Anti-falling fastening connecting piece for photoetching machine

Abstract

The utility model relates to the technical field of photoetching machine equipment, in particular to an anti-falling fastening connecting piece for a photoetching machine, which is used for fixing a light-transmitting mirror arranged in a main body of the photoetching machine, and comprises a fastening piece mechanism for fixing the light-transmitting mirror, the fastening piece mechanism comprises a bottom fixing piece and an upper fixing piece, the top end of the outer wall of the bottom fixing part is provided with a containing groove, the light-transmitting mirror is arranged in the containing groove, and the bottom fixing part and the upper fixing part are provided with fixing assemblies for fixing the light-transmitting mirror. Then a threaded rod is screwed to enable a side pressing block to abut against and fix the outer wall of the light-transmitting mirror from the side end, an upper fixing piece is taken out after fixation is completed, the upper fixing piece can be fixed to the top end of the outer wall of a bottom fixing piece, and then the light-transmitting mirror is pressed and fixed from the top end, so that the fixing effect on the light-transmitting mirror can be improved through the mode; and the light transmitting mirror is prevented from falling off.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography equipment, and in particular to an anti-falling fastening connector for a photolithography machine. Background Art

[0002] The photolithography machine is an important device used in the semiconductor manufacturing process. It is mainly used to transfer circuit patterns on silicon wafers. In the photolithography machine, a light-transmitting mirror is needed to adjust and focus the light beam emitted by the light source to ensure that the pattern is projected onto the photoresist coating with high precision. Therefore, the light-transmitting mirror is crucial to the image quality, resolution and exposure uniformity. The light-transmitting mirror of the photolithography machine is mostly fixed at the position of the light path of the light source or reflector.

[0003] Most of the existing light-transmitting mirrors are installed and fixed by means of a disc-type support frame, and personnel need to place the light-transmitting mirror in an annular groove opened at the top of the support frame, and then fix the light-transmitting mirror by setting a top block at the side end. However, this fixing method is prone to cause the top block to loosen and the light-transmitting mirror to loosen and fall off due to negligence of personnel, making the light-transmitting mirror easily damaged during use. Therefore, the existing light-transmitting mirror fasteners still have certain shortcomings when used.

[0004] In summary, it is necessary to invent a fastening connector for a photolithography machine that prevents it from falling off. Utility Model Content

[0005] To this end, the utility model provides an anti-falling fastening connector for a photolithography machine to solve the problem that due to negligence of personnel, the top block becomes loose and causes the light transmitting mirror to become loose and fall off, causing the light transmitting mirror to be easily damaged during use.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: an anti-falling fastening connector for a lithography machine, which is used to fix a light-transmitting mirror arranged in a main body of the lithography machine, and includes a fastener mechanism for fixing the light-transmitting mirror, the fastener mechanism includes a bottom fixing member and an upper fixing member, a placement groove is provided at the top of an outer wall of the bottom fixing member, the light-transmitting mirror is arranged in the placement groove, the upper fixing member is pressed above the top of the outer wall of the light-transmitting mirror, and fixing components for fixing the light-transmitting mirror are arranged on the bottom fixing member and the upper fixing member.

[0007] Preferably, the fixing assembly comprises a side pressure block, and a plurality of the side pressure blocks are arranged on the inner wall of the placement groove in a circular array and are located on the outer side of the light-transmitting mirror.

[0008] Preferably, the inner wall of the placement groove and the position corresponding to the side pressure block are provided with a storage groove, the outer wall of the side pressure block away from the light-transmitting mirror is rotatably connected with a threaded rod, and the end of the threaded rod away from the side pressure block is threadedly connected to the screw hole opened at the corresponding position of the bottom fixing piece.

[0009] Preferably, the bottom end of the outer wall of the upper fixing member is convex, the convex end of the upper fixing member is slidably connected to the inner wall of the placement groove, and through grooves are provided at the upper and lower ends of the outer wall of the upper fixing member and at positions corresponding to the light-transmitting mirror.

[0010] Preferably, a pressing groove is provided on the outer wall of the raised end of the upper fixing member and at a position corresponding to the side pressing block, the inner wall of the pressing groove is slidably connected to the outer wall of the side pressing block, and the pressing groove is provided on the outer side of the through groove.

[0011] Preferably, the bottom fixing member is fixedly connected to the upper fixing member by bolts, and an arc-shaped abutment block is provided at the rear end of the outer wall of the bottom fixing member.

[0012] Preferably, the front end of the outer wall of the arc-shaped abutment block is arranged in an arc shape, the front end of the outer wall of the arc-shaped abutment block abuts against the rear end of the outer wall of the bottom fixing member, and side fixing blocks are integrally fixed on both sides of the outer wall of the arc-shaped abutment block, and the side fixing blocks are fixed to the rear end of the outer wall of the bottom fixing member by bolts.

[0013] Preferably, side fixing plates are fixed to both sides of the outer wall of the arc-shaped abutment block and at one end away from the bottom fixing piece, and the side fixing plates are fixedly connected to the internal fixing pieces of the photolithography machine body by bolts.

[0014] The beneficial effects of the utility model are:

[0015] In the utility model, personnel can first place the light transmitting mirror in the placement groove, and then screw the threaded rod to make the side pressure block press and fix the outer wall of the light transmitting mirror from the side end, and after completion, take out the upper fixing piece so that the upper fixing piece can be fixed on the top of the outer wall of the bottom fixing piece, and then press and fix the light transmitting mirror from the top. The above method can improve the fixing effect of the light transmitting mirror, avoid the light transmitting mirror from falling off, and facilitate personnel to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the installation structure of the fastener mechanism in the main body of the photolithography machine in the utility model;

[0017] Figure 2 It is a schematic diagram of the external structure of the fastener mechanism in the utility model in the front view direction;

[0018] Figure 3 It is a partial cross-sectional structural schematic diagram of the fastener mechanism in the utility model in the front view direction;

[0019] Figure 4 It is a schematic diagram of a part of the structure of the fastener mechanism in the utility model when viewed from above;

[0020] Figure 5 It is a three-dimensional structural schematic diagram of the upper fixing member in the utility model;

[0021] Figure 6 It is a schematic diagram of the three-dimensional structure of the arc-shaped abutment block in the utility model when viewed from above.

[0022] In the figure, 100 is the main body of the lithography machine; 200 is the fastener mechanism; 210 is the bottom fixing member; 211 is the placement groove; 220 is the threaded rod; 230 is the side pressure block; 240 is the upper fixing member; 241 is the through groove; 242 is the pressure groove; 250 is the arc-shaped abutment block; 251 is the side fixing block; 252 is the side fixing plate; 300 is the light-transmitting mirror. DETAILED DESCRIPTION

[0023] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0024] Refer to the attached Figure 1-6 The utility model provides an anti-dropping fastening connector for a photolithography machine, including a fastener mechanism 200 for fixing a light-transmitting mirror 300 arranged in a photolithography machine body 100, and the fastener mechanism 200 is arranged below the light source of the photolithography machine body 100, and the fastener mechanism 200 includes a bottom fixing member 210 and an upper fixing member 240, and a placement groove 211 is provided at the top of the outer wall of the bottom fixing member 210, and the light-transmitting mirror 300 is arranged in the placement groove 211, and the upper fixing member 240 is pressed above the top of the outer wall of the light-transmitting mirror 300, and the bottom fixing member 210 can support the light-transmitting mirror 300, and the upper fixing member 240 can be fixed to the light-transmitting mirror 300 from the top, so that the light-transmitting mirror 300 can be stably fixed in the bottom fixing member 210;

[0025] The bottom fixing member 210 and the upper fixing member 240 are provided with a fixing assembly for fixing the light-transmitting mirror 300, and the fixing assembly includes a side pressing block 230. A plurality of side pressing blocks 230 are arranged on the inner wall of the placement groove 211 in a circular array and are located on the outer side of the light-transmitting mirror 300. The inner wall of the placement groove 211 and the positions corresponding to the side pressing blocks 230 are provided with storage grooves. The storage grooves are provided for temporarily storing the side pressing blocks 230 when personnel take and place the light-transmitting mirror 300. The outer wall of the side of the pressing block 230 away from the light-transmitting mirror 300 is rotatably connected with a threaded rod 220, and one end of the threaded rod 220 away from the side pressing block 230 is threadedly connected to a screw hole opened at a corresponding position of the bottom fixing member 210. Specifically, after placing the light-transmitting mirror 300, the personnel can rotate the threaded rod 220 so that the threaded rod 220 drives the side pressing block 230 to move toward the light-transmitting mirror 300, so that the light-transmitting mirror 300 can be tightened and fixed from multiple directions;

[0026] The bottom end of the outer wall of the upper fixing member 240 is convexly arranged, and the convex end of the upper fixing member 240 is slidably connected to the inner wall of the placement groove 211. The upper fixing member 240 is convexly arranged so that it can press and fix the outer edge of the light-transmitting mirror 300 after being fixed to the bottom fixing member 210. A layer of rubber pad can be arranged at the bottom of the convex end of the upper fixing member 240 to protect the light-transmitting mirror 300. The upper and lower ends of the outer wall of the upper fixing member 240 and the positions corresponding to the light-transmitting mirror 300 are penetrated. A through groove 241 is provided, and the through groove 241 is provided to facilitate the light to be emitted through the light-transmitting mirror 300. A pressing groove 242 is provided on the outer wall of the protruding end of the upper fixing member 240 and at the position corresponding to the side pressing block 230. The inner wall of the pressing groove 242 is slidably connected to the outer wall of the side pressing block 230. The pressing groove 242 is provided on the outer side of the through groove 241, and the pressing groove 242 is provided to accommodate the side pressing block 230, thereby improving the fixing stability of the bottom fixing member 210 and the upper fixing member 240.

[0027] The bottom fixing piece 210 is fixedly connected to the upper fixing piece 240 by bolts, and an arc-shaped abutting block 250 is provided at the rear end of the outer wall of the bottom fixing piece 210. The front end of the outer wall of the arc-shaped abutting block 250 is arranged in an arc shape, and the front end of the outer wall of the arc-shaped abutting block 250 abuts against the rear end of the outer wall of the bottom fixing piece 210. Side fixing blocks 251 are integrally fixed on both sides of the outer wall of the arc-shaped abutting block 250, and the side fixing blocks 251 are fixed to the rear end of the outer wall of the bottom fixing piece 210 by bolts. Side fixing plates 252 are fixed to both sides of the outer wall of the arc-shaped abutting block 250 and at one end away from the bottom fixing piece 210, and the side fixing plates 252 are fixedly connected to the internal fixing pieces of the photolithography machine body 100 by bolts. Specifically, personnel can fix the arc-shaped abutting block 250 to the rear side of the outer wall of the bottom fixing piece 210 by bolts and the side fixing blocks 251, and then fix the fastener mechanism 200 to the corresponding position inside the photolithography machine body 100 by bolts and the side fixing plates 252.

[0028] The use process of the utility model is as follows: first, the personnel can remove the upper fixing member 240, and rotate the threaded rod 220 to retract the side pressure block 230 into the storage groove, and then the personnel can take out the light-transmitting mirror 300 and place the light-transmitting mirror 300 in the placement groove 211. After the placement is completed, the personnel can selectively thread the threaded rod 220 so that the threaded rod 220 drives the side pressure block 230 to move toward the light-transmitting mirror 300, and the side pressure block 230 can perform the initial tightening and fixing of the light-transmitting mirror 300 from the side wall of the light-transmitting mirror 300. After the fixing is completed, the personnel take out the upper fixing member 240, and align the pressure groove 242 with the side pressure block 230. 0 After alignment, the upper fixing member 240 is installed on the bottom fixing member 210 from the top, so that the bottom protruding end of the upper fixing member 240 can press and fix the light-transmitting mirror 300 from the top. After completion, the upper fixing member 240 and the bottom fixing member 210 are fixedly connected by bolts, and then the arc abutment block 250 is taken out, and the personnel can fix the arc abutment block 250 to the rear side of the outer wall of the bottom fixing member 210 by bolts and side fixing blocks 251, and then fix the fastener mechanism 200 to the corresponding position inside the lithography machine body 100 by bolts and side fixing plates 252 for use.

[0029] The above is only a preferred embodiment of the utility model. Any person skilled in the art may modify the utility model by using the above technical solution or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement based on the technical solution of the utility model shall fall within the scope of protection claimed by the utility model.

Claims

1. A fastening connector for preventing a photolithography machine from falling off, which is used to fix a light-transmitting mirror (300) arranged in a photolithography machine body (100), characterized in that: The invention comprises a fastener mechanism (200) for fixing a light-transmitting mirror (300), the fastener mechanism (200) comprising a bottom fixing member (210) and an upper fixing member (240), a placement groove (211) being provided at the top of an outer wall of the bottom fixing member (210), the light-transmitting mirror (300) being arranged in the placement groove (211), the upper fixing member (240) being pressed against the top of the outer wall of the light-transmitting mirror (300), and fixing components for fixing the light-transmitting mirror (300) being arranged on the bottom fixing member (210) and the upper fixing member (240).

2. The anti-falling fastening connector for a photolithography machine according to claim 1, characterized in that: The fixing assembly comprises a side pressing block (230), and a plurality of the side pressing blocks (230) are arranged on the inner wall of the placement groove (211) in a circular array and are located outside the light-transmitting mirror (300).

3. The anti-falling fastening connector for a photolithography machine according to claim 2, characterized in that: The inner wall of the placement groove (211) and the position corresponding to the side pressure block (230) are both provided with a receiving groove, and the outer wall of the side pressure block (230) away from the light-transmitting mirror (300) is rotatably connected with a threaded rod (220), and one end of the threaded rod (220) away from the side pressure block (230) is threadedly connected to a screw hole provided at a corresponding position of the bottom fixing member (210).

4. The anti-falling fastening connector for a photolithography machine according to claim 2, characterized in that: The bottom end of the outer wall of the upper fixing member (240) is convexly arranged, and the convex end of the upper fixing member (240) is slidably connected to the inner wall of the placement groove (211). Through grooves (241) are provided through the upper and lower ends of the outer wall of the upper fixing member (240) and at positions corresponding to the light-transmitting mirror (300).

5. The anti-falling fastening connector for a photolithography machine according to claim 4, characterized in that: A pressing groove (242) is provided on the outer wall of the protruding end of the upper fixing member (240) and at a position corresponding to the side pressing block (230). The inner wall of the pressing groove (242) is slidably connected to the outer wall of the side pressing block (230). The pressing groove (242) is provided on the outer side of the through groove (241).

6. The anti-falling fastening connector for a photolithography machine according to claim 2, characterized in that: The bottom fixing member (210) and the upper fixing member (240) are fixedly connected by bolts, and an arc-shaped abutment block (250) is provided at the rear end of the outer wall of the bottom fixing member (210).

7. The anti-falling fastening connector for a photolithography machine according to claim 6, characterized in that: The front end of the outer wall of the arc-shaped abutting block (250) is arranged in an arc shape, and the front end of the outer wall of the arc-shaped abutting block (250) abuts against the rear end of the outer wall of the bottom fixing member (210). Side fixing blocks (251) are integrally fixed to both sides of the outer wall of the arc-shaped abutting block (250), and the side fixing blocks (251) are fixed to the rear end of the outer wall of the bottom fixing member (210) by bolts.

8. The anti-falling fastening connector for a photolithography machine according to claim 7, characterized in that: Side fixing plates (252) are fixed on both sides of the outer wall of the arc-shaped abutment block (250) and at one end away from the bottom fixing piece (210), and the side fixing plates (252) are fixedly connected to the internal fixing piece of the photolithography machine body (100) by bolts.

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