Connecting device and grinding equipment

Abstract

The utility model provides a connecting device and grinding equipment. The two ends of the first structural member are a first end and a second end respectively, and the first end is provided with a first connecting space; the second structural part comprises a first connecting part and a second connecting part, the first connecting part is opposite to the second end, and the second connecting part is connected with the part, away from the second end, of the first connecting part and provided with a second connecting space; the limiting structure comprises a plurality of limiting parts, the limiting parts are arranged at a plurality of positions of the first connecting part in a scattered mode and exposed out of the position, close to the second end, of the first connecting part so as to be connected with the first structural part, and the exposed part of at least one limiting part is provided with a plurality of connecting positions so as to be connected with the first structural part in a switchable mode. The angle of the first connecting space is adjusted by switching the connecting position of the first structural part at the position corresponding to the limiting part, so that the connecting device connected with the silicon carbide crystal to-be-polished part does not need to be replaced, the replacement steps are reduced, and the operation is convenient.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor production technology, and in particular to a connecting device and a polishing equipment. Background Art

[0002] Silicon carbide crystals have the advantages of large bandgap, high breakdown voltage, high thermal conductivity, high electron saturation drift rate, and small dielectric constant, which makes silicon carbide crystals can be used to make semiconductor devices.

[0003] In the related art, a semi-finished silicon carbide crystal is fixed on a grinding device, and then the silicon carbide crystal is ground to form a finished silicon carbide crystal of a preset shape.

[0004] However, when it is necessary to grind preset shapes at different angles, the part of the grinding equipment connected to the silicon carbide crystal needs to be replaced, which makes the operation inconvenient. Utility Model Content

[0005] The present disclosure provides a connecting device and a grinding device, and a technical problem to be solved is: grinding of silicon carbide crystals at different angles is achieved without replacing a part of the grinding device connected to the silicon carbide crystal, thereby making the operation more convenient.

[0006] In a first aspect, the present disclosure provides a connecting device, which includes: a first structural member, a second structural member and a limiting structure, wherein the two ends of the first structural member are respectively a first end and a second end, and the first end is provided with a first connecting space; the second structural member includes: a first connecting portion and a second connecting portion, the first connecting portion is opposite to the second end, and the second connecting portion is connected to a portion of the first connecting portion away from the second end and is provided with a second connecting space; the limiting structure includes: a plurality of limiting members, the plurality of limiting members are dispersedly arranged at a plurality of positions of the first connecting portion, and are all exposed from a position of the first connecting portion close to the second end to be connected to the first structural member, and the exposed portion of at least one limiting member has a plurality of connecting positions so as to be switchably connected to the first structural member.

[0007] In some embodiments, the limit member is disposed through the first connection portion and the first structural member, and can rotate relative to the first connection portion and the first structural member; during relative rotation, the relative position of the limit member and the first connection portion remains unchanged, and the connection position of the limit member and the first structural member switches from the first connection position to the second connection position.

[0008] In some embodiments, the surface of the limit member passing through the first connecting part is a smooth surface, and one end of the limit member corresponding to the first connecting part is provided with a stop portion abutting against the surface of the first connecting part away from the first structural member; the surface of the limit member passing through the first structural member is a spiral protrusion surface having an axial spiral protrusion along the limit member.

[0009] In some embodiments, a first connection space is formed on a side of the first structural member facing away from the second structural member; one end of the limiting member corresponding to the first structural member does not protrude from the surface of the first structural member facing away from the first connection portion.

[0010] In some embodiments, the second connection portion is connected to a side of the first connection portion facing away from the first structural member and extends in a direction away from the first connection portion; the threading direction of the limiting member is parallel to the extending direction of the second connection portion.

[0011] In some embodiments, the first structural member is in the shape of a circular plate; the first connection portion is in the shape of a circular plate, the circular surface of the first connection portion is disposed opposite to the circular surface of the first structural member, and the circumferences of the first connection portion and the first structural member are flush, and the second connection portion is perpendicularly connected to the circular surface of the first connection portion facing away from the first structural member, so that the second structural member is in a T shape; the connecting lines of a plurality of limiting members on the first connection portion form a regular polygon.

[0012] In some embodiments, the first connection space is a planar space on a side of the first structural member facing away from the first connection portion; or, the first connection space is a recessed space on a side of the first structural member facing away from the first connection portion; or, the first connection space is a recessed space on the thickness surface of the first structural member.

[0013] In some embodiments, the direction of the first structural member towards the first connection portion corresponds to the thickness direction of the first structural member, and a limiting recess is provided on the thickness surface of the first structural member; the limiting member is connected to the first connection portion, and a plurality of connection positions are exposed from a position of the first connection portion close to the first structural member, and a bendable limiting portion is provided at each connection position, so as to be able to switch and bend the limiting portions at different connection positions and limit them in the limiting recess.

[0014] In a second aspect, the present disclosure provides a grinding device, which includes: a first connection device, a first clamping device and a grinding device, and the first connection device includes the connection device according to any one of the embodiments of the first aspect; at least part of the first clamping device is located in the second connection space of the first connection device to clamp the second connection portion of the first connection device; the grinding device is used for grinding a workpiece to be ground in the first connection space of the first connection device.

[0015] In some embodiments, the grinding device may further include: a second connection device, a second clamping device and a moving device, and the second connection device includes the connection device according to any one of the embodiments of the first aspect; at least part of the second clamping device is located in the second connection space of the second connection device to clamp the second connection portion of the second connection device; the moving device is respectively connected to the first clamping device and the second clamping device, and provides a force for the first clamping device and / or the second clamping device to make the first connection space of the first connection device and the first connection space of the second connection device approach each other to coincide or move away from each other.

[0016] Through the above technical solutions, in the connecting device and the grinding equipment provided by the present disclosure, multiple limiting members of the limiting structure are respectively connected to the first connecting portion and the first structural member, and the exposed portions of at least one limiting member have multiple connecting positions so as to be connected to the first structural member in a switchable manner, so that the connecting position can be switched in the direction of approaching or departing from the first connecting portion through the first structural member corresponding to one or more limiting members, so as to adjust the angle of the first structural member and the first connecting space thereon. Thus, when it is necessary to grind preset shapes at different angles, the connecting position of at least one limiting member and the first structural member can be adjusted, so that it is not necessary to replace the connecting device for connecting the silicon carbide crystal waiting for grinding, thereby reducing the replacement steps and facilitating the operation.

[0017] The above description is only an overview of the technical solutions of the present disclosure. In order to be able to understand the technical means of the present disclosure more clearly and implement them in accordance with the content of the description, the following takes the preferred embodiments of the present disclosure and combines the accompanying drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present disclosure. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1 Structural schematic diagram of the connecting device provided by an embodiment of the present disclosure Figure 1 ;

[0020] Figure 2 Structural schematic diagram of the connecting device provided by an embodiment of the present disclosure Figure 2 ;

[0021] Figure 3 Exploded structural schematic diagram of the connecting device provided by an embodiment of the present disclosure;

[0022] Figure 4 Structural schematic diagram of the connecting device provided by another embodiment of the present disclosure Figure 3 ;

[0023] Figure 5 Partial structural schematic diagram of the connecting device provided by another embodiment of the present disclosure;

[0024] Figure 6 Partial structural schematic diagram of the grinding equipment provided by an embodiment of the present disclosure.

[0025] Description of the reference numerals:

[0026] 1. First structural member; 11. First end; 12. Second end; 13. First connection space; 14. Second through hole; 2. Second structural member; 21. First connection portion; 211. First through hole; 22. Second connection portion; 23. Second connection space; 3. Limiting structure; 31. Limiting member; 311. Limiting portion; 4. First connection device; 5. Second connection device; 6. Wax layer; 7. Isothermal glass. Detailed implementation manners

[0027] The following further describes in detail the implementation manners of the present disclosure in conjunction with the drawings and embodiments. The detailed descriptions and drawings of the following embodiments are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0028] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully convey the scope of the present disclosure to those skilled in the art. It should be noted that: unless otherwise specifically stated, the relative arrangements of components and steps, the components of materials, numerical expressions and values set forth in these embodiments should be construed as merely exemplary, rather than as limitations.

[0029] It should be noted that in the description of the present disclosure, unless otherwise specified, the meaning of "a plurality" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc. indicate the orientation or positional relationship for the sole purpose of facilitating the description of the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0030] In addition, the "first", "second" and similar terms used in the present disclosure do not denote any order, quantity or importance, but are only used to distinguish different parts. "Vertical" is not strictly vertical, but within the allowable error range. "Parallel" is not strictly parallel, but within the allowable error range. The terms "including" or "comprising" and the like mean that the elements before this term cover the elements listed after this term, and do not exclude the possibility of also covering other elements.

[0031] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances. When it is described that a specific device is located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0032] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in a general dictionary, such as those, should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and should not be interpreted in an idealized or overly formal sense, unless specifically defined as such herein.

[0033] Techniques, methods, and devices known to those of ordinary skill in the relevant fields may not be discussed in detail, but where appropriate, the techniques, methods, and devices should be regarded as part of the specification.

[0034] First aspect

[0035] The present disclosure provides a connecting device. Refer to Figures 1 to 4 As shown, the connecting device includes: a first structural member 1, a second structural member 2, and a limiting structure 3. The two ends of the first structural member 1 are respectively a first end 11 and a second end 12, and a first connection space 13 is provided at the first end 11; the second structural member 2 includes: a first connection portion 21 and a second connection portion 22. The first connection portion 21 faces the second end 12, and the second connection portion 22 is connected to a portion of the first connection portion 21 away from the second end 12 and is provided with a second connection space 23; the limiting structure 3 includes: a plurality of limiting members 31. The plurality of limiting members 31 are dispersedly arranged at a plurality of positions on the first connection portion 21, and all expose from positions on the first connection portion 21 close to the second end 12 to be connected to the first structural member 1, and at least one exposed portion of the limiting member 31 has a plurality of connection positions to be switchably connected to the first structural member 1.

[0036] The first connection space 13 of the first structural member 1 can be connected to a workpiece to be polished, such as a silicon carbide crystal. When the polishing device on the polishing equipment rotates or the first structural member 1 rotates, the workpiece to be polished can be polished by the polishing device; the workpiece to be polished can be connected to the first structural member 1 through molten wax to be located in the first connection space 13, or can be connected to the first structural member 1 through an adhesive to be located in the first connection space 13, or can also be connected to the first structural member 1 through other connection layers to be located in the first connection space 13.

[0037] The first connecting portion 21 and the second connecting portion 22 of the second structural member 2 can be connected together by means of bonding, welding or other connecting means, or can be connected together by an integral molding method, or can be connected together by other means. The first connecting portion 21 has a first surface, a second surface and a peripheral side surface. The first surface faces the first structural member 1, the second surface faces away from the first structural member 1, and the peripheral side surface connects the first surface and the second surface respectively. For example, the first connecting portion 21 is in the shape of a circular plate as shown in Figures 1 to 4 The figure shows that the first surface and the second surface are both circular, and the peripheral side surface is a circular surface, and the second surface faces away from the first structural member 1. The second connecting portion 22 can be connected to the second surface of the first connecting portion 21 and extend in a direction away from the second surface, or can be connected to the peripheral side surface of the first connecting portion 21 and extend in a direction away from the second surface; the second connecting space 23 of the second connecting portion 22 can be a clamping space. For example, as shown in Figures 1 to 4 The figure shows that the second connecting portion 22 is columnar, and the space on its peripheral side forms the second connecting space 23. In this way, the first clamping device or the second clamping device on the grinding device can be located in the second connecting space 23 on the peripheral side of the second connecting portion 22 and clamp the second connecting portion 22, so as to realize the connection between the grinding device and the connecting device through the second connecting space 23; another example is that the second connecting portion 22 is columnar, and three depressions are distributed on the peripheral side to cooperate to form the second connecting space 23. In this way, the three jaws distributed in a triangle on the first clamping device or the second clamping device on the grinding device are respectively located in one depression and squeeze each other towards the center of the axis of the second connecting portion 22, so as to realize the connection between the grinding device and the connecting device through the second connecting space 23; the second connecting space 23 can also be a clamping and adsorption space. For example, the second connecting portion 22 is recessed with a regular polygon-shaped prismatic depression to form the second connecting space 23. A part of the grinding device can extend into the second connecting space 23 and abut against the inner walls of the second connecting space 23, so as to realize the connection between the grinding device and the connecting device through the second connecting space 23.

[0038] The plurality of limiting members 31 of the limiting structure 3 are respectively connected to the first connecting portion 21 and the first structural member 1, and the exposed portions of at least one limiting member 31 have a plurality of connecting positions to be able to be connected to the first structural member 1 in a switching manner, so as to be able to switch the connecting positions of the first structural member 1 corresponding to one or more limiting members 31 in a direction close to or away from the first connecting portion 21, so as to adjust the angle of the first structural member 1 and the first connecting space 13 thereon. In this way, when it is necessary to grind preset shapes at different angles, the connection position between at least one limiting member 31 and the first structural member 1 can be adjusted, so that it is not necessary to replace the connecting device connecting the silicon carbide crystal waiting for grinding, so as to reduce the replacement steps and the operation is convenient.

[0039] When the temperature of the first structural member 1 itself is uneven, the temperature of the workpiece to be polished connected to the first structural member 1 is also uneven, which will affect the polishing effect. Figure 4 As shown, the first connection space 13 can be connected to the temperature-averaging glass 7 through the wax layer 6. In this way, after the workpiece to be polished is connected to the temperature-averaging glass 7, the temperature-averaging glass 7 evenly distributes the temperature at different positions of the temperature-averaging glass 7 to balance the temperature of the workpiece to be polished.

[0040] In some embodiments, see Figures 1 to 4 As shown, the limiting member 31 is provided through the first connection part 21 and the first structural member 1, and can rotate relative to the first connection part 21 and the first structural member 1; during the relative rotation, the relative position of the limiting member 31 and the first connection part 21 remains unchanged, and the connection position of the limiting member 31 and the first structural member 1 switches from the first connection position to the second connection position. It can also be said that the limiting member 31 is connected to the first connection part 21 and the first structural member 1 by means of the first penetration hole 211 on the first connection part 21 and the second penetration hole 14 on the first structural member 1, and the limiting member 31 can rotate relative to the first connection part 21 and the first structural member 1, and can adjust the position of the first structural member 1 in the direction away from or close to the first connection part 21 during the rotation, thereby adjusting the angle of the first connection space 13 on the first structural member 1.

[0041] In one example, the limiting member 31 is passed through the first penetration hole 211 on the first connecting portion 21 and the second penetration hole 14 on the first structural member 1, and is interference fit with the first connecting portion 21 and the first structural member 1 respectively; during relative rotation, the first structural member 1 at a position corresponding to at least one limiting member 31 can be adjusted toward or away from the first connecting portion 21, thereby achieving adjustment of the angle of the first structural member 1.

[0042] In another example, the surface of the stopper 31 passing through the first connection part 21 is a smooth surface, and one end of the stopper 31 corresponding to the first connection part 21 is provided with a stopper (not shown in the figure) abutting against the surface of the first connection part 21 away from the first structural member 1; the surface of the stopper 31 passing through the first structural member 1 is a spiral convex surface with an axial spiral convexity along the stopper 31. In other words, the stopper 31 is similar to the setting of a screw, and rotates smoothly with the first connection part 21 and spirally with the first structural member 1, so that in the process of relative rotation, the first structural member 1 at the position corresponding to the rotating stopper 31 is moved in a direction close to or away from the first connection part 21, thereby adjusting the angle of the first structural member 1.

[0043] In some embodiments, on one side of the first structural member 1 facing away from the second structural member 2, a first connection space 13 is formed. One end of the limiting member 31 corresponding to the first structural member 1 does not protrude from the surface of the first structural member 1 facing away from the first connection portion 21. In this way, the limiting member 31 will not enter the first connection space 13, so as to reduce the probability that the limiting member 31 jacks up the silicon carbide crystal in the first connection space 13 waiting for the grinding member.

[0044] In some embodiments, referring to Figures 1 to 4 As shown, the second connection portion 22 is connected to the side of the first connection portion 21 facing away from the first structural member 1 and extends in a direction away from the first connection portion 21; the threading direction of the limiting member 31 is parallel to the extending direction of the second connection portion 22. In this way, the probability that the tool for operating the rotation of the limiting member 31 interferes with the second connection portion 22 can be minimized as much as possible.

[0045] In some embodiments, referring to Figures 1 to 4 As shown, the first structural member 1 is in the shape of a circular plate; the first connection portion 21 is in the shape of a circular plate. The circular surface of the first connection portion 21 is disposed opposite to the circular surface of the first structural member 1, and the circumferences of the first connection portion 21 and the first structural member 1 are flush. The second connection portion 22 is vertically connected to the circular surface of the first connection portion 21 facing away from the first structural member 1, so that the second structural member 2 is in a T shape; the connection lines of the plurality of limiting members 31 on the first connection portion 21 form a regular polygon. Here, the structures of the first structural member 1 and the second structural member 2 are simple and easy to manufacture; the connection lines of the plurality of limiting members 31 on the first connection portion 21 form a regular polygon, so that the plurality of limiting members 31 have the beauty of a regular polygon distribution, and at the same time, the adjustment degrees of the plurality of limiting members 31 on the same connection line increase or decrease in sequence, so as to be able to uniformly support the first structural member 1.

[0046] In some embodiments, the first connection space 13 can be, for example, Figure 1 and Figure 6 As shown, the planar space on the side of the first structural member 1 facing away from the first connection portion 21; or, the first connection space 13 can be a recessed space on the side of the first structural member 1 facing away from the first connection portion 21; or, the first connection space 13 can be a recessed space on the thickness surface of the first structural member 1. When it is necessary to grind the entire thickness surface of the workpiece to be ground, the first connection space 13 can be, for example, Figure 1 and Figure 6In the planar space on the side of the first structural member 1 away from the first connecting portion 21 as shown, a circumferential edge of the piece to be polished extends out of the circumferential side of the first structural member 1 in the thickness direction of the piece to be polished. Thus, the protruding part can be polished. When it is necessary to polish a large surface of the piece to be polished, the first connecting space 13 can be a concave space on the side of the first structural member 1 away from the first connecting portion 21. After the piece to be polished is located in this concave space, a large surface thereof is exposed from the opening of this concave space. Thus, the exposed large surface can be polished. When it is necessary to polish a section of the thickness surface of the piece to be polished, the first connecting space 13 can be a concave space on the thickness surface of the first structural member 1. After the piece to be polished is located in this concave space, the thickness surface to be polished extends out of the opening of this concave space. Thus, the protruding surface can be polished.

[0047] In some embodiments, referring to Figure 5 as shown, the direction of the first structural member 1 towards the first connecting portion 21 corresponds to the thickness direction of the first structural member 1. A limiting concave portion is provided on the thickness surface of the first structural member 1; the limiting member 31 is connected to the first connecting portion 21, and a plurality of connecting positions are exposed from the position of the first connecting portion 21 close to the first structural member 1. Each connecting position is provided with a bendable limiting portion 311 so as to be able to limit the limiting portions 311 at different connecting positions in the limiting concave portion after being bent in a switching manner. That is to say, the limiting portions 311 can be respectively bent at a plurality of connecting positions on the limiting member 31, and one of the connecting positions can be bent at the same moment to form a limiting portion 311. Thus, the limiting portions 311 at different connecting positions can be bent in a switching manner and connected in the limiting concave portion on the first structural member 1, thereby realizing the change of the angle of the first connecting space 13. For example: Figure 5 As shown in the left figure, none of the three limiting portions 311 of the sheet-shaped limiting member 31 from top to bottom are bent. Figure 5 As shown on the right, the third limiting portion 311 arranged from top to bottom is bent perpendicular to the limiting member 31 and can extend into the limiting concave portion.

[0048] In a second aspect

[0049] The present disclosure provides a polishing device. Referring to Figure 6 as shown, the polishing device includes: a first connecting device 4, a first clamping device and a polishing device. The first connecting device 4 includes the connecting device according to any embodiment of the first aspect; at least a part of the first clamping device is located in the second connecting space 23 of the first connecting device 4 to clamp the second connecting portion 22 of the first connecting device 4; the polishing device is used for polishing the piece to be polished in the first connecting space 13 of the first connecting device 4. It is applicable to pieces to be polished with a small weight, so that they can be connected to the first connecting space 13 through molten wax, glue, etc.

[0050] In some embodiments, referring to Figure 6As shown, the grinding device may further include: a second connecting device 5, a second clamping device, and a moving device. The second connecting device 5 includes the connecting device of any embodiment of the first aspect; at least part of the second clamping device is located in the second connecting space 23 of the second connecting device 5 to clamp the second connecting portion 22 of the second connecting device 5; the moving device is respectively connected to the first clamping device and the second clamping device, and provides a force for the first clamping device and / or the second clamping device to make the first connecting space 13 of the first connecting device 4 and the first connecting space 13 of the second connecting device 5 approach each other to coincide or move away from each other. It is applicable to the workpiece to be ground with a relatively large weight, so that the first clamping device and the second clamping device can respectively apply forces to the first connecting device 4 and the second connecting device 5, thereby clamping the workpiece to be ground between the first connecting device 4 and the second connecting device 5.

[0051] It should be noted that the connecting device in the grinding device provided in the embodiments of the present disclosure is similar to the description of the connecting device embodiments described above, and has beneficial effects similar to those of the connecting device embodiments described above. For the technical details not disclosed in the embodiments of the grinding device of the present disclosure, please refer to the description of the connecting device embodiments in the present disclosure for understanding, and will not be elaborated here.

[0052] So far, the embodiments of the present disclosure have been described in detail. To avoid obscuring the concept of the present disclosure, some details well known in the art have not been described. Those skilled in the art can fully understand how to implement the technical solutions disclosed here based on the above description.

[0053] Although some specific embodiments of the present disclosure have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for the purpose of illustration and not for the purpose of limiting the scope of the present disclosure. Those skilled in the art should understand that the above embodiments can be modified or partial technical features can be equivalently replaced without departing from the scope and spirit of the present disclosure. In particular, as long as there is no structural conflict, the technical features mentioned in each embodiment can be combined in any way.

Claims

1. A connection device, characterized in that: include: A first structural member (1), having two ends respectively comprising a first end (11) and a second end (12), wherein the first end (11) is provided with a first connecting space (13); The second structural member (2) comprises: a first connecting portion (21) and a second connecting portion (22), wherein the first connecting portion (21) is opposite to the second end (12), and the second connecting portion (22) is connected to a portion of the first connecting portion (21) away from the second end (12) and is provided with a second connecting space (23); The limiting structure (3) comprises: a plurality of limiting members (31), wherein the plurality of limiting members (31) are dispersedly arranged at a plurality of positions of the first connecting portion (21), and are all exposed from a position of the first connecting portion (21) close to the second end (12) to be connected to the first structural member (1), and the exposed portion of at least one of the limiting members (31) has a plurality of connection positions to be switchably connected to the first structural member (1).

2. The connection device according to claim 1, characterized in that: The limiting member (31) is provided through the first connecting portion (21) and the first structural member (1), and is capable of rotating relative to the first connecting portion (21) and the first structural member (1); during relative rotation, the relative position of the limiting member (31) and the first connecting portion (21) remains unchanged, and the connection position of the limiting member (31) and the first structural member (1) switches from the first connection position to the second connection position.

3. The connection device according to claim 2, characterized in that: The surface of the limiting member (31) passing through the first connecting portion (21) is a smooth surface, and one end of the limiting member (31) corresponding to the first connecting portion (21) is provided with a stop portion abutting against the surface of the first connecting portion (21) away from the first structural member (1); The surface of the limiting member (31) penetrating the first structural member (1) is a spiral protrusion surface having an axial spiral protrusion along the limiting member (31).

4. The connection device according to claim 3, characterized in that: The first connecting space (13) is formed on a side of the first structural member (1) facing away from the second structural member (2); One end of the limiting member (31) corresponding to the first structural member (1) does not protrude from a surface of the first structural member (1) facing away from the first connecting portion (21).

5. The connection device according to any one of claims 2 to 4, characterized in that: The second connecting portion (22) is connected to a side of the first connecting portion (21) facing away from the first structural member (1), and extends in a direction away from the first connecting portion (21); The penetration direction of the limiting member (31) is parallel to the extension direction of the second connecting portion (22).

6. The connection device according to claim 1, characterized in that: The first structural member (1) is in the shape of a circular plate; The first connecting portion (21) is in the shape of a circular plate, the circular surface of the first connecting portion (21) is arranged opposite to the circular surface of the first structural member (1), and the peripheral side of the first connecting portion (21) is flush with the peripheral side of the first structural member (1), and the second connecting portion (22) is vertically connected to the circular surface of the first connecting portion (21) facing away from the first structural member (1), so that the second structural member (2) is T-shaped; A connecting line of the plurality of limiting members (31) on the first connecting portion (21) forms a regular polygon.

7. The connection device according to claim 6, characterized in that: The first connecting space (13) is a plane space on a side of the first structural member (1) away from the first connecting portion (21); Alternatively, the first connecting space (13) is a recessed space on a side of the first structural member (1) away from the first connecting portion (21); Alternatively, the first connection space (13) is a recessed space in the thickness surface of the first structural member (1).

8. The connection device according to claim 1, characterized in that: The direction of the first structural member (1) toward the first connecting portion (21) corresponds to the thickness direction of the first structural member (1), and a limiting recess is provided on the thickness surface of the first structural member (1); The limiting member (31) is connected to the first connecting portion (21), and a plurality of connecting positions are exposed from the first connecting portion (21) near the first structural member (1), and each of the connecting positions is provided with a bendable limiting portion so that the limiting portions of different connecting positions can be switchably bent and limited in the limiting recess.

9. A grinding device, characterized in that: include: A first connecting device (4), comprising a connecting device according to any one of claims 1 to 8; A first clamping device, at least partially located in the second connecting space (23) of the first connecting device (4) to clamp the second connecting portion (22) of the first connecting device (4); A grinding device is used to grind the part to be ground in the first connecting space (13) of the first connecting device (4).

10. The grinding device according to claim 9, characterized in that: Also includes: A second connecting device (5), comprising the connecting device according to any one of claims 1 to 8; A second clamping device, at least partially located in the second connecting space (23) of the second connecting device (5) to clamp the second connecting portion (22) of the second connecting device (5); A moving device is connected to the first clamping device and the second clamping device respectively, and provides a force to the first clamping device and / or the second clamping device to make the first connecting space (13) of the first connecting device (4) and the first connecting space (13) of the second connecting device (5) approach each other to overlap or move away from each other.

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