Piece pusher capable of adjusting length of push plate

Abstract

The utility model discloses a piece pusher capable of adjusting the length of a push plate, and relates to the technical field of piece pushers. The first push plate is vertically connected to one end of the push rod, a sliding groove is formed in the first push plate in the length direction, at least one end of the sliding groove in the length direction extends to the end face of the first push plate in the length direction, and the sliding groove extends to the end face of the end, away from the push rod, of the first push plate in the width direction; a clamping groove communicated with the sliding groove is formed in the side wall, adjacent to the push rod, of the first push plate. The auxiliary push plate is slidably arranged in the sliding groove, and the end, away from the push rod, of the auxiliary push plate is flush with the end, away from the push rod, of the first push plate. The self-locking fixing device is arranged in the clamping groove in a sliding mode, and the self-locking fixing device is used for fixing the relative positions of the first push plate and the auxiliary push plate in a self-locking mode. According to the utility model, the length of the auxiliary push plate extending out of the first push plate can be adjusted according to the number of transferred wafers, so that the transfer of a specific number of wafers can be completed at one time.

Description

Technical Field

[0001] The utility model relates to the technical field of film pushers, and more specifically to a film pusher with an adjustable push plate length. Background Art

[0002] Regarding the problem of transferring specific positions and specific numbers of wafers between different cassettes: large-sized wafers have large volume and mass, and the normal cassette inversion action is not suitable for the transfer of large-sized wafers, which requires the use of a wafer pusher. The wafer pusher currently used in the process of inverting the cassette transfers all the wafers in the entire cassette, and cannot achieve directional transfer of specific positions and specific numbers of wafers in the cassette. The length of the pusher plate used in the current prior art is almost the same as the length between the H-U of the cassette (see the attached manual). Figure 1 And the instruction manual Figure 2 ), each time it is used, all the wafers in the Cassette (between the H and U heads) will be transferred, and it is impossible to achieve the directional transfer of a specific number of wafers at a specific position in the Cassette. The existing pusher baffle is a fixed structure, and the length of the pusher baffle cannot be changed. It is not used in conjunction with the push and take of different numbers of wafers, and is not suitable for the need to push a specific number of wafers from a full Cassette wafer. At the same time, the existing pusher cannot achieve the function of quantitatively transferring a specific number of wafers; the suction pen sucks the wafers one by one, which is time-consuming, inefficient, and risky, and is prone to scratches or damage during the transfer process.

[0003] Therefore, how to provide a wafer pusher that can be used to quantitatively transfer large-sized wafers at any position of the Cassette is a problem that those skilled in the art urgently need to solve. Utility Model Content

[0004] In view of this, the utility model provides a wafer pusher with an adjustable push plate length, aiming to solve one of the problems in the above-mentioned background technology, realize the adjustment of the push plate length of the wafer pusher, and achieve the purpose of directional transfer of different numbers of wafers.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The utility model provides a film pusher with adjustable push plate length, comprising:

[0007] Putting;

[0008] A first push plate is vertically connected to one end of the push rod, a slide groove is arranged on the first push plate along its length direction, at least one end of the slide groove in its length direction extends to the end surface of the first push plate in the length direction, and the slide groove extends in its width direction to the end surface of the first push plate away from one end of the push rod, and a clamping groove connected to the slide groove is arranged on a side wall of the first push plate adjacent to the push rod;

[0009] An auxiliary push plate is slidably disposed in the slide groove, and one end of the auxiliary push plate away from the push rod is flush with one end of the first push plate away from the push rod;

[0010] The self-locking fixing device is slidably disposed in the card slot, and the self-locking fixing device is used to self-lock and fix the relative positions of the first push plate and the auxiliary push plate.

[0011] The film pusher with adjustable push plate length provided by the utility model further includes a second push plate, which is connected to an end of the push rod away from the first push plate, and the second push plate is parallel to the first push plate.

[0012] According to the film pusher with adjustable push plate length provided by the utility model, the length of the auxiliary push plate is less than or equal to the length of the slide groove.

[0013] According to the sheet pusher with adjustable push plate length provided by the utility model, the push rod is connected to one end of the first push plate, and the push rod is connected to the middle position of the second push plate.

[0014] According to the film pusher with adjustable push plate length provided by the utility model, the length of the second push plate is smaller than the length of the first push plate.

[0015] According to the wafer pusher with adjustable push plate length provided by the utility model, when the wafer pusher is used to fill the wafer jam with wafers, the height of the full wafer jam is greater than the length of the second push plate, and less than or equal to the sum of the length of the first push plate and the maximum stroke of the auxiliary push plate that can slide out of the first push plate.

[0016] According to the film pusher with adjustable push plate length provided by the utility model, the clamping slot is a structure with closed ends.

[0017] It can be known from the above technical scheme that compared with the prior art, the utility model discloses a film pusher with an adjustable push plate length, by slidably arranging an auxiliary push plate in the slide groove on the first push plate, when transferring chips at any position of a full chip jam to an empty chip jam, the length of the auxiliary push plate extending out of the first push plate can be adjusted according to the number of transferred chips, thereby realizing the transfer of a specific number of chips at one time, thereby avoiding scratches or damages to adjacent chips caused by multiple transfers. The film pusher provided by the utility model can flexibly and efficiently realize the function of directional and quantitative inverted cassette of chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0019] Figure 1 It is a structural schematic diagram of a film pusher in the prior art;

[0020] Figure 2 It is a structural schematic diagram of the use process of the film pusher in the prior art;

[0021] Figure 3 A schematic diagram of the structure of a film pusher with adjustable push plate length provided by the utility model;

[0022] Figure 4 A schematic diagram of the structure of the sheet pusher with adjustable push plate length provided by the utility model in a use state;

[0023] Figure 5 A schematic diagram of the structure of the film pusher with adjustable push plate length provided by the utility model in another use state;

[0024] Figure 6 The present invention is a schematic structural diagram of a film pusher with adjustable push plate length in another use state.

[0025] In the figure: 1 is a push rod; 2 is a first push plate; 3 is an auxiliary push plate; 4 is a self-locking fixing device; 5 is a slide groove; 6 is a card slot; 7 is a second push plate; 8 is a full wafer card plug; 9 is an empty card plug. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] See also Figure 1 and Figure 2 , is the structure of the film pusher in the prior art, and the length of the push plate cannot be adjusted. For this reason, the utility model provides the following film pusher with adjustable push plate length.

[0028] See also Figure 3-6 The embodiment of the utility model discloses a film pusher with adjustable push plate length, comprising: a push rod 1, a first push plate 2, an auxiliary push plate 3 and a self-locking fixing device 4.

[0029] Among them, the first push plate 2 is vertically connected to one end of the push rod 1, and a slide groove 5 is arranged on the first push plate 2 along its length direction. At least one end of the slide groove 5 in its length direction extends to the end surface of the first push plate 2 in the length direction, and the slide groove 5 extends in the width direction to the end surface of the first push plate 2 away from one end of the push rod 1, and a card groove 6 connected with the slide groove 5 is arranged on a side wall of the first push plate 2 adjacent to the push rod 1.

[0030] The auxiliary push plate 3 is slidably disposed in the slide groove 5, and the end of the auxiliary push plate 3 away from the push rod 1 is flush with the end of the first push plate 2 away from the push rod 1. When the auxiliary push plate 3 slides in the slide groove 5, the end surface of the auxiliary push plate 3 and the end of the first push plate 2 away from the push rod 1 are always kept flush.

[0031] The self-locking fixing device 4 is slidably disposed in the card slot 6, and the self-locking fixing device 4 is used to self-lock and fix the relative positions of the first push plate 2 and the auxiliary push plate 3. In this embodiment, the self-locking fixing device 4 adopts the self-locking fixing device 4 in the prior art, such as the structure used on the wallpaper knife. When the auxiliary push plate 3 slides out of the first push plate 2 for a certain distance, the self-locking fixing device 4 can lock or damp the auxiliary push plate 3 to prevent the auxiliary push plate 3 from sliding into the slide slot 5 under the action of its gravity. When it is necessary to adjust the length of the auxiliary push plate 3 extending out of the first push plate 2, the user pushes the self-locking fixing device 4, thereby driving the auxiliary push plate 3 to slide in the slide slot 5.

[0032] In some embodiments, the film pusher with adjustable push plate length provided by the utility model further includes a second push plate 7, which is connected to the end of the push rod 1 away from the first push plate 2, and the second push plate 7 is parallel to the first push plate 2. Through the arrangement of the second push plate 7, the second push plate 7 can also push the transfer of the wafer by utilizing the second push plate 7 when the wafer is transferred; at the same time, the arrangement of the second push plate 7 facilitates the use of the second push plate 7 to push the film pusher when the first push plate 2 is used to transfer the wafer. In this embodiment, the length of the push rod 1 is greater than the distance that the wafer needs to be pushed.

[0033] In some embodiments, the length of the auxiliary push plate 3 is less than or equal to the length of the slide slot 5. With this arrangement, when the auxiliary push plate 3 does not need to be extended out of the first push plate 2, the auxiliary push plate 3 can be stored in the slide slot 5.

[0034] In some embodiments, the push rod 1 is connected to one end of the first push plate 2, and the push rod 1 is connected to the middle position of the second push plate 7. Such an arrangement facilitates driving the film pusher during the film pushing process.

[0035] In some embodiments, the length of the second push plate 7 is less than the length of the first push plate 2. With this arrangement, when the number of wafers to be transferred is small, the second push plate 7 can be used to push and transfer the wafers, and when the number of wafers to be transferred is greater than the length of the second push plate 7, the first push plate 2 and the auxiliary push plate 3 are used to push and transfer the wafers.

[0036] In some embodiments, when the wafers in the wafer plug 8 are filled with wafers by using a wafer pusher, the height of the full wafer plug 8 is greater than the length of the second push plate 7, and is less than or equal to the sum of the length of the first push plate 2 and the maximum stroke that the auxiliary push plate 3 can slide out of the first push plate 2. With such a configuration, when the height occupied by the number of wafers to be pushed is greater than the length of the second push plate 7, and is less than or equal to the sum of the length of the first push plate 2 and the maximum stroke that the auxiliary push plate 3 can slide out of the first push plate 2, when the sum of the lengths extended by the first push plate 2 and the auxiliary push plate 3 is equal to the height of the number of wafers to be pushed, all the wafers to be transferred can be transferred to the empty plug 9 at one time, and at the same time, it can be ensured that all the wafers in the full wafer plug 8 are transferred to the empty plug 9 at one time by using the first push plate 2 and the auxiliary push plate 3; and when the height of the full wafer plug 8 is greater than the length of the second push plate 7, it can be ensured that the wafers in the full wafer plug 8 are effectively pushed by using the second push plate 7.

[0037] In other embodiments, the slot 6 is a structure with both ends closed, so as to prevent the self-locking fixing device 4 from slipping out of the slot 6.

[0038] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0039] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A film pusher with adjustable push plate length, characterized in that: include: Putting; A first push plate is vertically connected to one end of the push rod, a slide groove is arranged on the first push plate along its length direction, at least one end of the slide groove in its length direction extends to the end surface of the first push plate in the length direction, and the slide groove extends in its width direction to the end surface of the first push plate away from one end of the push rod, and a clamping groove connected to the slide groove is arranged on a side wall of the first push plate adjacent to the push rod; An auxiliary push plate is slidably disposed in the slide groove, and one end of the auxiliary push plate away from the push rod is flush with one end of the first push plate away from the push rod; The self-locking fixing device is slidably disposed in the card slot, and the self-locking fixing device is used to self-lock and fix the relative positions of the first push plate and the auxiliary push plate.

2. The film pusher with adjustable push plate length according to claim 1, characterized in that: It also includes a second push plate, which is connected to an end of the push rod away from the first push plate, and the second push plate is parallel to the first push plate.

3. The film pusher with adjustable push plate length according to claim 1 or 2, characterized in that: The length of the auxiliary push plate is less than or equal to the length of the slide groove.

4. The film pusher with adjustable push plate length according to claim 2, characterized in that: The push rod is connected to one end of the first push plate, and the push rod is connected to the middle position of the second push plate.

5. The film pusher with adjustable push plate length according to claim 2, characterized in that: The length of the second push plate is smaller than the length of the first push plate.

6. The film pusher with adjustable push plate length according to claim 5, characterized in that: When the wafer pusher is used to empty the wafer jam of the wafers, the height of the full wafer jam is greater than the length of the second push plate, and less than or equal to the sum of the length of the first push plate and the maximum stroke of the auxiliary push plate that can slide out of the first push plate.

7. The film pusher with adjustable push plate length according to claim 1, characterized in that: The card slot is a structure with two ends closed.

Images