third supporting foot plate 221, and each fifth through hole is provided corresponding to a sixth through hole. The third connecting member 25 includes a plurality of third connecting members 25, and each third connecting member 25 is inserted into a fifth through hole and a sixth through hole, so that the third supporting foot plate 221 is detachably connected to a position near the third end of the second heating part 12 through a plurality of third connecting members 25, so as to improve the reliability of the connection between the third supporting foot plate 221 and the second heating part 12. Furthermore, the stress at the connection between the second heating part 12 and the third supporting foot plate 221 can also be reduced, so as to avoid cracks at the connection between the second heating part 12 and the third supporting foot plate 221.

[0068] Similarly, a plurality of seventh through holes can be provided at a position near the fourth end of the second heating portion 12, and a plurality of eighth through holes can be provided on the fourth supporting foot plate 222, and each seventh through hole is provided corresponding to an eighth through hole. The fourth connecting member 26 includes a plurality of fourth connecting members 26, and each fourth connecting member 26 is inserted into a seventh through hole and an eighth through hole, so that the fourth supporting foot plate 222 is detachably connected to a position near the fourth end of the second heating portion 12 through a plurality of fourth connecting members 26, so as to improve the reliability of the connection between the fourth supporting foot plate 222 and the second heating portion 12. Furthermore, the stress at the connection between the second heating portion 12 and the fourth supporting foot plate 222 can also be reduced, so as to avoid cracks at the connection between the second heating portion 12 and the fourth supporting foot plate 222.

[0069] The embodiment of the present application also discloses a single crystal furnace, which includes a single crystal furnace body and the single crystal furnace heater described in the above embodiment, wherein the single crystal furnace heater is arranged in the single crystal furnace body.

[0070] It should be noted that the single crystal furnace heater included in the single crystal furnace disclosed in the embodiment of the present application has the same structure as the single crystal furnace heater described in the above embodiment, and its beneficial effects are also the same or similar, which will not be described in detail here.

[0071] Optionally, the single crystal furnace body has a accommodating cavity, and the single crystal furnace heater is arranged in the accommodating cavity; the bottom wall of the accommodating cavity is provided with two groups of electrodes, the first group of supporting foot plates 21 is detachably connected to one group of the electrodes, and the second group of supporting foot plates 22 is detachably connected to the other group of the electrodes.

[0072] The single crystal furnace disclosed in the embodiment of the present application includes a single crystal furnace body and the single crystal furnace heater described in the above embodiment. Among them, a receiving cavity is provided in the single crystal furnace body, and two groups of electrodes are provided on the bottom wall of the receiving cavity. The single crystal furnace heater is arranged in the receiving cavity, and the first group of supporting foot plates 21 is detachably connected to one group of electrodes, and the second group of supporting foot plates 22 is detachably connected to the other group of electrodes. Thus, the single crystal furnace heater is arranged and connected to the single crystal furnace body, so as to provide a heat field for the single crystal furnace through the single crystal furnace heater.

[0073] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0074] Although the optional embodiments of the utility model embodiments have been described, those skilled in the art, once knowing the basic creative concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including optional embodiments and all changes and modifications falling within the scope of the utility model embodiments.

[0075] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity from another entity, and do not necessarily require or imply any such actual relationship or order between these entities. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that an article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such article or terminal device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the article or terminal device including the elements.

[0076] The technical solution provided by the present invention is introduced in detail above. Specific examples are used in this article to illustrate the principle and implementation method of the present invention. At the same time, for those skilled in the art, according to the principle and implementation method of the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A heater for a single crystal furnace, characterized in that: include: A heating coil, the heating coil comprising a first heating part and a second heating part, the first heating part and the second heating part are arranged relatively spaced apart, the first heating part and the second heating part are both in a semicircular ring structure, and the first heating part and the second heating part enclose the heating coil in a ring structure; Supporting foot plates, the supporting foot plates comprising a first group of supporting foot plates and a second group of supporting foot plates, the first group of supporting foot plates being detachably connected to the first heating portion, and the second group of supporting foot plates being detachably connected to the second heating portion; Along the height direction of the heating coil, the first group of supporting foot plates and the second group of supporting foot plates are connected to the same side of the heating coil.

2. The single crystal furnace heater according to claim 1, characterized in that: Along the height direction of the heating coil, the height of the first group of supporting feet is equal to the height of the second group of supporting feet.

3. The single crystal furnace heater according to claim 2, characterized in that: The first group of supporting foot plates includes a first supporting foot plate and a second supporting foot plate, wherein: Along the circumferential direction of the heating coil, the first heating portion has a first end and a second end, the first supporting foot plate is detachably connected to a position of the first heating portion close to the first end, and the second supporting foot plate is detachably connected to a position of the first heating portion close to the second end; Along the height direction of the heating coil, the first supporting foot plate and the second supporting foot plate are connected to the same side of the first heating part.

4. The single crystal furnace heater according to claim 3, characterized in that: The single crystal furnace heater further comprises a first connecting member and a second connecting member, wherein: The first heating portion is provided with a first through hole at a position close to the first end, the first supporting foot plate is provided with a second through hole, and the first connecting member is inserted into the first through hole and the second through hole; A third through hole is disposed on the first heating portion near the second end, a fourth through hole is disposed on the second supporting foot plate, and the second connecting member is inserted into the third through hole and the fourth through hole.

5. The single crystal furnace heater according to claim 4, characterized in that: The first through hole and the second through hole each include a plurality of holes, and each of the first through holes is correspondingly arranged to one of the second through holes; The first connecting members also include a plurality of first connecting members, each of which is disposed correspondingly to one of the first through holes and one of the second through holes; And / or, the third through hole and the fourth through hole each include a plurality, and each of the third through holes is correspondingly arranged with one of the fourth through holes; The second connecting members also include a plurality of second connecting members, each of which is disposed correspondingly to one of the third through holes and one of the fourth through holes.

6. The single crystal furnace heater according to claim 2, characterized in that: The second group of supporting foot plates includes a third supporting foot plate and a fourth supporting foot plate, wherein: Along the circumferential direction of the heating coil, the second heating portion has a third end and a fourth end, the third supporting foot plate is detachably connected to a position of the second heating portion close to the third end, and the fourth supporting foot plate is detachably connected to a position of the second heating portion close to the fourth end; Along the height direction of the heating coil, the third supporting foot plate and the fourth supporting foot plate are connected to the same side of the second heating part.

7. The single crystal furnace heater according to claim 6, characterized in that: The single crystal furnace heater further includes a third connecting member and a fourth connecting member, wherein: The second heating portion is provided with a fifth through hole at a position close to the third end, the third supporting foot plate is provided with a sixth through hole, and the third connecting member is inserted into the fifth through hole and the sixth through hole; A seventh through hole is disposed on the second heating portion near the fourth end, an eighth through hole is disposed on the fourth supporting foot plate, and the fourth connecting member is inserted into the seventh through hole and the eighth through hole.

8. The single crystal furnace heater according to claim 7, characterized in that: The fifth through hole and the sixth through hole each include a plurality of through holes, and each of the fifth through holes is correspondingly arranged with one of the sixth through holes; The third connecting member also includes a plurality of third connecting members, each of which is disposed correspondingly to one of the fifth through holes and one of the sixth through holes; And / or, the seventh through hole and the eighth through hole each include a plurality of holes, and each of the seventh through holes is correspondingly arranged with one of the eighth through holes; The fourth connecting member also includes a plurality of members, each of which is disposed correspondingly to one of the seventh through holes and one of the eighth through holes.

9. A single crystal furnace, characterized in that: It comprises a single crystal furnace body and the single crystal furnace heater according to any one of claims 1 to 8, wherein the single crystal furnace heater is arranged in the single crystal furnace body.

10. The single crystal furnace according to claim 9, characterized in that: The single crystal furnace body has a containing cavity, and the single crystal furnace heater is arranged in the containing cavity; The bottom wall of the accommodating cavity is provided with two groups of electrodes, the first group of supporting foot plates is detachably connected to one of the groups of electrodes, and the second group of supporting foot plates is detachably connected to the other group of electrodes.

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