Desktop type low-temperature automatic probe station equipment

Abstract

The utility model relates to desktop type low-temperature automatic probe station equipment. According to one embodiment, a probe station apparatus includes: a main housing having a bottom wall and a side wall surrounding the bottom wall; the cover cap is used for covering the upper opening of the main shell so as to limit a test cavity; the piezoelectric motion module is arranged in the test cavity and used for moving a to-be-tested sample and a probe to carry out test operation, the piezoelectric motion module comprises a piezoelectric element, and the piezoelectric element deforms under a voltage signal to move the to-be-tested sample and the probe.

Description

Technical Field

[0001] The utility model relates to a small desktop low-temperature automatic probe station device, which adopts a high-precision piezoelectric motion module to achieve accurate measurement and positioning, and can be connected to a low-temperature refrigeration device and a vacuum pumping device, so that samples can be measured in a low-temperature and vacuum environment. Background Art

[0002] Semiconductor chip and integrated circuit design rely heavily on probe station systems for relevant performance verification. Existing probe station systems can be divided into fully automatic probe stations, semi-automatic probe stations and manual probe stations according to their functional test modules and test methods.

[0003] The fully automatic probe stations on the market are aimed at wafer testing of large-scale periodic arrays, and generally require probe cards. For example, the PT-9200 fully automatic probe station of Shenzhen Silicon Semiconductor is used for fully automatic testing of 5 to 8-inch wafers. It has up to 2,000 test probes and can be used for simultaneous detection of multiple chips to improve production efficiency. However, the equipment is large in size, complex in structure, and high in cost. It is not suitable for laboratory-level demonstration device testing, and it is not convenient to move flexibly.

[0004] Compared with the fully automatic probe station, the semi-automatic probe station has more choices of probe modules. For example, it can use a single probe module of radio frequency and direct current (RF&DC). However, the current semi-automatic probe station is generally used to measure larger wafers, such as 4 inches to 12 inches, and also has the above-mentioned problems of large size, complex structure, high cost and inconvenient to move.

[0005] Commonly used manual probe stations on the market, such as Lakeshore's low-temperature probe station, are suitable for measuring laboratory customer samples and can test samples under 4 inches. However, manual sampling and probe movement operations are required, which is time-consuming, labor-intensive, and inefficient.

[0006] In addition, in the current fully automatic, semi-automatic and manual probe station systems, servo motor plus screw or manual screw transmission is used, which requires a large space to accommodate the motor and screw, resulting in a large size of the entire device and inconvenience in movement. Moreover, the positioning accuracy of the motor and screw is low, which can no longer meet the measurement requirements of some small devices. For example, the probe may not be accurately positioned on a very small test pad. In addition, when low-temperature measurement is required, if the servo motor is set in a low-temperature chamber, the normal operation of the motor may be affected by the low temperature; if the motor is set outside the low-temperature chamber, a complex sealing and heat-insulating mechanical transmission structure is required, which increases the complexity of the equipment. Utility Model Content

[0007] In view of the above problems, the present utility model is proposed.

[0008] The utility model proposes a desktop low-temperature automatic probe station, which adopts a piezoelectric motion module to move the sample stage and the probe, which can not only realize accurate measurement and positioning, and is suitable for measuring miniaturized samples with very small pads, but also can be used in extreme environments such as low temperature and vacuum. The piezoelectric motion module can be driven by an electrical signal, so as to conveniently realize automatic measurement. It also has the advantages of simple structure and small size, so that the entire probe station can have a smaller volume and can be easily moved. The probe station system can be connected to a low-temperature refrigeration device and a vacuum pumping device, so that the sample can be measured in a low-temperature and vacuum environment. The desktop low-temperature automatic probe station of the utility model provides a good testing environment and solution for small sample testing in laboratories or research and development institutions.

[0009] One aspect of the utility model provides a probe station device, comprising: a main shell having a bottom wall and side walls surrounding the bottom wall; a cover for covering the upper opening of the main shell to define a test cavity; and a piezoelectric motion module, arranged in the test cavity, for moving a sample to be tested and a probe to perform a test operation, wherein the piezoelectric motion module includes a piezoelectric element, and the piezoelectric element is deformed under a voltage signal to move the sample to be tested and the probe.

[0010] In one embodiment, the piezoelectric motion module includes a plurality of probe motion components, each of which includes: a first stacking structure, including a plurality of first stator layers and a plurality of first piezoelectric layers stacked alternately, the plurality of first piezoelectric layers including a first-direction piezoelectric layer and a second-direction piezoelectric layer, the first-direction piezoelectric layer generates a deformation displacement along a first direction under a voltage signal, the second-direction piezoelectric layer generates a deformation displacement along a second direction under a voltage signal, and the second direction is perpendicular to the first direction; a second stacking structure, supported by a support above the first stacking structure, includes a plurality of second stator layers and a plurality of second piezoelectric layers stacked alternately, the second piezoelectric layer generates a deformation displacement along a third direction under a voltage signal, and the third direction is perpendicular to the first direction and the second direction, so that the probe motion component can move the probe mounted thereon in the first direction, the second direction and the third direction.

[0011] In one embodiment, the stacking direction of the first stacking structure is set to be in a vertical direction, the stacking direction of the second stacking structure is set to be in a horizontal direction, the support member connects the topmost first stator layer of the first stacking structure and the bottommost second stator layer of the second stacking structure, and separates the second stacking structure from the first stacking structure by a distance, and the probe is arranged on the topmost second stator layer of the second stacking structure.

[0012] In one embodiment, the piezoelectric motion module also includes a sample motion component, which includes: a piezoelectric rotational motion component for providing rotational motion; and a piezoelectric displacement motion component for providing in-plane translational motion, the piezoelectric displacement motion component includes a plurality of stator layers and a plurality of piezoelectric sublayers stacked alternately, the plurality of piezoelectric sublayers include a first-direction piezoelectric sublayer and a second-direction piezoelectric sublayer, the first-direction piezoelectric sublayer generates a deformation displacement along a first direction under a voltage signal, the second-direction piezoelectric sublayer generates a deformation displacement along a second direction under a voltage signal, and the second direction is perpendicular to the first direction.

[0013] In one embodiment, the sample platform is supported on the sample motion assembly, and at least four probe motion assemblies and corresponding probes are arranged around the sample platform.

[0014] In one embodiment, the main shell includes one or more of the following items: a refrigeration interface for connecting to a refrigerator; a vacuum interface for connecting to a vacuum device; one or more sealed cable connectors for connecting to peripheral devices; and a plurality of fixing ear structures for fixing to positioning holes on the desktop by bolts.

[0015] In one embodiment, the peripheral device includes: a voltage source for providing a voltage signal to the piezoelectric motion module to control the deformation of the piezoelectric element, thereby controlling the movement of the sample to be tested and the probe; a current source for applying a test current to the sample to be tested; and a voltage detection unit or a current detection unit for measuring the electrical signal on the sample to be tested.

[0016] In one embodiment, the probe station device further includes: a camera, which is disposed above the cover and is aimed at the cover, so as to obtain images of the sample to be tested and the probe in the test cavity.

[0017] In one embodiment, the probe station device also includes: a host computer, the camera and one or more of the peripheral devices are connected to the host computer via a cable, so that the host computer displays the image obtained by the camera and controls the movement of the sample to be tested and the probe based on the image to perform the test process.

[0018] In one embodiment, the probe station device further includes: a bracket disposed in the test cavity, and the piezoelectric motion module is disposed on the bracket.

[0019] The above and other features and advantages of the present invention will become apparent from the following description of exemplary embodiments with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1A schematic diagram showing the appearance of a probe station device according to an embodiment of the utility model is shown;

[0021] Figure 2 A schematic diagram showing the internal structure of a probe station device according to an embodiment of the utility model is shown;

[0022] Figure 3 A schematic diagram showing the internal structure of a probe station device according to another embodiment of the utility model is shown;

[0023] Figure 4 A schematic diagram showing the structure of a piezoelectric motion module for moving a sample of a probe station device according to an embodiment of the present utility model;

[0024] Figure 5 A schematic diagram showing the structure of a piezoelectric motion module for moving a probe of a probe station device according to an embodiment of the utility model;

[0025] Figure 6 A schematic diagram showing a probe station testing system according to an embodiment of the utility model is shown;

[0026] Figures 7A to 7J A schematic diagram showing a motion system calibration and leveling process according to an embodiment of the present invention; and

[0027] Figure 8 A flow chart of a test process performed using a probe station according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0028] Exemplary embodiments of the present invention are described below with reference to the accompanying drawings.

[0029] Figure 1 The figure shows the appearance of a desktop low-temperature probe station device according to an embodiment of the present invention. Figure 1, the probe station device includes a main housing 20 and a cover 30. The main housing 20 can be an insulating housing with a multilayer structure, for example, including an external support layer, a middle insulation layer and an internal support layer, wherein the internal and external support layers can be metal layers, and the middle insulation layer can include any insulation material commonly used in low-temperature equipment, and there is no specific restriction on this. The main housing 20 can have various shapes, such as a circle, a regular polygon, or any irregular shape. The main housing 20 may include a bottom wall and a side wall surrounding the bottom wall, and the top of the main housing 20 may be open to the outside world for easy sample loading and sampling operations. The cover 30 may have an inverted basin shape, or it may also be a plane shape, which can cover the top opening of the main housing 20 in a sealed manner. In one embodiment, a flange structure may be formed at the upper opening edge of the main housing 20, a groove may be formed in the flange structure, an insulating rubber ring may be arranged in the groove, and a flange structure may also be formed at the opening edge of the cover 30, which is pressed on the insulating rubber ring of the main housing 20 to form a seal. Of course, other sealing joint structures may also be formed between the main housing 20 and the cover 30, and the present invention has no specific limitation on this.

[0030] In one embodiment, the cover 30 may be formed of a transparent material such as glass or plastic, or the cover 30 may include an observation window formed of a transparent material, so that the probe and sample position disposed therein, as well as the process of measuring the sample using the probe, can be observed. Figure 1 As shown, a camera 40 may also be provided to observe the position of the probe and the sample in the cavity surrounded by the main housing 20 and the cover 30, so as to perform the measurement process, which will be described in detail below. Although not shown, a frame for supporting the camera 40 may be provided. The frame may be movable, for example, and when loading and sampling, the camera 40 may be moved away by the frame to avoid obstructing the loading and sampling operations; when performing the measurement process, the camera 40 may be moved to the top of the cover 30 by the frame, and aligned with the area where the probe and the sample are provided.

[0031] The main housing 20 may be provided with various interfaces, such as a refrigeration interface 21 for connecting a refrigerator, a vacuum interface 22 for connecting a vacuum device, etc. The probe station device of the utility model can be designed to be suitable for various refrigeration equipment, preferably a small refrigeration equipment, examples of which include but are not limited to Stirling refrigerators, pulse tube refrigerators, GM cycle refrigerators, etc., and the refrigeration interface 21 can be designed for the refrigerator used. Depending on the refrigeration mode of the refrigerator, the refrigeration interface 21 can be formed in an appropriate form to transfer refrigerant or cold. In one embodiment, a refrigeration switch, or a thermal switch, can also be formed at the refrigeration interface 21 to control the efficiency of cold transfer between the refrigerator and the test cavity.

[0032] A plurality of sealed cable connectors 23 may also be provided on the main housing 20, and external circuits such as current sources, voltage sources, measuring devices, control devices, etc. may be connected to circuits provided in the main housing 20 through the sealed cable connectors 23, such as temperature sensors, vacuum sensors, and piezoelectric motion modules for moving probes and samples.

[0033] A plurality of fixing ears 24 may be provided around the lower part of the main housing 20 for fixing the main housing 20 to the positioning holes 12 on the desktop 10 using bolts 14. A buffer pad 11, such as a rubber pad, may be provided between the main housing 20 and the desktop 10 to reduce the vibration of the main housing 20 caused by the vibration of the ground. Although not shown, a buffer pad may also be provided between the support legs of the desktop 10 and the ground to reduce the vibration of the desktop 10.

[0034] Figure 2 FIG. 2 is a schematic diagram showing a structure disposed in a cavity surrounded by a main housing 20 and a cover 30 according to an embodiment of the present invention. Figure 2 As shown, the cavity may include a support 25, which may have various shapes or may include multiple separate support structures, without limitation. Figure 2 The shape and structure shown. In one embodiment, the bracket 25 can be made of a heat-conducting metal material such as copper or stainless steel, and the refrigerator head of the refrigeration equipment can be connected to the bracket 25 through a refrigeration member such as a copper braid to achieve a refrigeration function. In one embodiment, a refrigerant channel can be formed in the bracket 25, and the refrigerant can flow through the channel in the bracket 25 through a pipeline to achieve a refrigeration function. In another embodiment, the bracket 25 can also be formed of ceramic or other insulating materials. Refrigeration lines (not shown) such as commonly used refrigeration coils can also be arranged in the space below the bracket 25 to cool the test environment. In another embodiment, the coil can be omitted, and liquid nitrogen or liquid helium can be directly passed into the chamber for refrigeration, and the liquid helium or liquid nitrogen can be evacuated by a vacuum device, and the cooling temperature of the chamber can be controlled by controlling the flow of liquid nitrogen or liquid helium.

[0035] The piezoelectric motion module including a plurality of probe motion components 50 and a sample motion component 60 is disposed in a test cavity surrounded by the main housing 20 and the cover 30 and can be located on the bracket 25. For example, Figure 2 As shown, the sample motion assembly 60 may be disposed on the support 25, for example, in the central area of ​​the support 25. The sample motion assembly 60 may include a piezoelectric rotation motion member 61, a piezoelectric level shift motion member 62 disposed on the piezoelectric rotation motion member 61, and a sample stage 63 disposed on the piezoelectric level shift motion member 62. It can be understood that the relative positions of the piezoelectric rotation motion member 61 and the piezoelectric level shift motion member 62 may be oppositely disposed, that is, the piezoelectric rotation motion member 61 is located above the piezoelectric level shift motion member 62. Figure 2The sample to be tested, such as a chip 64, is shown disposed on the sample stage 63. The sample to be tested 64 can be fixed on the sample stage 63 using double-sided tape, or a chuck for fixing the sample 64 can be disposed on the sample stage 63. In other embodiments, the sample to be tested 64 can be first fixed on a sample holder (not shown), and then the sample holder can be mounted on the sample stage 63.

[0036] The piezoelectric rotary motion member 61 can provide an in-plane rotational motion, thereby rotating the sample 64 to adapt to the probe position. In one embodiment, the piezoelectric rotary motion member 61 can adopt a piezoelectric rotary device, such as the compact piezoelectric stepping rotary device for extremely low temperature and ultra-high vacuum environment described in the applicant's prior invention patent application CN202111215282.3, the disclosure of which is incorporated herein by reference, and its repeated description is omitted here.

[0037] The piezoelectric translation motion member 62 can provide in-plane translation motion, i.e., translation motion in the X-axis direction and the Y-axis direction, wherein the X-axis and the Y-axis define a plane parallel to the sample to be tested, such as the chip 64. In some embodiments, the piezoelectric translation motion member 62 can be a piezoelectric translation member, and its structure will be described in detail below with reference to the accompanying drawings.

[0038] A plurality of probe motion assemblies 50 are disposed on the support 25 around the sample motion assembly 60, and each probe motion assembly 50 may be provided with a probe 51. Appropriate probes may be selected according to test requirements, such as but not limited to electrical radio frequency and direct current (RF&DC) probes, scanning proton microprobes (SPM) for atomic force microscopes (AFM) and scanning electron microscopes (SEM), etc. Figure 2 Two probe motion assemblies 50a and 50b are shown, on which probes 51a and 51b are respectively arranged, but it should be understood that more probe motion assemblies and corresponding probes may be included, such as four, six, eight, etc., and an odd number of probe motion assemblies and corresponding probes may also be included. Each probe motion assembly 50 can provide three-dimensional translational motion in a plane and in a vertical direction, for example, the movement in a plane can align the probe 51 with the test pad on the sample to be tested 64, and the movement in a vertical direction can press the probe 51 down onto the test pad of the sample to be tested 64 to form an electrical contact, so that a test can be performed. In one embodiment, at least four probe motion assemblies 50 and corresponding probes 51 may be provided to perform a four-probe measurement method.

[0039] As described above, in an exemplary embodiment of the present utility model, the rotational motion component 61 and the translational motion component 62 in the sample motion assembly 60 and the probe motion assembly 50 are each piezoelectric motion devices. As will be described in detail below, the piezoelectric motion device generates displacement by the deformation of the piezoelectric element formed by the piezoelectric material under voltage, and thus has a very high displacement accuracy, and can accurately locate the position of the sample 64 and the probe 51, thereby achieving accurate measurement of small samples. Moreover, the movement amplitude of the piezoelectric motion device can be conveniently controlled by controlling the voltage, which is easy to operate and can achieve automatic measurement. In addition, the piezoelectric motion device is suitable for use in extremely low temperature and ultra-high vacuum environments, and also has the advantage of small size, so the probe station equipment of the present utility model can be made very small and suitable for desktop applications.

[0040] Figure 3 A schematic diagram of the internal structure of a probe station device according to another embodiment of the utility model is shown. Figure 3 The structure shown is Figure 2 Basically similar, except that a magnetic field generating device 70 is also disposed on the bracket 25 . Figure 3 Two electromagnet coils 70a and 70b are shown, which can form Helmholtz coils to provide a magnetic field along the axial direction of the coil. In another embodiment, electromagnet coil pairs can also be arranged in two other directions in three-dimensional space to provide magnetic fields in these directions.

[0041] Figure 4 FIG. 6 is a schematic diagram showing the structure of a piezoelectric displacement motion component 62 in a sample motion assembly 60 of a probe station device according to an embodiment of the present invention. Figure 4 As shown, the piezoelectric displacement motion member 62 includes a plurality of stator layers 65 and a plurality of piezoelectric layers 66 that are alternately stacked, wherein the stator layer 65 may be formed of an insulating material such as ceramic, and each piezoelectric layer 66 is formed of a piezoelectric material. The piezoelectric material deforms when a voltage is applied, thereby generating displacement in a specific direction, and the stator layer 65 and the piezoelectric layer 66 may be fixed to each other by, for example, gluing. Figure 4 In the illustrated embodiment, the plurality of piezoelectric sublayers 66 may include a first direction (e.g., X-axis direction) piezoelectric sublayer 66a and a second direction (e.g., Y-axis direction) piezoelectric sublayer 66b, wherein the first direction and the second direction may be perpendicular to each other. When a voltage signal is applied to the first direction piezoelectric sublayer 66a, its piezoelectric material produces a deformation along the first direction, and when a voltage signal is applied to the second direction piezoelectric sublayer 66b, its piezoelectric material produces a deformation along the second direction. Therefore, by controlling the magnitude of the voltage signal, the plurality of first direction piezoelectric sublayers 66a and second direction piezoelectric sublayers 66b may produce a desired movement within a plane to move the sample 64 to be tested thereon to a desired position.

[0042] Figure 5 FIG. 5 is a schematic diagram showing the structure of a probe motion assembly 50 of a probe station device according to an embodiment of the present utility model. Figure 5 As shown, the probe motion assembly 50 includes a plurality of first stator layers 52 and a plurality of first piezoelectric layers 53 stacked alternately, wherein the stator layer 52 may be formed of an insulating material such as ceramic, and each first movable layer 53 is formed of a piezoelectric material, which is deformed when a voltage is applied, thereby generating a displacement in a specific direction, and the first stator layer 52 and the first movable layer 53 may be fixed to each other by, for example, gluing. The plurality of first movable layers 53 may include a first direction (e.g., X-axis direction) piezoelectric layer 53a and a second direction (e.g., Y-axis direction) piezoelectric layer 53b, wherein the first direction and the second direction may be perpendicular to each other and parallel to the layer plane direction of the first stator layer 52 and the first movable layer 53. When a voltage signal is applied to the first direction piezoelectric layer 53a, its piezoelectric material generates a deformation along the first direction, and when a voltage signal is applied to the second direction piezoelectric layer 53b, its piezoelectric material generates a deformation along the second direction. Therefore, by controlling the magnitude of the voltage signal, the plurality of first-direction piezoelectric sublayers 53a and second-direction piezoelectric sublayers 53b can generate a desired movement within a plane to move the probe 51 thereon (see Figure 2 ) to the desired position.

[0043] The probe motion assembly 50 includes a plurality of second stator layers 54 and a plurality of second piezoelectric stator layers 55 that are alternately stacked. Figure 5 As shown, a plurality of first stator layers 52 and a plurality of first piezoelectric layers 53 are alternately stacked to form a first stacking structure, and a plurality of second stator layers 54 and a plurality of second piezoelectric layers 55 are alternately stacked to form a second stacking structure, wherein the second stacking structure is arranged such that each layer plane thereof is perpendicular to each layer plane of the first stacking structure, or in other words, the stacking direction ( Figure 5 is the horizontal direction) is perpendicular to the stacking direction of the first stacking structure ( Figure 5 The second stacking structure is supported above the first stacking structure by a support member 56, and a distance may be spaced between the two, wherein the support member 56 may connect the uppermost stator layer 52 in the first stacking structure and the lowermost stator layer 52 in the second stacking structure. Figure 5 The stator layer 54 is the rightmost layer in the figure. Figure 5In the illustrated embodiment, the support member 56 and the two stator layers 52 and 54 connected thereto can be formed into an integral structure, i.e., formed into an L shape. As previously mentioned, when a voltage is applied, the piezoelectric sublayer 53a in the first direction (e.g., the X-axis direction) and the piezoelectric sublayer 53b in the second direction (e.g., the Y-axis direction) can be deformed, thereby driving the second stacked structure thereon to move in the XY plane. In addition, when a voltage signal is applied to the plurality of second piezoelectric sublayers 55, they are deformed in a third direction (e.g., the Z-axis direction) perpendicular to both the first direction and the second direction, i.e., the probe 51 can be driven to move in the third direction. Therefore, by using an appropriate voltage signal to control the probe motion assembly 50, movement in a three-dimensional space can be achieved, thereby positioning the probe 51 to a desired position.

[0044] Figure 6 FIG. 1 is a schematic diagram of a probe station testing system 100 according to an embodiment of the present invention. Figure 6 As shown, the probe station test system 100 includes the above-mentioned probe station device 110 installed on the desktop, which can be the probe station device 110 described above. Figure 1-5 The probe station device described, wherein the camera 112 is arranged above the cover and aimed at the sample to be tested in the test cavity, the refrigeration interface 114 on the main housing is connected to the refrigerator 120, although not shown, the vacuum interface on the main housing can also be connected to a vacuum device such as a mechanical pump or a molecular pump. A plurality of sealed cable interfaces 116 on the main housing can be connected to peripheral devices 130 via cables, such as a voltage source, a current source, a voltage detection unit, a current detection unit, a temperature monitoring unit, a vacuum monitoring unit, etc., Figure 6 Only one peripheral device 130 is shown as an example, but there may be multiple peripheral devices. For example, a voltage source can be used to apply a voltage signal to the piezoelectric motion module, thereby controlling the piezoelectric motion module to move the sample and the probe to the desired position, so as to facilitate the measurement process; a voltage source or a current source can be used to apply a measurement signal to the probe, and a voltage detection unit or a current detection unit can be used to measure the electrical signal on the sample. The host computer 140 can control the operation of the refrigerator 120 according to the temperature signal fed back by the temperature monitoring unit to achieve the desired test temperature in the test chamber. The host computer 140 can also control the operation of the vacuum device (not shown) according to the vacuum degree fed back by the vacuum degree monitoring unit to achieve the desired vacuum degree in the test chamber. The camera 112, the refrigerator 120, the peripheral device 130, etc. can all be connected to the host computer 140 through the cable 101, and perform corresponding control or measurement operations under the control of the host computer 140. For example, the camera 112 may feed back real-time images to the host computer 140 , and the host computer 140 may control the positions of the probe and the sample to be measured according to the images to perform corresponding measurement operations.

[0045] It can be understood that the wafer to be tested may include an array of multiple samples to be tested arranged in rows and columns. When testing multiple samples, it is necessary to move the probe in the row or column direction to test each sample. Therefore, in order to reduce the relative movement amplitude, it is desirable to align the row arrangement direction of the samples with the row and column direction of the probe movement, which is also called a leveling operation. Figures 7A to 7I A schematic diagram showing the motion system calibration and leveling process according to an embodiment of the present invention, which uses a two-point calibration method to rotate the sample to achieve horizontal alignment. Fig. 7A , which shows a sample on the wafer to be tested shown in the image obtained by the camera 112, which is recorded as sample S1 here. By moving the sample stage, the crosshair on the screen is aligned with a predetermined feature point on the sample S1, and its coordinates S1 (x1, y1) are obtained.

[0046] Continue to refer to Figure 7B , move the sample to the Nth sample in the same row / line, here recorded as sample S2, align the crosshairs on the screen with the corresponding feature point on sample S2, and obtain its coordinates S2 (x2, y2).

[0047] Then refer to Figure 7C , the host computer 140 controls the piezoelectric motion module to return to the initial feature point S1 (x1, y1), but at this time, due to the error of the piezoelectric motion module and other reasons, the returned point does not coincide with the initial feature point S1, but exists Figure 7C It should be understood that the error is only illustrative and may also return to other positions near the feature point S1.

[0048] Continue to refer to Fig.7D , the piezoelectric motion module is controlled by the host computer 140 so that the crosshairs on the screen coincide with the predetermined feature points on the sample S1, and its new coordinates S1 (x3, y3) are obtained.

[0049] Then, the angle tanθ=(y3-y2) / (x3-x2) between the line connecting the coordinate point S1 (x3, y3) and the coordinate point S2 (x2, y2) relative to the horizontal direction (i.e., the X-axis direction) can be calculated to obtain the angle θ. The angle θ can be compared with a predetermined angle threshold. If θ is greater than the threshold, the host computer 140 controls the sample motion assembly 60 to rotate in the opposite direction by the angle θ, such as Fig. 7E As shown, the two samples are arranged in the horizontal direction (ie, the X-axis direction). If θ is less than or equal to the threshold, it means that the line between samples S1 and S2 is basically in the horizontal direction, and no rotation is required.

[0050] The above process can be repeated until the calculated θ value is less than or equal to a predetermined threshold value, that is, samples S1 and S2 are basically arranged in the horizontal direction. Figure 7FAfter the rotation operation is performed, the host computer 140 controls the piezoelectric motion module to return to the feature point S2, that is, its new position after rotation. At this time, due to the error of the piezoelectric motion module and other reasons, the returned point does not coincide with the feature point S2, but there is Figure 7F It should be understood that the error is only illustrative and may also return to other positions near the feature point S2.

[0051] Reference Figure 7G , the piezoelectric motion module is controlled by the host computer 140 so that the crosshairs on the screen coincide with the predetermined feature points on the sample S2, and its new coordinates S2 (x4, y4) are obtained.

[0052] Then refer to Figure 7H , the piezoelectric motion module is controlled by the host computer 140 to return to the characteristic point S1, that is, the new position after the rotation. At this time, due to the error of the piezoelectric motion module and other reasons, the point returned does not completely coincide with the characteristic point S1.

[0053] Continue to refer to Fig.7I , the piezoelectric motion module is controlled by the host computer 140 so that the crosshair on the screen coincides with the predetermined feature point on the sample S1, and its new coordinates S1 (x5, y5) are obtained.

[0054] Then, the angle tanθ=(y5-y4) / (x5-x4) between the line connecting the coordinate point S1 (x5, y5) and the coordinate point S2 (x4, y4) relative to the horizontal direction (i.e., the X-axis direction) can be calculated to obtain the angle θ. The angle θ can be compared with a predetermined angle threshold. If θ is greater than the threshold, the host computer 140 controls the sample motion assembly 60 to rotate in the opposite direction by an angle θ, such as Figure 7J As shown, the two samples are arranged in the horizontal direction (i.e., the X-axis direction). If θ is less than or equal to the threshold, it means that the line between samples S1 and S2 is basically in the horizontal direction, and no rotation is required, and the leveling operation is completed. The above process can be repeated until the calculated θ angle is less than or equal to the threshold, that is, the line between samples S1 and S2 is basically in the horizontal direction, and the leveling operation is completed.

[0055] Figure 8 FIG. 2 is a flow chart showing a test process 200 using a probe station according to an embodiment of the present invention. Figure 8In step 210, the sample to be tested, such as a wafer, can be mounted on the sample stage 63, and then in step 220, the probe station equipment can be started and initialized. For example, the test conditions, such as temperature, vacuum degree, magnetic field and light field, etc. can be set, the refrigerator 120 can be started to start cooling and cooling, the vacuum equipment can be started to start vacuuming, etc. Initialization can also include starting the camera 40 / 112 to observe the sample to be tested, and setting the coordinate origin of the test, also known as the home point.

[0056] In step 230, the camera 40 / 112 may be used to capture an image of the sample to be tested, and the host computer 140 may be used to set an effective test area, thereby determining the coordinate range of the effective test area. The effective test area may include, for example, all samples to be tested on a wafer.

[0057] At step 240, a motion system calibration and leveling operation may be performed, as described above with reference to 7A to 7I As described above, the description will not be repeated here.

[0058] In step 250, manual testing or automatic testing of the sample may be performed. In the manual testing process, the user may control each probe 51 through the host computer 140, move the probe 51 to contact the test point on the sample, perform the testing process, and the test data may be automatically recorded on the host computer 140. In the automatic testing process, the test pad of the sample to be tested may be automatically identified based on image recognition technology, the probe may be automatically positioned to the test pad, and the testing process may be performed.

[0059] In an embodiment of the present invention, the host computer 140 may be a computer device, which includes a processor and a memory, and the memory may store computer program instructions, and when the instructions are executed by the processor, the host computer 140 may perform the above-mentioned related operations. For example, as described above, the host computer 140 can execute an image recognition algorithm to identify multiple samples to be tested in an effective test area calibrated by a user on a wafer, and then perform an automatic measurement process, which greatly saves manpower.

[0060] Unless the context clearly requires otherwise, throughout the specification and claims, contrary to the exclusive or exhaustive meaning, the words "including", "comprising", etc. should be understood in an inclusive sense, that is, in the sense of "including but not limited to". In the embodiments described above, some commonly used known devices, operations, etc. in the relevant field may be omitted. The wording "connected" generally used here means that two or more elements can be directly connected or connected by means of one or more intermediate elements. In addition, when used in this application, the words "here", "above", "below" and words of similar meanings should refer to the application as a whole, rather than any specific part of the application. When the context permits, the words used in the above description in the singular or plural may also include the plural or singular, respectively. The wording "or" when referring to a list of two or more items covers all of the following interpretations thereof: any item in the list, all items in the list, and any combination of items in the list.

[0061] The above detailed description of the embodiment of the utility model is not intended to be exhaustive or to limit the utility model to the precise form disclosed above. Although the specific embodiment of the utility model and the example for the utility model are described above for the purpose of illustration, as will be appreciated by those skilled in the art, various equivalent modifications within the scope of the utility model are feasible. For example, although a process or block is presented in a given order, an alternative embodiment can perform a process with steps in different orders, or adopt a system with blocks in different orders, and some processes or blocks can be deleted, moved, added, subtracted, combined and / or modified. Each of these processes or blocks can be implemented in a variety of different ways. Similarly, although a process or block is sometimes shown as being executed serially, on the contrary, these processes or blocks can also be executed in parallel, or can be executed at different times.

[0062] Although some embodiments of the utility model have been described, these embodiments have been presented only by way of example, and the embodiments are not intended to limit the scope of the present disclosure. In fact, the novel methods and systems described herein can be implemented in a variety of other forms; in addition, various omissions, substitutions, and changes in the form of the methods and systems described herein can be made without departing from the spirit of the present disclosure. The drawings and their equivalents are intended to cover such forms or modifications that will fall within the scope and spirit of the present disclosure.

Claims

1. A probe station device, characterized in that include: A main housing having a bottom wall and a side wall surrounding the bottom wall; A cover, used to cover the upper opening of the main housing to define a test cavity; as well as The piezoelectric motion module is arranged in the test cavity and is used to move the sample to be tested and the probe to perform the test operation. The piezoelectric motion module includes a piezoelectric element, which is deformed under a voltage signal to move the sample to be tested and the probe.

2. The probe station device according to claim 1, characterized in that The piezoelectric motion module includes a plurality of probe motion components, each of which includes: A first stacking structure, comprising a plurality of first stator layers and a plurality of first piezoelectric sublayers alternately stacked, wherein the plurality of first piezoelectric sublayers include a first-direction piezoelectric sublayer and a second-direction piezoelectric sublayer, wherein the first-direction piezoelectric sublayer generates a deformation displacement along a first direction under a voltage signal, and the second-direction piezoelectric sublayer generates a deformation displacement along a second direction under a voltage signal, and the second direction is perpendicular to the first direction; The second stacking structure is supported by a support above the first stacking structure, and includes a plurality of second stator layers and a plurality of second piezoelectric layers stacked alternately. The second piezoelectric layers generate deformation displacement along a third direction under a voltage signal, and the third direction is perpendicular to the first direction and the second direction, so that the probe motion assembly can move the probe mounted thereon in the first direction, the second direction and the third direction.

3. The probe station device as claimed in claim 2, characterized in that, The stacking direction of the first stacking structure is set to be in a vertical direction, and the stacking direction of the second stacking structure is set to be in a horizontal direction. The support connects the topmost first stator layer of the first stacking structure and the bottommost second stator layer of the second stacking structure, and separates the second stacking structure from the first stacking structure by a distance. The probe is arranged on the topmost second stator layer of the second stacking structure.

4. The probe station device as claimed in claim 2, characterized in that, The piezoelectric motion module further includes a sample motion component, and the sample motion component includes: a piezoelectric rotational motion member for providing rotational motion; and A piezoelectric displacement motion component for providing in-plane translational motion, the piezoelectric displacement motion component comprising a plurality of stator layers and a plurality of piezoelectric layers alternately stacked, the plurality of piezoelectric layers comprising a first-direction piezoelectric layer and a second-direction piezoelectric layer, the first-direction piezoelectric layer generating a deformation displacement along a first direction under a voltage signal, the second-direction piezoelectric layer generating a deformation displacement along a second direction under a voltage signal, the second direction being perpendicular to the first direction.

5. The probe station device according to claim 4, characterized in that, The sample stage is supported on the sample motion assembly, and at least four probe motion assemblies and corresponding probes are arranged around the sample stage.

6. The probe station device according to any one of claims 1 to 5, characterized in that: The main housing includes one or more of the following: A refrigeration interface for connecting to a refrigeration machine; A vacuum interface for connecting to a vacuum extraction device; one or more sealed cable glands for connection to peripheral equipment; A plurality of fixing ear structures for fixing to the positioning holes on the table top by bolts.

7. The probe station device according to claim 6, characterized in that, The peripheral devices include: A voltage source, used to provide a voltage signal to the piezoelectric motion module to control the deformation of the piezoelectric element, thereby controlling the movement of the sample to be tested and the probe; a current source for applying a test current to the sample to be tested; and The voltage detection unit or the current detection unit is used to measure the electrical signal on the sample to be tested.

8. The probe station device as claimed in claim 7, characterized in that Also includes: A camera is arranged above the cover and aimed at the cover to obtain images of the sample to be tested and the probe in the test cavity.

9. The probe station device as claimed in claim 8, characterized in that Also includes: A host computer, the camera and one or more of the peripheral devices are connected to the host computer via a cable, so that the host computer displays the image obtained by the camera and controls the movement of the sample to be tested and the probe based on the image to perform the test process.

10. The probe station device according to any one of claims 1 to 5, characterized in that Also includes: A bracket is arranged in the test cavity, and the piezoelectric motion module is arranged on the bracket.

Images