Board separating device

Abstract

The utility model relates to the field of semiconductors, and discloses a board dividing device which comprises a board dividing assembly and a board dividing assembly, and the board dividing assembly comprises a first board dividing mechanism; the groove structure comprises a rolling element and a groove body, the rolling element is connected with the groove body, and the first board dividing mechanism is arranged on one side of any groove opening; rolling elements are arranged between the wall plate and the bottom plate in the height direction of the wall plate, a limiting notch is formed between the wall plate and the bottom plate, the rolling elements are arranged on the side, away from the groove cavity, of the limiting notch, and the multiple rolling elements and the limiting notch are arranged in the length direction of the wall plate. In order to solve the problem that chips which are not completely packaged are damaged in the board splitting process, according to the board splitting device, a substrate is contained in a groove cavity of a groove body, the substrate is limited through a limiting notch, and a rolling element is arranged in the length direction of a wall board, so that in the process that the substrate moves towards a first board splitting mechanism in the groove cavity, the substrate is separated from the first board splitting mechanism; and the guide element is in rolling contact with the rolling element for guiding, so that the scratch of the substrate in the moving process is reduced, and the moving resistance of the substrate is reduced.

Description

Technical Field

[0001] The present application belongs to the field of semiconductors, and in particular, relates to a panel separation device. Background Art

[0002] Chip packaging is an important part of the semiconductor manufacturing process. It involves cutting and sealing the processed wafers, connecting the circuits with external devices, and providing mechanical protection for semiconductor products to prevent them from being damaged by physical, chemical and other environmental factors. The traditional chip packaging process includes bonding the chip to the packaging substrate, welding the chip pins to the connection points on the substrate with gold wires or aluminum wires, i.e. bonding, injecting and curing the packaging glue, and installing the packaging cover.

[0003] However, some special chips, such as WMC modules, need to be tested for depaneling without injection, curing and packaging cover of encapsulation glue. Conventional chip testing uses a robot for mobile positioning. Since the WMC module is not protected by a plastic package, there is a risk of damage during the depaneling process. Utility Model Content

[0004] The embodiment of the present application provides a panel separation device, which can protect the incompletely packaged chips during the panel separation process and reduce scratches on the substrate.

[0005] An embodiment of the present application provides a panel splitting device, comprising: a panel splitting assembly, the panel splitting assembly comprising a first panel splitting mechanism; a limiting assembly, the limiting assembly comprising a groove structure, the groove structure comprising a rolling element and a groove body, the rolling element being connected to the groove body, the groove body comprising a bottom plate, a wall plate disposed on a first surface of the bottom plate and arranged oppositely, a groove cavity and grooves disposed oppositely along the length direction of the wall plate, the grooves and the groove cavities being connected, and the first panel splitting mechanism being disposed on one side of any groove; along the height direction of the wall plate, a rolling element is disposed between the wall plate and the bottom plate and a limiting notch is formed, the rolling element is disposed on a side of the limiting notch away from the groove cavity, and a plurality of rolling elements and limiting notches are disposed along the length direction of the wall plate.

[0006] According to the panel splitting device provided in the embodiment of the present application, the oppositely arranged wall panels include a first wall panel and a second wall panel, a rolling element on one side is connected to the first wall panel, and the first wall panel is slidably connected to the bottom panel along a direction opposite to the first wall panel and the second wall panel.

[0007] According to the plate dividing device provided in the embodiment of the present application, the rolling element includes a wheel-shaped member, which is connected to the first wall panel through an axis, and the first wall panel is provided with an installation groove along the length direction. The wheel-shaped member is placed in the installation groove, and a side wall of the installation groove close to the groove cavity forms a limiting notch with the first surface of the bottom plate, and the wheel surface of the wheel-shaped member is opposite to the limiting notch.

[0008] According to the panel splitting device provided in the embodiment of the present application, the limiting assembly further includes a first driving member, which is connected to the first wall panel and is used to drive the first wall panel to slide.

[0009] According to the panel splitting device provided in the embodiment of the present application, the first wall panel and the bottom panel are spaced apart, and the trough body further includes a limiting protrusion, which extends toward the bottom panel along a partial area of ​​the first wall panel and has a spacing with the bottom panel to form a limiting gap.

[0010] According to the panel splitting device provided in the embodiment of the present application, the limiting assembly also includes a first pushing member, which is placed on a side of the slot opposite to the first panel splitting mechanism, and is used to move along the length direction of the wall panel.

[0011] According to the plate splitting device provided in the embodiment of the present application, the first plate splitting mechanism includes a first flip plate and a second driving member, the first flip plate is connected to the bottom plate through a first rotating shaft, and the second driving member is connected to the first flip plate for driving the first flip plate to flip around the first rotating shaft toward the direction of the groove cavity.

[0012] According to the panel splitting device provided in the embodiment of the present application, the panel splitting assembly further includes a second panel splitting mechanism, and the panel splitting direction of the second panel splitting mechanism is perpendicular to that of the first panel splitting mechanism;

[0013] At least one of the oppositely arranged wall plates is formed with a loading port, the second plate separation mechanism is arranged at the loading port, and the first plate separation mechanism is used to separate the plates separated by the second plate separation mechanism into the substrate in the groove cavity for secondary plate separation.

[0014] According to the plate splitting device provided in the embodiment of the present application, the second plate splitting mechanism includes a second flip plate and a third driving member. The second flip plate is connected to the base plate through a second rotating shaft. The third driving member is connected to the second flip plate and is used to drive the second flip plate to flip around the second rotating shaft toward the direction of the groove cavity.

[0015] According to the plate splitting device provided in the embodiment of the present application, the limiting assembly also includes a second pushing member, the second pushing member is placed on the side of the loading port opposite to the second plate splitting mechanism, the pushing direction of the second pushing member is perpendicular to the extension direction of the wall panel, and the second pushing member is used to push the substrate on the second flip plate to be placed in the groove cavity.

[0016] In the panel splitting device of the embodiment of the present application, the groove cavity of the groove body accommodates the substrate, and the substrate is limited by the limiting notch, so that the first panel splitting mechanism can separate the substrate; rolling elements are arranged along the length direction of the wall panel, so that when the substrate moves in the groove cavity toward the first panel splitting mechanism, it comes into rolling contact with the rolling elements for guidance, thereby reducing scratches on the substrate during movement and reducing the movement resistance of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] Figure 1 This is one of the structural schematic diagrams of the panel separation device in some embodiments of the present application;

[0019] Figure 2 A cross-sectional view of a groove structure according to some embodiments of the present application;

[0020] Figure 3 This is a schematic diagram of the end surface structure of the first wall panel in some embodiments of the present application;

[0021] Figure 4 This is the second structural schematic diagram of the panel separation device of some embodiments of the present application;

[0022] Figure 5 Another structural schematic diagram of the first wall plate of some embodiments of the present application;

[0023] Figure 6 This is the third structural schematic diagram of the panel separation device of some embodiments of the present application;

[0024] Figure 7 This is a fourth structural schematic diagram of the panel separation device of some embodiments of the present application;

[0025] Figure 8 This is a schematic structural diagram of the second wall panel of some embodiments of the present application.

[0026] Reference numerals:

[0027] 100: split plate assembly; 110: first split plate mechanism; 111: first flip plate; 112: second driving member; 120: second split plate mechanism; 121: second flip plate; 122: third driving member; 200: limit assembly; 201: slot body; 210: slot structure; 211: wall panel; 212: bottom plate; 213: slot cavity; 214: slot opening; 215: limit notch; 216: first wall panel; 217: second wall panel; 218: mounting groove; 219: limit protrusion; 220: first driving member; 230: first push member; 231: loading port; 240: second mounting groove; 241: second limit notch; 242: roller; 243: second ball bearing; 300: substrate. DETAILED DESCRIPTION

[0028] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0030] The main purpose of chip packaging is to protect the chip and prevent the external environment (such as impurities, bad gases, water vapor, etc. in the air) from corroding the precision circuits on the chip, which in turn leads to a decrease in electrical performance. At the same time, packaging also provides electrical connections between the chip and external devices and ensures that the chip can work stably and reliably. Traditional chip packaging usually includes the following steps:

[0031] Preparation work: Prepare packaging materials (such as packaging glue, packaging cover, etc.), chips, pins, substrates, etc.

[0032] Bonding: Bonding the chip to the package substrate, usually using thermally conductive glue or other adhesives to fix the chip to the substrate.

[0033] Wire bonding: The chip pins are connected to the connection points on the substrate by welding with gold wire or aluminum wire. This step is usually called wire bonding.

[0034] Packaging glue injection: The packaging glue is injected between the packaging substrate and the chip to protect the chip and improve the strength of the package.

[0035] Curing: Curing the encapsulation glue to make it hard and fix the chip and pins.

[0036] Package cover installation: Install the package cover onto the package substrate to protect the chip and packaging glue.

[0037] Testing: Testing the packaged chip to ensure it functions properly.

[0038] Cleaning and Packaging: The packaged chips are cleaned and then packaged for storage and transportation.

[0039] Among them, the substrate can be selected from DBC substrate or PCB board. DBC substrate is a direct bonded copper substrate (Direct Bonded Copper), which is a composite material made of ceramic substrate and copper foil directly bonded by high temperature and high pressure. After the traditional chip is packaged on the substrate, it needs to be divided into boards, and the whole substrate is divided into multiple independent units by certain process means for subsequent assembly, testing and use. The back of the existing substrate has a pre-dividing groove, and the substrate is divided along the pre-dividing groove.

[0040] Existing depaneling can use a depaneling jig, which places the substrate in the depaneling jig and continuously moves the substrate along the guide structure of the depaneling jig for a specified distance for positioning. The substrate is then divided into small pieces by a manipulator or other depaneling moving parts. However, during the continuous movement, scratches will be generated on the side of the substrate that contacts the guide structure, causing damage to the chip, thereby affecting the quality of the chip.

[0041] In order to solve the problems in the prior art, an embodiment of the present application provides a panel splitting device. The following first introduces the panel splitting device provided in the embodiment of the present application.

[0042] like Figure 1 and Figure 2 As shown, the embodiment of the present application provides a panel splitting device including: a panel splitting assembly 100 and a limiting assembly 200, the panel splitting assembly 100 includes a first panel splitting mechanism 110; the limiting assembly 200 includes a groove structure 210, the groove structure 210 includes a rolling element and a groove body 201, the rolling element is connected to the groove body 201, the groove body 201 includes a bottom plate 212, a wall plate 211 placed on the first surface of the bottom plate 212 and arranged oppositely, a groove cavity 213 and notches 214 arranged oppositely along the length direction of the wall plate 211, the notch 214 is connected with the groove cavity 213, and the first panel splitting mechanism 110 is placed on one side of any notch 214; along the height direction of the wall plate 211, a rolling element is arranged between the wall plate 211 and the bottom plate 212 and a limiting notch 215 is formed, the rolling element is arranged on the side of the limiting notch away from the groove cavity 213, and a plurality of rolling elements and limiting notches are extended along the length direction of the wall plate 211.

[0043] Specifically, the bottom plate 212 and the wall plate 211 are surrounded to form a groove cavity 213 and a notch 214, and the groove cavity 213 and the notch 214 are connected. The groove cavity 213 is used to place the substrate 300. The substrate 300 moves from one notch 214 to another notch 214 along the length direction of the wall plate 211, and is separated one by one by the first plate separation mechanism 110 placed in another notch 214. The first plate separation mechanism 110 can separate a whole substrate 300 into strips, or separate the strip substrate 300 into blocks. For example, the substrate 300 can be inserted from one notch 214, and removed from another notch 214 during the continuous movement. The wall plate 211 and the bottom plate 212 can be an integral structure, or can be detachably connected, or can be slidably connected.

[0044] Among them, the two wall panels 211 arranged opposite to each other may be partially in contact with or not in contact with the first surface of the bottom plate 212. When both wall panels 211 are partially in contact with the first surface, taking one of the wall panels 211 as an example, the wall panel 211 includes a second surface opposite to the first surface, and the second surface may be spaced apart from the first surface of the bottom plate 212 to form a limiting notch, the limiting notch is connected to the groove cavity 213, and a rolling element is installed on the side of the limiting notch away from the groove cavity 213. A plurality of rolling elements are arranged along the moving direction of the substrate 300, and the substrate 300 placed in the groove cavity 213 is inserted into the limiting notch, and the side of the substrate 300 is in contact with the rolling element. In the process of the substrate 300 moving from one notch 214 to another notch 214 along the length direction of the wall panel 211, the spacing between the substrate 300 and the limiting notch is maintained, and the side of the substrate 300 is in rolling contact with the rolling element, that is, the rolling element is rotatable relative to the wall panel 211. Similarly, a relative limiting notch and rolling element are also arranged on the other wall panel 211. For example, the rolling element may include a ball, which is rotatably connected between the first surface and the second surface; the rolling element may also include a roller 242 bearing and other rolling rotating structures. The length direction of the wall plate 211 is consistent with the movement direction of the substrate 300 in the groove cavity 213, and is consistent with the relative setting direction of the two slots 214.

[0045] In the process of the first panel separation mechanism 110 separating the substrate 300, in order to better complete the panel separation process, the limiting notch limits the height of the substrate 300. For example, the first panel separation mechanism 110 breaks the substrate 300 along the pre-dividing groove of the substrate 300 to achieve panel separation. During the breaking process, the substrate 300 placed in the groove cavity 213 can be prevented from excessive warping by the limiting notch.

[0046] like Figure 3As shown, for other structures of the rolling element, in a specific embodiment of the present application, the rolling element includes a wheel-shaped member, which may be a cylindrical roller, a wheel, or a rolling bearing, etc. The wheel-shaped member is connected to the wall plate 211 through an axis, and the wall plate 211 is provided with a mounting groove 218 along the length direction, and the wheel-shaped member is placed in the mounting groove 218. A side wall of the mounting groove 218 close to the groove cavity 213 forms a limiting notch with the first surface of the bottom plate 212, and the wheel surface of the wheel-shaped member is opposite to the limiting notch.

[0047] In other words, in order to make the wheel surface of the wheel-shaped member face the limiting notch, the wheel-shaped member is connected to the wall plate 211 through an axis. The axis of the axis is arranged parallel to the height direction of the wall plate 211. The mounting groove 218 is formed through the length direction of the wall plate 211, and is not through the width direction of the wall plate 211. Therefore, the wall plate 211 on the side of the mounting groove 218 away from the groove cavity 213 can be connected to the bottom plate 212, and the wall plate 211 on the side of the mounting groove 218 close to the groove cavity 213 has a second surface, and there is a spacing between the first surface of the bottom plate 212 to form a limiting notch. The wheel-shaped member is arranged in the mounting groove 218 along the length direction of the mounting groove 218, and the wheel surface of the wheel-shaped member is in rolling contact with the side of the substrate 300. Specifically, the rolling element on one side can be installed on the wall plate 211 on one side, and the rolling element on the other side can be installed on the bottom plate 212; or, the rolling elements on both sides are installed on the wall plate 211 or the bottom plate 212. In addition, the rolling element on one side may be a ball, and the rolling element on the other side may be a wheel; or, the rolling elements on both sides may be ball or wheel.

[0048] Furthermore, in order to improve the use range and flexibility of the panel splitting device, as Figure 4 As shown, in another specific embodiment of the present application, the oppositely arranged wall panels 211 include a first wall panel 216 and a second wall panel 217, a rolling element on one side is connected to the first wall panel 216, and the first wall panel 216 is slidingly connected to the bottom panel 212 along the direction relative to the first wall panel 216 and the second wall panel 217.

[0049] That is, at least one of the two wall plates 211 disposed opposite to each other is slidably connected to the bottom plate 212, so as to adjust the size of the groove cavity 213, and guide and limit the base plate 300 of different directions or sizes. Specifically, in order to ensure that the adjustment of the width direction of the wall plate 211 does not affect the rolling contact between the rolling element and the base plate 300, the rolling element is installed on the slidable wall plate 211, so as to achieve the adjustability of the rolling element along with the wall plate 211.

[0050] Specifically, multiple rolling elements on one side can be installed on the first wall plate 216, and the first wall plate 216 can be slidably connected to the bottom plate 212 along the width direction. For example, the first wall plate 216 is connected to the bottom plate 212 through a slide rail. After the first wall plate 216 is adjusted to a suitable position, the first wall plate 216 and the bottom plate 212 are locked to prevent the first wall plate 216 from moving. For example, the rolling element is a wheel-shaped member, and the wheel-shaped member is connected to the first wall plate 216 through an axis and placed in the installation groove 218. Of course, the first wall plate 216 and the second wall plate 217 with adjustable width also facilitate the placement of the substrate 300 in the groove cavity 213. For example, the first wall plate 216 is moved away from the second wall plate 217. After the substrate 300 is placed in the groove cavity 213, the first wall plate 216 is moved closer to the second wall plate 217, and the substrate 300 is inserted into the limiting notch and contacted and clamped by the rolling element. Among them, the material of the rolling element can be a flexible material such as rubber, and of course, a metal material can also be selected.

[0051] Continue to refer Figure 4 In order to achieve automatic adjustment or rapid adjustment, in other embodiments of the present application, the limit assembly 200 further includes a first drive member 220, which is connected to the first wall plate 216 and is used to drive the first wall plate 216 to slide along the width direction. The first drive member 220 can be a telescopic cylinder, such as a pneumatic cylinder, an electric cylinder, etc. The first drive member 220 can also be a combination of a motor and a lead screw nut mechanism, or a combination of a motor and a guide rail slider, etc. The spacing between the first wall plate 216 and the second wall plate 217 is adjusted by controlling the telescopic amount of the first drive member 220.

[0052] In the state where the first wall plate 216 and the bottom plate 212 can slide relative to each other, in order to simplify the structure, the structure of the first wall plate 216 can be Figure 5 Specifically, in the embodiment of the present application, the first wall plate 216 is spaced apart from the bottom plate 212, and the trough body 201 further includes a limiting protrusion 219, which extends along a portion of the first wall plate 216 toward the bottom plate 212, and has a spacing with the bottom plate 212 to form a limiting gap.

[0053] That is, the lower surface of the first wall plate 216 is parallel to and spaced from the bottom plate 212, and is connected to the first wall plate 216 through the first driving member 220, driving the first wall plate 216 to translate relative to the bottom plate 212. The lower surface of the first wall plate 216 is close to one side of the chamber, and a local extension is provided to form a limiting protrusion 219, which includes a second surface, and the second surface is spaced from the first surface of the bottom plate 212 to form a limiting notch. The rolling element can be a wheel-shaped member, which is connected to the lower surface of the first wall plate 216 through a shaft, and the substrate 300 passes through the limiting notch and contacts the wheel surface of the wheel-shaped member.

[0054] like Figure 6As shown, in order to improve the degree of automation of the panel separation process, the movement of the substrate 300 in the slot cavity 213 can be automated. In an optional embodiment of the present application, the limiting assembly 200 further includes a first pusher 230, which is disposed on a side of the slot 214 opposite to the first panel separation mechanism 110, and the first pusher 230 is used to move along the length direction of the wall plate 211. In other words, the moving direction of the first pusher 230 is the same as the length direction of the wall plate 211, and the first pusher 230 is used to push the substrate 300 in the slot cavity 213 to move along the rolling element.

[0055] Specifically, the first pusher 230 is arranged opposite to the first plate-dividing mechanism 110, and the first pusher 230 extends into the notch 214 on one side, moves the substrate 300 in the groove cavity 213 toward the first plate-dividing mechanism 110, and places the substrate 300 on the first plate-dividing mechanism 110 through the notch 214 on the other side, and the first plate-dividing mechanism 110 divides the substrate 300 along the pre-dividing groove. The advancing distance of the first pusher 230 each time is the spacing between adjacent pre-dividing grooves, thereby ensuring that the substrate 300 is divided into a specified size. During the process of the first plate-dividing mechanism 110 dividing the plate, the first pusher 230 can contact and abut the substrate 300, or it can be non-contact with the substrate 300. Among them, the first pusher 230 can be a telescopic cylinder, such as a pneumatic cylinder, an electric cylinder, etc. The first pusher 230 can also be a coordination structure of a motor and a lead screw nut mechanism, or a coordination structure of a motor and a guide rail slider, etc.

[0056] In addition, in order to facilitate the loading of the substrate 300 into the groove cavity 213, a loading port 231 can be formed on the wall panel 211 on the opposite side of the slidable wall panel 211. For example, the first wall panel 216 is connected to the first driving member 220 to achieve sliding, and the second wall panel 217 is provided with a loading port 231. The bottom plate 212 can also be extended to the loading port 231, so as to be used to carry the pre-divided substrate 300. The pre-divided substrate 300 is translated into the groove cavity 213 to realize the loading process.

[0057] Continue to refer Figure 6 In one embodiment of the present application, the first plate splitting mechanism 110 includes a first flip plate 111 and a second driving member 112. The first flip plate 111 is connected to the bottom plate 212 via a first rotating shaft, and the second driving member 112 is connected to the first flip plate 111, and is used to drive the first flip plate 111 to flip around the first rotating shaft toward the direction of the groove cavity 213. The second driving member 112 can be a telescopic cylinder, such as a pneumatic cylinder, an electric cylinder, etc. The second driving member 112 can also be a matching structure of a motor and a lead screw nut mechanism, or a matching structure of a motor and a guide rail slider, etc. The first flip plate 111 and the second driving member 112 can be contact-connected and fixedly connected.

[0058] For example, the upper surface of the first flip plate 111 can be parallel to the first surface of the bottom plate 212, or the upper surface of the first flip plate 111 can be at an angle greater than 180 degrees to the first surface. The substrate 300 is pushed along the length direction of the wall plate 211 to the upper surface of the first flip plate 111, so that the pre-dividing groove of the substrate 300 is placed at the intersection of the first flip plate 111 and the bottom plate 212, and the second driving member 112 drives the first flip plate 111 to rise away from the side of the bottom plate 212, so that the first flip plate 111 rotates around the first rotation axis, and the substrate 300 is forced to be split along the pre-dividing groove, with one part placed on the first flip plate 111 and the other part placed on the bottom plate 212. Based on the above steps, the remaining parts of the substrate 300 are divided into panels in sequence.

[0059] Since a whole substrate 300 needs to be divided at least twice in a perpendicular direction to divide the whole substrate 300 into small pieces of substrate 300, in order to improve the efficiency of dividing the substrate, Figure 7 As shown, in another embodiment of the present application, the panel splitting assembly 100 also includes a second panel splitting mechanism 120, and the second panel splitting mechanism 120 is perpendicular to the panel splitting direction of the first panel splitting mechanism 110; at least one of the relatively arranged wall panels 211 is formed with a loading port 231, and the second panel splitting mechanism 120 is arranged at the loading port 231, and the first panel splitting mechanism 110 is used to split the second panel splitting mechanism 120 into the substrate 300 in the groove cavity 213 for secondary panel splitting.

[0060] That is to say, the wall panels 211 arranged opposite to each other include a first wall panel 216 and a second wall panel 217, the second wall panel 217 is provided with a loading port 231, and the loading port 231 is provided on the side of the second wall panel 217 away from the first panel splitting mechanism 110. The second panel splitting mechanism 120 is arranged at the loading port 231, and is used to split a part of the substrate 300 into the groove cavity 213. The panel splitting direction is defined by the horizontal and vertical directions of the pre-split groove of the substrate 300. For example, the pre-split groove arranged along the length direction of the substrate 300 is the first panel splitting direction of the second panel splitting mechanism 120, and the pre-split groove arranged along the width direction of the substrate 300 is the second panel splitting direction of the first panel splitting mechanism 110. The first panel splitting direction is perpendicular to the second panel splitting direction, and the first panel splitting mechanism 110 and the second panel splitting mechanism 120 split a whole substrate 300 into small pieces of substrate 300 along the perpendicular panel splitting direction.

[0061] The panel splitting assembly 100 can realize two panel splittings. The second panel splitting mechanism 120 performs the first panel splitting to split the substrate 300 from a whole sheet into strips. The first panel splitting mechanism 110 performs the second panel splitting to split the strip substrate 300 into blocks. The slot cavity 213 can accommodate the strip substrate 300. When the second panel splitting mechanism 120 splits the panel, part of the substrate 300 is placed in the slot cavity 213, and the substrate 300 is inserted into the limiting notch. After the panel splitting is completed, the strip substrate 300 is retained in the slot cavity 213. The first pusher 230 pushes the strip substrate 300 to move along the rolling element toward the first panel splitting mechanism 110. When the strip substrate 300 is partially placed on the first panel splitting mechanism 110, the left and right sides of the substrate 300 in the slot cavity 213 are placed in the limiting notches of the first wall plate 216 and the second wall plate 217.

[0062] Specifically, in some specific embodiments of the present application, the second split plate mechanism 120 includes a second flip plate 121 and a third driving member 122, the second flip plate 121 is connected to the bottom plate 212 via a second rotating shaft, and the third driving member 122 is connected to the second flip plate 121, and is used to drive the second flip plate 121 to flip around the second rotating shaft in the direction of the groove cavity 213. The third driving member 122 can be a telescopic cylinder, such as a pneumatic cylinder, an electric cylinder, etc. The third driving member 122 can also be a cooperation between a motor and a lead screw nut mechanism, or a cooperation structure between a motor and a guide rail slider, etc. The second flip plate 121 and the third driving member 122 can be contact-connected and fixedly connected.

[0063] For example, the upper surface of the second flip plate 121 can be parallel to the first surface of the bottom plate 212, or the upper surface of the second flip plate 121 can be at an angle greater than 180 degrees to the first surface. The substrate 300 is pushed from the second flip plate 121 to the upper surface of the bottom plate 212 along the width direction of the second wall plate 217, and inserted into the limiting notch of the first wall plate 216, so that the pre-dividing groove of the substrate 300 is placed at the intersection of the second flip plate 121 and the bottom plate 212, and the third driving member 122 drives the second flip plate 121 to rise away from the side of the bottom plate 212, so that the second flip plate 121 rotates around the second rotation axis, and the substrate 300 is forced to be split along the pre-dividing groove, with one part placed on the second flip plate 121 and the other part placed on the bottom plate 212. Based on the above steps, the remaining part of the substrate 300 is divided into panels in sequence.

[0064] like Figure 8 As shown, in other embodiments of the present application, with respect to the second wall plate 217, in order to prevent the substrate 300 from sliding and rubbing against the second wall plate 217 on one side during the movement of the second flip plate 121 toward the groove cavity 213, thereby damaging the substrate 300, a rolling element along the width direction is provided on one side of the second wall plate 217 close to the second plate separation mechanism 120.

[0065] Specifically, the second wall panel 217 is provided with a second mounting groove 240 along the length direction, and a side wall of the second mounting groove 240 close to the groove cavity 213 forms a second limiting notch 241 with the bottom plate 212. The rolling element arranged along the length direction of the second wall panel 217 includes a roller 242, and the roller 242 is installed in the second mounting groove 240. The rolling element arranged along the width direction of the second wall panel 217 includes a second ball 243, and the second ball 243 is rotatably installed in the width direction of the second wall panel 217 for rolling contact with the substrate 300 on the second flip plate 121.

[0066] In addition, in other optional embodiments of the present application, the limiting assembly 200 further includes a second pusher (not shown in the figure), which is placed on the side of the loading port 231 opposite to the second plate splitting mechanism 120, and the pushing direction of the second pusher is perpendicular to the extension direction of the wall plate 211, and the second pusher is used to push the substrate 300 on the second flip plate 121 to be placed in the groove cavity 213. The second pusher can be a telescopic cylinder, such as a gas cylinder, an electric cylinder, etc. The second pusher can also be a cooperation between a motor and a lead screw nut mechanism, or a cooperation structure between a motor and a guide rail slider, etc.

[0067] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A panel splitting device, characterized in that: include: A panel splitting assembly, the panel splitting assembly comprising a first panel splitting mechanism; A limiting component, wherein the limiting component includes a groove structure, the groove structure includes a rolling element and a groove body, the rolling element is connected to the groove body, the groove body includes a bottom plate, a wall plate placed on the first surface of the bottom plate and arranged oppositely, a groove cavity and grooves arranged oppositely along the length direction of the wall plate, the groove is connected to the groove cavity, and the first plate dividing mechanism is placed on one side of any of the grooves; along the height direction of the wall plate, the rolling element is arranged between the wall plate and the bottom plate and a limiting notch is formed, the rolling element is arranged on the side of the limiting notch away from the groove cavity, and a plurality of the rolling elements and the limiting notch are arranged along the length direction of the wall plate.

2. The panel splitting device according to claim 1, characterized in that: The oppositely arranged wall plates include a first wall plate and a second wall plate, the rolling element on one side is connected to the first wall plate, and the first wall plate is slidably connected to the bottom plate along the direction opposite to the first wall plate and the second wall plate.

3. The panel splitting device according to claim 2, characterized in that: The rolling element includes a wheel-shaped member, which is connected to the first wall plate through an axis. The first wall plate is provided with an installation groove along the length direction. The wheel-shaped member is placed in the installation groove. A side wall of the installation groove close to the groove cavity and the first surface of the bottom plate form the limiting notch, and the wheel surface of the wheel-shaped member is opposite to the limiting notch.

4. The panel splitting device according to claim 2, characterized in that: The limiting assembly also includes a first driving member, which is connected to the first wall panel and is used to drive the first wall panel to slide.

5. The panel splitting device according to claim 4, characterized in that: The first wall plate is spaced apart from the bottom plate, and the trough body further comprises a limiting protrusion, which is extended toward the bottom plate along a partial area of ​​the first wall plate and has a spacing with the bottom plate to form the limiting gap.

6. The panel splitting device according to claim 1, characterized in that: The limiting assembly also includes a first push member, which is disposed on a side of the notch opposite to the first panel splitting mechanism, and is used to move along the length direction of the wall panel.

7. The panel splitting device according to claim 1, characterized in that: The first plate separation mechanism includes a first flip plate and a second driving member, the first flip plate is connected to the bottom plate via a first rotating shaft, and the second driving member is connected to the first flip plate for driving the first flip plate to flip around the first rotating shaft toward the direction of the slot cavity.

8. The panel splitting device according to any one of claims 1 to 7, characterized in that: The panel splitting assembly further comprises a second panel splitting mechanism, wherein the panel splitting direction of the second panel splitting mechanism is perpendicular to that of the first panel splitting mechanism; At least one of the relatively arranged wall panels is formed with a loading port, the second panel splitting mechanism is arranged at the loading port, and the first panel splitting mechanism is used to separate the panels separated by the second panel splitting mechanism into the substrate in the groove cavity for secondary panel splitting.

9. The panel splitting device according to claim 8, characterized in that: The second plate separation mechanism includes a second flip plate and a third driving member, the second flip plate is connected to the bottom plate via a second rotating shaft, and the third driving member is connected to the second flip plate for driving the second flip plate to flip around the second rotating shaft toward the direction of the slot cavity.

10. The panel splitting device according to claim 9, characterized in that: The limiting assembly also includes a second push member, which is placed on the side of the loading port opposite to the second plate separation mechanism. The pushing direction of the second push member is perpendicular to the extension direction of the wall panel, and the second push member is used to push the substrate on the second flip plate into the groove cavity.

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