Water-cooling type drying oven of glove box

Abstract

The utility model discloses a water-cooling type drying oven of a glove box, which comprises a box body, the front end and the rear end of the box body are communicated, flanges are respectively arranged on the end faces of the two ends of the box body, and the flange faces vertically extend outwards from the outer wall of the box body; and the at least two cooling flow channels are arranged on the opposite side walls of the two flanges respectively, the cooling flow channels extend at least around the flange faces by one circle, and water inlets and water outlets are formed in the cooling flow channels respectively. According to the utility model, the cooling flow channel is arranged on the side wall of the flange, so that the sealing element on the flange can be effectively subjected to continuous circulating water cooling treatment, and the bad conditions of aging, damage and the like of the sealing element of the oven at high temperature can be effectively avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of glove boxes, and in particular relates to a water-cooled oven for a glove box. Background Art

[0002] The oven in the semiconductor glove box is an important part of the semiconductor production process. It is mainly used to remove moisture and organic solvents from materials to ensure that semiconductor production is carried out in a dry, impurity-free environment.

[0003] The glove box vacuum oven currently used in the semiconductor industry can only withstand a maximum temperature of 200°C due to the temperature limit of the seal. As there is a market demand for oven temperatures exceeding 200°C, existing oven seals will age, become damaged, and other adverse conditions under over-temperature conditions, which cannot meet market demand and has greatly restricted the use of glove box products in the semiconductor industry.

[0004] In view of this, the present utility model is proposed. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a water-cooled oven for a glove box. By arranging a cooling flow channel on the side wall of the flange, the seal on the flange can be effectively subjected to continuous circulating water cooling treatment, thereby effectively preventing the seal of the oven from aging, damage and other adverse conditions at high temperatures.

[0006] In order to solve the above technical problems, the basic concept of the technical solution adopted by the utility model is: to provide a water-cooled oven for a glove box, including a box body, the front and rear ends of which are connected, and flanges are respectively arranged on the end surfaces of the two ends of the box body, and the flange surfaces extend vertically outward from the outer wall of the box body;

[0007] At least two cooling channels are respectively arranged on the side walls opposite to the two flanges. The cooling channels are extended at least around the flange surface. A water inlet and a water outlet are respectively arranged on the cooling channels.

[0008] Furthermore, a sealing groove is provided on the side walls of the two flanges facing each other, the sealing groove extends around the flange surface, and a sealing ring is provided in the sealing groove;

[0009] The cooling channel and the sealing groove are arranged opposite to each other.

[0010] Furthermore, the orthographic projection of the sealing groove onto the cooling channel is completely covered.

[0011] Furthermore, the cooling channel is in a zigzag shape, a partition is arranged inside the cooling channel to separate the cooling channel, and a water inlet and a water outlet are arranged on the cooling channel on both sides of the partition.

[0012] Furthermore, the side of the cooling channel that contacts the flange surface is open, and the open side wall of the cooling channel is welded to the flange surface.

[0013] Furthermore, the cooling channel is arranged independently of the flange surface, and the cooling channel is detachably arranged on the flange surface.

[0014] After adopting the above technical solution, the utility model has the following beneficial effects compared with the prior art:

[0015] (1) The utility model provides a cooling channel on the side wall of the flange, thereby effectively performing a continuous circulating water cooling treatment on the seal on the flange, thereby effectively preventing the seal of the oven from aging, being damaged, and other undesirable conditions at high temperatures.

[0016] (2) The utility model arranges the cooling channel and the sealing groove relative to each other so that the positive projection of the sealing groove onto the cooling channel is completely covered. The slot size of the sealing groove is smaller than the width of the cooling channel. Since the two are arranged relative to each other, the entire sealing groove and the sealing ring installed therein are completely covered in the cooling area of ​​the cooling channel, thereby achieving the best cooling effect.

[0017] (3) The utility model sets the cooling channel in a circular shape, and sets a partition inside the cooling channel. The water inlet and the water outlet are set on the cooling channel on both sides of the partition. This can ensure as much as possible that the circulating water in the water cooler enters from the water inlet, goes around the flange surface and then is discharged from the water outlet. Therefore, the sealing ring in the sealing groove on the opposite side can be fully cooled to ensure the cooling effect.

[0018] The specific implementation of the utility model is further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are part of the present invention and are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention, but do not constitute an improper limitation on the present invention. Obviously, the accompanying drawings described below are only some embodiments. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without creative work. In the accompanying drawings:

[0020] Figure 1 It is a three-dimensional structural schematic diagram of a water-cooled oven of a glove box of the utility model;

[0021] Figure 2 It is a side view of a water-cooled oven of a glove box of the utility model;

[0022] Figure 3 It is a cross-sectional view of a water-cooled oven of a glove box of the utility model;

[0023] Figure 4 The utility model is a bottom view of a water-cooled oven of a glove box.

[0024] In the figure: 1. Box body; 2. Flange; 21. Sealing groove; 22. Sealing ring; 3. KF flange pipe; 4. Stainless steel ferrule; 5. Heating plate fixing nail; 6. Cooling channel; 61. Water inlet; 62. Water outlet.

[0025] It should be noted that these drawings and textual descriptions are not intended to limit the conceptual scope of the present invention in any way, but rather to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. The following embodiments are used to illustrate the utility model but are not used to limit the scope of the utility model.

[0027] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] like Figures 1 to 4 As shown, the water-cooled oven of the glove box described in the utility model comprises:

[0030] The box body 1 is through-set at both ends. A plurality of stainless steel ferrules 4 are arranged on two opposite side walls on the outer peripheral wall of the box body 1. The stainless steel ferrules 4 are formed on the outer wall of the box body 1 by welding, and the heating rod is passed through the stainless steel ferrule 4 on one side of the box body 1 and fixed with the stainless steel ferrule 4 on the opposite side. A more preferred embodiment: stainless steel ferrules 4 are arranged on opposite sides of the box body 1, wherein the stainless steel ferrules 4 on the opposite sides are arranged alternately in sequence, and the heating rods pass through the stainless steel ferrules 4 on different sides and are clamped and sealed, so that a heating rod can be arranged at the same interval in the horizontal direction to ensure the uniformity of temperature during heating.

[0031] More specifically, a plurality of heating plate fixing nails 5 are arranged on the inner wall of the box body 1, and the heating plate is fixed to the inside of the box body 1 by the heating plate fixing nails 5. The heating rod is inserted into the interior of the heating plate, so that the parts to be dried and heated can be placed on the heating plate.

[0032] In addition, a KF flange pipe 3 is provided on the outer wall of the box body 1, wherein the KF flange pipe 3 is connected to the interior of the box body 1. The KF flange pipe 3 is externally connected to a vacuum system, and the vacuum system evacuates the interior of the box body 1 through the KF flange pipe 3 to provide a vacuum environment for subsequent drying of parts.

[0033] The stainless steel ferrule 4 and the KF flange pipe 3 are connected to the box body 1 by argon arc welding.

[0034] Flanges 2 are respectively provided on the end surfaces of both ends of the box body 1, and the flange surfaces extend vertically outward from the outer wall of the box body 1;

[0035] At least two cooling channels 6 are respectively arranged on the opposite side walls of the two flanges 2. The cooling channels 6 extend at least around the flange surface. A water inlet 61 and a water outlet 62 are respectively arranged on the cooling channels 6.

[0036] In the present invention, the box body 1 is a tubular structure, and the cross section of the pipe mouth is square. Of course, the specific shape of the cross section of the pipe mouth can also be circular, polygonal, etc., and no specific requirements are made here. The preferred scheme of the square cross section is used as an example for explanation. The box body 1 is open at both ends and is set through. Flanges 2 are welded on the end faces of both ends, and the flanges 2 extend vertically and uniformly outward from the outer wall of the box body 1, thereby forming a square surface structure with a central square hole.

[0037] A cooling channel 6 is provided on the side walls opposite to the flange 2 provided at the front and rear ends of the box body 1, wherein the cooling channel 6 can be extended around the surface of the flange 2 to form a whole circular channel. Specifically, a water inlet 61 and a water outlet 62 are provided on the cooling channel 6, and the water inlet 61 is connected to an external water cooler. Through the water supply of the water cooler, water fills the interior of the entire cooling channel 6 and flows under pressure, and finally is discharged from the water outlet 62, forming the entire water cooling process. By providing the cooling channel 6 on the side wall of the flange 2, the seals on the flange 2 and / or the end face of the oven can be effectively subjected to a continuous circulation water cooling treatment, thereby effectively preventing the seals of the oven from aging, damage, and other undesirable conditions at high temperatures.

[0038] Furthermore, a sealing groove 21 is provided on the side walls of the two flanges 2 facing each other. The sealing groove 21 extends around the flange surface. A sealing ring 22 is provided in the sealing groove 21.

[0039] The cooling channel 6 is arranged opposite to the sealing groove 21 .

[0040] In the present invention, a circular sealing groove 21 is provided on the opposite side walls of the two flanges 2, and an annular sealing ring 22 is installed in the sealing groove 21. Specifically, the oven is generally arranged on the left side of the glove box, and the two are connected together through the through holes of the flange 2 on the oven and the welding studs on the glove box, and the sealing ring 22 on the flange 2 fits with the side wall of the glove box for sealing.

[0041] In the specific setting, by setting the cooling channel 6 and the sealing groove 21 on the flange 2 in a front-to-back correspondence, the cooling range of the cooling channel 6 at least partially overlaps with the notch range of the sealing groove 21. Therefore, in the specific water cooling process, the overall flowing water can perform water cooling treatment on the corresponding part of the sealing ring 22 in the sealing groove 21, making the water cooling area more targeted and ensuring the water cooling effect.

[0042] Furthermore, the orthographic projection of the sealing groove 21 onto the cooling channel 6 is completely covered.

[0043] In the utility model, the sealing groove 21 is projected in a direction perpendicular to the cooling channel 6 or perpendicular to the flange surface, and the entire sealing groove 21 is located in the cooling channel 6, that is, the slot size of the sealing groove 21 is smaller than the width of the cooling channel 6. Since the two are arranged correspondingly, the entire sealing groove 21 and the sealing ring 22 installed therein are completely covered in the cooling area of ​​the cooling channel 6, so that the cooling effect can be optimized.

[0044] Furthermore, the cooling channel 6 is in a zigzag shape, and a partition is provided inside the cooling channel 6 to separate the cooling channel 6 . The water inlet 61 and the water outlet 62 are provided on the cooling channel 6 on both sides of the partition.

[0045] In the present invention, the cooling channel 6 is set as a through-going zigzag structure, and a partition for blocking the channel is set in the internal channel of the zigzag structure, and a water outlet 62 and a water inlet 61 are respectively set on the side walls of the corresponding cooling channel 6 on both sides of the partition. It can be ensured as much as possible that the circulating water in the water cooler enters from the water inlet 61, goes around the flange surface for a circle, and then is discharged from the water outlet 62, so that the sealing ring 22 in the sealing groove 21 on the opposite surface can be fully cooled, and the cooling effect can be ensured.

[0046] Furthermore, the side of the cooling channel 6 that contacts the flange surface is open, and the open side wall of the cooling channel 6 is welded to the flange surface.

[0047] In the present invention, in one preferred embodiment of the molding method of the cooling channel 6, the cross section of the cooling channel 6 is U-shaped or C-shaped, and the open end surface is directly welded to the flange surface, so that one side of the cooling channel 6 can form a complete flow channel for water flow by using the flange surface. And because the cooling channel 6 is closer to the flange surface and thus closer to the sealing ring 22 in the opposite sealing groove 21, the overall cooling effect is better on the basis of the design without wall thickness.

[0048] Furthermore, the cooling channel 6 is arranged independently of the flange surface, and the cooling channel 6 is detachably arranged on the flange surface.

[0049] In the present invention, another preferred embodiment of the molding method of the cooling channel 6 is that the cooling channel 6 is a complete tubular structure, wherein the cooling channel 6 may be provided with screw holes, and the cooling channel 6 is connected to the flange 2 by fixing the screw holes with bolts. Alternatively, a detachable connection may be made by plugging. The design is mainly to protect the cooling channel 6 and the flange 2 from being designed independently and assembled through an assembly relationship. Through the above design, the cooling channel 6 is more convenient when assembly or maintenance is required.

[0050] The above is only a preferred embodiment of the present invention, and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with this patent can make some changes or modifications to equivalent embodiments of equivalent changes using the technical content suggested above without departing from the scope of the technical solution of the present invention. The implementation schemes in the above embodiments can also be further combined or replaced. However, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the present invention.

Claims

1. A water-cooled oven for a glove box, characterized in that: include, The box body is connected at both ends, and flanges are respectively arranged on the end surfaces of both ends of the box body, and the flange surfaces extend vertically outward from the outer wall of the box body; At least two cooling channels are respectively arranged on the side walls opposite to the two flanges. The cooling channels are extended at least around the flange surface. A water inlet and a water outlet are respectively arranged on the cooling channels.

2. The water-cooled oven of the glove box according to claim 1, characterized in that: A sealing groove is arranged on the side walls of the two flanges facing each other, the sealing groove extends around the flange surface, and a sealing ring is arranged in the sealing groove; The cooling channel and the sealing groove are arranged opposite to each other.

3. The water-cooled oven of the glove box according to claim 2, characterized in that: The orthographic projection of the sealing groove onto the cooling channel is completely covered.

4. The water-cooled oven of the glove box according to claim 3, characterized in that: The cooling channel is in a zigzag shape, a partition is arranged inside the cooling channel to separate the cooling channel, and a water inlet and a water outlet are arranged on the cooling channel on both sides of the partition.

5. A water-cooled oven for a glove box according to any one of claims 1 to 4, characterized in that: The side of the cooling channel that contacts the flange surface is open, and the open side wall of the cooling channel is welded to the flange surface.

6. A water-cooled oven for a glove box according to any one of claims 1 to 4, characterized in that: The cooling channel is independently arranged on the flange surface, and the cooling channel is detachably arranged on the flange surface.

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