Probe purging device

Abstract

The utility model provides a probe purging device which comprises the components of a device base which is provided with a convex step and a plunger piston which is formed on the lower plane of the convex step; the blowing arm comprises a vertical air pipe which vertically penetrates through the device base and a horizontal air nozzle which is arranged below the device base and is parallel to the surface of the device base, and the vertical air pipe and the horizontal air nozzle are connected to form an L-shaped structure; a shaft hole perpendicular to the rotary limiting handle is formed in one end of the rotary limiting handle, a notch is formed in the outer side of the shaft hole, a groove is formed in the radial plane of the shaft hole on the outer side of the shaft hole in the direction perpendicular to the notch, and the vertical air pipe of the blowing arm perpendicularly penetrates through the device base through the shaft hole of the rotary limiting handle above the device base; the spring is vertically arranged between the upper portion of the device base and the shaft hole of the rotary limiting handle and surrounds the outer side of the vertical air pipe, and the rotary limiting handle controls the vertical air pipe to horizontally rotate and / or vertically move so as to control the horizontal air nozzle to be aligned with the probe for blowing.

Description

Technical Field

[0001] This utility model patent application relates to the manufacture of surface acoustic wave filters, specifically to probe testing and probe impurity removal. Background Art

[0002] During the probe testing process, after the probe contacts the surface of the device multiple times, it will be contaminated with impurities such as metal. Therefore, after a certain number of probe tests, the probe will return from the device test position to the cleaning position, and then use contact impurity removal methods such as grinding to remove the impurities. Summary of the Utility Model

[0003] One aspect of this utility model proposes a probe purging device, including: a device base on which a raised step is formed, and a plunger is formed on the lower plane of the raised step; a purging arm including a vertical air pipe vertically passing through the device base and a horizontal air nozzle below the device base and parallel to the surface of the device base, wherein the vertical air pipe and the horizontal air nozzle are connected to form an L-shaped structure; a rotary limit handle, one end of which has a shaft hole perpendicular to the rotary limit handle, a notch is formed outside the shaft hole, and a groove is formed in a direction 90 degrees to the notch on the radial plane of the shaft hole outside the shaft hole. Among them, above the device base, the vertical air pipe of the purging arm vertically passes through the device base via the shaft hole of the rotary limit handle; a spring is vertically arranged between the upper part of the device base and the shaft hole of the rotary limit handle and surrounds the outside of the vertical air pipe. Among them, the rotary limit handle controls the horizontal rotation and / or vertical movement of the vertical air pipe to control the horizontal air nozzle to align with the probe for purging.

[0004] One aspect of this utility model proposes a probe purging device, wherein one end of the vertical air pipe located below the device base is connected to one end of the horizontal air nozzle via a right-angle joint to form an L-shaped structure, the other end of the vertical air pipe located above the device base is connected to a flow regulating valve, and the other end of the horizontal air nozzle is used to align with the probe for purging.

[0005] One aspect of this utility model proposes a probe purging device, wherein the rotary limit handle is pressed downwards to the lower plane of the raised step, and then the rotary limit handle is horizontally rotated so that the groove on the rotary limit handle and the plunger on the lower plane of the raised step are mutually embedded under the upward force of the spring, so that the probe purging device enters the "purging state".

[0006] One aspect of this utility model proposes a probe purging device, wherein one end of the rotary limit handle also has a set screw. Among them, when the other end of the horizontal air nozzle aligns with the probe, the rotary limit handle is fixed to the vertical air pipe through the set screw.

[0007] On one aspect of the present utility model, a probe purging device is proposed. Among them, rotate the rotary limit handle horizontally until the notch of the rotary limit handle aligns with the protrusion. Under the action of the spring, the rotary limit handle drives the purging arm to slide upward, so that the protrusion is embedded in the notch, and the probe purging device enters the "retracted state".

[0008] On one aspect of the present utility model, a probe purging device is proposed, which further includes a height limiting member for limiting the upward sliding distance of the purging arm. It is located below the device base, has a cylindrical inner hole, surrounds the vertical air pipe, and can slide up and down along the axis of the vertical air pipe.

[0009] On one aspect of the present utility model, a probe purging device is proposed. Among them, a bearing is provided on the device base, which surrounds the vertical air pipe, enabling the vertical air pipe to rotate horizontally and slide up and down.

[0010] On one aspect of the present utility model, a probe purging device is proposed. Among them, the planar contour of the device base fits the test host, enabling it to be embedded in the host, and is detachably connected by means such as bolt connection and magnet adsorption. And among them, the probe is fixed to the test host.

[0011] On one aspect of the present utility model, a probe purging device is proposed. Before purging the probe, adjust the distance between the horizontal air nozzle and the rotary limit handle along the axis of the vertical air pipe so that the height of the horizontal air nozzle is below the probe.

[0012] On one aspect of the present utility model, a probe purging device is proposed. Among them, a flow regulating valve is used to control the flow rate of the purging gas. Description of the Drawings

[0013] Figure 1 Shows the structure of the probe purging device according to an embodiment of the present application.

[0014] Figure 2 and Figure 3 Shows the structure of the 1 device base according to an embodiment of the present application.

[0015] Figure 4 Shows the structure of the 2 purging arm.

[0016] Figure 5 Shows the structure of the 3 rotary limit handle.

[0017] Figure 6 Is a schematic diagram of the probe purging device according to an embodiment of the present application in the purging state.

[0018] Figure 7 Is a schematic diagram of the probe purging device according to an embodiment of the present application in the retracted state. Detailed Embodiments

[0019] Before proceeding with the following detailed description, it may be advantageous to set forth definitions of certain words and phrases used throughout this patent document. The terms "coupled," "connected," and their derivatives refer to any direct or indirect communication or connection between two or more elements, regardless of whether those elements are in physical contact with each other. The terms "transmit," "receive," and "communicate," and their derivatives cover both direct and indirect communication. The terms "comprise" and "include," and their derivatives mean including but not limited to. The term "or" is inclusive, meaning and / or. The phrase "associated with," and its derivatives, means including, included within, interconnected, containing, contained within, connected or connected to, coupled or coupled to, communicating with, cooperating with, interlacing, juxtaposed, adjacent, bound or bound to, having, having an attribute, having a relationship or having a relationship with, etc. The term "controller" refers to any device, system, or part thereof that controls at least one operation. Such a controller can be implemented in hardware, or a combination of hardware and software and / or firmware. The functions associated with any particular controller can be centralized or distributed, whether local or remote. The phrase "at least one," when used in conjunction with a list of items, means that different combinations of one or more of the listed items can be used, and it may only be necessary to have one item from the list. For example, "at least one of A, B, C" includes any one of the following combinations: A, B, C, A and B, A and C, B and C, A and B and C.

[0020] Definitions of other specific words and phrases are provided throughout this patent document. Those of ordinary skill in the art should understand that, in many cases, if not most cases, such definitions apply to the prior and future use of the words and phrases so defined.

[0021] In this patent document, the application combination of modules and the hierarchical division of sub-modules are only for illustration purposes. Without departing from the scope of the present disclosure, the application combination of modules and the hierarchical division of sub-modules can have different ways.

[0022] The existing method requires the probe to move back from the device test position to the cleaning position, and then re-perform the alignment test after the cleaning is completed. This moving process has a high precision and takes a long time, affecting the efficiency.

[0023] The existing method is a contact cleaning method, which will cause wear to the probe.

[0024] The present utility model designs a rotatable and movable nitrogen purging device for purging the probe, which replaces the precise movement process of the probe, so that precise alignment is not required, reducing the movement time and improving the efficiency.

[0025] By adopting the non-contact nitrogen purging and impurity removal method of the present utility model, the wear of the probe can be reduced and the service life can be prolonged.

[0026] The following describes the structure and working principle of a probe purging device according to an embodiment of the application.

[0027] Figure 1 The structure of a probe purging device according to an embodiment of the present application is shown.

[0028] As Figure 1 shown, the probe purging device includes 1 device base, 2 purging arm, 3 rotation limiting member (hereinafter referred to as 3 rotation limiting handle), 4 spring, 5 height limiting member, 6 gas switch valve, and 7 hose.

[0029] Figure 2 and Figure 3 The structure of the 1 device base according to an embodiment of the present application is shown.

[0030] As Figure 2 and Figure 3 shown, the components of the 1 device base include 1-1 plane, 1-2 raised step, 1-3 bearing, and 1-4 plunger. The states and functions of the components of the 1 device base are as follows:

[0031] 1) As Figure 2 shown, the contour of the 1-1 plane is designed to fit with the test host so that it can be embedded in the host and is detachably connected by means such as bolt connection and magnet adsorption.

[0032] 2) As Figure 2 shown, the 1-2 raised step is designed so that the protrusion fits with the 3-1 notch of the 3 rotation limiting handle. Horizontally rotate the 3 rotation limiting handle. When the notch aligns with the protrusion, under the action of the 4 spring, the 3 rotation limiting handle drives the 2 purging arm to slide upward, and the sliding displacement is limited by the 5 height limiting member. At this time, the probe purging device is in the "retracted state".

[0033] 3) As Figure 2 shown, the 1-3 bearing is designed to enable the 2-1 vertical air pipe of the 2 purging arm to rotate horizontally and slide up and down.

[0034] 4) As Figure 3 shown, the 1-4 plunger is designed to be on the lower plane of the raised step. As Figure 3 shown, when pressing down the 3 rotation limiting handle to the lower plane of the raised step and rotating the 3 rotation limiting handle, the 3-2 groove on the 3 rotation limiting handle and the 1-4 plunger are mutually embedded under the upward force of the spring. At this time, the probe purging device is in the "purging state".

[0035] Figure 4 The structure of the 2 purging arm is shown.

[0036] As Figure 4As shown, the 2 purge arms are composed of a 2-1 vertical air pipe, a 2-2 horizontal air nozzle, a 2-3 right-angle joint, and a 2-4 flow regulating valve to form an L-shaped structure.

[0037] The 2-1 vertical air pipe is a hollow cylindrical pipe, forming an adjustable connection with the 3-3 shaft hole of the 3 rotary limit handle that can axially slide and radially rotate. In the "purge state", along the axis of the 2-1 vertical air pipe, adjust the distance between the 2-2 horizontal air nozzle and the 3 rotary limit handle so that the height of the horizontal air nozzle is below the probe and above the wafer platform; rotate the 3 rotary limit handle radially along the 2-1 vertical air pipe so that the outlet end of the 2-1 horizontal air nozzle is aligned with the probe. After adjustment, fix the 3 rotary limit handle to the 2-1 vertical air pipe with the 3-4 set screw.

[0038] The 2-4 flow regulating valve controls the flow rate of the purge gas, thereby controlling the force of the airflow on the probe, which can not only achieve the effect of blowing away impurities but also prevent the force from damaging the probe.

[0039] Figure 5 The structure of the 3 rotary limit handle is shown.

[0040] The 3 rotary limit handle is designed with a 3-1 notch, a 3-2 groove, a 3-3 shaft hole, and a 3-4 set screw.

[0041] The 3 rotary limit handle is used to adjust the lowering height (lower limit) and horizontal rotation angle of the 2-2 horizontal air nozzle in the "purge state" so as to align with the probe. For example, the adjustment of the lowering height is achieved by pressing down the 3 rotary limit handle to compress the spring. At this time, the vertical air pipe slides downward, causing the outlet end of the horizontal air nozzle to lower. Rotate the 3 rotary limit handle horizontally until the outlet end of the horizontal air nozzle reaches the predetermined position to align with the probe, and the predetermined position refers to the optimal position for purging the probe.

[0042] The directions of the 3-1 notch and the 3-2 groove are designed to be distributed at 90° in the radial plane of the shaft hole, so that the horizontal rotation angle of the 2 purge arms in the "purge state" and the "retracted state" is 90°.

[0043] As Figure 1 and Figure 2 shown, the inner hole of the 5 height limit member is cylindrical and can slide up and down axially on the 2-1 vertical air pipe. In the "retracted state", the 5 height limit member limits the upward movement height (upper limit) of the purge arm. Since the hose moves up and down and rotates horizontally with the 2 purge arms, a 7 hose is required for air path connection during air path connection.

[0044] The above references Figures 1-5 describe the structures, functions, and working principles of the components of the probe purge device of the present application.

[0045] The following referencesFigure 6 and Figure 7 are used to describe embodiments of the probe purging device of the present application.

[0046] Figure 6 is a schematic diagram of the probe purging device according to an embodiment of the present application in the purging state. Figure 7 is a schematic diagram of the probe purging device according to an embodiment of the present application in the retracted state.

[0047] The wafer platform holds the wafer to be tested and moves in the three-axis directions of front-back, left-right, and up-down. When in the purging state, the wafer platform descends, and the purging arm of the probe purging device is manually switched to the "purging state" through the rotation limit handle. At this time, the end of the purging arm is aligned with the probe, and the gas switch valve is opened to perform purging and impurity removal. The probe testing device (not shown) and the probe are fixed to the testing host.

[0048] After the purging of the probe is completed, the gas switch valve is closed, and the rotation limit handle is operated to make the probe purging device in the retracted state. At this time, the wafer platform moves upward to contact the probe, and the wafer is tested by the probe testing device.

[0049] The rotatable and movable nitrogen purging device for purging the probe according to the present utility model does not require precise movement of the probe and does not require precise alignment of the probe, eliminates the time required for probe movement, and improves the impurity removal efficiency. In addition, the rotatable and movable nitrogen purging device for purging the probe according to the present utility model can reduce the wear of the probe and extend the service life.

[0050] Although the present disclosure has been described with exemplary embodiments, various changes and modifications can be suggested to those skilled in the art. The present disclosure is intended to cover such changes and modifications that fall within the scope of the appended claims.

[0051] Any description in the present utility model should not be construed as implying that any particular element, step, or function is an essential element that must be included within the scope of the claims. The scope of the patent subject matter is defined only by the claims.

Claims

1. A probe purge device, characterized in that include: A device base is formed with a raised step, and a plunger is formed on the lower plane of the raised step; A purge arm, comprising a vertical air pipe vertically passing through the device base and a horizontal air nozzle below the device base and parallel to the surface of the device base, wherein the vertical air pipe and the horizontal air nozzle are connected to form an L-shaped structure; A rotation limit handle, one end of which has an axial hole perpendicular to the rotation limit handle, a notch is formed on the outside of the axial hole, and a groove is formed on the radial plane of the axial hole on the outside of the axial hole in a direction 90 degrees to the notch, wherein above the device base, the vertical air pipe of the purge arm passes vertically through the device base via the axial hole of the rotation limit handle; The spring is vertically arranged between the top of the device base and the axial hole of the rotation limit handle and surrounds the outside of the vertical air pipe. The rotation limit handle controls the horizontal rotation and / or vertical movement of the vertical air pipe to control the horizontal air nozzle to align with the probe for purging.

2. The probe purging device according to claim 1, characterized in that: One end of the vertical air pipe located below the device base is connected to one end of the horizontal air nozzle via a right-angle joint to form an L-shaped structure. The other end of the vertical air pipe located above the device base is connected to the flow regulating valve, and the other end of the horizontal air nozzle is used to align the probe for purging.

3. The probe purging device according to claim 1, characterized in that: Press the rotation limit handle downward to the lower plane of the raised step, and then rotate the rotation limit handle horizontally so that the groove on the rotation limit handle and the plunger on the lower plane of the raised step are embedded in each other under the upward force of the spring, so that the probe purge device enters the "purge state".

4. The probe purging device according to claim 1 or 3, characterized in that: One end of the rotation limit handle is also provided with a set screw, wherein when the other end of the horizontal air nozzle is aligned with the probe, the rotation limit handle is fixed to the vertical air pipe through the set screw.

5. The probe purging device according to claim 1, characterized in that: The rotation limit handle is rotated horizontally until the notch of the rotation limit handle is aligned with the protrusion. Under the action of the spring, the rotation limit handle drives the purge arm to slide upward, so that the protrusion is embedded in the notch, and the probe purge device enters the "retracted state".

6. The probe purging device according to claim 1 or 5, characterized in that: It also includes a height limiter for limiting the upward sliding distance of the purge arm. The height limiter is located below the base of the device, has a cylindrical inner hole, surrounds the vertical air pipe, and can slide up and down in the axial direction of the vertical air pipe.

7. The probe purging device according to claim 1, characterized in that: A bearing is arranged on the base of the device and surrounds the vertical air pipe so that the vertical air pipe can rotate horizontally and slide up and down.

8. The probe purging device according to claim 1, characterized in that: The plane contour of the device base matches the test host, so that it can be embedded in the host and can be detachably connected by bolt connection or magnet adsorption, and The probe is fixed on the test host.

9. The probe purging device according to claim 1 or 3, characterized in that: Before purging the probe, adjust the distance between the horizontal air nozzle and the rotation limit handle along the axial direction of the vertical air pipe so that the height of the horizontal air nozzle is below the probe.

10. The probe purging device according to claim 2, characterized in that: The flow regulating valve is used to control the flow of the purge gas.

Images